WO2016058311A1

WO2016058311A1 - Mask frame, mask plate and manufacturing method thereof

Info

Publication number: WO2016058311A1
Application number: PCT/CN2015/073357
Authority: WO
Inventors: 吴海东; 金泰逵; 白娟娟; 马群
Original assignee: 京东方科技集团股份有限公司; 鄂尔多斯市源盛光电有限责任公司
Priority date: 2014-10-13
Filing date: 2015-02-27
Publication date: 2016-04-21
Also published as: CN104298069A; CN104298069B

Abstract

Disclosed are a mask frame (10), a mask plate and manufacturing method thereof. The mask frame (10) comprises a frame main body (11), the frame main body (11) being used for supporting a mask strip (20); two fixing parts (12) on two opposite sides of the frame main body (11), the two fixing parts (12) being fixedly connected with the two opposite ends of the mask strip (20) respectively; and an elastic device (13) for fixedly connecting each fixing part (12) in the two fixing parts (12) with the frame main body (11), the elastic device (13) being configured to apply a tensile force to the mask strip (20) on the fixing part (12).

Description

Mask frame, mask plate and manufacturing method thereof

The present application claims priority to Chinese Patent Application No. 201410540132.3, filed on Jan. 13, 2014, entitled,,,,, In this application.

Technical field

The invention relates to the technical field of masks, in particular to a mask frame, a mask board and a manufacturing method thereof.

Background technique

In the fabrication process of the display, a patterned layer structure is often formed by a patterning process. The patterning process generally comprises: coating a photoresist on the film, exposing, developing, etching, etc. the photoresist by using a mask to form a film having the same or opposite pattern as the mask.

As shown in FIG. 1 and FIG. 2, a mask for forming a pixel unit includes a rectangular mask frame 10 and a plurality of mask strips 20 (ie, mask strip a-mask strips i). The mask strip 20 includes a plurality of pixel patterns. The opposite ends of the mask strip 20 respectively have solder joints 21, and the mask strips 20 are soldered on the mask frame 10 in the direction of 101. In order to prevent the mask portion from sag and deform in the middle portion of the mask strip, the shape difference and positional deviation of the mask pattern are caused, resulting in display defects such as color shift and color mixture on the display panel. As shown in FIG. 2, in the process of soldering the mask strip 20 to the mask frame 10, it is necessary to give the mask strip 20 a tensile force F1 and a pressing force F2 to the mask frame 10 to ensure the welding is completed. The back mask strip 20 maintains the shape when stretched. However, during the deformation and contraction process of the mask frame 10, the stretching force of the mask strip 20 at different positions is uneven, and the mask frame 10 is generally masked at an intermediate position along the direction of the mask strip 20, that is, the direction of 101. The tensile force of the film strip 20 is small, as shown by the dashed line in FIG. 1, which in turn causes a shape difference and a positional deviation between the pixel pattern at the intermediate position of the mask frame 10 and the pixel pattern at the positions on the opposite sides thereof.

Summary of the invention

Embodiments of the present invention provide a mask frame, a mask, and a manufacturing method thereof, which solve the problem that the existing mask strips have uneven stretching force at different positions of the mask.

In order to achieve the above object, embodiments of the present invention adopt the following technical solutions:

In one aspect of the invention, a mask frame is provided, wherein the mask frame comprises:

a frame body for supporting the mask strip;

Two fixing portions on opposite sides of the frame body, wherein the two fixing portions are respectively fixedly connected to opposite ends of the mask strip;

An elastic means for fixedly connecting each of the two fixing portions to the frame body, the elastic means being configured to apply a tensile force to the mask strip fixed to the fixing portion.

Preferably, the fixing portion is fixedly coupled to the frame body by a plurality of elastic means.

Preferably, the plurality of elastic means are evenly distributed on the opposite sides of the frame body.

Preferably, a plurality of elastic means on one of the opposite sides and a plurality of elastic means on the other of the opposite sides are offset from each other.

Preferably, the elastic device has a one-to-one correspondence with the mounting position of the mask strip at the frame body.

Preferably, the fixing portion is the same material as the frame body.

Preferably, the elastic means is a spring.

Preferably, both ends of each mask strip are respectively fixed to the fixing portion by solder joints.

In another aspect of the invention, a mask is provided, the mask comprising:

Multiple mask strips, and

In the above mask frame, the opposite ends of the mask strip are respectively fixed to the fixing portions on opposite sides of the frame body.

In still another aspect of the present invention, a method of fabricating the above mask is provided, comprising the steps of:

Squeezing the fixing portion such that the fixing portion is close to the frame body, so that the elastic device is elastically deformed;

Fixing the mask strip to the fixing portion;

The pressing is canceled so that the elastic means applies a tensile force to the mask fixed to the fixing portion.

Preferably, the manufacturing method further comprises: stretching the mask strip before attaching the mask strip to the fixing portion.

Preferably, in the step of fixing and fixing the mask strip to the fixed connection portion, the mask strip is fixedly connected to the fixing portion by soldering.

A mask frame, a mask sheet and a manufacturing method thereof are provided by embodiments of the present invention. Specifically, the mask frame includes a frame body, an elastic device, and two fixing portions on opposite sides of the frame body, and each fixing portion is respectively fixed and fixed to the frame body by an elastic device, and the frame body is used for supporting the cover. When the film strip and the mask strip are fixed to the fixing portion, the fixing portion may be brought close to the mask frame, so that the mask strip and the fixing portion are fixed, and the elastic device is elastically deformed. After fixing the connection, cancel the fixing part Extrusion, in order to restore the original shape, the restoring force of the elastic device causes the fixing portion to be away from the frame body, thereby applying a tensile force to the mask strip fixed on the fixing portion, preventing the middle portion of the mask strip from sagging, causing color deviation of the display panel. Poor problems such as color mixing; and the elastic device can equalize the tensile force of each mask strip, so that the tensile force of the mask strip fixed at different positions tends to be uniform, thereby improving the mask pattern formed. The accuracy is improved, and the display of color shift, color mixture, and the like due to the deviation of the mask pattern is improved.

DRAWINGS

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the description of the prior art will be briefly described below. Obviously, the drawings in the following description are only It is a certain embodiment of the present invention, and other drawings can be obtained from those skilled in the art without any inventive labor.

1 is a schematic view of a mask in the prior art;

2 is a schematic view of a prior art fixing a mask strip using the mask of FIG. 1;

3 is a schematic diagram of a mask frame according to an embodiment of the present invention;

4 is a schematic diagram of another mask frame according to an embodiment of the present invention;

FIG. 5 is a schematic diagram of a mask according to an embodiment of the present invention.

Reference mark:

10-mask frame; 11-frame body; 12-fixed portion; 13-elastic device; 20-mask strip; 21-solder joint

detailed description

The technical solutions in the embodiments of the present invention are clearly and completely described in the following with reference to the accompanying drawings in the embodiments of the present invention. It is obvious that the described embodiments are only a part of the embodiments of the present invention, but not all embodiments.

The embodiment of the present invention provides a mask frame, as shown in FIG. 3, comprising a frame body 11, an elastic device 13, and two fixing portions 12 on opposite sides of the frame body 11. The frame body 11 is for supporting a mask strip, and each of the two fixing portions 12 is fixedly connected to opposite ends of the mask strip. The elastic means 13 fixedly connects each of the two fixing portions 12 to the frame main body 11. In use, the resilient means 13 is configured to apply a tensile force to a mask strip secured to the fixed portion 12.

It should be noted that the frame body in the embodiment of the present invention is substantially the same as the mask frame structure in the prior art. The mask frame may be generally formed of a metal or an alloy, and the fixing portion may be the same material as the mask frame. The fixing portion is fixedly connected to the frame body by an elastic device, that is, the two ends of the elastic device are respectively fixed with the fixing portion and The frame body is fixedly connected. Specifically, the elastic device may be detachably connected to the fixing portion and the frame main body by a snapping or the like, or may be connected and fixed to the fixing portion and the frame main body by welding or the like. In the embodiment of the present invention, the elastic device is separately welded to the mask frame and the fixing portion as an example, but the present invention is not limited thereto.

In addition, the elastic device may be any member having an elastic function. In the embodiment of the present invention, the elastic device is used as a spring for detailed description.

A mask frame provided by an embodiment of the invention includes a frame body, an elastic device and two fixing portions on opposite sides of the frame body, and each fixing portion is respectively fixed and fixed to the frame body by an elastic device, and is used for the frame body When the mask strip is supported and the mask strip is fixed to the fixing portion, the fixing portion may be pressed only so that the fixing portion is close to the mask frame, thereby fixing the mask strip and the fixing portion. During this process, the elastic device is elastically deformed. After the fixed connection, the pressing of the fixing portion is cancelled or cancelled, and in order to restore the original state, the restoring force of the elastic device causes the fixing portion to be away from the frame body, thereby applying a tensile force to the mask strip fixed on the fixing portion, thereby preventing the masking. The middle portion of the deformation of the film strip sags, which causes the display panel to have problems such as color shift and color mixing; and the elastic device can balance the tensile force of each mask strip, so that the mask strips fixed at different positions are subjected to The stretching force tends to be uniform, and the precision of the formed mask pattern can be improved, and display defects such as color shift and color mixture due to the deviation of the mask pattern can be improved.

In addition, the mask frame provided by the embodiment of the present invention can simplify the manufacturing process of the mask after adding the elastic device with respect to the existing mask. Specifically, since the existing mask is obtained by deforming the peripheral mask frame to obtain the tensile force required for the mask strip, the tensile force required for different positions of the mask frame is different, and The mechanical force simulation of the mask frame is used to obtain the pressing force required at different positions, but the simulation process is very complicated and has many considerations, and the simulation results are often quite different from the actual ones. In the embodiment of the present invention, the tensile force applied to the mask strip tends to be uniform by providing the elastic device, and the complicated simulation is not required, thereby greatly simplifying the manufacturing process of the mask.

Optionally, as shown in FIG. 3 , the two fixing portions 12 are respectively fixedly connected to the frame body 11 by a plurality of elastic devices 13 (springs), and the plurality of elastic devices 13 are evenly distributed on both sides of the frame body 11 . Since the plurality of elastic means 13 are evenly distributed on both sides of the frame body, it is advantageous for the elastic device 13 to uniformly distribute the elastic force acting on the fixed portion. Further, as shown in FIG. 3, a plurality of elastic means 13 located on opposite sides of the frame main body 11 are disposed offset from each other. Due to the misalignment of the elastic devices on both sides of the frame body, the elastic forces on both sides of the frame body are complementary, which improves the uniformity of the force of the mask frame, and improves the display defects such as color shift and color mixture caused by the deviation of the mask pattern.

Preferably, as shown in FIG. 4, the frame body 11 can be used to support the mask strip 20 so that the mask strip 20 and The fixing portion 12 is connected and fixed, and the elastic device 13 and the mask strip 20 are in one-to-one correspondence with the mounting position of the frame body 11. That is, as shown in FIG. 4, both ends of the mask strip a-i correspond to a spring, and the spring is connected to the fixing portion 12 and the frame body 11.

The embodiment of the present invention provides a mask, as shown in FIG. 5, comprising a plurality of mask strips 20 and a mask frame according to any one of the embodiments of the present invention. The fixing portions 12 located on opposite sides of the frame main body 11 are fixed. Specifically, as shown in FIG. 5, the mask includes a mask strip ai, and both ends of each mask strip 20 are soldered to the fixing portion 12 at the soldering point 21, respectively, because the elastic portion between the fixing portion 12 and the frame body 11 further includes elasticity. In the device 13, the elastic device 13 causes the fixing portion 12 to be close to the frame body 11 when being pressed, and the fixing portion 12 and the mask strip 20 are welded together, and after the pressing of the fixing portion 12 is cancelled, in order to restore the original state The elastic device 13 generates an elastic force for the fixing portion 12 to move away from the frame body 11 , and further exerts a tensile force on the mask strip 20 fixed to the fixing portion 12 to prevent the middle portion of the mask strip 20 from sagging and deforming. Further, the display panel is caused to have color shift, color mixture, and the like; and the elastic device 13 can balance the tensile force received by each of the mask strips 20, so that the tensile force of the mask strip 20 fixed at different positions tends to be uniform. Further, the accuracy of the formed mask pattern can be improved, and display defects such as color shift and color mixture due to the deviation of the mask pattern can be improved.

It should be noted that the mask strip and the fixing portion are welded as an example. The specific mask strip is fixed to the fixing portion and can be fixed by screws or the like. In addition, the mask frame can also be modified in various ways according to different elastic devices. The embodiment of the present invention is only described in detail by taking the example shown in FIG. 5 as an example.

An embodiment of the present invention provides a method for fabricating the above mask, comprising: pressing a fixing portion such that the fixing portion is close to the frame body, so that the elastic device is elastically deformed; and the mask strip is The fixing portion is fixedly coupled; the pressing is canceled to cause the elastic means to apply a tensile force to the mask fixed to the fixing portion.

In the manufacturing method provided by the embodiment of the present invention, in the process of connecting and fixing the fixing portions on both sides of the mask frame, the fixing portion is first pressed, and at this time, the elastic device is pressed and elastically deformed. When the mask strip is fixedly connected to the fixing portion, the pressing force on the elastic device is cancelled, and the elastic device generates an outward elastic force in order to restore the original shape, and the elastic force acts on the fixing portion so that the fixing portion is away from the frame body, and thus The mask strip fixed on the fixing portion is stretched to prevent the mask strip from being deformed and the middle portion from sagging. In addition, the elastic device can equalize the tensile force of each mask strip, so that the tensile force of the mask strip fixed at different positions tends to be uniform, thereby improving the precision of the formed mask pattern and improving the masking. The color shift, color mixture, and the like caused by the deviation of the film pattern are poorly displayed.

Optionally, before the fixing of the mask strip to the fixing portion, the method further comprises: stretching the mask strip. That is, in order to prevent the middle portion of the mask strip from sagging, the mask strip is stretched before the mask strip is fixed, and after the mask strip is fixed and the pressing of the elastic device is cancelled, the mask strip is not only subjected to the elastic force of the elastic device. Stretching, and itself is also in a stretched state, further beneficial to prevent sagging of the middle portion of the mask strip; due to the elastic force of the elastic device, the tensile force of the mask strip tends to be uniform at different positions of the fixing portion, thereby improving the mask formed The accuracy of the film pattern improves the display defects such as color shift and color mixture due to the deviation of the mask pattern.

The above is only a specific embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art can easily think of changes or substitutions within the technical scope of the present invention. All should be covered by the scope of the present invention. Therefore, the scope of the invention should be determined by the scope of the appended claims.

Claims

A mask frame, the mask frame comprising:

a frame body for supporting the mask strip;

Two fixing portions on opposite sides of the frame body, wherein the two fixing portions are respectively fixedly connected to opposite ends of the mask strip;

An elastic means for fixedly connecting each of the two fixing portions to the frame body, the elastic means being configured to apply a tensile force to the mask strip fixed to the fixing portion.
The mask frame according to claim 1, wherein the fixing portion is fixedly coupled to the frame body by a plurality of elastic means.
The mask frame of claim 2, wherein the plurality of elastic means are evenly distributed on the opposite sides of the frame body.
The mask frame according to claim 3, wherein a plurality of elastic means on one of said opposite sides and a plurality of elastic means on the other of said opposite sides are mutually offset .
The mask frame according to claim 3, wherein said elastic means are in one-to-one correspondence with said mask strip at a mounting position of the frame body.
The mask frame according to claim 1, wherein the fixing portion is made of the same material as the frame body.
A mask frame according to any one of claims 1 to 6, wherein the elastic means is a spring.
The mask frame according to any one of claims 1 to 7, wherein both ends of each of the mask strips are respectively fixed to the fixing portion by solder joints.
A mask comprising:

Multiple mask strips; and

The mask frame according to any one of claims 1 to 8, wherein opposite ends of the mask strip are respectively fixed to fixing portions on opposite sides of the frame body.
A method of fabricating a mask according to claim 9, comprising the steps of:

Squeezing the fixing portion such that the fixing portion is close to the frame body, so that the elastic device is elastically deformed;

Fixing the mask strip to the fixing portion;

Squeezing the extrusion to cause the elastic device to apply tension to the mask fixed to the fixing portion force.
The fabricating method according to claim 10, further comprising: stretching the mask strip before attaching the mask strip to the fixing portion.
The manufacturing method according to claim 10 or 11, wherein in the step of fixing and fixing the mask strip to the fixed connection portion, the mask strip is fixedly connected to the fixing portion by soldering.