WO2019063074A1 - Mask arrangement for masking a substrate, apparatus for processing a substrate, and method therefor - Google Patents

Mask arrangement for masking a substrate, apparatus for processing a substrate, and method therefor Download PDF

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Publication number
WO2019063074A1
WO2019063074A1 PCT/EP2017/074503 EP2017074503W WO2019063074A1 WO 2019063074 A1 WO2019063074 A1 WO 2019063074A1 EP 2017074503 W EP2017074503 W EP 2017074503W WO 2019063074 A1 WO2019063074 A1 WO 2019063074A1
Authority
WO
WIPO (PCT)
Prior art keywords
mask
mechanical structure
mask frame
carrier
frame
Prior art date
Application number
PCT/EP2017/074503
Other languages
French (fr)
Inventor
Matthias HEYMANNS
Tommaso Vercesi
Original Assignee
Applied Materials, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials, Inc. filed Critical Applied Materials, Inc.
Priority to JP2018553214A priority Critical patent/JP2019533761A/en
Priority to KR1020187030596A priority patent/KR102183040B1/en
Priority to PCT/EP2017/074503 priority patent/WO2019063074A1/en
Priority to CN201780041675.2A priority patent/CN109844164B/en
Publication of WO2019063074A1 publication Critical patent/WO2019063074A1/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/682—Mask-wafer alignment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70825—Mounting of individual elements, e.g. mounts, holders or supports
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67276—Production flow monitoring, e.g. for increasing throughput
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping

Definitions

  • the present disclosure relates to processing of substrates, particular thin flat substrates.
  • embodiments described herein relate to mask arrangements for masking a substrate during deposition, deposition apparatuses for depositing material on a substrate through a mask, and a methods for holding a mask.
  • embodiments of the present disclosure relate to mask arrangements, deposition apparatuses and methods employed in the production of opto-electronic devices, e.g. organic light emitting diodes (OLEDs).
  • OLEDs organic light emitting diodes
  • substrates may be coated by using an evaporation process, such as a physical vapor deposition (PVD) process, a chemical vapor deposition (CVD) process, a sputtering process, a spraying process, etc.
  • PVD physical vapor deposition
  • CVD chemical vapor deposition
  • sputtering process a spraying process, etc.
  • the process can be performed in a processing chamber of a deposition apparatus where the substrate to be coated is located.
  • a deposition material is provided in the processing chamber.
  • a plurality of materials such as small molecules, metals, oxides, nitrides and carbides, may be used for deposition on a substrate.
  • other processes like etching, structuring, annealing, or the like can be conducted in processing chambers.
  • Coated substrates may be used in several applications and in several technical fields. For instance, an application lies in the field of organic light emitting diode (OLED) panels. Further applications include insulating panels, microelectronics, such as semiconductor devices, substrates with TFT, color filters or the like.
  • OLEDs are solid-state devices composed of thin films of (organic) molecules that create light with the application of electricity. OLEDs can provide bright displays on electronic devices and use less power than for instance light- emitting diodes (LEDs) or liquid crystal displays (LCDs).
  • the organic molecules are generated (e.g., evaporated, sputtered, or sprayed etc.) and allowed to condense as thin films on the substrates. The particles pass through a mask having a specific pattern to form an OLED pattern on the substrate.
  • deposition apparatuses that allow for processing of a masked substrate in a vertical orientation.
  • the substrate and the mask arrangement are vertically arranged within the processing chamber.
  • the force of gravity can lead to a deformation or bending of the mask arrangement, resulting in a reduced quality of the processed substrate, and in particular of the deposited film or layer.
  • a mask arrangement for masking a substrate during deposition in a processing chamber.
  • the mask arrangement includes a mask frame for holding a mask. Further, the mask arrangement includes a mask carrier for holding the mask frame, wherein the mask frame is connected to the mask carrier by a compliant support.
  • a mask arrangement for masking a substrate during deposition in a processing chamber wherein the mask arrangement includes a mask frame for holding a mask and a mask carrier for holding the mask frame.
  • the mask frame is connected to the mask carrier via a first mechanical structure and via a second mechanical structure.
  • the first mechanical structure is configured for supporting the mask frame in a first direction and in a second direction.
  • the second mechanical structure is configured for providing a degree of freedom in the first direction.
  • a mask arrangement for masking a substrate during deposition in a processing chamber includes a mask frame for holding a mask, and a mask carrier for holding the mask frame.
  • the mask frame is connected to the mask carrier via a first mechanical structure and via a second mechanical structure.
  • the first mechanical structure is configured as a fixed support for fixing the mask frame in a first direction and in a second direction.
  • the second mechanical structure is configured for providing a degree of freedom in the first direction and for fixing the second direction.
  • an apparatus for processing a substrate includes: a processing chamber adapted for layer deposition therein; a deposition source for depositing material forming the layer; and a mask arrangement according to any embodiments described herein within the processing chamber.
  • a method for providing a support of a mask frame by a mask carrier includes manufacturing a first mechanical structure and a second mechanical structure, particularly by electrical discharge machining, such that the first mechanical structure and the second mechanical structure are integrated into the mask carrier or into the mask frame, wherein the first mechanical structure provides for a compliant support of the mask frame in a first direction and in a second direction, and wherein the second mechanical structure provides for a degree of freedom in the first direction. Further, the method includes connecting the mask frame to the mask carrier via the first mechanical structure and via the second mechanical structure.
  • Embodiments are also directed at apparatuses for carrying out the disclosed methods and include apparatus parts for performing each described method aspect. These method aspects may be performed by way of hardware components, a computer programmed by appropriate software, by any combination of the two or in any other manner. Furthermore, embodiments according to the disclosure are also directed at methods for operating the described apparatus. The methods for operating the described apparatus include method aspects for carrying out every function of the apparatus.
  • FIG. 1A shows a schematic front view of a mask arrangement according to embodiments described herein;
  • FIG. IB shows a schematic side view of a mask arrangement according to embodiments described herein;
  • FIG. 2 shows a schematic front view of a mask arrangement according to further embodiments described herein
  • FIG. 3A shows a schematic front view of a mask arrangement according to some embodiments described herein, wherein a compliant support is integrated into the mask carrier;
  • FIG. 3B shows a schematic front view of a mask arrangement according to some embodiments described herein, wherein a compliant support is integrated into the mask frame;
  • FIGS. 4A and 4B shows a schematic front view of a mask arrangement according to further embodiments described herein;
  • FIG. 5A shows a schematic example of a first mechanical structure for supporting the mask frame of the mask arrangement according to some embodiments described herein;
  • FIG. 5B shows a schematic alternative example of a first mechanical structure for supporting the mask frame of the mask arrangement according to some embodiments described herein
  • FIG. 5C shows a schematic example of a second mechanical structure for supporting the mask frame of the mask arrangement according to some embodiments described herein;
  • FIG. 6 shows a schematic view of an apparatus for processing a substrate according to embodiments described herein; and FIG. 7 shows a flowchart for illustrating a method for providing a support of a mask frame by a mask carrier according to embodiments described herein.
  • a "mask arrangement for masking a substrate” can be understood as an arrangement including a mask for masking a substrate, particularly for masking a substrate as described herein.
  • a “mask arrangement” as described herein can be understood as an arrangement including a mask frame which is configured for holding a mask in a predetermined position.
  • the "mask arrangement” further includes a mask carrier which is configured for holding the mask frame.
  • a “mask carrier” may be understood as a carrier including a reception configured for receiving the mask frame.
  • the reception of the mask carrier can be an opening configured for receiving the mask frame.
  • the mask carrier can be configured such that the mask frame is held or supported by the mask carrier.
  • the mask carrier can at least partially be arranged around the mask frame.
  • the mask arrangement includes a mask carrier configured for supporting the mask frame, wherein the mask carrier surrounds the outer contour of the mask frame, as exemplarily shown in FIG. 1A.
  • the mask arrangement as described herein can be configured for masking a substrate as described herein, particularly a large area substrate as described herein. Accordingly, the dimensions of the mask typically substantially correspond to the dimensions of the respective substrate to be masked. Thus, it is to be understood that the dimensions selected for the mask influence the respective dimensions of the mask frame holding the mask as well as the respective dimensions of the mask carrier holding the mask frame.
  • a "mask frame for holding a mask” can be understood as a mechanical frame structure which is configured for holding a mask, particularly a mask as described herein.
  • a "mask” can be understood as a thin plate having at least one opening.
  • the mask as described herein may have a thickness of 0.2 mm or less.
  • the mask as described herein may be employed to cover areas of a substrate which shall not be processed, e.g. not be coated.
  • the mask as described herein may be made of at least one material selected from the group consisting of: LiCO, AI 2 O 2 , YSZ, AlTiC, glass D263T, stainless steel, Ti, Macor, and Invar e.g. with approx 30% or 80% Ni.
  • the mask may be an edge exclusion shield configured for masking one or more edge regions of a substrate, such that no material is deposited on the one or more edge regions during the coating of the substrate.
  • the mask may be a shadow mask for masking a plurality of features, which are deposited on the substrate with the material from a deposition source.
  • the mask may be a pixel mask, particularly configured for OLED production.
  • a "compliant support” can be understood as a support which is configured such that a mechanical decoupling of two elements which are connected by the compliant support can be provided.
  • a “compliant support” can be understood as a support which provides for mechanical isolation of two elements connected to each other via the compliant support.
  • the compliant support can be a compliant connection provided between the mask frame and the mask carrier.
  • a compliant connection between the mask frame and the mask carrier can be understood as a floating connection between the mask frame and the mask carrier.
  • the compliant support as described herein can be configured such that mechanical or thermal stress on the mask carrier can be compensated by the compliant support, such that beneficially a deformation of the mask frame and thus a deformation of the mask is substantially reduced or even avoided.
  • a "compliant support" as described herein can be configured such that when a stress or load is applied to the mask carrier, a stress or load transfer from the mask carrier to the mask frame is substantially reduced or even eliminated; i.e. compensated by the compliant support.
  • the compliant support can be understood as a resilient support or an elastic support.
  • the compliant support can be understood as a support providing a connection between the mask carrier and the mask frame, such that the connection is elastic or resilient.
  • a compliant element as described herein, can be understood as an element being configured for providing compliance or for providing elasticity or for providing resilience. Accordingly, the compliant element can be an elastic element or a resilient element.
  • the stress or load applied to the mask carrier can be a mechanical stress or load and/or a thermal stress or load.
  • a mechanical stress on the mask carrier may occur during assembly of the mask arrangement, i.e. during assembly of the mask frame and the mask carrier.
  • the compliant support as described herein can be configured such that a mechanical stress transfer from the mask carrier to the mask frame, e.g. during assembly of the mask arrangement, is substantially reduced or even eliminated.
  • a deformation of the mask due to mechanical stress on the mask carrier during assembly is substantially reduced or even avoided.
  • a mechanical stress on the mask carrier may occur during alignment of the mask carrier with the substrate.
  • the compliant support as described herein can be configured such that a mechanical stress transfer from the mask carrier to the mask frame during alignment is substantially reduced or even eliminated.
  • a thermal stress or load on the mask carrier may occur during processing, e.g. during a material deposition process.
  • the mask carrier is typically subjected to elevated temperatures, which may cause thermal expansion of the mask carrier.
  • the compliant support as described herein can be configured such that a thermal stress transfer from the mask carrier to the mask frame at elevated temperatures, e.g. during processing, is substantially reduced or even eliminated, i.e. compensated by the compliant support.
  • the compliant support as described herein can be configured such that a thermal expansion of the mask carrier does substantially not transfer to the mask frame.
  • the mask arrangement 100 includes a mask frame 110 for holding a mask 115. Further, the mask arrangement includes a mask carrier 120 for holding the mask frame 110. As schematically shown in FIG. 1, the mask frame 110 is connected to the mask carrier 120 by a compliant support 130. Accordingly, beneficially a mask arrangement is provided which is configured such that when a stress or load is applied to the mask carrier, a transfer of the stress or load from the mask carrier to the mask frame is substantially reduced or even eliminated.
  • embodiments of the mask arrangement as described herein have the advantage that a transfer of mechanical stress or load from the mask carrier to the mask frame and/or a transfer of thermal stress or load from the mask carrier to the mask frame is substantially reduced or even avoided.
  • the embodiments of the mask arrangement as described herein are improved since a deformation of a mask held by the mask frame can be reduced or even avoided. Accordingly, by employing a mask arrangement according to embodiments described herein during processing, particularly during material deposition on a substrate, the quality of the processing result can be improved.
  • the compliant support 130 is configured such that the mask frame 110 is mechanically decoupled from the mask carrier 120.
  • the compliant support may be configured such that mask carrier deformations are decoupled from the mask frame structure. Accordingly, beneficially deformations of the mask carrier are not transferred to the mask frame.
  • the compliant support can be configured such that the mask frame is mechanically isolated from the mask carrier.
  • the compliant support can be configured such that a floating mounting of the mask frame to the mask carrier is provided.
  • the compliant support 130 is schematically indicated by spring mechanisms.
  • the compliant support can be configured such that exactly one mechanical support, particularly exactly one connection of the mask frame to the mask carrier, provides a compliant support for the mask frame, particularly a compliant support with mechanical stiffness, in a first direction 101.
  • the compliant support can be configured such that exactly two mechanical supports, particularly exactly two connections of the mask frame to the mask carrier, provide a compliant support, particularly a compliant support with mechanical stiffness, in a second direction 102 being different from the first direction 101.
  • the second direction 102 can be perpendicular to the first direction 101.
  • the first direction 101 can be an x-direction and the second direction 102 can be a y-direction.
  • the expression "compliant support with mechanical stiffness” is to be understood as a support structure connecting the mask frame with the mask carrier, wherein the support structure is configured for holding the mask frame (e.g. by providing a connection between the mask frame and the mask carrier with sufficient mechanical stiffness to support or hold the mask frame) and for compensating mechanical or thermal stress on the mask carrier such that a deformation of the mask held by the mask frame is substantially reduced or even avoided (e.g. by providing a connection between the mask frame and the mask carrier with sufficient compliance or sufficient elasticity for compensating mechanical or thermal stress).
  • a mechanical decoupling of the mask frame from the mask carrier may be realized by providing the mask carrier with a first fixed support (i.e. being fixed in the first direction 101 and the second direction 102) for the mask frame and providing the mask carrier with a second support being fixed in the first direction 101 and having a degree of freedom in the second direction 102.
  • the second support may be fixed in the second direction 102 and have a degree of freedom in the first direction 101.
  • the first fixed support may be provided on a first corner of the mask carrier and the second support may be provided on an adjacent corner of the mask carrier.
  • the mask carrier may be provided with two or more additional supports for the mask frame, the two or more additional supports being configured having a degree of freedom in the first direction 101 and a degree of freedom in the second direction 102.
  • the compliant support 130 includes a first compliant support 131 at a first side 110A of the mask frame 110 and a second compliant support 132 at a second side HOB of the mask frame 110 opposite the first side of the mask frame.
  • the first compliant support 131 is configured for supporting the mask frame 110 in a first direction 101.
  • the first compliant support 131 is configured for supporting the mask frame 110 in a second direction 102.
  • the second compliant support 132 is configured for supporting the mask frame 110 in the second direction 102.
  • the second compliant support 132 is configured for providing a degree of freedom for the mask frame 110 in the first direction 101.
  • the connection of the mask frame to the mask carrier via the compliant support is exemplarily indicated by reference numbers 133 and 134. Accordingly, the mask frame 110 can be connected to the mask carrier 120 by a set of compliant supports.
  • the compliant support 130 is configured for providing a compliant support in a third direction 103.
  • the third direction can be a z-direction.
  • the third direction 103 can be perpendicular to the first direction 101 and perpendicular to the second direction 102.
  • the mask carrier 120 is at least partially arranged around the mask frame 110.
  • the mask carrier can include a reception configured for receiving the mask frame.
  • the reception of the mask carrier can be an opening configured for receiving the mask frame.
  • the opening can be configured such that in an assembled state of the mask arrangement, at least three outer edges of the mask frame, particularly four outer edges of the mask frame, face at least three corresponding inner edges of the opening of the mask carrier, particularly four inner edges of the opening of the mask carrier.
  • the reception of the mask carrier can be configured such that the inner circumference or inner contour of the reception faces the outer circumference or outer contour of the mask frame.
  • a free space 121 may be provided between the inner circumference or inner contour of the mask carrier, particularly of the reception of the mask carrier, and the outer circumference or outer contour of the mask frame.
  • the free space can be a gap provided between the mask carrier and the mask frame, particularly between the inner circumference or inner contour of the mask carrier and the outer circumference or outer contour of the mask frame.
  • the gap may have a dimension D selected from a range having a lower limit of 250 ⁇ , particularly a lower limit of 500 ⁇ , more particularly a lower limit of 1.0 mm and an upper limit of 1.5 mm, particularly an upper limit of 2.5 mm, more particularly an upper limit of 5.0 mm.
  • an outer edge of the mask frame 110 may overlap with an inner edge of the reception of the mask carrier 120.
  • the compliant support can include an elastic foundation providing elasticity in the third direction.
  • the outer edge of the mask frame 110 may be connected with the inner edge of the reception of the mask carrier 120 by one or more connecting elements (e.g. the schematically indicated spring elements in FIG. IB) which provide a compliant support in the third direction.
  • the compliant support in the third direction may be an elastic foundation or elastic connection between the mask frame and the mask carrier.
  • the compliant support in the third direction may be provided on at least two sides of the mask frame.
  • the compliant support in the third direction may be provided on a left side of the mask frame and on a right side of the mask frame.
  • the compliant support in the third direction may be provided at an upper side of the mask frame and on a lower side of the mask frame. Accordingly, it is to be understood, that the compliant support in the third direction can be provided at an upper side of the mask frame and on a lower side of the mask frame and/or on a left side of the mask frame and on a right side of the mask frame.
  • the compliant support in the third direction can be provided on each side of the mask frame.
  • the compliant support in the third direction may be provided by an elastic element provided between the mask frame and the mask carrier.
  • the elastic element can be an O-ring.
  • the elastic element e.g. the O-ring, may be arranged in a corresponding recess or notch provided in the mask frame and/or in a corresponding recess or notch provided in the mask carrier.
  • the elastic element can be arranged between the mask carrier and the mask frame, being in contact with the mask carrier and the mask frame.
  • the elastic element may be made of an elastomer.
  • the mask arrangement is configured such that a contactless support of the mask frame by the mask carrier is provided.
  • a “contactless support” may be understood as a support which is configured such that the outer circumference or outer contour of the mask frame has no contact with the inner circumference or inner contour of the mask carrier.
  • a free space provided around the outer contour of the mask frame allows for a relative movement of the mask frame to the mask carrier as well as for a relative movement of the mask carrier to the mask frame, such that mechanical or thermal stress on the mask carrier can be compensated by the compliant support.
  • the mask frame 110 may be mounted on the mask carrier 120 via the compliant support 130, as schematically shown in FIGS. 3A and 3B.
  • the mask frame can be mounted on top of the mask carrier such that the outer circumference or outer contour of the mask frame has no contact with the mask carrier.
  • a mounting of the mask frame to the mask carrier is provided which allows for a relative movement of the mask frame to the mask carrier as well as for a relative movement of the mask carrier to the mask frame, such that mechanical or thermal stress on the mask carrier can be compensated by the compliant support.
  • the compliant support 130 is integrated into the mask carrier 120.
  • the compliant support 130 can be integrated into the mask frame 110.
  • FIG. 3A an exemplary embodiment of the mask arrangement 100 is shown in which the compliant support 130 is integrated into the mask carrier 120, as schematically indicated by the dotted square depicted on the first side 120 A of the mask carrier and the dotted square depicted on the second side 120B of the mask carrier.
  • FIG. 3A an exemplary embodiment of the mask arrangement 100 is shown in which the compliant support 130 is integrated into the mask carrier 120, as schematically indicated by the dotted square depicted on the first side 120 A of the mask carrier and the dotted square depicted on the second side 120B of the mask carrier.
  • 3B shows an exemplary embodiment of the mask arrangement in which the compliant support 130 is integrated into the mask frame, as schematically indicated by the solid line square depicted on the first side 11 OA of the mask frame 110 and the solid line square depicted on the second side 110B of the mask frame 110.
  • the compliant support 130 is provided by a mechanical structure manufactured by electrical discharge machining (EDM), particularly by wire-EDM.
  • the mechanical structure which provides the compliant support may include a first mechanical structure 141 manufactured by EDM and a second mechanical structure 142 manufactured by EDM via which the mask frame is connected to the mask carrier, as exemplarily described in more detail with reference to FIGS. 4, 5 A, 5B and 5C.
  • the mechanical structure which provides the compliant support according to embodiments described herein may be provided by milling (e.g. thinning of the respective material structure of the mask frame and/ or thinning of the respective material structure of the mask carrier).
  • a mask arrangement 100 for masking a substrate during deposition in a processing chamber is provided.
  • the mask arrangement includes a mask frame 110 for holding a mask 115.
  • the mask arrangement includes a mask carrier 120 for holding the mask frame 110.
  • the mask frame 110 is connected to the mask carrier 120 via a first mechanical structure 141 and via a second mechanical structure 142.
  • the first mechanical structure 141 and the second mechanical structure 142 can be configured to provide a compliant connection between the mask frame and the mask carrier.
  • the first mechanical structure 141 can be configured for supporting the mask frame 110 in a first direction 101.
  • the first mechanical structure 141 can be configured for supporting the mask frame 110 in a second direction 102.
  • the second mechanical structure 142 can be configured for providing a degree of freedom in the first direction 101.
  • the first mechanical structure 141 and the second mechanical structure 142 can be configured for providing a compliant support of the mask frame 110 in a third direction 103.
  • the third direction 103 is perpendicular to the first direction 101 and perpendicular to the second direction 102.
  • the first mechanical structure 141 may be configured to provide a first compliant support 131 as described herein and the second mechanical structure 142 may be configured to provide a second compliant support 132 as described herein.
  • an alternative solution for a mechanical decoupling of the mask frame from the mask carrier may be realized by providing the first mechanical structure as a fixed support 145 (i.e. being fixed in the first direction 101 and the second direction 102) for the mask frame and providing the second mechanical structure 142 as a second support configured for providing a degree of freedom in the first direction 101 and for fixing the second direction 102.
  • the second support may be fixed in the first direction 101 and have a degree of freedom in the second direction 102.
  • the fixed support 145 may be provided on a first corner of the mask carrier and the second mechanical structure 142 providing the second support may be provided on an adjacent corner of the mask carrier.
  • the fixed support 145 can be a fixing pin.
  • the mask carrier may be provided with one or more additional supports (e.g. two or more mechanical structures) for the mask frame, the one or more additional supports being configured having a degree of freedom in the first direction 101 and a degree of freedom in the second direction 102.
  • a third mechanical structure 143 and/or a fourth mechanical structure 144 may be provided, as exemplarily shown in FIG. 4B.
  • the third mechanical structure 143 and/or the fourth mechanical structure 144 can be configured as the first mechanical structure as exemplarily described with reference to FIGS. 5 A and 5B.
  • the fixed support 145 and the third mechanical structure 143 may be arranged on the first side 11 OA of the mask frame 110 and the second mechanical structure 142 the fourth mechanical structure 144 may be arranged on the second side HOB of the mask frame 110, as exemplarily shown in FIG. 4B.
  • the first mechanical structure 141 and the second mechanical structure 142 are integrated into the mask carrier 120.
  • first mechanical structure 141 can be integrated into the first side 120 A of the mask carrier 120 and the second mechanical structure 142 can be integrated into the second side 120B of the mask carrier 120.
  • first mechanical structure 141 and the second mechanical structure 142 can be integrated into the mask frame 110.
  • first mechanical structure 141 can be integrated into the first side 11 OA of the mask frame 110 and the second mechanical structure 142 can be integrated into the second side HOB of the mask frame 110.
  • the first mechanical structure 141 can be an EDM cut structure and/or the second mechanical structure 142 can be an EDM cut structure.
  • the first mechanical structure 141 can be an EDM cut structure integrated into the mask carrier 120, as exemplarily shown in FIG. 5A, or into the mask frame (not explicitly shown).
  • the second mechanical structure 142 can be an EDM cut structure integrated into the mask carrier 120, as exemplarily shown in FIG. 5C, or into the mask frame (not explicitly shown).
  • the first mechanical structure 141 can include two first compliant elements 151 extending in the first direction 101. Further, the first mechanical structure 141 can include two second compliant elements 152 extending in the second direction 102. In particular, the two first compliant elements 151 and the two second compliant elements 152 may be provided by EDM cut structures.
  • the solid lines with the dots at the ends represent EDM cuts.
  • the EDM cuts may have a width of 0.5 mm to 2.0 mm, e.g. 1.0 mm + 0.1 mm.
  • the two first compliant elements 151 and the two second compliant elements 152 are arranged in a cross-like pattern. [0048] FIG.
  • FIG. 5B shows a schematic alternative example of a first mechanical structure for supporting the mask frame of the mask arrangement according to some embodiments described herein.
  • the two second compliant elements 152 are provided on a right and left side of the two first compliant elements 151. Accordingly, the two first compliant elements 151 and the two second compliant elements 152 can be arranged in a H-like pattern.
  • the first mechanical structure 141 is configured for providing exactly one compliant support in the first direction 101 as well as exactly one compliant support in the second direction 102. Further, from FIG. 5 A it is to be understood that the first mechanical structure 141 is configured for further providing a compliant support in the third direction 103. For instance, the dimensions in the third direction of the first compliant element 151 and the second compliant element 152 can be selected such that a compliant support in the third direction 103 is provided.
  • the connection point or mounting point of the first mechanical structure 141 for connecting the mask frame to the mask carrier is indicated by reference number 133 in FIG. 5 A.
  • the second mechanical structure 142 can include two third compliant elements 153 extending in the second direction 102. Accordingly, the second mechanical structure 142 is configured for providing exactly one compliant support in the second direction 102. Accordingly, it is to be understood that by turning the structure as shown in FIG. 5C by 90°, a second mechanical structure 142 can be realized which includes two third compliant elements 153 extending in the first direction 101, such that exactly one compliant support in the first direction 101 can be provided.
  • the second mechanical structure 142 can be configured for further providing a compliant support in the third direction 103.
  • the dimensions in the third direction of the two third compliant elements 153 can be selected such that a compliant support in the third direction 103 is provided.
  • the connection point or mounting point of the second mechanical structure 142 for connecting the mask frame to the mask carrier is indicated by reference number 134 in FIG. 5C.
  • the first compliant element 151 and/or the second compliant element 152 and/or the third compliant element 153 may be configured as at least one element of selected from the group consisting of: an elongated element, as zic-zac element (e.g. an element with an accordion-like structure), or any other suitable element configured for providing compliance.
  • the two third compliant elements 153 may be provided by EDM cut structures.
  • the solid lines with the dots at the ends represent EDM cuts.
  • the EDM cuts may have a width of 0.5 mm to 1.5 mm, e.g. 1.0 mm + 0.1 mm.
  • the two third compliant elements 153 are arranged opposed to each other in the second direction 102.
  • the apparatus includes a processing chamber 201 adapted for layer deposition therein; a deposition source 225 for depositing material forming a layer; and a mask arrangement 100 according to any of the embodiments described herein.
  • the apparatus further includes a substrate carrier 220 for carrying a substrate as described herein.
  • a first track arrangement 210 is provided which is configured for transportation of the substrate carrier 220.
  • a second track arrangement 230 can be provided which is configured for transportation of the mask arrangement 100.
  • the processing chamber 201 is a vacuum chamber (e.g. a vacuum processing chamber, particularly a vacuum deposition chamber).
  • vacuum can be understood in the sense of a technical vacuum having a vacuum pressure of less than, for example, 10 mbar.
  • the pressure in a vacuum chamber as described herein may be between 10 "5 mbar and about 10 - “ 8 mbar, more typically between 10 - “ 5 mbar and 10 - “ 7 mbar, and even more typically between about 10 "6 mbar and about 10 "7 mbar.
  • the pressure in the vacuum chamber may be considered to be either a partial pressure of an evaporated material within the vacuum chamber or the total pressure (which may approximately be the same when only the evaporated material is present as a component to be deposited in the vacuum chamber).
  • the total pressure in the vacuum chamber may range from about 10 "4 mbar to about 10 "7 mbar, especially in the case that a second component besides the evaporated material is present in the vacuum chamber (such as a gas or the like).
  • the apparatus can include at least one further chamber 202 having a transport arrangement.
  • the at least one further chamber 202 can be a rotation module, a transit module, or a combination thereof.
  • the rotation module the track arrangement and the carrier(s) arranged thereon can be rotated around a rotational axis, such as a vertical rotation axis.
  • the carrier(s) can be transferred from the left side of the apparatus to the right side of the apparatus, or vice versa.
  • the transit module can include tracks such that carrier(s) can be transferred through the transit module in different directions.
  • the vacuum processing chamber can be configured for depositing organic materials.
  • a deposition source 225 can be provided in the processing chamber 201.
  • the deposition source 225 can be provided on a track or linear guide 222.
  • the linear guide 222 may be configured for translational movement of the deposition source 225.
  • a drive for providing a translational movement of deposition source 225 can be provided.
  • a transportation apparatus for contactless transportation of the deposition source 225 may be provided.
  • a source support 231 can be provided which is configured for the translational movement of the deposition source 225 along the linear guide 222.
  • the source support 231 can support an evaporation crucible 221 and a distribution assembly 226 provided over the evaporation crucible 221. Accordingly, the vapor generated in the evaporation crucible 221 can move upwardly and out of one or more outlets of the distribution assembly.
  • the distribution assembly 226 is configured for providing evaporated organic material, particularly a plume of evaporated source material, from the distribution assembly to the substrate.
  • the processing chamber 201 may have gate valves 215 via which the vacuum processing chamber can be connected to an adjacent further chamber 202, e.g. a routing module or an adjacent service module.
  • the gate valves 215 allow for a vacuum seal to the adjacent further chamber and can be opened and closed for moving a substrate and/or a mask into or out of the vacuum processing chamber.
  • two substrates e.g. a first substrate 10A and a second substrate 10B
  • respective transportation tracks such as respective first track arrangements 210 as described herein.
  • two tracks e.g. two second track arrangements 230 as described herein, for providing mask arrangements 100 as described herein thereon can be provided.
  • the tracks for transportation of a substrate carrier 220 and/or a mask arrangement 100 may be configured for contactless transportation.
  • coating of the substrates may include masking the substrates by respective masks, e.g. by an edge exclusion mask or by a shadow mask.
  • a first mask 20A corresponding to the first substrate 10A and a second mask 20B corresponding to the second substrate 10B are provided in respective mask arrangements as described herein to hold the first mask 20A and the second mask 20B in a predetermined position, as exemplarily shown in FIG. 6.
  • the substrate is supported by the substrate carrier 220, which can be connected to an alignment system as described herein (not shown in FIG. 6).
  • the alignment system can be configured for adjusting the position of the substrate with respect to the mask. It is to be understood that the substrate can be moved relative to the mask in order to provide for a proper alignment between the substrate and the mask during deposition of the organic material.
  • the mask carrier holding the mask frame can be connected to the alignment system.
  • the mask frame holding the mask can be connected to the alignment system.
  • either the mask can be positioned relative to the substrate or the mask and the substrate can both be positioned relative to each other.
  • An alignment system as described herein may allow for a proper alignment of the masking during the deposition process, which is beneficial for high quality or OLED display manufacturing.
  • the apparatus for processing a substrate is configured for processing of large area substrates.
  • a "large area substrate" as described herein can have a size of at least 0.01 m , specifically at least 0.1 m 2 , and more specifically at least 0.5 m 2.
  • a large area substrate or carrier can be GEN 4.5, which corresponds to about 0.67 m 2 substrates (0.73 x 0.92m), GEN 5, which corresponds to about 1.4 m 2 substrates (1.1 m x 1.3 m), GEN 7.5, which corresponds to about 4.29 m 2 substrates (1.95 m x 2.2 m), GEN 8.5, which corresponds to about 5.7m 2 substrates (2.2 m x 2.5 m), or even GEN 10, which corresponds to about 8.7 m 2 substrates (2.85 m x 3.05 m). Even larger generations such as GEN 11 and GEN 12 and corresponding substrate areas can similarly be implemented.
  • the substrate can be selected from the group consisting of GEN 1, GEN 2, GEN 3, GEN 3.5, GEN 4, GEN 4.5, GEN 5, GEN 6, GEN 7, GEN 7.5, GEN 8, GEN 8.5, GEN 10, GEN 11, and GEN 12.
  • the substrate can be selected from the group consisting of GEN 4.5, GEN 5, GEN 7.5, GEN 8.5, GEN 10, GEN 11, and GEN 12, or larger generation substrates.
  • the substrate thickness can be from 0.1 to 1.8 mm, particularly about 0.9 mm or below, such as 0.7 mm or 0.5.
  • the term "substrate” or "large area substrate” as used herein shall particularly embrace inflexible substrates, e.g., glass plates and metal plates.
  • the present disclosure is not limited thereto, and the term “substrate” can also embrace flexible substrates such as a web or a foil.
  • the substrate can be made of any material suitable for material deposition.
  • the substrate can be made of a material selected from the group consisting of glass (for instance soda-lime glass, borosilicate glass etc.), metal, polymer, ceramic, compound materials, carbon fiber materials, mica or any other material or combination of materials which can be coated by a deposition process.
  • the apparatus for processing a substrate is configured for vertical substrate processing.
  • terms like "vertical direction” or “vertical orientation” are understood to distinguish over “horizontal direction” or “horizontal orientation”.
  • the apparatus for processing a substrate can be configured for vertical substrate masking, particularly by employing a mask arrangement as described herein.
  • the method includes manufacturing (block 310) a first mechanical structure 141 and a second mechanical structure 142, particularly by electrical discharge machining, such that the first mechanical structure and the second mechanical structure are integrated into the mask carrier 120 or into the mask frame 110.
  • manufacturing the first mechanical structure 141 includes manufacturing the first mechanical structure 141 such that a compliant support of the mask frame in a first direction and a compliant support in a second direction is provided.
  • manufacturing the second mechanical structure 142 includes manufacturing the second mechanical structure 142 such that a degree of freedom in the first direction is provided. Additionally, the method includes connecting (block 320) the mask frame 110 to the mask carrier 120 via the first mechanical structure 141 and via the second mechanical structure 142.
  • embodiments as described herein beneficially provide for improved mask arrangements, improved masking techniques and improved apparatuses for the production of optoelectronic devices, such as OLEDs.
  • embodiments as described herein have the advantage that a transfer of the stress or load from the mask carrier to the mask frame is substantially reduced or even eliminated.
  • embodiments as described herein have the advantage that a transfer of mechanical stress or load from the mask carrier to the mask frame and/or a transfer of thermal stress or load from the mask carrier to the mask frame is substantially reduced or even avoided.
  • embodiments of the present disclosure provide for an improved quality of the processing result, particularly for producing high quality OLEDs.

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Abstract

A mask arrangement (100) for masking a substrate during deposition in a processing chamber is described. The mask arrangement (100) includes a mask frame (110) for holding a mask (115), and a mask carrier (120) for holding the mask frame (110), wherein the mask frame (110) is connected to the mask carrier (120) by a compliant support (130).

Description

MASK ARRANGEMENT FOR MASKING A SUBSTRATE, APPARATUS FOR PROCESSING A SUBSTRATE, AND METHOD THEREFOR
TECHNICAL FIELD
[0001] The present disclosure relates to processing of substrates, particular thin flat substrates. In particular, embodiments described herein relate to mask arrangements for masking a substrate during deposition, deposition apparatuses for depositing material on a substrate through a mask, and a methods for holding a mask. More particularly, embodiments of the present disclosure relate to mask arrangements, deposition apparatuses and methods employed in the production of opto-electronic devices, e.g. organic light emitting diodes (OLEDs).
BACKGROUND
[0002] Several methods are known for depositing a material on a substrate. As an example, substrates may be coated by using an evaporation process, such as a physical vapor deposition (PVD) process, a chemical vapor deposition (CVD) process, a sputtering process, a spraying process, etc. The process can be performed in a processing chamber of a deposition apparatus where the substrate to be coated is located. A deposition material is provided in the processing chamber. A plurality of materials, such as small molecules, metals, oxides, nitrides and carbides, may be used for deposition on a substrate. Further, other processes like etching, structuring, annealing, or the like can be conducted in processing chambers.
[0003] Coated substrates may be used in several applications and in several technical fields. For instance, an application lies in the field of organic light emitting diode (OLED) panels. Further applications include insulating panels, microelectronics, such as semiconductor devices, substrates with TFT, color filters or the like. [0004] OLEDs are solid-state devices composed of thin films of (organic) molecules that create light with the application of electricity. OLEDs can provide bright displays on electronic devices and use less power than for instance light- emitting diodes (LEDs) or liquid crystal displays (LCDs). In the processing chamber, the organic molecules are generated (e.g., evaporated, sputtered, or sprayed etc.) and allowed to condense as thin films on the substrates. The particles pass through a mask having a specific pattern to form an OLED pattern on the substrate.
[0005] In order to reduce a footprint of deposition apparatuses, there are deposition apparatuses that allow for processing of a masked substrate in a vertical orientation. In other words, the substrate and the mask arrangement are vertically arranged within the processing chamber. When the mask arrangement is vertically oriented, the force of gravity can lead to a deformation or bending of the mask arrangement, resulting in a reduced quality of the processed substrate, and in particular of the deposited film or layer. Further, during assembling of the mask arrangement, during mask alignment, and during material deposition, it is critical to avoid deformation of the mask in order to produce high quality OLEDs.
[0006] Thus, there is a continuing need for improved mask arrangements, improved masking techniques and improved apparatuses for the production of optoelectronic devices, such as OLEDs.
SUMMARY
[0007] In light of the above, a mask arrangement for masking a substrate, an apparatus for processing a substrate, and a method for providing a support of a mask frame within a mask carrier are provided. Further aspects, benefits, and features of the present disclosure are apparent from the claims, the description, and the accompanying drawings.
[0008] According to an aspect of the present disclosure, a mask arrangement for masking a substrate during deposition in a processing chamber is provided. The mask arrangement includes a mask frame for holding a mask. Further, the mask arrangement includes a mask carrier for holding the mask frame, wherein the mask frame is connected to the mask carrier by a compliant support.
[0009] According to another aspect of the present disclosure, a mask arrangement for masking a substrate during deposition in a processing chamber is provided, wherein the mask arrangement includes a mask frame for holding a mask and a mask carrier for holding the mask frame. The mask frame is connected to the mask carrier via a first mechanical structure and via a second mechanical structure. The first mechanical structure is configured for supporting the mask frame in a first direction and in a second direction. The second mechanical structure is configured for providing a degree of freedom in the first direction.
[0010] According to another aspect of the present disclosure, a mask arrangement for masking a substrate during deposition in a processing chamber is provided. The mask arrangement includes a mask frame for holding a mask, and a mask carrier for holding the mask frame. The mask frame is connected to the mask carrier via a first mechanical structure and via a second mechanical structure. The first mechanical structure is configured as a fixed support for fixing the mask frame in a first direction and in a second direction. The second mechanical structure is configured for providing a degree of freedom in the first direction and for fixing the second direction.
[0011] According to yet another aspect of the present disclosure, an apparatus for processing a substrate is provided. The apparatus includes: a processing chamber adapted for layer deposition therein; a deposition source for depositing material forming the layer; and a mask arrangement according to any embodiments described herein within the processing chamber.
[0012] According to a further aspect of the present disclosure, a method for providing a support of a mask frame by a mask carrier is provided. The method includes manufacturing a first mechanical structure and a second mechanical structure, particularly by electrical discharge machining, such that the first mechanical structure and the second mechanical structure are integrated into the mask carrier or into the mask frame, wherein the first mechanical structure provides for a compliant support of the mask frame in a first direction and in a second direction, and wherein the second mechanical structure provides for a degree of freedom in the first direction. Further, the method includes connecting the mask frame to the mask carrier via the first mechanical structure and via the second mechanical structure.
[0013] Embodiments are also directed at apparatuses for carrying out the disclosed methods and include apparatus parts for performing each described method aspect. These method aspects may be performed by way of hardware components, a computer programmed by appropriate software, by any combination of the two or in any other manner. Furthermore, embodiments according to the disclosure are also directed at methods for operating the described apparatus. The methods for operating the described apparatus include method aspects for carrying out every function of the apparatus.
BRIEF DESCRIPTION OF THE DRAWINGS
[0014] So that the manner in which the above recited features of the present disclosure can be understood in detail, a more particular description of the disclosure, briefly summarized above, may be had by reference to embodiments. The accompanying drawings relate to embodiments of the disclosure and are described in the following:
FIG. 1A shows a schematic front view of a mask arrangement according to embodiments described herein;
FIG. IB shows a schematic side view of a mask arrangement according to embodiments described herein;
FIG. 2 shows a schematic front view of a mask arrangement according to further embodiments described herein; FIG. 3A shows a schematic front view of a mask arrangement according to some embodiments described herein, wherein a compliant support is integrated into the mask carrier;
FIG. 3B shows a schematic front view of a mask arrangement according to some embodiments described herein, wherein a compliant support is integrated into the mask frame;
FIGS. 4A and 4B shows a schematic front view of a mask arrangement according to further embodiments described herein;
FIG. 5A shows a schematic example of a first mechanical structure for supporting the mask frame of the mask arrangement according to some embodiments described herein;
FIG. 5B shows a schematic alternative example of a first mechanical structure for supporting the mask frame of the mask arrangement according to some embodiments described herein; FIG. 5C shows a schematic example of a second mechanical structure for supporting the mask frame of the mask arrangement according to some embodiments described herein;
FIG. 6 shows a schematic view of an apparatus for processing a substrate according to embodiments described herein; and FIG. 7 shows a flowchart for illustrating a method for providing a support of a mask frame by a mask carrier according to embodiments described herein.
DETAILED DESCRIPTION OF EMBODIMENTS
[0015] Reference will now be made in detail to the various embodiments of the disclosure, one or more examples of which are illustrated in the figures. Within the following description of the drawings, the same reference numbers refer to same components. Only the differences with respect to individual embodiments are described. Each example is provided by way of explanation of the disclosure and is not meant as a limitation of the disclosure. Further, features illustrated or described as part of one embodiment can be used on or in conjunction with other embodiments to yield yet a further embodiment. It is intended that the description includes such modifications and variations.
[0016] Before various embodiments of the present disclosure are described in more detail, some aspects with respect to some terms and expressions used herein are explained.
[0017] In the present disclosure, a "mask arrangement for masking a substrate" can be understood as an arrangement including a mask for masking a substrate, particularly for masking a substrate as described herein. In particular, a "mask arrangement" as described herein can be understood as an arrangement including a mask frame which is configured for holding a mask in a predetermined position. Typically, the "mask arrangement" further includes a mask carrier which is configured for holding the mask frame. A "mask carrier" may be understood as a carrier including a reception configured for receiving the mask frame. For example, the reception of the mask carrier can be an opening configured for receiving the mask frame. Accordingly, the mask carrier can be configured such that the mask frame is held or supported by the mask carrier. The mask carrier can at least partially be arranged around the mask frame. According to one example, the mask arrangement includes a mask carrier configured for supporting the mask frame, wherein the mask carrier surrounds the outer contour of the mask frame, as exemplarily shown in FIG. 1A.
[0018] Further, it is to be understood that the mask arrangement as described herein can be configured for masking a substrate as described herein, particularly a large area substrate as described herein. Accordingly, the dimensions of the mask typically substantially correspond to the dimensions of the respective substrate to be masked. Thus, it is to be understood that the dimensions selected for the mask influence the respective dimensions of the mask frame holding the mask as well as the respective dimensions of the mask carrier holding the mask frame. A "mask frame for holding a mask" can be understood as a mechanical frame structure which is configured for holding a mask, particularly a mask as described herein.
[0019] In the present disclosure, a "mask" can be understood as a thin plate having at least one opening. Typically, the mask as described herein may have a thickness of 0.2 mm or less. In particular, the mask as described herein may be employed to cover areas of a substrate which shall not be processed, e.g. not be coated. For instance, the mask as described herein may be made of at least one material selected from the group consisting of: LiCO, AI2O2, YSZ, AlTiC, glass D263T, stainless steel, Ti, Macor, and Invar e.g. with approx 30% or 80% Ni. For example, the mask may be an edge exclusion shield configured for masking one or more edge regions of a substrate, such that no material is deposited on the one or more edge regions during the coating of the substrate. As another example, the mask may be a shadow mask for masking a plurality of features, which are deposited on the substrate with the material from a deposition source. For instance, the mask may be a pixel mask, particularly configured for OLED production.
[0020] In the present disclosure, a "compliant support" can be understood as a support which is configured such that a mechanical decoupling of two elements which are connected by the compliant support can be provided. In other words, a "compliant support" can be understood as a support which provides for mechanical isolation of two elements connected to each other via the compliant support. In particular, in the present disclosure, the compliant support can be a compliant connection provided between the mask frame and the mask carrier. For instance, a compliant connection between the mask frame and the mask carrier can be understood as a floating connection between the mask frame and the mask carrier. In particular, the compliant support as described herein can be configured such that mechanical or thermal stress on the mask carrier can be compensated by the compliant support, such that beneficially a deformation of the mask frame and thus a deformation of the mask is substantially reduced or even avoided. [0021] For instance, a "compliant support" as described herein can be configured such that when a stress or load is applied to the mask carrier, a stress or load transfer from the mask carrier to the mask frame is substantially reduced or even eliminated; i.e. compensated by the compliant support. In particular, the compliant support can be understood as a resilient support or an elastic support. Accordingly, the compliant support can be understood as a support providing a connection between the mask carrier and the mask frame, such that the connection is elastic or resilient. A compliant element as described herein, can be understood as an element being configured for providing compliance or for providing elasticity or for providing resilience. Accordingly, the compliant element can be an elastic element or a resilient element.
[0022] For example, the stress or load applied to the mask carrier can be a mechanical stress or load and/or a thermal stress or load. In particular, a mechanical stress on the mask carrier may occur during assembly of the mask arrangement, i.e. during assembly of the mask frame and the mask carrier. Accordingly, the compliant support as described herein can be configured such that a mechanical stress transfer from the mask carrier to the mask frame, e.g. during assembly of the mask arrangement, is substantially reduced or even eliminated. Thus, beneficially a deformation of the mask due to mechanical stress on the mask carrier during assembly is substantially reduced or even avoided.
[0023] According to another example, a mechanical stress on the mask carrier may occur during alignment of the mask carrier with the substrate. For instance, during alignment of the mask carrier with the substrate, accurate and well defined clamping of the mask carrier may be necessary, which can cause mechanical stress on the mask carrier. Accordingly, the compliant support as described herein can be configured such that a mechanical stress transfer from the mask carrier to the mask frame during alignment is substantially reduced or even eliminated. Thus, beneficially a deformation of the mask during alignment is substantially reduced or even avoided. [0024] According to a further example, a thermal stress or load on the mask carrier may occur during processing, e.g. during a material deposition process. In particular, during processing the mask carrier is typically subjected to elevated temperatures, which may cause thermal expansion of the mask carrier. Accordingly, the compliant support as described herein can be configured such that a thermal stress transfer from the mask carrier to the mask frame at elevated temperatures, e.g. during processing, is substantially reduced or even eliminated, i.e. compensated by the compliant support. In other words, the compliant support as described herein can be configured such that a thermal expansion of the mask carrier does substantially not transfer to the mask frame. Thus, beneficially a deformation of the mask during processing is substantially reduced or even avoided.
[0025] With exemplary reference to FIG. 1A, a mask arrangement 100 for masking a substrate during deposition in a processing chamber is described. According to embodiments which can be combined with any other embodiments described herein, the mask arrangement 100 includes a mask frame 110 for holding a mask 115. Further, the mask arrangement includes a mask carrier 120 for holding the mask frame 110. As schematically shown in FIG. 1, the mask frame 110 is connected to the mask carrier 120 by a compliant support 130. Accordingly, beneficially a mask arrangement is provided which is configured such that when a stress or load is applied to the mask carrier, a transfer of the stress or load from the mask carrier to the mask frame is substantially reduced or even eliminated. In particular, embodiments of the mask arrangement as described herein have the advantage that a transfer of mechanical stress or load from the mask carrier to the mask frame and/or a transfer of thermal stress or load from the mask carrier to the mask frame is substantially reduced or even avoided. Thus, compared to conventional mask arrangements, the embodiments of the mask arrangement as described herein are improved since a deformation of a mask held by the mask frame can be reduced or even avoided. Accordingly, by employing a mask arrangement according to embodiments described herein during processing, particularly during material deposition on a substrate, the quality of the processing result can be improved.
[0026] As schematically shown in FIG. 1A, according to embodiments which can be combined with any other embodiments described herein, the compliant support 130 is configured such that the mask frame 110 is mechanically decoupled from the mask carrier 120. In particular, the compliant support may be configured such that mask carrier deformations are decoupled from the mask frame structure. Accordingly, beneficially deformations of the mask carrier are not transferred to the mask frame. In other words, the compliant support can be configured such that the mask frame is mechanically isolated from the mask carrier. For instance, the compliant support can be configured such that a floating mounting of the mask frame to the mask carrier is provided.
[0027] In FIG. 1A, the compliant support 130 is schematically indicated by spring mechanisms. In particular, the compliant support can be configured such that exactly one mechanical support, particularly exactly one connection of the mask frame to the mask carrier, provides a compliant support for the mask frame, particularly a compliant support with mechanical stiffness, in a first direction 101. Further, the compliant support can be configured such that exactly two mechanical supports, particularly exactly two connections of the mask frame to the mask carrier, provide a compliant support, particularly a compliant support with mechanical stiffness, in a second direction 102 being different from the first direction 101. In particular, the second direction 102 can be perpendicular to the first direction 101. For instance, the first direction 101 can be an x-direction and the second direction 102 can be a y-direction. In particular, the first direction 101 may be a substantially horizontal direction ("substantially horizontal direction" = horizontal + 15°) and the second direction 102 may be a substantially vertical direction ("substantially vertical direction" = vertical + 15°).
[0028] In the present disclosure, the expression "compliant support with mechanical stiffness" is to be understood as a support structure connecting the mask frame with the mask carrier, wherein the support structure is configured for holding the mask frame (e.g. by providing a connection between the mask frame and the mask carrier with sufficient mechanical stiffness to support or hold the mask frame) and for compensating mechanical or thermal stress on the mask carrier such that a deformation of the mask held by the mask frame is substantially reduced or even avoided (e.g. by providing a connection between the mask frame and the mask carrier with sufficient compliance or sufficient elasticity for compensating mechanical or thermal stress).
[0029] According to another exemplary embodiment which can be combined other embodiments described herein, a mechanical decoupling of the mask frame from the mask carrier, particularly a decoupling of mask carrier deformations from the mask frame may be realized by providing the mask carrier with a first fixed support (i.e. being fixed in the first direction 101 and the second direction 102) for the mask frame and providing the mask carrier with a second support being fixed in the first direction 101 and having a degree of freedom in the second direction 102. Alternatively, the second support may be fixed in the second direction 102 and have a degree of freedom in the first direction 101.
[0030] For instance, the first fixed support may be provided on a first corner of the mask carrier and the second support may be provided on an adjacent corner of the mask carrier. According to further embodiments, the mask carrier may be provided with two or more additional supports for the mask frame, the two or more additional supports being configured having a degree of freedom in the first direction 101 and a degree of freedom in the second direction 102.
[0031] With exemplary reference to FIG. 2, according to embodiments which can be combined with any other embodiments described herein, the compliant support 130 includes a first compliant support 131 at a first side 110A of the mask frame 110 and a second compliant support 132 at a second side HOB of the mask frame 110 opposite the first side of the mask frame. In particular, the first compliant support 131 is configured for supporting the mask frame 110 in a first direction 101. Additionally, the first compliant support 131 is configured for supporting the mask frame 110 in a second direction 102. The second compliant support 132 is configured for supporting the mask frame 110 in the second direction 102. Additionally, the second compliant support 132 is configured for providing a degree of freedom for the mask frame 110 in the first direction 101. In FIG. 2, the connection of the mask frame to the mask carrier via the compliant support is exemplarily indicated by reference numbers 133 and 134. Accordingly, the mask frame 110 can be connected to the mask carrier 120 by a set of compliant supports.
[0032] As schematically shown in FIG. IB, according to embodiments which can be combined with any other embodiments described herein, the compliant support 130 is configured for providing a compliant support in a third direction 103. The third direction can be a z-direction. In particular, the third direction 103 can be perpendicular to the first direction 101 and perpendicular to the second direction 102.
[0033] With exemplary reference to FIG. 1A, according to embodiments which can be combined with any other embodiments described herein, the mask carrier 120 is at least partially arranged around the mask frame 110. For instance, the mask carrier can include a reception configured for receiving the mask frame. In particular, the reception of the mask carrier can be an opening configured for receiving the mask frame. For example, the opening can be configured such that in an assembled state of the mask arrangement, at least three outer edges of the mask frame, particularly four outer edges of the mask frame, face at least three corresponding inner edges of the opening of the mask carrier, particularly four inner edges of the opening of the mask carrier. Accordingly, the reception of the mask carrier can be configured such that the inner circumference or inner contour of the reception faces the outer circumference or outer contour of the mask frame.
[0034] As exemplarily shown in FIG. 2, according to embodiments which can be combined with any other embodiments described herein, a free space 121 may be provided between the inner circumference or inner contour of the mask carrier, particularly of the reception of the mask carrier, and the outer circumference or outer contour of the mask frame. For instance, the free space can be a gap provided between the mask carrier and the mask frame, particularly between the inner circumference or inner contour of the mask carrier and the outer circumference or outer contour of the mask frame. The gap may have a dimension D selected from a range having a lower limit of 250 μιη, particularly a lower limit of 500 μιη, more particularly a lower limit of 1.0 mm and an upper limit of 1.5 mm, particularly an upper limit of 2.5 mm, more particularly an upper limit of 5.0 mm.
[0035] According to embodiments some embodiments which can be combined with other embodiments described herein, an outer edge of the mask frame 110 may overlap with an inner edge of the reception of the mask carrier 120. Such a configuration can in particular be beneficial for providing a compliant support in the third direction 103, as exemplarily shown in FIG. IB. In particular, with exemplary reference to FIG. IB, the compliant support can include an elastic foundation providing elasticity in the third direction. For example, the outer edge of the mask frame 110 may be connected with the inner edge of the reception of the mask carrier 120 by one or more connecting elements (e.g. the schematically indicated spring elements in FIG. IB) which provide a compliant support in the third direction. In particular, the compliant support in the third direction may be an elastic foundation or elastic connection between the mask frame and the mask carrier. The compliant support in the third direction may be provided on at least two sides of the mask frame. For instance, the compliant support in the third direction may be provided on a left side of the mask frame and on a right side of the mask frame. Alternatively, as exemplarily shown in FIG. IB, the compliant support in the third direction may be provided at an upper side of the mask frame and on a lower side of the mask frame. Accordingly, it is to be understood, that the compliant support in the third direction can be provided at an upper side of the mask frame and on a lower side of the mask frame and/or on a left side of the mask frame and on a right side of the mask frame. For instance, the compliant support in the third direction can be provided on each side of the mask frame. [0036] According to an example, the compliant support in the third direction may be provided by an elastic element provided between the mask frame and the mask carrier. For instance the elastic element can be an O-ring. For example, the elastic element, e.g. the O-ring, may be arranged in a corresponding recess or notch provided in the mask frame and/or in a corresponding recess or notch provided in the mask carrier. Accordingly, the elastic element can be arranged between the mask carrier and the mask frame, being in contact with the mask carrier and the mask frame. For instance, the elastic element may be made of an elastomer. [0037] Accordingly, beneficially the mask arrangement is configured such that a contactless support of the mask frame by the mask carrier is provided. A "contactless support" may be understood as a support which is configured such that the outer circumference or outer contour of the mask frame has no contact with the inner circumference or inner contour of the mask carrier. Thus, a free space provided around the outer contour of the mask frame allows for a relative movement of the mask frame to the mask carrier as well as for a relative movement of the mask carrier to the mask frame, such that mechanical or thermal stress on the mask carrier can be compensated by the compliant support.
[0038] According to another embodiment which can be combined with other embodiments described herein, the mask frame 110 may be mounted on the mask carrier 120 via the compliant support 130, as schematically shown in FIGS. 3A and 3B. In particular, the mask frame can be mounted on top of the mask carrier such that the outer circumference or outer contour of the mask frame has no contact with the mask carrier. Thus, beneficially a mounting of the mask frame to the mask carrier is provided which allows for a relative movement of the mask frame to the mask carrier as well as for a relative movement of the mask carrier to the mask frame, such that mechanical or thermal stress on the mask carrier can be compensated by the compliant support.
[0039] According to embodiments which can be combined with any other embodiments described herein, the compliant support 130 is integrated into the mask carrier 120. Alternatively, the compliant support 130 can be integrated into the mask frame 110. In FIG. 3A, an exemplary embodiment of the mask arrangement 100 is shown in which the compliant support 130 is integrated into the mask carrier 120, as schematically indicated by the dotted square depicted on the first side 120 A of the mask carrier and the dotted square depicted on the second side 120B of the mask carrier. FIG. 3B shows an exemplary embodiment of the mask arrangement in which the compliant support 130 is integrated into the mask frame, as schematically indicated by the solid line square depicted on the first side 11 OA of the mask frame 110 and the solid line square depicted on the second side 110B of the mask frame 110.
[0040] According to embodiments which can be combined with any other embodiments described herein, the compliant support 130 is provided by a mechanical structure manufactured by electrical discharge machining (EDM), particularly by wire-EDM. In particular, the mechanical structure which provides the compliant support may include a first mechanical structure 141 manufactured by EDM and a second mechanical structure 142 manufactured by EDM via which the mask frame is connected to the mask carrier, as exemplarily described in more detail with reference to FIGS. 4, 5 A, 5B and 5C. Alternatively, the mechanical structure which provides the compliant support according to embodiments described herein, may be provided by milling (e.g. thinning of the respective material structure of the mask frame and/ or thinning of the respective material structure of the mask carrier). As a further alternative, the mechanical structure which provides the compliant support according to embodiments described herein, may be provided by spring elements, particularly mechanical springs. [0041] With exemplary reference to FIG. 4A, according to embodiments which can be combined with any other embodiments described herein, a mask arrangement 100 for masking a substrate during deposition in a processing chamber is provided. The mask arrangement includes a mask frame 110 for holding a mask 115. Further, the mask arrangement includes a mask carrier 120 for holding the mask frame 110. Typically, the mask frame 110 is connected to the mask carrier 120 via a first mechanical structure 141 and via a second mechanical structure 142.
[0042] As schematically indicated by spring mechanisms in FIG. 4A, the first mechanical structure 141 and the second mechanical structure 142 can be configured to provide a compliant connection between the mask frame and the mask carrier. For instance, the first mechanical structure 141 can be configured for supporting the mask frame 110 in a first direction 101. Further, the first mechanical structure 141 can be configured for supporting the mask frame 110 in a second direction 102. The second mechanical structure 142 can be configured for providing a degree of freedom in the first direction 101. Further, the first mechanical structure 141 and the second mechanical structure 142 can be configured for providing a compliant support of the mask frame 110 in a third direction 103. Typically, the third direction 103 is perpendicular to the first direction 101 and perpendicular to the second direction 102. [0043] In particular, the first mechanical structure 141 may be configured to provide a first compliant support 131 as described herein and the second mechanical structure 142 may be configured to provide a second compliant support 132 as described herein.
[0044] With exemplarily reference to FIG. 4B, according to another exemplary embodiment which may be combined with other embodiments described herein, an alternative solution for a mechanical decoupling of the mask frame from the mask carrier, particularly a decoupling of mask carrier deformations from the mask frame structure may be realized by providing the first mechanical structure as a fixed support 145 (i.e. being fixed in the first direction 101 and the second direction 102) for the mask frame and providing the second mechanical structure 142 as a second support configured for providing a degree of freedom in the first direction 101 and for fixing the second direction 102. Alternatively, the second support may be fixed in the first direction 101 and have a degree of freedom in the second direction 102. [0045] For instance, the fixed support 145 may be provided on a first corner of the mask carrier and the second mechanical structure 142 providing the second support may be provided on an adjacent corner of the mask carrier. In particular, the fixed support 145 can be a fixing pin. According to further embodiments, the mask carrier may be provided with one or more additional supports (e.g. two or more mechanical structures) for the mask frame, the one or more additional supports being configured having a degree of freedom in the first direction 101 and a degree of freedom in the second direction 102. In particular, a third mechanical structure 143 and/or a fourth mechanical structure 144 may be provided, as exemplarily shown in FIG. 4B. For instance, the third mechanical structure 143 and/or the fourth mechanical structure 144 can be configured as the first mechanical structure as exemplarily described with reference to FIGS. 5 A and 5B. For example, the fixed support 145 and the third mechanical structure 143 may be arranged on the first side 11 OA of the mask frame 110 and the second mechanical structure 142 the fourth mechanical structure 144 may be arranged on the second side HOB of the mask frame 110, as exemplarily shown in FIG. 4B. According to embodiments which can be combined with any other embodiments described herein, the first mechanical structure 141 and the second mechanical structure 142 are integrated into the mask carrier 120. For example, the first mechanical structure 141 can be integrated into the first side 120 A of the mask carrier 120 and the second mechanical structure 142 can be integrated into the second side 120B of the mask carrier 120. Alternatively, the first mechanical structure 141 and the second mechanical structure 142 can be integrated into the mask frame 110. For instance, the first mechanical structure 141 can be integrated into the first side 11 OA of the mask frame 110 and the second mechanical structure 142 can be integrated into the second side HOB of the mask frame 110.
[0046] With exemplary reference to FIGS. 5 A, 5B and 5C, according to embodiments which can be combined with any other embodiments described herein, the first mechanical structure 141 can be an EDM cut structure and/or the second mechanical structure 142 can be an EDM cut structure. In particular, the first mechanical structure 141 can be an EDM cut structure integrated into the mask carrier 120, as exemplarily shown in FIG. 5A, or into the mask frame (not explicitly shown). Accordingly, the second mechanical structure 142 can be an EDM cut structure integrated into the mask carrier 120, as exemplarily shown in FIG. 5C, or into the mask frame (not explicitly shown). [0047] For example, as schematically shown in FIG. 5A, the first mechanical structure 141 can include two first compliant elements 151 extending in the first direction 101. Further, the first mechanical structure 141 can include two second compliant elements 152 extending in the second direction 102. In particular, the two first compliant elements 151 and the two second compliant elements 152 may be provided by EDM cut structures. In FIG. 5A, the solid lines with the dots at the ends represent EDM cuts. For instance, the EDM cuts may have a width of 0.5 mm to 2.0 mm, e.g. 1.0 mm + 0.1 mm. In the example as shown in FIG. 5A, the two first compliant elements 151 and the two second compliant elements 152 are arranged in a cross-like pattern. [0048] FIG. 5B shows a schematic alternative example of a first mechanical structure for supporting the mask frame of the mask arrangement according to some embodiments described herein. In the example as shown in FIG. 5A, the two second compliant elements 152 are provided on a right and left side of the two first compliant elements 151. Accordingly, the two first compliant elements 151 and the two second compliant elements 152 can be arranged in a H-like pattern.
[0049] Accordingly, the first mechanical structure 141 is configured for providing exactly one compliant support in the first direction 101 as well as exactly one compliant support in the second direction 102. Further, from FIG. 5 A it is to be understood that the first mechanical structure 141 is configured for further providing a compliant support in the third direction 103. For instance, the dimensions in the third direction of the first compliant element 151 and the second compliant element 152 can be selected such that a compliant support in the third direction 103 is provided. For illustrative purposes, the connection point or mounting point of the first mechanical structure 141 for connecting the mask frame to the mask carrier is indicated by reference number 133 in FIG. 5 A. [0050] As exemplarily shown in FIG. 5C, the second mechanical structure 142 can include two third compliant elements 153 extending in the second direction 102. Accordingly, the second mechanical structure 142 is configured for providing exactly one compliant support in the second direction 102. Accordingly, it is to be understood that by turning the structure as shown in FIG. 5C by 90°, a second mechanical structure 142 can be realized which includes two third compliant elements 153 extending in the first direction 101, such that exactly one compliant support in the first direction 101 can be provided.
[0051] Further, from FIG. 5C it is to be understood that the second mechanical structure 142 can be configured for further providing a compliant support in the third direction 103. For instance, the dimensions in the third direction of the two third compliant elements 153 can be selected such that a compliant support in the third direction 103 is provided. For illustrative purposes, the connection point or mounting point of the second mechanical structure 142 for connecting the mask frame to the mask carrier is indicated by reference number 134 in FIG. 5C.
[0052] According to embodiments, which can be combined with any other embodiments described herein the first compliant element 151 and/or the second compliant element 152 and/or the third compliant element 153 may be configured as at least one element of selected from the group consisting of: an elongated element, as zic-zac element (e.g. an element with an accordion-like structure), or any other suitable element configured for providing compliance.
[0053] Further, the two third compliant elements 153 may be provided by EDM cut structures. In FIG. 5C, the solid lines with the dots at the ends represent EDM cuts. For instance, the EDM cuts may have a width of 0.5 mm to 1.5 mm, e.g. 1.0 mm + 0.1 mm. In the example as shown in FIG. 5C, the two third compliant elements 153 are arranged opposed to each other in the second direction 102.
[0054] With exemplary reference to FIG. 6, an apparatus 200 for processing a substrate is described. According to embodiments which can be combined with any other embodiments described herein, the apparatus includes a processing chamber 201 adapted for layer deposition therein; a deposition source 225 for depositing material forming a layer; and a mask arrangement 100 according to any of the embodiments described herein.
[0055] According to embodiments which can be combined with any other embodiments described herein, the apparatus further includes a substrate carrier 220 for carrying a substrate as described herein. In some implementations, a first track arrangement 210 is provided which is configured for transportation of the substrate carrier 220. Further, a second track arrangement 230 can be provided which is configured for transportation of the mask arrangement 100. [0056] According to some embodiments, which can be combined with any other embodiments described herein, the processing chamber 201 is a vacuum chamber (e.g. a vacuum processing chamber, particularly a vacuum deposition chamber). The term "vacuum", as used herein, can be understood in the sense of a technical vacuum having a vacuum pressure of less than, for example, 10 mbar. Typically, the pressure in a vacuum chamber as described herein may be between 10"5 mbar and about 10 -"8 mbar, more typically between 10 -"5 mbar and 10 -"7 mbar, and even more typically between about 10"6 mbar and about 10"7 mbar. According to some embodiments, the pressure in the vacuum chamber may be considered to be either a partial pressure of an evaporated material within the vacuum chamber or the total pressure (which may approximately be the same when only the evaporated material is present as a component to be deposited in the vacuum chamber). In some embodiments, the total pressure in the vacuum chamber may range from about 10"4 mbar to about 10"7 mbar, especially in the case that a second component besides the evaporated material is present in the vacuum chamber (such as a gas or the like).
[0057] Further, as exemplarily shown in FIG. 6, the apparatus can include at least one further chamber 202 having a transport arrangement. The at least one further chamber 202 can be a rotation module, a transit module, or a combination thereof. In the rotation module, the track arrangement and the carrier(s) arranged thereon can be rotated around a rotational axis, such as a vertical rotation axis. As an example, the carrier(s) can be transferred from the left side of the apparatus to the right side of the apparatus, or vice versa. The transit module can include tracks such that carrier(s) can be transferred through the transit module in different directions. The vacuum processing chamber can be configured for depositing organic materials.
[0058] As exemplarily shown in FIG. 6, a deposition source 225, particularly an evaporation source, can be provided in the processing chamber 201. The deposition source 225 can be provided on a track or linear guide 222. The linear guide 222 may be configured for translational movement of the deposition source 225. Further, a drive for providing a translational movement of deposition source 225 can be provided. In particular, a transportation apparatus for contactless transportation of the deposition source 225 may be provided.
[0059] With exemplary reference to FIG. 6, according to embodiments which can be combined with any other embodiments described herein, a source support 231 can be provided which is configured for the translational movement of the deposition source 225 along the linear guide 222. The source support 231 can support an evaporation crucible 221 and a distribution assembly 226 provided over the evaporation crucible 221. Accordingly, the vapor generated in the evaporation crucible 221 can move upwardly and out of one or more outlets of the distribution assembly. Thus, the distribution assembly 226 is configured for providing evaporated organic material, particularly a plume of evaporated source material, from the distribution assembly to the substrate.
[0060] As exemplarily shown in FIG. 6, the processing chamber 201 may have gate valves 215 via which the vacuum processing chamber can be connected to an adjacent further chamber 202, e.g. a routing module or an adjacent service module. In particular, the gate valves 215 allow for a vacuum seal to the adjacent further chamber and can be opened and closed for moving a substrate and/or a mask into or out of the vacuum processing chamber. [0061] With exemplary reference to FIG. 6, according to embodiments which can be combined with any other embodiment described herein, two substrates, e.g. a first substrate 10A and a second substrate 10B, can be supported on respective transportation tracks, such as respective first track arrangements 210 as described herein. Further, two tracks, e.g. two second track arrangements 230 as described herein, for providing mask arrangements 100 as described herein thereon can be provided. In particular, the tracks for transportation of a substrate carrier 220 and/or a mask arrangement 100 may be configured for contactless transportation.
[0062] According to embodiments which can be combined with any other embodiments described herein, coating of the substrates may include masking the substrates by respective masks, e.g. by an edge exclusion mask or by a shadow mask. According to some embodiments, a first mask 20A corresponding to the first substrate 10A and a second mask 20B corresponding to the second substrate 10B are provided in respective mask arrangements as described herein to hold the first mask 20A and the second mask 20B in a predetermined position, as exemplarily shown in FIG. 6.
[0063] According to some embodiments, which can be combined with other embodiments described herein, the substrate is supported by the substrate carrier 220, which can be connected to an alignment system as described herein (not shown in FIG. 6). The alignment system can be configured for adjusting the position of the substrate with respect to the mask. It is to be understood that the substrate can be moved relative to the mask in order to provide for a proper alignment between the substrate and the mask during deposition of the organic material. According to a further embodiment, which can be combined with other embodiments described herein, alternatively or additionally the mask carrier holding the mask frame can be connected to the alignment system. According to a yet further embodiment, which can be combined with other embodiments described herein, alternatively or additionally the mask frame holding the mask can be connected to the alignment system. Accordingly, either the mask can be positioned relative to the substrate or the mask and the substrate can both be positioned relative to each other. An alignment system as described herein may allow for a proper alignment of the masking during the deposition process, which is beneficial for high quality or OLED display manufacturing.
[0064] According to embodiments, which can be combined with any other embodiments described herein, the apparatus for processing a substrate is configured for processing of large area substrates. For example, a "large area substrate" as described herein can have a size of at least 0.01 m , specifically at least 0.1 m 2 , and more specifically at least 0.5 m 2. For instance, a large area substrate or carrier can be GEN 4.5, which corresponds to about 0.67 m2 substrates (0.73 x 0.92m), GEN 5, which corresponds to about 1.4 m2 substrates (1.1 m x 1.3 m), GEN 7.5, which corresponds to about 4.29 m2 substrates (1.95 m x 2.2 m), GEN 8.5, which corresponds to about 5.7m2 substrates (2.2 m x 2.5 m), or even GEN 10, which corresponds to about 8.7 m2 substrates (2.85 m x 3.05 m). Even larger generations such as GEN 11 and GEN 12 and corresponding substrate areas can similarly be implemented. Accordingly, the substrate can be selected from the group consisting of GEN 1, GEN 2, GEN 3, GEN 3.5, GEN 4, GEN 4.5, GEN 5, GEN 6, GEN 7, GEN 7.5, GEN 8, GEN 8.5, GEN 10, GEN 11, and GEN 12. In particular, the substrate can be selected from the group consisting of GEN 4.5, GEN 5, GEN 7.5, GEN 8.5, GEN 10, GEN 11, and GEN 12, or larger generation substrates. Further, the substrate thickness can be from 0.1 to 1.8 mm, particularly about 0.9 mm or below, such as 0.7 mm or 0.5.
[0065] In the present disclosure, the term "substrate" or "large area substrate" as used herein shall particularly embrace inflexible substrates, e.g., glass plates and metal plates. However, the present disclosure is not limited thereto, and the term "substrate" can also embrace flexible substrates such as a web or a foil. According to some embodiments, the substrate can be made of any material suitable for material deposition. For instance, the substrate can be made of a material selected from the group consisting of glass (for instance soda-lime glass, borosilicate glass etc.), metal, polymer, ceramic, compound materials, carbon fiber materials, mica or any other material or combination of materials which can be coated by a deposition process.
[0066] According to embodiments which can be combined with any other embodiments described herein, the apparatus for processing a substrate is configured for vertical substrate processing. The expression "vertical substrate processing" can be understood in that the apparatus is configured for processing a substrate in a substantially vertical orientation (substantially vertical = vertical +- 15°). As used throughout the present disclosure, terms like "vertical direction" or "vertical orientation" are understood to distinguish over "horizontal direction" or "horizontal orientation". Accordingly, the apparatus for processing a substrate can be configured for vertical substrate masking, particularly by employing a mask arrangement as described herein. The expression "vertical substrate masking" can be understood in that the apparatus is configured for masking a substrate in a substantially vertical orientation. Accordingly, the mask arrangement may be provided in a substantially vertical state (substantially vertical state = vertical state +- 15°) within the processing apparatus, particularly within the processing chamber.
[0067] With exemplary reference to the flowchart shown in FIG. 7, a method 300 for providing a support of a mask frame 110 by a mask carrier 120 is described. According to embodiments which can be combined with any other embodiments described herein, the method includes manufacturing (block 310) a first mechanical structure 141 and a second mechanical structure 142, particularly by electrical discharge machining, such that the first mechanical structure and the second mechanical structure are integrated into the mask carrier 120 or into the mask frame 110. In particular, manufacturing the first mechanical structure 141 includes manufacturing the first mechanical structure 141 such that a compliant support of the mask frame in a first direction and a compliant support in a second direction is provided. Further, manufacturing the second mechanical structure 142 includes manufacturing the second mechanical structure 142 such that a degree of freedom in the first direction is provided. Additionally, the method includes connecting (block 320) the mask frame 110 to the mask carrier 120 via the first mechanical structure 141 and via the second mechanical structure 142.
[0068] It is to be understood that the features as described with respect to the embodiments of the mask arrangement can also be applied to the method 300 for providing a support of a mask frame 110 by a mask carrier 120.
[0069] In view of the above, it is to be understood that embodiments as described herein beneficially provide for improved mask arrangements, improved masking techniques and improved apparatuses for the production of optoelectronic devices, such as OLEDs. In particular, embodiments as described herein have the advantage that a transfer of the stress or load from the mask carrier to the mask frame is substantially reduced or even eliminated. More specifically, embodiments as described herein have the advantage that a transfer of mechanical stress or load from the mask carrier to the mask frame and/or a transfer of thermal stress or load from the mask carrier to the mask frame is substantially reduced or even avoided. Thus, compared to conventional mask arrangements, conventional masking techniques and conventional processing apparatuses for the production of optoelectronic devices, embodiments of the present disclosure provide for an improved quality of the processing result, particularly for producing high quality OLEDs. [0070] While the foregoing is directed to embodiments of the disclosure, other and further embodiments of the disclosure may be devised without departing from the basic scope thereof, and the scope thereof is determined by the claims that follow.
[0071] In particular, this written description uses examples to disclose the disclosure, including the best mode, and also to enable any person skilled in the art to practice the described subject-matter, including making and using any devices or systems and performing any incorporated methods. While various specific embodiments have been disclosed in the foregoing, mutually nonexclusive features of the embodiments described above may be combined with each other. The patentable scope is defined by the claims, and other examples are intended to be within the scope of the claims if the claims have structural elements that do not differ from the literal language of the claims, or if the claims include equivalent structural elements with insubstantial differences from the literal language of the claims.

Claims

A mask arrangement (100) for masking a substrate during deposition in processing chamber, the mask arrangement comprising:
- a mask frame (110) for holding a mask (115), and
- a mask carrier (120) for holding the mask frame (110),
wherein the mask frame (110) is connected to the mask carrier (120) by compliant support (130).
The mask arrangement (100) according to claim 1, wherein the compliant support is configured such that the mask frame is mechanically decoupled from the mask carrier, particularly wherein the compliant support is configured such mask carrier deformations are decoupled from the mask frame.
The mask arrangement (100) according to claim 1 or 2, the compliant support (130) comprising a first compliant support (131) at a first side (110A) of the mask frame (110) and a second compliant support (132) at a second side (HOB) of the mask frame (110) opposite the first side (110A) of the mask frame (110).
The mask arrangement (100) according to claim 3, wherein the first compliant support (131) is configured for supporting the mask frame (110) in a first direction (101) and a second direction (102), and wherein the second compliant support (132) is configured for supporting the mask frame (110) in the second direction and providing a degree of freedom in the first direction (101).
The mask arrangement (100) according to any of claims 1 to 4, wherein the compliant support (130) is configured for providing a compliant support in a third direction (103), particularly wherein the compliant support includes an elastic foundation providing elasticity in the third direction.
The mask arrangement (100) according to any of claims 1 to 5, wherein the mask carrier (120) is at least partially arranged around the mask frame (110).
The mask arrangement (100) according to any of claims 1 to 6, wherein the compliant support (130) is integrated into the mask carrier (120), or wherein the compliant support (130) is integrated into the mask frame (110).
The mask arrangement (100) according to any of claims 1 to 7, wherein the compliant support (130) is provided by a mechanical structure manufactured by electrical discharge machining.
A mask arrangement (100) for masking a substrate during deposition in a processing chamber, the mask arrangement comprising:
- a mask frame (110) for holding a mask (115), and
- a mask carrier (120) for holding the mask frame (110),
wherein the mask frame (110) is connected to the mask carrier (120) via a first mechanical structure (141) and via a second mechanical structure (142), wherein the first mechanical structure (141) is configured for supporting the mask frame (110) in a first direction (101) and in a second direction (102), and wherein the second mechanical structure (142) is configured for providing a degree of freedom in the first direction (101).
10. A mask arrangement (100) for masking a substrate during deposition in a processing chamber, the mask arrangement comprising:
- a mask frame (110) for holding a mask (115), and
- a mask carrier (120) for holding the mask frame (110),
wherein the mask frame (110) is connected to the mask carrier (120) via a first mechanical structure (141) and via a second mechanical structure (142), wherein the first mechanical structure (141) is configured as a fixed support (145) for fixing the mask frame (110) in a first direction (101) and in a second direction (102), and wherein the second mechanical structure (142) is configured for providing a degree of freedom in the first direction (101) and for fixing the second direction (102).
The mask arrangement (100) according to claim 9, wherein the first mechanical structure (141) and the second mechanical structure (142) are configured for providing a compliant support of the mask frame (110) in a third direction (103) being perpendicular to the first direction (101) and the second direction (102).
The mask arrangement (100) according to any of claims 9 to 11, wherein the first mechanical structure (141) and the second mechanical structure (142) are integrated into the mask carrier (120).
The mask arrangement (100) according to any of claims 9 to 11, wherein the first mechanical structure (141) and the second mechanical structure (142) are integrated into the mask frame (110).
The mask arrangement (100) according to claims 9, wherein the first mechanical structure (141) comprises a first compliant element (151) extending in the first direction (101) and a second compliant element (152) extending in the second direction (102), and wherein the second mechanical structure (142) comprises a third compliant element (153) extending in the second direction (101).
An apparatus (200) for processing a substrate, the apparatus comprising:
- a processing chamber (201) adapted for layer deposition therein;
- a deposition source (225) for depositing material forming a layer; and
- a mask arrangement (100) according to any of claims 1 to 14 within the processing chamber (201).
16. A method (300) for providing a support of a mask frame by a mask carrier, the method comprising:
- manufacturing a first mechanical structure and a second mechanical structure, particularly by electrical discharge machining, such that the first mechanical structure and the second mechanical structure are integrated into the mask carrier or into the mask frame, wherein the first mechanical structure provides for a compliant support of the mask frame in a first direction and in a second direction, and wherein the second mechanical structure provides for a degree of freedom in the first direction, and - connecting the mask frame to the mask carrier via the first mechanical structure and via the second mechanical structure.
PCT/EP2017/074503 2017-09-27 2017-09-27 Mask arrangement for masking a substrate, apparatus for processing a substrate, and method therefor WO2019063074A1 (en)

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KR1020187030596A KR102183040B1 (en) 2017-09-27 2017-09-27 Mask arrangement for masking a substrate, apparatus for processing a substrate, and method therefor
PCT/EP2017/074503 WO2019063074A1 (en) 2017-09-27 2017-09-27 Mask arrangement for masking a substrate, apparatus for processing a substrate, and method therefor
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JP2019533761A (en) 2019-11-21

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