TWI401112B - Filter leak inspection apparatus and filter leak inspection method - Google Patents

Filter leak inspection apparatus and filter leak inspection method Download PDF

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TWI401112B
TWI401112B TW99142836A TW99142836A TWI401112B TW I401112 B TWI401112 B TW I401112B TW 99142836 A TW99142836 A TW 99142836A TW 99142836 A TW99142836 A TW 99142836A TW I401112 B TWI401112 B TW I401112B
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filter material
unit
image
scanning light
scanning
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TW99142836A
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TW201223616A (en
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Yang You Chung
Ming Chuan Hu
Chun Hua Chu
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Taiwan Textile Res Inst
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濾材洩漏檢測裝置及濾材洩漏檢測方法Filter material leakage detecting device and filter material leakage detecting method

本發明是有關於一種濾材洩漏檢測裝置及濾材洩漏檢測方法,且特別是有關於一種能夠提高檢測速度及辨識率的濾材洩漏檢測裝置及濾材洩漏檢測方法。The present invention relates to a filter material leakage detecting device and a filter material leakage detecting method, and more particularly to a filter material leakage detecting device and a filter material leakage detecting method capable of improving the detecting speed and the recognition rate.

隨著人類工業技術的演進,許多新型態的實驗、工廠的製造程序,都需要越來越高的潔淨度,其他甚至是為了居住的環境或是安全的考量,都希望能夠儘可能地減少室內空氣中的汙染物。為了因應各種環境下的需求,許多空氣過濾材料陸續被開發出來,藉此以提供初級微粒(High Efficiency Particulate Air,HEPA)之潔淨空氣,或是更高潔淨度的超微粉塵顆粒空氣(Ultra-Low Particulate Air,ULPA)。With the evolution of human industrial technology, many new-type experiments and factory manufacturing procedures require more and more cleanliness. Others, even for residential environments or safety considerations, hope to be as much as possible. Contaminants in the indoor air. In order to meet the needs of various environments, many air filtration materials have been developed to provide clean air of High Efficiency Particulate Air (HEPA) or ultra-fine dust particles of higher purity (Ultra- Low Particulate Air, ULPA).

由於濾材的優劣將會對生產或是安全造成極大的影響,為了提升濾材的可靠度,必須對濾材是否洩漏加以檢測。但,在習知的檢測方式中,檢測人員大多是以手持粒子計數器的方式在濾材表面附近進行掃描的動作,以偵測出濾材中的洩漏位置。然而,此檢測方式極為耗時,且檢測人員在長時間的作業下,其檢測洩漏的辨識度逐步下降至約60%左右。因此,如何開發出一種辨識度高,檢測時間更短之濾材洩漏檢測裝置及檢測方法,實為研發者所亟達成的目標之一。Since the quality of the filter material will have a great impact on production or safety, in order to improve the reliability of the filter material, it is necessary to detect whether the filter material leaks. However, in the conventional detection method, the detecting personnel mostly perform scanning operations in the vicinity of the surface of the filter material by means of a hand-held particle counter to detect the leak position in the filter medium. However, this detection method is extremely time consuming, and the identification of the detection leak is gradually reduced to about 60% by the inspector under long-term operation. Therefore, how to develop a filter leakage detection device and detection method with high recognition and shorter detection time is one of the goals that the developer has achieved.

此外,在美國專利號US 6,177,678、US 7,334,490 B2、US 4,494,403、US 7,201,039 B2、US 7,210,363 B2、US 7,669,490 B2、US 7,649,174 B2、US 4,772,789、US 4,612,797、US 5,001,346、US 6,177,678 B1、美國專利公開號US 2006/027301 A1以及行政院勞工委員會勞工安全衛生研究所委託研究報告之岡亭式氣罩設計規範研究中亦提出了多種濾材洩漏檢測裝置及方法。In addition, US Patent Nos. 6,177,678, US 7,334,490 B2, US 4,494,403, US 7,201,039 B2, US 7,210,363 B2, US 7,669,490 B2, US 7,649,174 B2, US 4,772,789, US 4,612,797, US 5,001,346, US 6,177,678 B1, US Patent Publication No. US 2006/027301 A1 and the research report on the design of the Okin-type hoods commissioned by the Institute of Labor Safety and Health of the Executive Yuan Labor Committee also proposed a variety of filter leakage detection devices and methods.

本發明提出一種濾材洩漏檢測裝置,其可節省針對濾材進行檢測時所需時間,且其辨識度高。The invention provides a filter material leakage detecting device, which can save time required for detecting the filter material, and has high recognition degree.

本發明提出一種濾材洩漏檢測裝置,此方法可節省針對濾材進行檢測時所需時間且辨識度高。The invention provides a filter material leakage detecting device, which can save time required for detecting the filter material and has high recognition.

本發明提出另一種濾材洩漏檢測裝置,此方法亦可節省針對濾材進行檢測時所需時間且辨識度亦高。The invention proposes another filter material leakage detecting device, which can also save time required for detecting the filter material and has high recognition degree.

本發明提出一種濾材洩漏檢測裝置,此裝置包括氣膠供應單元、濾材固定單元以及測漏單元。氣膠供應單元具有氣膠輸出端,此氣膠供應單元適於供應氣膠至氣膠輸出端。濾材固定單元將濾材固定於氣膠輸出端。測漏單元包括掃描模組、影像擷取單元以及判斷單元。掃描模組提供掃描光線並使掃描光線在與濾材平行之平面上移動,當濾材具有破孔時,氣膠從破孔洩漏而使掃描光線在對應於破孔的位置被散射。影像擷取單元擷取濾材之影像。判斷單元與影像擷取單元連接,其中判斷單元接收影像並從影像 中判斷出掃描光線被散射的位置。The invention provides a filter material leakage detecting device, which comprises a gas glue supply unit, a filter material fixing unit and a leak detecting unit. The gas glue supply unit has a gas glue output unit, and the gas glue supply unit is adapted to supply the gas glue to the gas glue output end. The filter fixing unit fixes the filter material to the gas gel output end. The leak detection unit includes a scan module, an image capture unit, and a determination unit. The scanning module provides scanning light and moves the scanning light in a plane parallel to the filter material. When the filter material has a broken hole, the gas glue leaks from the broken hole and the scanning light is scattered at a position corresponding to the broken hole. The image capturing unit captures an image of the filter material. The determining unit is connected to the image capturing unit, wherein the determining unit receives the image and receives the image from the image The position at which the scanning ray is scattered is judged.

本發明提出一種濾材洩漏檢測方法,此方法包括提供氣膠至濾材的一側。利用測漏單元於濾材的另一側檢測濾材是否洩漏,而測漏單元包括掃描模組、影像擷取單元以及判斷單元。掃描模組提供掃描光線並使掃描光線在與濾材平行之平面上移動,當濾材具有破孔時,氣膠從破孔洩漏而使掃描光線在對應於破孔的位置被散射。影像擷取單元擷取濾材之影像。判斷單元與影像擷取單元連接,其中判斷單元接收影像並從影像中判斷出掃描光線被散射的位置。The present invention provides a filter material leak detection method that includes providing a gas gel to one side of a filter material. The leak detecting unit detects whether the filter material leaks on the other side of the filter material, and the leak detecting unit includes a scanning module, an image capturing unit, and a judging unit. The scanning module provides scanning light and moves the scanning light in a plane parallel to the filter material. When the filter material has a broken hole, the gas glue leaks from the broken hole and the scanning light is scattered at a position corresponding to the broken hole. The image capturing unit captures an image of the filter material. The judging unit is connected to the image capturing unit, wherein the judging unit receives the image and determines a position where the scanning light is scattered from the image.

本發明提出另一種濾材洩漏檢測裝置,此方法包括提供氣膠至濾材的一側。於濾材的另一側提供掃描光線並使掃描光線在與濾材平行之平面上移動,當濾材具有破孔時,氣膠從破孔洩漏而使掃描光線在對應於破孔的位置被散射。於濾材的另一側擷取濾材之影像。從影像中判斷出掃描光線被散射的位置。The present invention provides another filter leakage detecting device that includes providing a side of the gas gel to the filter material. Scanning light is provided on the other side of the filter material and the scanning light is moved in a plane parallel to the filter material. When the filter material has a broken hole, the gas glue leaks from the broken hole and the scanning light is scattered at a position corresponding to the broken hole. The image of the filter material is taken from the other side of the filter material. The position where the scanning light is scattered is judged from the image.

在本發明之一實施例中,上述之掃描模組沿著第一方向移動,而第一方向實質上垂直於掃描光線的傳遞方向。In an embodiment of the invention, the scanning module moves in a first direction, and the first direction is substantially perpendicular to a direction in which the scanning light is transmitted.

在本發明之一實施例中,上述之掃描模組包括線性位移機構以及光源。線性位移機構沿著第一方向移動,而第一方向實質上垂直於掃描光線的傳遞方向。光源配置於線性位移機構上以提供掃描光線。In an embodiment of the invention, the scanning module includes a linear displacement mechanism and a light source. The linear displacement mechanism moves in a first direction, and the first direction is substantially perpendicular to the direction of transmission of the scanning ray. The light source is disposed on the linear displacement mechanism to provide scanning light.

在本發明之一實施例中,上述之掃描光線為雷射光。In an embodiment of the invention, the scanning light is laser light.

在本發明之一實施例中,上述之濾材位於氣膠供應單 元與影像擷取單元之間。In an embodiment of the invention, the filter material is located in a gas supply list Between the element and the image capture unit.

在本發明之一實施例中,上述之濾材洩漏檢測裝置可進一步包括位移機構,其中影像擷取單元配置於位移機構上以調整影像擷取單元與濾材之間的相對位置。In an embodiment of the invention, the filter leakage detecting device may further include a displacement mechanism, wherein the image capturing unit is disposed on the displacement mechanism to adjust a relative position between the image capturing unit and the filter medium.

在本發明之一實施例中,上述之平面位於影像擷取單元與濾材之間。In an embodiment of the invention, the plane is located between the image capturing unit and the filter material.

基於上述,由於本發明所提出之濾材洩漏檢測裝置是利用掃描光束在與濾材平行之平面上移動以檢測出破孔所在的位置,因此本發明之濾材洩漏檢測裝置可節省進行檢測所需的時間,且其辨識度高。此外,本發明所提出之濾材洩漏檢測方法亦可節省進行檢測所需的時間且不易發生因檢測人員體力(精神)下降而導致辨識度變低的問題。Based on the above, since the filter material leakage detecting device proposed by the present invention uses the scanning beam to move in a plane parallel to the filter material to detect the position where the hole is located, the filter material leakage detecting device of the present invention can save time required for the detection. And its recognition is high. In addition, the filter material leakage detecting method proposed by the present invention can also save the time required for the detection and is less prone to the problem that the recognition degree is lowered due to the decrease in the physical strength (spirit) of the detecting person.

為讓本發明之上述特徵和優點能更明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。The above described features and advantages of the present invention will be more apparent from the following description.

圖1為本發明一實施例之濾材洩漏檢測裝置示意圖。請參照圖1,本實施例之濾材洩漏檢測裝置1000可包括氣膠供應單元100、濾材固定單元200以及測漏單元300。氣膠供應單元100具有氣膠輸出端100a,此氣膠供應單元100適於供應氣膠(圖1中未繪示)至氣膠輸出端100a。在本實施例中,氣膠可為懸浮在空氣中的液膠或固膠。1 is a schematic view of a filter material leakage detecting device according to an embodiment of the present invention. Referring to FIG. 1 , the filter material leakage detecting device 1000 of the present embodiment may include a gas glue supply unit 100 , a filter material fixing unit 200 , and a leak detecting unit 300 . The gas glue supply unit 100 has a gas glue output end 100a, and the gas glue supply unit 100 is adapted to supply a gas glue (not shown in FIG. 1) to the gas glue output end 100a. In this embodiment, the gas glue may be a liquid glue or a solid glue suspended in the air.

本實施例之氣膠供應單元100可包括風管110、氣流產生單元120、第一過濾單元130、第二過濾單元132、第 三過濾單元134、第四過濾單元136、第一整流單元140、第二整流單元142以及微粒產生單元150。氣流產生單元120透過第一過濾單元130、第二過濾單元132、第三過濾單元134以及第四過濾單元136提供乾淨的氣流F至風管110中。此乾淨的氣流F經過第一整流單元140以及第二整流單元142後呈現均勻的分佈,以和微粒產生單元150所產生的微粒(圖1中未繪示)混合成均勻的氣膠(圖1中未繪示)。值得一提的是,在本實施例中,第二整流單元142的使用可避免氣流F在靠近氣膠輸出端100a產生紊流而影響檢測結果。The gas supply unit 100 of the embodiment may include a duct 110, an airflow generating unit 120, a first filtering unit 130, a second filtering unit 132, and a The third filter unit 134, the fourth filter unit 136, the first rectification unit 140, the second rectification unit 142, and the particle generation unit 150. The airflow generating unit 120 provides a clean airflow F into the air duct 110 through the first filter unit 130, the second filter unit 132, the third filter unit 134, and the fourth filter unit 136. The clean airflow F is uniformly distributed after passing through the first rectifying unit 140 and the second rectifying unit 142, and is mixed with the particles (not shown in FIG. 1) generated by the microparticle generating unit 150 to form a uniform gas gel (FIG. 1). Not shown in the middle). It is worth mentioning that, in this embodiment, the use of the second rectifying unit 142 can prevent the airflow F from generating turbulence near the gas gel output end 100a and affecting the detection result.

本實施例之濾材固定單元200將濾材210固定於氣膠輸出端100a。舉例而言,如圖1所示,濾材固定元件200可直接施壓於濾材210之邊框210a上,藉此方式可將濾材210固定於氣膠輸出端100a。然,本發明並不以此為限,在其他實施例中,亦可藉由其它方式將濾材210固定於氣膠輸出端100a。The filter medium fixing unit 200 of the present embodiment fixes the filter medium 210 to the gas gel output end 100a. For example, as shown in FIG. 1, the filter material fixing member 200 can be directly pressed against the frame 210a of the filter material 210, whereby the filter material 210 can be fixed to the gas gel output end 100a. However, the present invention is not limited thereto. In other embodiments, the filter medium 210 may be fixed to the gas gel output end 100a by other means.

本實施例之測漏單元300可包括掃描模組310、影像擷取單元320以及判斷單元330。圖2為圖1之部份區域放大示意圖。請同時參照圖1及圖2,本實施例之掃描模組310提供掃描光線L,並使掃描光線L在與濾材210平行之平面P上移動。當濾材210具有破孔H時,氣膠X從破孔H洩漏,而使掃描光線L在對應於破孔H的位置K被散射。舉例而言,濾材210是位於x-y平面,掃描光線L在與x-y平面平行之平面P上移動,當濾材210具有破 孔H時,氣膠X從破孔H洩漏,而使掃描光線L在對應於破孔H的位置K被散射。The leak detecting unit 300 of the embodiment may include a scanning module 310, an image capturing unit 320, and a determining unit 330. Figure 2 is an enlarged schematic view of a portion of the area of Figure 1. Referring to FIG. 1 and FIG. 2 simultaneously, the scanning module 310 of the present embodiment provides the scanning light L and moves the scanning light L on a plane P parallel to the filter material 210. When the filter material 210 has the broken hole H, the gas gel X leaks from the hole H, and the scanning light L is scattered at the position K corresponding to the hole H. For example, the filter material 210 is located on the x-y plane, and the scanning light L moves on a plane P parallel to the x-y plane, when the filter material 210 is broken. At the time of the hole H, the gas gel X leaks from the hole H, and the scanning light L is scattered at the position K corresponding to the hole H.

更詳細地說,本實施例之掃描模組310可沿著第一方向移動,而第一方向實質上垂直於掃描光線L的傳遞方向。舉例而言,掃描模組310可沿著y方向移動,而y方向實質上垂直於掃描光線L的傳遞方向(例如負x方向)。進一步地說,本實施例之掃描模組310可包括線性位移機構312以及光源314。線性位移機構312沿著第一方向移動,而第一方向實質上垂直於掃描光線L的傳遞方向,光源314配置於線性位移機構312上以提供掃描光線L。舉例而言,本實施例之線性位移機構312可架設在沿著y方向延伸的軌道Sy上,而光源314配置於線性位移機構上312並向負x方向發出掃描光線L。此線性位移機構312會順著軌道Sy在y方向上移動,而使朝負x方向傳遞之掃描光線L可掃過整個與濾材210所在平面(例如x-y平面)平行之平面P。在本實施例中,線性位移機構312例如為電動載台,光源314例如為雷射二極體,掃描光線L例如為雷射光。In more detail, the scanning module 310 of the present embodiment is movable along the first direction, and the first direction is substantially perpendicular to the transmission direction of the scanning light L. For example, the scanning module 310 can move along the y direction, and the y direction is substantially perpendicular to the direction of transmission of the scanning ray L (eg, the negative x direction). Further, the scanning module 310 of the embodiment may include a linear displacement mechanism 312 and a light source 314. The linear displacement mechanism 312 moves in a first direction, and the first direction is substantially perpendicular to the direction of transmission of the scanning ray L, and the light source 314 is disposed on the linear displacement mechanism 312 to provide the scanning ray L. For example, the linear displacement mechanism 312 of the present embodiment can be mounted on the track Sy extending along the y direction, and the light source 314 is disposed on the linear displacement mechanism 312 and emits the scanning light L in the negative x direction. The linear displacement mechanism 312 moves in the y direction along the track Sy, and the scanning light L transmitted in the negative x direction can sweep across the entire plane P parallel to the plane of the filter material 210 (for example, the x-y plane). In the present embodiment, the linear displacement mechanism 312 is, for example, an electric stage, the light source 314 is, for example, a laser diode, and the scanning light L is, for example, laser light.

本實施例之影像擷取單元320適於擷取濾材210之影像。在本實施例中,濾材210位於氣膠供應單元100與影像擷取單元320之間,掃描光線L所在之平面P位於濾材210與影像擷取單元320之間。詳言之,本實施例之影像擷取單元320可配合掃描光線L移動的速率來擷取濾材210及掃描光線L之影像,進而判斷出濾材210上是否有 破孔H及破孔H所在的位置。舉例而言,若掃描光線L在y方向的寬度(未繪示)為2.2釐米,且以每秒60釐米的速率在與濾材所在平面(例如x-y平面)平行之平面P上移動時,影像擷取單元320可以每秒30幅的速率擷取濾材210及掃描光線L之影像。換言之,當掃描光線L每移動2釐米(小於掃描光線L寬度2.2釐米)影像擷取單元320即擷取一張濾材210及掃描光線L的影像。如此一來,影像擷取單元320便可擷取到掃描光線L掃過整個與濾材210平行之平面P的影像,進而使得本實施例之濾材洩漏檢測裝置1000的辨識度高。值得一提的是,一般而言,濾材210中破孔H(缺陷)多由碰撞所引起且其直徑大於0.4釐米,而本實施例之濾材洩漏檢測裝置1000可偵測直徑大於0.4釐米的破孔H且其辨識度可大於95%。。The image capturing unit 320 of the embodiment is adapted to capture an image of the filter material 210. In the present embodiment, the filter material 210 is located between the gas supply unit 100 and the image capturing unit 320, and the plane P where the scanning light L is located is located between the filter material 210 and the image capturing unit 320. In detail, the image capturing unit 320 of the present embodiment can capture the image of the filter material 210 and the scanning light L according to the moving speed of the scanning light L, thereby determining whether the filter material 210 has The location where the hole H and the hole H are located. For example, if the width of the scanning light L in the y direction (not shown) is 2.2 cm and moves at a rate of 60 cm per second on a plane P parallel to the plane of the filter medium (for example, the xy plane), the image 撷The taking unit 320 can capture the image of the filter material 210 and the scanning light L at a rate of 30 frames per second. In other words, when the scanning light L is moved by 2 cm (less than the scanning light L width of 2.2 cm), the image capturing unit 320 captures an image of the filter material 210 and the scanning light L. In this way, the image capturing unit 320 can capture the image of the scanning light L sweeping through the entire plane P parallel to the filter material 210, thereby making the filter material leakage detecting device 1000 of the present embodiment highly recognizable. It is worth mentioning that, in general, the hole H (defect) in the filter material 210 is mostly caused by a collision and its diameter is greater than 0.4 cm, and the filter material leakage detecting device 1000 of the embodiment can detect a broken diameter of more than 0.4 cm. Hole H and its degree of recognition can be greater than 95%. .

本實施例之濾材洩漏檢測裝置1000可進一步包括位移機構400,其中影像擷取單元320配置於此位移機構400上以調整影像擷取單元320與濾材210之間的相對位置。詳言之,本實施例之位移機構400可包括一條沿著x方向延伸的軌道Sx以及兩條相互平行且沿著z方向延伸的軌道Sz1以及Sz2,其中軌道Sx架在軌道Sz1以及Sz2上,且軌道Sx可藉由軌道Sz1以及Sz2在z方向上移動。在本實施例中,影像擷取單元320是架設在軌道Sx上,因此影像擷取單元320除了可藉由軌道Sx在x方向上移動外,亦可藉由軌道Sz1以及Sz2在z方向上移動。這樣一來,當濾材210的大小或架設位置改變時,影像擷取單元320 便可藉由位移機構400調整與濾材210之間的相對位置,以使濾材210及掃描光線L之影響可完整地為影像擷取單元320所接收。The filter material leakage detecting device 1000 of the present embodiment may further include a displacement mechanism 400, wherein the image capturing unit 320 is disposed on the displacement mechanism 400 to adjust the relative position between the image capturing unit 320 and the filter material 210. In detail, the displacement mechanism 400 of the present embodiment may include a track Sx extending along the x direction and two tracks Sz1 and Sz2 extending parallel to each other and extending along the z direction, wherein the track Sx is mounted on the tracks Sz1 and Sz2, And the track Sx can be moved in the z direction by the tracks Sz1 and Sz2. In this embodiment, the image capturing unit 320 is mounted on the track Sx. Therefore, the image capturing unit 320 can be moved in the z direction by the tracks Sz1 and Sz2, in addition to being movable in the x direction by the track Sx. . In this way, when the size or the mounting position of the filter material 210 is changed, the image capturing unit 320 is changed. The relative position between the filter material 210 and the filter material 210 can be adjusted by the displacement mechanism 400 so that the influence of the filter material 210 and the scanning light L can be completely received by the image capturing unit 320.

本實施例之判斷單元330與影像擷取單元320連接,其中判斷單元330接收影像並從影像中判斷出掃描光線L被散射的位置K。舉例而言,本實施例之影像擷取單元320(例如攝錄影機)可擷取掃描光線L掃過與濾材210平行之平面P的所有影像,並將此影像傳送到判斷單元330(例如電腦)中。此影像經判斷單元330利用影像方法處理後,便可取出這些畫面中較亮的點(即掃描光線L被氣膠X所散射的的位置K),進而判斷出氣膠X洩漏的位置(即濾材210中破孔H的位置)。值得一提的是,在本實施例中,影像擷取單元320例如為攝錄影機,其焦距可被適當地設計以獲得合適的工作距離(即濾材210到影像擷取單元320的距離),並減少因像差問題而導致的破孔H位置誤判的機率。舉例而言,本實施例之影像擷取單元320的焦距可為80釐米,但本發明不以此為限。The determining unit 330 of the embodiment is connected to the image capturing unit 320, wherein the determining unit 330 receives the image and determines from the image the position K at which the scanning light L is scattered. For example, the image capturing unit 320 (for example, a video camera) of the embodiment can capture all the images of the scanning light L across the plane P parallel to the filter material 210, and transmit the image to the determining unit 330 (for example, In the computer). After the image is processed by the judging unit 330 by using the image method, the brighter points of the images (ie, the position K where the scanning light L is scattered by the gas gel X) can be taken out, thereby determining the position where the gas gel X leaks (ie, the filter material). 210 is the location of the hole H). It should be noted that in the embodiment, the image capturing unit 320 is, for example, a video camera, and the focal length thereof can be appropriately designed to obtain a suitable working distance (ie, the distance between the filter material 210 and the image capturing unit 320). And reduce the probability of misjudging the position of the hole H caused by the aberration problem. For example, the focal length of the image capturing unit 320 of the embodiment may be 80 cm, but the invention is not limited thereto.

圖3為本實施例之濾材洩漏檢測方法流程示意圖。請同時參照圖2及圖3,本實施例之濾材洩漏檢測方法可包括下列步驟:請參考圖2,提供氣膠X至濾材210的一側210a(步驟S100)。於濾材210的另一側210b提供掃描光線L並使掃描光線L在與濾材210平行之平面P上移動(步驟S110),當濾材210具有破孔H時,氣膠X從破孔H洩漏而使掃描光線L在對應於破孔H的位置K被散射。於濾 材210的另一側210b擷取濾材210之影像(步驟S120)。從影像中判斷出掃描光線L被散射的位置K(步驟S130)。值得一提,前述之步驟S100、S110之順序可以對調。詳言之,可先進行步驟S110,再進行步驟100,當然,亦可先進行步驟S100,再進行步驟S110。FIG. 3 is a schematic flow chart of the filter material leakage detecting method according to the embodiment. Referring to FIG. 2 and FIG. 3 simultaneously, the filter material leakage detecting method of the present embodiment may include the following steps: Referring to FIG. 2, the side of the gas material X to the filter material 210 is provided 210a (step S100). The scanning light L is provided on the other side 210b of the filter material 210 and the scanning light L is moved on a plane P parallel to the filter material 210 (step S110). When the filter material 210 has the broken hole H, the gas gel X leaks from the hole H. The scanning light L is scattered at a position K corresponding to the broken hole H. Filter The other side 210b of the material 210 captures an image of the filter material 210 (step S120). The position K at which the scanning light L is scattered is judged from the image (step S130). It is worth mentioning that the order of the foregoing steps S100 and S110 can be reversed. In detail, step S110 may be performed first, and then step 100 may be performed. Of course, step S100 may be performed first, and then step S110 is performed.

更詳細地說,如圖2及圖4中所示,本實施例之濾材洩漏檢測方法可包括下列步驟:提供氣膠X至濾材210的一側210a(步驟S200)。利用測漏單元300於濾材210的另一側210b檢測濾材210是否洩漏(步驟S210),而測漏單元300可包括掃描模組310、影像擷取單元320以及判斷單元330。掃描模組310提供掃描光線L並使掃描光線L在與濾材210平行之平面P上移動,當濾材210具有破孔H時,氣膠X從破孔H洩漏而使掃描光線L在對應於破孔H的位置K被散射。影像擷取單元320擷取濾材210之影像。判斷單元330與影像擷取單元320連接,其中判斷單元330接收影像並從影像中判斷出掃描光線L被散射的位置。透過上述之濾材洩漏檢測方法,可節省針對濾材210進行檢測時所需時間,且其辨識度高。此外,亦不易發生因檢測人員體力(精神)下降而導致辨識度變低的問題。In more detail, as shown in FIGS. 2 and 4, the filter leakage detecting method of the present embodiment may include the step of providing the gas gel X to one side 210a of the filter material 210 (step S200). The filter unit 210 is detected by the leak detecting unit 300 on the other side 210b of the filter material 210 (step S210), and the leak detecting unit 300 may include a scanning module 310, an image capturing unit 320, and a determining unit 330. The scanning module 310 provides the scanning light L and moves the scanning light L on the plane P parallel to the filter material 210. When the filter material 210 has the broken hole H, the gas gel X leaks from the broken hole H and the scanning light L corresponds to the broken The position K of the hole H is scattered. The image capturing unit 320 captures an image of the filter material 210. The determining unit 330 is connected to the image capturing unit 320, wherein the determining unit 330 receives the image and determines from the image the position where the scanning light L is scattered. Through the above-described filter material leakage detecting method, the time required for detecting the filter material 210 can be saved, and the degree of recognition is high. In addition, it is not easy to cause a problem that the recognition degree is lowered due to a decrease in the physical strength (spirit) of the tester.

綜上所述,由於本發明所提出之濾材洩漏檢測裝置是利用掃描光束在與濾材平行之平面上移動以檢測出破孔所在的位置,因此本發明之濾材洩漏檢測裝置可節省進行檢測所需的時間,且其辨識度高。此外,本發明所提出之濾材洩漏檢測方法亦可節省進行檢測所需的時間且不易發生 因檢測人員體力(精神)下降而導致辨識度變低的問題。In summary, since the filter material leakage detecting device proposed by the present invention uses the scanning beam to move in a plane parallel to the filter material to detect the position where the hole is broken, the filter material leakage detecting device of the present invention can save the need for detection. Time, and its recognition is high. In addition, the filter material leakage detecting method proposed by the present invention can also save time required for detecting and is not easy to occur. The problem of low recognition due to a decrease in the physical strength (spirit) of the tester.

雖然本發明已以實施方式揭露如上,然其並非用以限定本發明,任何所屬技術領域中具有通常知識者,在不脫離本發明之精神和範圍內,當可作些許之更動與潤飾,故本發明之保護範圍當視後附之申請專利範圍所界定者為準。Although the present invention has been disclosed in the above embodiments, it is not intended to limit the invention, and any one of ordinary skill in the art can make some modifications and refinements without departing from the spirit and scope of the invention. The scope of the invention is defined by the scope of the appended claims.

1000‧‧‧濾材洩漏檢測裝置1000‧‧‧Filter material leak detection device

100‧‧‧氣膠供應單元100‧‧‧Gum supply unit

100a‧‧‧氣膠輸出端100a‧‧‧ gas gel output

110‧‧‧風管110‧‧‧ duct

110a‧‧‧上半段部分110a‧‧‧ the first half of the section

110b‧‧‧下半段部分110b‧‧‧ lower half

120‧‧‧氣流產生單元120120‧‧‧airflow generating unit 120

130、132、134、136‧‧‧過濾單元130, 132, 134, 136‧ ‧ filter unit

140、142‧‧‧整流單元140, 142‧‧‧Rectifier unit

150‧‧‧微粒產生單元150‧‧‧Particle generating unit

200‧‧‧濾材固定單元200‧‧‧Filter material fixing unit

210‧‧‧濾材210‧‧‧ Filter media

210a‧‧‧濾材之邊框210a‧‧‧The border of the filter material

300‧‧‧測漏單元300‧‧‧ leak detection unit

310‧‧‧掃描模組310‧‧‧ scan module

312‧‧‧線性位移機構312‧‧‧Linear displacement mechanism

314‧‧‧光源314‧‧‧Light source

320‧‧‧影像擷取單元320‧‧‧Image capture unit

330‧‧‧判斷單元330‧‧‧judging unit

400‧‧‧位移機構400‧‧‧displacement mechanism

F‧‧‧氣流F‧‧‧Airflow

L‧‧‧掃描光線L‧‧‧ scanning light

P‧‧‧平面P‧‧‧ plane

H‧‧‧破孔H‧‧‧Breaking

X‧‧‧氣膠X‧‧‧ gas glue

K‧‧‧位置K‧‧‧ position

Sy、Sz1、Sz2、Sx‧‧‧軌道Sy, Sz1, Sz2, Sx‧‧ track

S100、S110、S120、S130、S200、S210‧‧‧步驟S100, S110, S120, S130, S200, S210‧‧‧ steps

x、y、z‧‧‧方向x, y, z‧‧ direction

圖1為本發明一實施例之濾材洩漏檢測裝置示意圖。1 is a schematic view of a filter material leakage detecting device according to an embodiment of the present invention.

圖2為本發明一實施例之部分濾材洩漏檢測裝置示意圖。2 is a schematic view of a portion of a filter material leakage detecting device according to an embodiment of the present invention.

圖3、圖4為本發明一實施例之濾材洩漏檢測方法流程示意圖。3 and FIG. 4 are schematic diagrams showing the flow of a filter material leakage detecting method according to an embodiment of the present invention.

210‧‧‧濾材210‧‧‧ Filter media

310‧‧‧掃描模組310‧‧‧ scan module

320‧‧‧影像擷取單元320‧‧‧Image capture unit

330‧‧‧判斷單元330‧‧‧judging unit

L‧‧‧掃描光線L‧‧‧ scanning light

P‧‧‧平面P‧‧‧ plane

H‧‧‧破孔H‧‧‧Breaking

X‧‧‧氣膠X‧‧‧ gas glue

K‧‧‧位置K‧‧‧ position

x、y、z‧‧‧方向x, y, z‧‧ direction

Claims (9)

一種濾材洩漏檢測裝置,包括:一氣膠供應單元,具有一氣膠輸出端,該氣膠供應單元適於供應一氣膠至該氣膠輸出端;一濾材固定單元,將一濾材固定於該氣膠輸出端;一測漏單元,包括:一掃描模組,提供一掃描光線並使該掃描光線在一與該濾材平行之平面上移動,當該濾材具有一破孔時,該氣膠從該破孔洩漏而使該掃描光線在對應於該破孔的位置被散射;一影像擷取單元,擷取該濾材之一影像;以及一判斷單元,與該影像擷取單元連接,其中該判斷單元接收該影像並從該影像中判斷出該掃描光線被散射的位置。A filter material leakage detecting device comprises: a gas glue supply unit having a gas glue output end, wherein the gas glue supply unit is adapted to supply a gas glue to the gas glue output end; a filter material fixing unit fixes a filter material to the gas glue output unit; a leak detecting unit, comprising: a scanning module, providing a scanning light and moving the scanning light in a plane parallel to the filter material; when the filter material has a broken hole, the gas glue is from the broken hole Leaking to cause the scanning light to be scattered at a position corresponding to the broken hole; an image capturing unit capturing an image of the filter material; and a determining unit connected to the image capturing unit, wherein the determining unit receives the image The image and the position at which the scanning ray is scattered are judged from the image. 如申請專利範圍第1項所述之濾材洩漏檢測裝置,其中該掃描模組沿著一第一方向移動,而該第一方向實質上垂直於該掃描光線的傳遞方向。The filter material leakage detecting device according to claim 1, wherein the scanning module moves along a first direction, and the first direction is substantially perpendicular to a transmission direction of the scanning light. 如申請專利範圍第1項所述之濾材洩漏檢測裝置,其中該掃描模組包括:一線性位移機構,沿著一第一方向移動,而該第一方向實質上垂直於該掃描光線的傳遞方向;以及一光源,配置於該線性位移機構上以提供該掃描光線。The filter material leakage detecting device of claim 1, wherein the scanning module comprises: a linear displacement mechanism, moving along a first direction, wherein the first direction is substantially perpendicular to a transmission direction of the scanning light And a light source disposed on the linear displacement mechanism to provide the scanning light. 如申請專利範圍第1項所述之濾材洩漏檢測裝置,其中該掃描光線為一雷射光。The filter material leakage detecting device according to claim 1, wherein the scanning light is a laser light. 如申請專利範圍第1項所述之濾材洩漏檢測裝置,其中該濾材位於該氣膠供應單元與該影像擷取單元之間。The filter material leakage detecting device according to claim 1, wherein the filter material is located between the gas glue supply unit and the image capturing unit. 如申請專利範圍第1項所述之濾材洩漏檢測裝置,更包括一位移機構,其中該影像擷取單元配置於該位移機構上以調整該影像擷取單元與該濾材之間的相對位置。The filter material leakage detecting device of claim 1, further comprising a displacement mechanism, wherein the image capturing unit is disposed on the displacement mechanism to adjust a relative position between the image capturing unit and the filter medium. 如申請專利範圍第1項所述之濾材洩漏檢測裝置,其中該平面位於該影像擷取單元與該濾材之間。The filter material leakage detecting device according to claim 1, wherein the plane is located between the image capturing unit and the filter medium. 一種濾材洩漏檢測方法,包括:提供一氣膠至一濾材的一側;利用一測漏單元於該濾材的另一側檢測該濾材是否洩漏,而該測漏單元包括:一掃描模組,提供一掃描光線並使該掃描光線在一與該濾材平行之平面上移動,當該濾材具有一破孔時,該氣膠從該破孔洩漏而使該掃描光線在對應於該破孔的位置被散射;一影像擷取單元,擷取該濾材之一影像;以及一判斷單元,與該影像擷取單元連接,其中該判斷單元接收該影像並從該影像中判斷出該掃描光線被散射的位置。A filter material leakage detecting method includes: providing a gas glue to one side of a filter material; detecting, by a leak detecting unit, the filter material leaking on the other side of the filter material, and the leak detecting unit comprises: a scanning module, providing a Scanning the light and moving the scanning light in a plane parallel to the filter material. When the filter material has a broken hole, the gas gel leaks from the broken hole to cause the scanning light to be scattered at a position corresponding to the broken hole. An image capturing unit captures an image of the filter material; and a determining unit coupled to the image capturing unit, wherein the determining unit receives the image and determines a position at which the scanning light is scattered from the image. 一種濾材洩漏檢測方法,包括:提供一氣膠至一濾材的一側;於該濾材的另一側提供一掃描光線並使該掃描光線在一與該濾材平行之平面上移動,當該濾材具有一破孔時,該氣膠從該破孔洩漏而使該掃描光線在對應於該破孔的位置被散射;於該濾材的另一側擷取該濾材之一影像;以及從該影像中判斷出該掃描光線被散射的位置。A filter material leakage detecting method comprises: providing a gas gel to one side of a filter material; providing a scanning light on the other side of the filter material and moving the scanning light on a plane parallel to the filter material, when the filter material has a When the hole is broken, the gas gel leaks from the hole to cause the scanning light to be scattered at a position corresponding to the hole; the other side of the filter material captures an image of the filter material; and the image is judged from the image The position at which the scanning ray is scattered.
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