CN103898441A - Matched mask plates and vapor deposition method thereof - Google Patents
Matched mask plates and vapor deposition method thereof Download PDFInfo
- Publication number
- CN103898441A CN103898441A CN201410091023.8A CN201410091023A CN103898441A CN 103898441 A CN103898441 A CN 103898441A CN 201410091023 A CN201410091023 A CN 201410091023A CN 103898441 A CN103898441 A CN 103898441A
- Authority
- CN
- China
- Prior art keywords
- mask plate
- evaporation
- evaporation hole
- mask
- adjacent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Landscapes
- Electroluminescent Light Sources (AREA)
Abstract
The invention discloses matched mask plates which comprise mask plates having two structures, wherein each mask plate is provided with a mask pattern region composed of a vapor deposition hole array, vapor deposition holes penetrate through the mask plate, each vapor deposition hole is in a polygonal shape, the mask plates having two structures comprise a first mask plate and a second mask plate, the number of the vapor deposition holes on the first mask plate is twice the number of the vapor deposition holes on the second mask plate, and the vapor deposition holes on the first mask plate are arranged in a rectangular array mode along the row direction and the column direction; and the vapor deposition holes on the second mask plate are sequentially arranged along the row direction and the column direction, two adjacent rows of vapor deposition holes are staggered along the row direction, and two adjacent columns of vapor deposition holes are staggered along the vertical direction. The matched first mask plate and second mask plate are structurally complementary. By using the matched mask plates and the vapor deposition method thereof provided by the invention, the area of blue sub-pixels of an OLED (organic light-emitting diode) display screen can be increased, and the ppi (pixel per inch) of a display can be improved, thus correspondingly prolonging the service life of the blue sub-pixels and improving the display quality of the OLED display screen.
Description
Technical field
The present invention relates to a kind of matching mask plate and evaporation coating method thereof, be specifically related to a kind of matching mask plate and evaporation coating method thereof of using for OLED display screen evaporation.
Background technology
Organic Light Emitting Diode (Organic Light-Emitting Diode; OLED) indicating meter has a series of advantages such as independently luminous, low-voltage direct-current drives, entirely solidifies, visual angle is wide, color is abundant, compared with liquid-crystal display, OLED indicating meter does not need backlight, visual angle is large, power is low, its response speed can reach 1000 times of liquid-crystal display, and its manufacturing cost is but lower than the liquid-crystal display of equal resolving power.Therefore, OLED displaying appliance has broad application prospects, and becomes gradually the following 20 years the fastest novel technique of display of growth.
Wherein, the luminescent layer of OLED screen body is all generally to utilize evaporation film-forming technology to see through metal mask plate corresponding location of pixels in deposition substrate by organic materials to form organic emitting components.The good Pixel arrangement mode of OLED screen colorize effect is to have three sub-pixels of red, green, blue at each pixel cell, and each sub-pixel has independently organic light emission components and parts.Due to the luminous organic material difference of red, green, blue three sub pixels, in making processes, need to by metal mask plate on corresponding position respectively to three kinds of different organic materialss of red, green, blue three-color light-emitting sub-pixel evaporation, then regulate the colour mixture ratio of three kinds of color combination, produce true color.So, pixel cell of the independent luminous formation of red, green, blue three look OLED elements.
Figure 1 shows that traditional masks board component integral planar structural representation, mask plate is fixed on housing 14 by laser welding, 12 solder joints for laser welding formation, on mask plate 10, comprise multiple mask unit 11, Figure 2 shows that 13 part structure for amplifying schematic diagram in Fig. 1, 20 for running through on mask plate 10 evaporation hole, evaporation hole 20 is arranged on mask plate 10 in rectangular array mode with column direction in the row direction, dot structure by OLED display screen after the mask plate evaporation shown in Fig. 1～Fig. 2 as shown in Figure 3, because the structure of three sub pixels is identical, so can carry out evaporation with the mask plate of same structure in evaporate process, three kinds of organic materialss can be with a mask plates evaporation, after each evaporation step, need to clean, also can use three mask plates evaporation.
Very large by the life-span of OLED display screen after mask plate evaporation and the relational degree of pixel, it is the life-span that has determined to a great extent OLED display screen in life-span of pixel, in industry, be blue subpixels for the bottleneck of making pixel at present, its reason is that the luminous efficiency of blue subpixels under equal electric current is starkly lower than green and red sub-pixel (gap is very large), in order to make OLED display screen display white normally, can only improve the electric current of blue subpixels, although it is green and red to have done balance like this, but because electric current has improved, the life-span of blue subpixels shortens greatly, thereby affect the life-span of OLED display screen.
In addition, as another important parameter---the resolving power of evaluating OLED display screen quality, the arrangement of itself and pixel is contacted directly, and the OLED display screen of making high ppi (pixel per inch) is the important goal that industry is pursued always.
The present invention proposes a kind of mask plate and evaporation coating method thereof for above problem, to solve preferably the above problem.
Summary of the invention
In view of this, main purpose of the present invention is to provide a kind of matching mask plate and evaporation coating method thereof, can increase the ppi that increases the area of blue subpixels in the each pixel cell of OLED, improves indicating meter by the luminous organic material of matching mask plate evaporation provided by the present invention, thereby make accordingly the life-span increase of blue subpixels, the display quality of OLED display screen improve.
The invention provides a kind of matching mask plate, comprise the mask plate of two kinds of structures, described mask plate is provided with the mask pattern region being formed by evaporation hole array, described mask plate is run through in described evaporation hole, described evaporation hole shape is Polygons, and the mask plate of described two kinds of structures comprises the first mask plate and the second mask plate, and the above evaporation hole number of described the first mask plate is the twice of described the above evaporation hole number of the second mask plate, wherein
Arrange in rectangular array mode with column direction in the row direction in described evaporation hole on described the first mask plate;
Arrange successively with column direction in the row direction in described evaporation hole on described the second mask plate, and the described evaporation hole of adjacent two row is dislocation arrangement in the row direction, and the described evaporation holes of adjacent two row are vertically dislocation arrangement.
Describe matching mask plate provided by the present invention below in detail.
Further, described evaporation hole be shaped as tetragon or hexagon or octagon.
Further; the above evaporation hole of described mask plate of described two kinds of structures be shaped as octagon; described octagon has four groups of parallel opposite side; the size dimension of described octagonal four groups of opposite side is respectively a1, a2, a3, a4, and its size range and mutual relationship are: 10 μ m≤a1≤35 μ m; 10 μ m≤a2≤35 μ m; 5 μ m≤a3≤25 μ m; A3=a4; Place, the limit straight line of the described a1 of being of a size of is perpendicular to place, the limit straight line that is of a size of a2.
Further, the distance of one group of opposite side that the described length of side is a1 is b1, and the size range of described b1 is 30 μ m≤b1≤60 μ m; The described length of side is that the distance of one group of opposite side of a2 is b2, and the size range of described b2 is 30 μ m≤b2≤60 μ m.
Further, in described the first mask plate, described in adjacent two row, the distance between evaporation hole is L2, and the pass of described a2 and described L2 is: a2≤L2; Distance in described the first mask plate between adjacent two row described evaporation holes is L1, and the pass of described a1 and described L1 is: a1≤L1.
Further, on described the second mask plate, the line space in the described evaporation hole of adjacent two odd-numbered lines or adjacent two even number lines is L4, and described L2, described b1, described L4 three's pass is: L4=2L2+2b1; The column pitch in adjacent two odd columns of described the second mask plate or the described evaporation hole of adjacent two even columns is L3, and described L1, described b2, described L3 three's pass is: L3=2L1+2b2.
Further, four described evaporation holes adjacent one another are on described the first mask plate surround a virtual evaporation hole, the area in described virtual evaporation hole is more than or equal to the area in a described evaporation hole, and the shape in described virtual evaporation hole is identical with the shape in described evaporation hole.
Further, be formed in one structure or combined by discrete mask unit of described mask plate, described mask plate is fixed on housing.
The present invention also provides a kind of evaporation coating method, comprise that right to use requires matching mask plate described in 1～8 any one claim by the organic luminous layer of vacuum evaporation step making OLED display screen, it is characterized in that: the blue subpixels of OLED display screen forms by described the first mask plate evaporation, the red sub-pixel of OLED display screen and green sub-pixels form by described the second mask plate evaporation.
Further, described evaporation step comprises described red sub-pixel evaporation step, described green sub-pixels evaporation step, described blue subpixels evaporation step, before each described sub-pixel evaporation step, also comprise contraposition step, described contraposition step is by described mask plate and deposition substrate contraposition, makes the described evaporation hole on described mask plate corresponding with the corresponding subpixel area of described deposition substrate.
Beneficial effect of the present invention is, can greatly increase the area of blue subpixels in the each pixel cell of OLED by the luminous organic material of matching mask plate evaporation provided by the present invention, make in the time of balance red sub-pixel and green sub-pixels, without blue subpixels being provided to excessive electric current, get final product normal display white, thereby increase accordingly the life-span of blue subpixels, indirectly extended the bulk life time of OLED display screen; In addition, due to the special construction setting of mask plate, the OLED display screen of making by matching mask plate evaporation provided by the present invention can have higher ppi, has improved the display quality of display screen.
The aspect that the present invention is additional and advantage in the following description part provide, and part will become obviously from the following description, or recognize by practice of the present invention.
Accompanying drawing explanation
Above-mentioned and/or additional aspect of the present invention and advantage will become obviously and easily from the following description of the accompanying drawings of embodiments to be understood, wherein:
Figure 1 shows that the two dimensional structure schematic diagram of a kind of mask set plate of the present invention;
Figure 2 shows that 13 part-structure enlarged diagrams in Fig. 1;
Figure 3 shows that the conventional pixel structure schematic diagram of arranging;
Figure 4 shows that the two dimensional structure schematic diagram of a kind of mask plate component of the present invention;
Figure 5 shows that 41 part-structure enlarged diagrams in Fig. 4;
Figure 6 shows that the further structure for amplifying schematic diagram in mask plate evaporation hole in Fig. 5;
Figure 7 shows that the another kind of structure enlarged diagram of 41 parts in Fig. 4;
Figure 8 shows that the dot structure schematic diagram of arranging;
Figure 9 shows that the dot structure schematic diagram of arranging.
In Fig. 1,10 is mask plate, and 11 is mask pattern region, and 12 is solder joint, and 13 amplify observation part for waiting, 14 is housing;
In Fig. 2,20 is the evaporation hole on mask plate 10;
In Fig. 3,30 is deposition substrate, and 31 is a pixel cell;
In Fig. 4,40 is mask unit, and 41 for waiting to amplify observation part;
In Fig. 5,50 is evaporation hole, and 51 is virtual evaporation hole;
In Fig. 6, a1, a2, a3, a4 are respectively the size dimension of the four groups of opposite side in octagon evaporation hole, and L1 is the distance between adjacent two row evaporation holes, and L2 is the distance between adjacent two row evaporation holes;
In Fig. 7, L3 is the column pitch in the evaporation hole of adjacent two odd columns or adjacent two even columns, and L4 is the line space in the evaporation hole of adjacent two odd-numbered lines or adjacent two even number lines;
In Fig. 8,80 is deposition substrate, and R, G, B represent respectively red sub-pixel, green sub-pixels, blue subpixels.
Embodiment
Describe below with reference to accompanying drawings embodiments of the invention, the example of described embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or has the element of identical or similar functions from start to finish.Be exemplary below by the embodiment being described with reference to the drawings, only for explaining the present invention, and can not be interpreted as limitation of the present invention.
According to embodiments of the invention, shown in figure 1, Fig. 4～Fig. 7, the invention provides a kind of matching mask plate, comprise the mask plate of two kinds of structures, mask plate 10 is provided with the mask pattern region 11 being formed by evaporation hole 50 arrays, mask plate 10 is run through in evaporation hole 50, evaporation hole 50 is shaped as Polygons, and the mask plate of two kinds of structures comprises the first mask plate and the second mask plate, and on the first mask plate, evaporation hole number is the twice of evaporation hole number on the second mask plate, wherein
Arrange in rectangular array mode with column direction in the row direction in evaporation hole 50 on the first mask plate, as shown in Figure 5, Figure 6;
Arrange successively with column direction in the row direction in evaporation hole 50 on the second mask plate, and the evaporation hole 50 of adjacent two row is dislocation arrangement in the row direction, and the evaporation holes 50 of adjacent two row are vertically dislocation arrangement (as shown in Figure 7).
Describe below with reference to accompanying drawings matching mask plate of the present invention in detail.
According to embodiments of the invention, evaporation hole 50 be shaped as tetragon or hexagon or octagon, the evaporation hole 50 as shown in Fig. 4 ~ Fig. 7 be shaped as octagon.
According to embodiments of the invention; as shown in Fig. 5 ~ Fig. 6; on the mask plate of two kinds of structures, evaporation hole 50 is shaped as octagon; octagon has four groups of parallel opposite side; the size dimension of octagonal four groups of opposite side is respectively a1, a2, a3, a4, and its size range and mutual relationship are: 10 μ m≤a1≤35 μ m; 10 μ m≤a2≤35 μ m; 5 μ m≤a3≤25 μ m; A3=a4; Be of a size of place, the limit straight line of a1 perpendicular to place, the limit straight line that is of a size of a2.
Vertical after the extended line on the limit that the extended line on the limit that size dimension is a1 is as shown in Figure 6 a2 with size dimension is crossing, the extended line (in figure shown in dotted line) that size dimension is respectively two groups of opposite side of a1 and a2 intersects formation rectangle between two.Size dimension is that the straight line at one group of opposite side place of a1 is parallel with line direction.
In the present invention, described line direction i.e. directions X shown in figure, and described column direction i.e. Y-direction shown in figure.
According to some embodiments of the present invention, as shown in Figure 6, the distance of one group of opposite side that the length of side is a1 is b1, and the size range of b1 is: 30 μ m≤b1≤60 μ m; The length of side is that the distance of one group of opposite side of a2 is b2,, the size range of b2 is: 30 μ m≤b2≤60 μ m.
According to some embodiments of the present invention, as shown in Figure 6, the distance in the first mask plate between adjacent two row evaporation holes 50 is L2, and the pass of a2 and L2 is: a2≤L2; Distance in the first mask plate between adjacent two row evaporation holes is L1, and the pass of a1 and L1 is: a1≤L1.
According to some embodiments of the present invention, as shown in Figure 7, the line space in adjacent two odd-numbered lines of the second mask plate or the evaporation hole 50 of adjacent two even number lines is to add along directions X the line that black dotted line is center, evaporation hole in L4(figure), L2, b1, L4 three's pass is: L4=2L2+2b1; The column pitch in adjacent two odd columns of the second mask plate or the evaporation hole 50 of adjacent two even columns is to add along Y-direction the line that black dotted line is center, evaporation hole in L3(figure), L1, b2, L3 three's pass is: L3=2L1+2b2.
As shown in Fig. 6 ~ Fig. 7, the spacing of adjacent two row of the second mask plate is L1, distance between adjacent two row of the second mask plate is L2, the distance between distance two row adjacent with the first mask plate between adjacent two row of the second mask plate equates, the distance between distance two row adjacent with the first mask plate between adjacent two row of the second mask plate equates.
According to some embodiments of the present invention, as shown in Figure 5, on the first mask plate, four evaporation holes adjacent one another are surround a virtual evaporation hole 51, as shown in Figure 5, the virtual evaporation hole 51 that dotted line is connected to form, the area in virtual evaporation hole is more than or equal to the area in an evaporation hole 50, and the shape in virtual evaporation hole 51 is identical with the shape in evaporation hole 50.
According to some embodiments of the present invention, as Figure 1 and Figure 4, be formed in one structure or combined by discrete mask unit of mask plate 10, described mask plate is fixed on housing.
The structure that is formed in one of mask plate 10 shown in Fig. 1, mask plate 10 shown in Fig. 4 is combined by discrete mask unit 40.As shown in Figure 1 and Figure 4, mask plate 10 or mask unit 40 are fixed on mask frame 14 by laser welding, and wherein 12 is solder joint.
According to one embodiment of present invention, as shown in Fig. 5 ~ Fig. 7, four groups of opposite side that size dimension is respectively a1, a2, a3, a4 are of a size of: a1=24 μ m, a2=28 μ m, a3=a4=10 μ m.
According to one embodiment of present invention, as shown in Fig. 5 ~ Fig. 7, four groups of opposite side that size dimension is respectively a1, a2, a3, a4 are of a size of: a1=20 μ m, a2=20 μ m, a3=a4=14.14 μ m.
The present invention also provides a kind of evaporation coating method, comprise the organic luminous layer that uses matching mask plate described above to make OLED display screen by vacuum evaporation step, the blue subpixels of OLED display screen forms by the first mask plate evaporation, and the red sub-pixel of OLED display screen and green sub-pixels form by the second mask plate evaporation.
According to embodiments of the invention, evaporation step comprises red sub-pixel evaporation step, green sub-pixels evaporation step, blue subpixels evaporation step, before each sub-pixel evaporation step, also comprise contraposition step, contraposition step is by mask plate and deposition substrate contraposition, makes the evaporation hole 50 on mask plate corresponding with the corresponding subpixel area of deposition substrate.
Use dot structure that matching mask plate provided by the invention and evaporation coating method thereof make as shown in Fig. 8 ~ Fig. 9, B (Blue) represents blue subpixels, R(Red) represent red sub-pixel, G(Green) represent green sub-pixels.Blue subpixels forms by the first mask plate evaporation shown in Fig. 5, and green sub-pixels and red sub-pixel form by the second mask plate evaporation shown in Fig. 7.Red sub-pixel and green sub-pixels are used two the second mask plates to make, and also can use same the second mask plate to make.While using same the second mask plate to make red and green sub-pixels, after each evaporation step, need to clean, mask plate is cleaned up, avoid colour mixture.
As shown in Figure 8, Figure 9, the area in blue subpixels B region is the area sum in red sub-pixel Zone R territory and green sub-pixels G region, and the area change of blue subpixels can effectively improve the life-span of OLED display screen.Pixel arrangement mode shown in Fig. 8 has also improved the ppi of OLED display screen simultaneously.
Can greatly increase the area of blue subpixels in the each pixel cell of OLED by the luminous organic material of matching mask plate evaporation provided by the present invention, make in the time of balance red sub-pixel and green sub-pixels, without blue subpixels being provided to excessive electric current, get final product normal display white, thereby increase accordingly the life-span of blue subpixels, indirectly extended the bulk life time of OLED display screen; In addition, due to the special construction setting of mask plate, the OLED display screen of making by matching mask plate evaporation provided by the present invention can have higher ppi, has improved the display quality of display screen.
Although the specific embodiment of the present invention is described in detail with reference to multiple illustrative examples of the present invention, but it must be understood that, those skilled in the art can design multiple other improvement and embodiment, and these improve and within embodiment will drop on spirit and scope.Particularly, within the scope of aforementioned open, accompanying drawing and claim, can aspect the layout of component and/or subordinate composite configuration, make rational modification and improvement, and can not depart from spirit of the present invention.Except modification and the improvement of component and/or layout aspect, its scope is limited by claims and equivalent thereof.
Claims (10)
1. a matching mask plate, comprise the mask plate of two kinds of structures, described mask plate is provided with the mask pattern region being formed by evaporation hole array, described mask plate is run through in described evaporation hole, it is characterized in that: described evaporation hole shape is Polygons, the mask plate of described two kinds of structures comprises the first mask plate and the second mask plate, and the above evaporation hole number of described the first mask plate is the twice of described the above evaporation hole number of the second mask plate, wherein
Arrange in rectangular array mode with column direction in the row direction in described evaporation hole on described the first mask plate;
Arrange successively with column direction in the row direction in described evaporation hole on described the second mask plate, and the described evaporation hole of adjacent two row is dislocation arrangement in the row direction, and the described evaporation holes of adjacent two row are vertically dislocation arrangement.
2. matching mask plate according to claim 1, is characterized in that, described evaporation hole be shaped as tetragon or hexagon or octagon.
3. matching mask plate according to claim 2; it is characterized in that; the above evaporation hole of described mask plate of described two kinds of structures be shaped as octagon; described octagon has four groups of parallel opposite side; the size dimension of described octagonal four groups of opposite side is respectively a1, a2, a3, a4, and its size range and mutual relationship are: 10 μ m≤a1≤35 μ m; 10 μ m≤a2≤35 μ m; 5 μ m≤a3≤25 μ m; A3=a4; Place, the limit straight line of the described a1 of being of a size of is perpendicular to place, the limit straight line that is of a size of a2.
4. matching mask plate according to claim 3, is characterized in that, the distance of one group of opposite side that the described length of side is a1 is b1, and the size range of described b1 is 30 μ m≤b1≤60 μ m; The described length of side is that the distance of one group of opposite side of a2 is b2, and the size range of described b2 is 30 μ m≤b2≤60 μ m.
5. matching mask plate according to claim 3, is characterized in that, in described the first mask plate, described in adjacent two row, the distance between evaporation hole is L2, and the pass of described a2 and described L2 is: a2≤L2; Distance in described the first mask plate between adjacent two row described evaporation holes is L1, and the pass of described a1 and described L1 is: a1≤L1.
6. matching mask plate according to claim 5, is characterized in that, on described the second mask plate, the line space in the described evaporation hole of adjacent two odd-numbered lines or adjacent two even number lines is L4, and described L2, described b1, described L4 three's pass is: L4=2L2+2b1; The line space in adjacent two odd columns of described the second mask plate or the described evaporation hole of adjacent two even columns is L3, and described L1, described b2, described L3 three's pass is: L3=2L1+2b2.
7. according to the matching mask plate described in claim 2 or 3, it is characterized in that, four described evaporation holes adjacent one another are on described the first mask plate surround a virtual evaporation hole, the area in described virtual evaporation hole is more than or equal to the area in a described evaporation hole, and the shape in described virtual evaporation hole is identical with the shape in described evaporation hole.
8. according to the matching mask plate described in claim 2 or 3, it is characterized in that, be formed in one structure or combined by discrete mask unit of described mask plate, described mask plate is fixed on housing.
9. an evaporation coating method, comprise that right to use requires matching mask plate described in 1～8 any one claim by the organic luminous layer of vacuum evaporation step making OLED display screen, it is characterized in that: the blue subpixels of OLED display screen forms by described the first mask plate evaporation, the red sub-pixel of OLED display screen and green sub-pixels form by described the second mask plate evaporation.
10. evaporation coating method according to claim 9, it is characterized in that, described evaporation step comprises described red sub-pixel evaporation step, described green sub-pixels evaporation step, described blue subpixels evaporation step, before each described sub-pixel evaporation step, also comprise contraposition step, described contraposition step is by described mask plate and deposition substrate contraposition, makes the described evaporation hole on described mask plate corresponding with the corresponding subpixel area of described deposition substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410091023.8A CN103898441A (en) | 2014-03-13 | 2014-03-13 | Matched mask plates and vapor deposition method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410091023.8A CN103898441A (en) | 2014-03-13 | 2014-03-13 | Matched mask plates and vapor deposition method thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103898441A true CN103898441A (en) | 2014-07-02 |
Family
ID=50990005
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410091023.8A Pending CN103898441A (en) | 2014-03-13 | 2014-03-13 | Matched mask plates and vapor deposition method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103898441A (en) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104112824A (en) * | 2014-07-09 | 2014-10-22 | 京东方科技集团股份有限公司 | OLED display device, and preparation method and vapor-deposition mask plates thereof |
| CN104630703A (en) * | 2015-01-29 | 2015-05-20 | 四川虹视显示技术有限公司 | Mask film assembly and substrate of OLED device |
| CN105702707A (en) * | 2015-09-17 | 2016-06-22 | 京东方科技集团股份有限公司 | Display substrate, display device and mask |
| CN104157550B (en) * | 2014-07-28 | 2016-08-31 | 京东方科技集团股份有限公司 | Film patterning method and mask plate |
| WO2018024040A1 (en) * | 2016-08-03 | 2018-02-08 | 京东方科技集团股份有限公司 | Mask plate, mask plate assembly comprising the mask plate, and manufacturing method thereof |
| WO2018227958A1 (en) * | 2017-06-16 | 2018-12-20 | 京东方科技集团股份有限公司 | Mask plate module, method for manufacturing film layer, and method for manufacturing organic electroluminescent display panel |
| CN109166470A (en) * | 2018-09-28 | 2019-01-08 | 云谷（固安）科技有限公司 | Display panel and its image element driving method, display device, mask plate |
| CN109427855A (en) * | 2017-09-05 | 2019-03-05 | 三星显示有限公司 | The method for showing equipment and manufacture display equipment |
| CN109468584A (en) * | 2018-12-14 | 2019-03-15 | 武汉华星光电半导体显示技术有限公司 | Mask plate is combined and is combined using mask plate by the patterned method of semiconductive thin film |
| CN110649179A (en) * | 2019-09-29 | 2020-01-03 | 京东方科技集团股份有限公司 | Display substrate, preparation method thereof, display device and mask plate |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050162079A1 (en) * | 2003-02-13 | 2005-07-28 | Fujitsu Limited | Display device and manufacturing method thereof |
| CN102386208A (en) * | 2010-08-27 | 2012-03-21 | 乐金显示有限公司 | Organic electroluminescent device |
| CN103123927A (en) * | 2013-01-24 | 2013-05-29 | 昆山维信诺显示技术有限公司 | Pixel structure for OLED display screen and metal mask thereof |
| CN203834004U (en) * | 2014-03-13 | 2014-09-17 | 昆山允升吉光电科技有限公司 | Mating mask plates |
-
2014
- 2014-03-13 CN CN201410091023.8A patent/CN103898441A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050162079A1 (en) * | 2003-02-13 | 2005-07-28 | Fujitsu Limited | Display device and manufacturing method thereof |
| CN102386208A (en) * | 2010-08-27 | 2012-03-21 | 乐金显示有限公司 | Organic electroluminescent device |
| CN103123927A (en) * | 2013-01-24 | 2013-05-29 | 昆山维信诺显示技术有限公司 | Pixel structure for OLED display screen and metal mask thereof |
| CN203834004U (en) * | 2014-03-13 | 2014-09-17 | 昆山允升吉光电科技有限公司 | Mating mask plates |
Cited By (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10186557B2 (en) | 2014-07-09 | 2019-01-22 | Boe Technology Group Co., Ltd. | OLED display device, manufacturing method thereof, display device and mask for vaporization |
| EP3168891A4 (en) * | 2014-07-09 | 2017-10-18 | Boe Technology Group Co. Ltd. | Oled display device and manufacturing method thereof, display device and evaporation-deposition mask plate |
| CN104112824A (en) * | 2014-07-09 | 2014-10-22 | 京东方科技集团股份有限公司 | OLED display device, and preparation method and vapor-deposition mask plates thereof |
| CN104157550B (en) * | 2014-07-28 | 2016-08-31 | 京东方科技集团股份有限公司 | Film patterning method and mask plate |
| CN104630703A (en) * | 2015-01-29 | 2015-05-20 | 四川虹视显示技术有限公司 | Mask film assembly and substrate of OLED device |
| CN105702707A (en) * | 2015-09-17 | 2016-06-22 | 京东方科技集团股份有限公司 | Display substrate, display device and mask |
| WO2018024040A1 (en) * | 2016-08-03 | 2018-02-08 | 京东方科技集团股份有限公司 | Mask plate, mask plate assembly comprising the mask plate, and manufacturing method thereof |
| US10934613B2 (en) | 2016-08-03 | 2021-03-02 | Boe Technology Group Co., Ltd. | Mask plate, mask plate assembly including mask plate and method for manufacturing same |
| US11018327B2 (en) | 2017-06-16 | 2021-05-25 | Boe Technology Group Co., Ltd. | Mask module, method for manufacturing a film layer, organic electromagnetic light-emitting display panel and method for manufacturing the same |
| WO2018227958A1 (en) * | 2017-06-16 | 2018-12-20 | 京东方科技集团股份有限公司 | Mask plate module, method for manufacturing film layer, and method for manufacturing organic electroluminescent display panel |
| JP2019045841A (en) * | 2017-09-05 | 2019-03-22 | 三星ディスプレイ株式會社Ｓａｍｓｕｎｇ Ｄｉｓｐｌａｙ Ｃｏ．，Ｌｔｄ． | Display and method for manufacturing the same |
| CN109427855A (en) * | 2017-09-05 | 2019-03-05 | 三星显示有限公司 | The method for showing equipment and manufacture display equipment |
| KR20190027051A (en) * | 2017-09-05 | 2019-03-14 | 삼성디스플레이 주식회사 | Display device and method of manufacturing the same |
| JP7107728B2 (en) | 2017-09-05 | 2022-07-27 | 三星ディスプレイ株式會社 | Display device and manufacturing method thereof |
| KR102520710B1 (en) * | 2017-09-05 | 2023-04-12 | 삼성디스플레이 주식회사 | Display device and method of manufacturing the same |
| CN109427855B (en) * | 2017-09-05 | 2023-09-01 | 三星显示有限公司 | Display device and method of manufacturing the same |
| CN109166470A (en) * | 2018-09-28 | 2019-01-08 | 云谷（固安）科技有限公司 | Display panel and its image element driving method, display device, mask plate |
| CN109468584A (en) * | 2018-12-14 | 2019-03-15 | 武汉华星光电半导体显示技术有限公司 | Mask plate is combined and is combined using mask plate by the patterned method of semiconductive thin film |
| US11158799B2 (en) | 2018-12-14 | 2021-10-26 | Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd. | Mask assembly and method of patterning semiconductor film using thereof |
| CN110649179A (en) * | 2019-09-29 | 2020-01-03 | 京东方科技集团股份有限公司 | Display substrate, preparation method thereof, display device and mask plate |
| US20220093892A1 (en) * | 2019-09-29 | 2022-03-24 | Boe Technology Group Co., Ltd. | Display substrate, method of manufacturing the same, display apparatus, and mask |
| US11825677B2 (en) | 2019-09-29 | 2023-11-21 | Boe Technology Group Co., Ltd. | Display substrate, method of manufacturing the same, display apparatus, and mask |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103898441A (en) | Matched mask plates and vapor deposition method thereof | |
| EP2950348B1 (en) | Pixel structure for oled display screen | |
| CN106486513B (en) | Pixel structure and OLED display panel | |
| CN106486514B (en) | Pixel structure and OLED display panel | |
| US8896200B2 (en) | Pixel structure of organic light emitting display device | |
| US9343511B1 (en) | Pixel arrangement structure for organic light-emitting diode | |
| CN103904105A (en) | Pixel structure of OLED display screen | |
| EP3382683B1 (en) | Display | |
| TWI585726B (en) | Pixel structure | |
| CN108155204B (en) | Pixel arrangement structure, display device and mask plate | |
| CN104282710B (en) | Pixel structure and metal mask thereof | |
| US9030384B2 (en) | OLED panel with partition plate | |
| CN105789261A (en) | Pixel array and manufacturing method thereof, and organic light emitting diode array substrate | |
| CN104201192A (en) | Pixel structure of display screen, metal mask plate and OLED (organic light emitting diode) display screen | |
| CN104835832A (en) | Pixel arrangement structure, organic electroluminescent device, display device, and mask plate | |
| CN105552099A (en) | OLED pixel arrangement structure | |
| CN104659064B (en) | Organic light emitting diode display pixel arrangement structure and display device | |
| CN109300958A (en) | A kind of dot structure, display panel and display device | |
| US20230180527A1 (en) | Display substrate and display apparatus | |
| CN203834004U (en) | Mating mask plates | |
| KR20190131580A (en) | Pixel Structures and OLED Display Panels | |
| CN104992959A (en) | OLED pixel arrangement structure and display device | |
| CN207068854U (en) | Dot structure, the OLED display screen comprising the dot structure, evaporation mask plate | |
| CN103898442A (en) | Matched mask plates and vapor deposition method thereof | |
| US20200194512A1 (en) | Organic light-emitting diode pixel structure |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20140702 |