KR101514300B1 - Measuring method and filter performance measuring device of filter use of clean room - Google Patents

Abstract

In the present invention, provided are a device for measuring the capacity of a filter using in a cleaning room, comprising a frame (100), a chamber (200) and a particle scanner (300), which accordingly resolves problems that an existing device must have at least 300 Pa of air resistance in an environment condition whose temperature is 25 degree Celsius and humidity is 40 %; need a filter to filter 99.996% of particles whose size is 0.1 to 0.5 um; hardly measures the capacity of the filter; measures filter many times when the area of the filter is larger than that of the device; hardly finds faults likes torn filters or irregular thickness of filters caused by a short shot wherein the device for measuring the capacity of filtering in the present invention has a customized chamber, which is simple; accordingly circulates current smoothly; enables particles to be forcibly adsorbed to the filter by forming lower current in the chamber through a blower; measures particles discharged through the filter, velocity of wind and pressure of wind; measures the value of voltage of the filter by controlling ranges to be measured corresponding to filters whose size is various; directly observes the capacity of the filter with use of measured data-turned-2D or 3D MAP; and finds fault in filters by a tearing or a short shot, and a method for measuring filters.

Description

TECHNICAL FIELD [0001] The present invention relates to a filtration performance measuring apparatus and method,

The present invention simplifies a specially designed chamber, forms an airflow through a blower in the state of downflowing the airflow in the chamber, measures particles, wind velocity and wind pressure, and measures the measured data in a 2D or 3D map The filtering performance of the filter is intuitively observed. The MAP is used to find the wrong part of the filter. The filtering performance of the clean room filter with the screen plate that can measure various filters through one device Measuring apparatus and method.

In recent years, as people's living standards have improved and their interest in environmental pollution has increased, the demand for comfortable environments has also increased. In particular, indoor air quality has a direct impact on health, There is a growing interest in indoor air quality improvement due to reporting and analysis technology.

Therefore, the HEPA filter and the ULPA filter which can effectively remove the particles of 0.01 ~ 10μm in diameter, which is the size of the particles that are in trouble in the present environment, sanitary or technological purpose among the particles floating in the indoor atmosphere Filters have been developed to prevent foreign matter from being generated in various industries such as semiconductor, electric, electronic, mechanical, chemical, nuclear power, etc. In order to keep the indoor air comfortable by filtering fine particles in air even in daily life Air purifiers, air conditioners, vacuum cleaners, automobiles, air conditioners in high-rise buildings, and the like.

In this case, the performance of the filter used should have an air resistance of at least 300 Pa in an environment of 25 ° C and a humidity of 40% or less, and particle filtering of 0.1um to 0.5um should be 99.996% If the area of the filter is wider than that of the measuring device, it must be measured several times for each part. It is not easy to find defects such as uneven thickness due to ripping or unforming in the middle of the filter. there was.

In order to solve the above problems, the present invention simplifies the circulation of the airflow by simplifying a specially designed chamber, measures a fine particle, wind velocity and wind pressure by forming a downward current in a chamber through a blower, And it is possible to intuitively observe the performance of the measured filter by making the measured data into a 2D or 3D MAP, and to find out defective parts such as unformed and ripped through the MAP The present invention relates to an apparatus and method for measuring the filtering performance of a clean room-use filter having a screen plate.

According to another aspect of the present invention, there is provided an apparatus for measuring the filtering performance of a clean room-

A frame 100 that supports and protects the internal devices of the overall filter performance measuring device in the form of a rectangular box-

A downward air flow which is located inside the upper frame 110 and can control the wind velocity and the wind pressure through an internal blower, is moved in the upward and downward directions, is in contact with the particle scanner 300, A chamber 200,

Particles that are located inside the lower plate 120 and fall down through the filter 121a-1 inserted in the filter fixing plate without passing through the filter are counted, the air velocity and wind pressure of air passing through the filter are measured, And a particle scanner 300, which is capable of intuitively observing the performance of the measured filter.

Further, the filtering performance measuring method of the clean room using filter according to the present invention is characterized in that,

A step S100 of inserting and fixing a filter to be measured and a particle blocking plate in a rectangular groove formed in the upper surface of the lower plate and then tightly coupling the coupling ring and the coupling portion by pulling the reaction frame in the lower direction to fasten the chamber and the lower frame, ,

Controlling the blowing fan, the exhaust fan, and the vacuum pump through the control unit to form a downward flow in the chamber and controlling the wind speed and the wind pressure to be constant (S200)

(S300) of injecting particle particles used for measurement into the upper end of the blowing fan and forcibly collecting the particles in the filter through the downward flow of the blowing fan,

A step (S400) for transferring the particle counter in the zigzag direction alternately in the x-axis direction and the y-axis direction to count the particles that pass through the filter without being trapped in the filter,

A step S500 of intuitively inspecting the number and the size of the particles passing through according to the area by numerically displaying the number and size of the particles passing through the MAP display unit in a 2D and 3D map,

The number and size of particles passing through the measured filter are determined and a step S600 of selecting a filter having a performance lower than the use standard or a filter having a defect such as tearing or unforming is performed.

As described above, in the present invention, a chamber designed specifically is simplified to circulate airflow smoothly, a downward flow is formed in the chamber through a blower to forcibly adsorb particles to the filter, It is able to measure the particle, wind speed and wind pressure, adjust the measurement range according to the size of various filters, and measure the whole position of the filter. By making the measured data into 2D or 3D MAP, And it has a good effect of finding defective parts such as unformed and ripped through MAP.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view showing an overall configuration of an apparatus for measuring the filtering performance of a clean room-use filter according to the present invention;
Fig. 2 is an exploded perspective view showing components of the frame according to the present invention in an exploded manner, Fig.
3 is a perspective view illustrating the components of the chamber according to the present invention,
4 is a perspective view illustrating components of a particle scanner according to the present invention,
FIG. 5 is a view showing an embodiment in which the y-axis transfer table of the particle scanner according to the present invention is moved to the rear side.
6 is a view showing an embodiment in which the x-axis transfer table of the patacle scanner according to the present invention is moved to the left side.
FIG. 7 is a view showing an embodiment in which coordinates of a moving copper line of a particle counter moved by an x-axis transfer table and a y-axis transfer table according to the present invention and sensing a particle,
8 is a diagram illustrating a filter corresponding to a normal reference value measured in a 2D screen in the MAP display controller according to the present invention,
FIG. 9 is a diagram illustrating a filter having a defect in the upper left of the measurement, which is displayed on the 2D screen in the MAP display controller according to the present invention,
10 is a diagram illustrating distribution of particles displayed on a 3D screen, air pressure, air velocity, and the like in the MAP display control unit according to the present invention,
11 is a flowchart showing a method of measuring filtering performance of a clean room-use filter according to the present invention in order.

Prior to describing the present invention, the HEPA filter is an abbreviation of HEPA (High Efficiency Particulate Air) filter, and has a collection rate of 99.97% or more with respect to 0.3 μm microparticles, and a filter having an initial pressure loss of generally 300 Pa (30 mmH 2 O) to be.

ULPA filter is an abbreviation of ULPA (Ultra Low Penetration Air) filter and is a filter having a collection rate of 99.999% or more for particles of 0.1 μm or more.

The x-axis feed in the present invention means the lateral feed in relation to the front of the filter performance measuring device.

The y-axis feed refers to the forward and backward feed based on the front face of the filter performance measuring device.

In the x · y coordinate (0, 0) of the present invention, the former zero means the x axis coordinate and the latter 0 means the y axis coordinate.

Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a perspective view showing an overall configuration of an apparatus for measuring the filtering performance of a clean room-use filter according to the present invention, which is composed of a frame 100, a chamber 200, and a particle scanner 300.

First, the frame 100 according to the present invention will be described.

The frame 100 is shaped like a rectangular box, and supports and protects the internal equipment of the overall filter performance measuring device. The frame 100 has a rectangular box-like shape standing upright in the vertical direction and supporting the chamber 200 And a lower frame 120 for fixing the particle scanner 300 is formed by dividing the upper frame 110 into two sections in the form of a rectangular box that is wider than the width of the upper frame at the lower end of the upper frame.

The upper frame 110 has a guide rail 111 vertically installed on one side of the rear left and right sides to form a passage through which the guide roller 212 formed on the rear surface of the duct body 210 can move up and down do.

The lower frame 120 includes a filter fixing plate 121 having a rectangular groove 121a at the center so as to fix the filter 121a-1 on the upper surface thereof, A scanner fixing plate 122 for fixing the particle scanner is formed and the front, rear, left and right outer surfaces between the filter fixing plate 121 and the scanner fixing plate 122 are sealed, and a transparent window 123).

At this time, a filter 121a-1 to be measured is placed on the left side of the rectangular groove 121a of the filter fixing plate 121, and the filter 121a-1 is fixed by inserting and fixing the filter 121a-1 to the particle- The plate 121a-2 is inserted and fixed.

Here, the particle blocking plate 121a-2 is formed by selectively replacing the corresponding size according to the size of the inserted filter to fill the rectangular groove 121a without any spaces. In the filtering performance measurement, the filter 121a -1) to prevent the particles from passing in the lower direction.

The circumferential circumference of the rectangular groove 121a is formed so as to prevent the outside air from flowing into the joining portion when the coupling ring 211 of the chamber 200 is coupled with the coupling portion 121b of the filter fixing plate 121, A rectangular outside-air blocking plate 121c is formed.

In this case, the rectangular groove 121a is a groove having a size of 610 x 1250 when the unit of length is mm. When the size of the inserted filter is 610 x 910, a particle blocking plate having a size of 610 x 340 is inserted. When the size is 610 x 762, 610 x 488 particle blocking plate is inserted. When the filter size is 610 x 610, 610 x 640 particle blocking plate is inserted. When the filter size is 305 x 305, 610 A particle shielding plate with a size of × 340 is inserted to seal the front surface of the filter fixing plate excluding the filter to be measured.

The filter 121a-1, which is used herein, is a rectangular box-like structure selectively used among a HEPA filter and an Ul-wave filter, and collects particles by interference shape, diffusion, sedimentation phenomenon, A filter having a collection rate of 99.97% or more with respect to fine particles having a particle size of 10 mu m or more and a filter having a collection rate of 99.999% or more with respect to fine particles having a particle size of 0.1 mu m or more, × 762, 610 × 488, 610 × 610, and 305 × 305.

Next, the chamber 200 according to the present invention will be described.

The chamber 200 is located inside the upper end of the frame 100 and forms a downward flow through the blower to control the wind speed and the wind pressure. The chamber 200 moves upward and downward, abuts the particle scanner 300, And includes a duct body 210, a blowing fan 220, and a vertical movement adjusting unit 230.

The duct body 210 is formed in the shape of a hollow circle at the upper end thereof and a vent hole in which a lower end thereof is connected in sequence to a quadrangular pyramidal shape and a rectangular shape to block particles and impurities floating in the atmosphere introduced from the side, A binding portion 121b is provided on one side of the front, rear, left and right sides of the filter fixing plate 121 so as to be hermetically engaged with and separated from the filter fixing plate 121, So that it is possible to block the entry and exit of airborne particles and impurities in the air except for the outside air supplied from the blowing fan 220 to perform accurate filter measurement.

Four guide rollers 212 are formed on the upper left and right upper and lower ends of the duct body 210 and are inserted into the guide rails 111 formed on the rear surface of the upper frame so that the duct body moves in the vertical direction Ensure smooth movement without shaking and friction.

The air blowing fan 220 is formed in the upper end of the hollow duct body 210 and connected to the control unit to control the rotation speed to supply the outside air to the inside of the duct body. So that forced convection is generated and the particles inserted into the filter 121a-1 are collected by the filter 121a-1.

The upper and lower movement regulating portions 230 are formed between the upper frame and the chambers to connect the chambers and smoothly move the chambers in the vertical direction. The chambers 231, the reaction frame 232, (233).

The spring 231 is coupled to an upper end of the backrest frame 232 at the left and right sides of the backrest frame 232 and has a lower end coupled to the filter fixing plate 121 to raise the chamber by an elastic force. The tensioned state is maintained and the combined rebound frame 232 is pushed upward and the duct body is lifted to facilitate the replacement of the filter and the cleaning of the interior.

The rebound frame 232 is coupled to the link portion 233 on one side of the left and right sides of the duct body and is coupled to the rear side of the guide rail 111 formed on the rear side of the upper frame 110 in the longitudinal direction, A spring 231 is coupled to the right side to raise and lower the duct body 210 vertically through the external force of the inspector.

That is, when the filtering measurement of the filter is not performed, the front face of the recoil frame 242 is kept elevated relative to the rear face and the duct body 210 is formed at the upper end. When the filtering measurement is performed, The front face is lowered to the lower end, the front face is lowered relative to the rear face, the duct body is held at the lower end, and then the coupling ring 211 and the coupling portion 121b are fastened and fixed.

The link part 233 is coupled to the reaction frame 242 at one side of the link part 233 and is coupled with the side surface of the chamber at the other side of the link part 233 and is rotatable due to the external force of the inspector, And helps the chamber to move smoothly in the vertical direction.

Next, the particle scanner 300 according to the present invention will be described.

The particle scanner 300 is located inside the lower end of the frame 100 and counts the particles that pass through the filter 121a-1 without being filtered by the filter 121a-1, measures air velocity and wind pressure of air passing through the filter, The y-axis movement table 320, the particle counter 330, the MAP display control unit 340, the y-axis movement table 320, And an exhaust unit 350.

The x-axis transfer table 310 is formed at the center of the scanner fixing plate 122 to support the particle scanner as a whole, detects the x-axis movement signal supplied from the MAP display controller 340, 3, a first rectangular groove 311 is formed in the center so that the particles can pass through and be discharged. The first rectangular groove 311 is formed at one side of the front surface of the first rectangular groove, An x-axis transporting rail 313 is formed at one side of the rear side, an x-axis transporting rail 313 is formed at the rear end of the rear x-axis transporting rail and the left end thereof is wound in a semicircular shape, 1 motor 313-a and a first reduction gear 313-b are formed to detect the movement signal supplied from the MAP display control unit 340 and to move the particle counter including the y-axis transport table in the left and right directions.

The first motor 313a and the first reducer 313b which receive the operation signal of the MAP display control unit 340 are operated to move the x-axis transport chain 313 by the coordinate 1 in the x-axis direction and stop, And transmits an operation signal to the transfer table.

Here, the coordinates of the x axis are divided into 0 to 14, and the time when the particle counter 340 reaches the end in the left direction becomes 0 point, and the time when the particle counter 340 reaches the end in the right direction becomes 14 point.

The y-axis transporting table 320 is formed at the upper end of the x-axis transporting rail 312. The y-axis transporting table 320 senses a movement signal supplied from the MAP display controller 340 and rotates the particle counter 340 As shown in FIG. 4, the second rectangular groove 321 is formed in such a manner that the particles can pass through the center and can be discharged. The y-axis transporting rail 321 is provided on one side of the left side of the second rectangular groove, A y-axis transport chain 323 is formed in front of the right side y-side transporting rail and a front end thereof is wound in a semicircular shape, and the second motor 323a and the second reducer 322 are provided on the side of the y- A particle counter 323b is formed to detect the movement signal supplied from the MAP display controller 340 and to move the particle counter in the forward and backward directions.

The second motor 323a and the second reducer 323b which receive the operation signal of the MAP display control unit 340 are operated and when the coordinate starting point of the y-axis transporting chain 323 is 0, 10, and when the start point of the coordinate is 10, it moves to the opposite end point of 0, stops, and transmits an operation signal to the x-axis movement table.

Here, the y-axis coordinates are divided into 0 to 10, and the time when the particle counter 340 reaches the end in the front direction becomes 0 point, and the time when the particle counter 340 reaches the end in the rear direction becomes 10 point.

The x-axis transfer table 310 and the y-axis transfer table 320 according to the present invention move the particle counter 330 in the x-axis direction and the y-axis direction to measure the entire position of the fixed filter 121a-1 .

The particle counter 330 is formed at the upper end of the y-axis transfer table 320 and is disposed on the x and y axes and is not adsorbed to the filter 121a-1. The particle counter 330 distributes the particles according to the measured position of the particles, And transmits the wind speed and wind pressure of the airflow passing through the filter to the MAP display control unit 340. The vacuum pump 331 includes a laser oscillation unit 332 and a photodetector 333. [

The vacuum pump 331 functions to absorb particles that have passed through the filter 121a-1 without being adsorbed by the filter 121a-1 in a vertically erected hollow cylinder shape. This absorbs particles only in the vertical direction of the upper end, To be irradiated to the laser oscillated from the oscillating portion.

Here, the reason why the particles are absorbed only in the vertical direction at the upper part is that, when all of the particles floating in all directions are absorbed, the particle distribution can not be grasped by the correct position, so that the position of the filter can not be clearly identified.

The laser oscillating unit 332 is formed to be opposed to the particle detector 333 at the lower end of the vacuum pump 331 in a rectangular shape having an empty interior and serves to oscillate the laser in the direction of the particle detector 333, A laser element is formed inside the opposite side of the particle detector which is coupled to and coupled with the outer periphery of the particle detector so that the laser is oscillated in the photodetector and irradiated to the falling particles absorbed by the vacuum pump therebetween.

The photodetector 333 is formed to be opposed to the laser oscillating unit 332 at the lower end of the vacuum pump 331 in a rectangular shape having an empty interior and measuring and dataizing the number and size of particles scattered by the laser, More specifically, the portion of the laser that is not irradiated to the photodetector is detected by the reflection of the particle particles passing through between the irradiation of the laser and the irradiation of the photodetector, so that the size and the number of the particles And distributes the detected particle distribution according to the measured position to the MAP display controller 340.

The reset point and the starting point of the particle counter 330 according to the present invention always start to measure the filter with x · y coordinates (0, 0), and when the particle counter probe detects the y axis starting point 0 to the end point 10 The x-axis is shifted to the right by one point each time the start point and the end point are reached.

That is, when the particle counter moves from the 0 point to 10 point, which is the starting point of the y axis, the particle counter moves to the right in the x axis direction as soon as it reaches the point. And reaches the end point of the x-axis. When the point reaches the end point of the x-axis, the measurement of the filter is completed. The performance of filters of different sizes can be measured through a single instrument through the x, y axis movement, where the counter probe returns to the reset point (0,0).

The MAP display controller 340 digitizes the data received through the wireless network in the particle counter 330 or converts the data into a 2D or 3D map so that the inspector can intuitively observe the performance of the measured filter on the display screen.

It is possible to check the quality of the measured filter through the distribution data of the displayed particles and check the part where the particles are densely packed to find defective parts such as improper processing or tearing.

Here, the MAP display control unit 340 sets the temperature inside the chamber 200 to 25 °, sets the humidity to maintain the humidity of 40%, and controls the moving speeds of the x-axis transport table and the y-axis transport table.

In order to measure the performance of the filter accurately, the internal temperature of the filtering performance measuring apparatus is set to 25 ° and the humidity is set to 40% or less.

At this time, the performance of the suitable filter 121a-1 is determined by injecting test particles having a size of 0.1 to 0.5 um into the chamber where the internal temperature of the filtering performance measuring apparatus is 25 and the humidity is maintained within 40% , 99.996% of the particles should be filtered, and air resistance of at least 300Pa should be applied when the wind and wind pressure are applied to the fixed filter inside.

That is, if the particle filtering is not more than 99.996 when the MAP display control unit 340 is observed, or if particles in a specific region pass through the filter without being collected, the defect can be removed.

The exhaust unit 350 is formed at the lower end of the x-axis transport frame and controls the speed of the exhaust fan through the wireless network of the MAP display controller 340 to discharge the internal air and particles that have passed through the filter to the outside The lower airflow passing through the filter is guided so that a constant pressure can be applied, the speed of the exhaust fan is controlled, and the air is discharged to the outside to smoothly flow the air in the chamber.

Hereinafter, a specific operation of the method for measuring the performance of the clean room-use filter according to the present invention will be described.

First, a filter and a particle blocking plate to be measured are inserted and fixed in a rectangular groove formed on the upper surface of the lower plate, and then the reaction frame is pulled in the lower direction to fasten the coupling ring and the coupling part to seal the chamber and the lower frame. )

Subsequently, a blowing fan, an exhaust fan, and a vacuum pump are controlled through the control unit to form a downward current in the chamber, and the wind velocity and the wind pressure are controlled and maintained constant (S200).

Particles to be used for measurement are then introduced into the upper part of the blowing fan, and the particles are forcibly collected in the filter through the downward flow of the blowing fan (S300)

At this time, the particles are trapped and collected by the filter due to the interference shape, diffusion, sedimentation phenomenon, inertial collision, and the like.

Subsequently, the particle counter is moved in the zigzag direction alternately in the x-axis direction and the y-axis direction to count particles passing through the filter without being captured (S400)

Next, the number and size of the particles passing through the area are numerically displayed on the MAP display unit and displayed in 2D and 3D maps to be intuitively inspected by the inspector (S500).

Finally, the number and size of the particles passing through the measured filter are determined, and a filter having a performance that does not meet the usage criterion or a filter having a defect such as tearing or non-forming is selected (S600)

100: frame 110: upper frame
120: lower frame 200: chamber
210: duct body 220: blowing fan
230: vertical movement regulating unit 300: particle scanner
310: x-axis feed table 320: y-axis feed table
330: particle counter 340: MAP display control unit
350:

Claims (7)

A filter performance measuring device (1) capable of measuring the performance of a filter
A frame 100 composed of a top frame 110 and a bottom frame 120 to support and protect the internal devices of the overall filter performance measuring device in the form of a rectangular box-
A downward air flow which is located inside the upper end of the frame 100 and is capable of controlling the wind velocity and the wind pressure through the blower and is moved in the upward and downward directions and is in contact with the particle scanner 300, A chamber 200 made up of a fan 210, a blowing fan 220, and a vertical movement adjusting unit 230,
The particles located inside the lower end of the frame 100, which are not filtered by the filter 121a-1 and are descending, are counted. The air velocity and wind pressure of the air passing through the filter are measured. An apparatus for measuring the filtering performance of a clean room-use filter comprising a particle scanner (300) capable of intuitively observing the performance of a filter,
The up-and-down movement regulating unit 230
A spring 231 coupled to an upper end of the back side of the recoil frame 232 and coupled to the lower end of the filter fixing plate 121 to raise the chamber by an elastic force,
A guide rail 111 formed on the rear surface of the upper frame 110 in the longitudinal direction and a rear surface are coupled to each other and a spring 231 is attached to the rear left and right sides of the duct body, A rebound frame 232 for vertically moving up and down the duct body 210 through an external force of the inspector,
The front side is coupled to the recoil frame 242, the rear side is formed by engaging with the side surface of the chamber, and the smooth vertical movement of the chamber is performed even if the direction of the force of rotation and action is different due to the external force of the examiner or the elastic force of the spring And a link unit (233) for facilitating the filtration of the clean room.
delete delete delete The particle scanner (300) of claim 1, wherein the particle scanner
Axis movement table and the particle counter 330 are moved in the x-axis direction by sensing the x-axis movement signal received from the MAP display control unit 340 and supporting the particle scanner as a whole in the center of the scanner fixing plate 122, Axis x-axis transfer table 310,
a y-axis transporting table 320 formed at the upper end of the x-axis transporting rail 312 for sensing the movement signal supplied from the MAP display controller 340 and moving the particle counter 340 attached to the upper end in the y- and,
axis transporting table 320 to detect the distribution of particles according to the measured position of the particles that are passed through the filter 121a-1 without being adsorbed on the filter 121a-1 and the wind speed of the airflow passing through the filter A particle counter 330 for converting the wind pressure into data and transmitting it to the MAP display control unit 340,
A MAP display control unit 340 that allows the inspector to intuitively observe the performance of the measured filter by digitizing the data received through the wireless network in the particle counter 330 or by converting it into 2D or 3D MAP,
and an exhaust unit 350 formed at the lower end of the x-axis transport frame and controlling the speed of the exhaust fan through the wireless network of the MAP display control unit 340 to discharge the air and the particles passing through the filter to the outside. A filtering performance measuring device for a clean room use filter.
6. The method of claim 5, wherein the particle counter (330)
A vacuum pump 331 for absorbing particles passed through the filter 121a-1 without being adsorbed in a vertically erected hollow cylindrical shape,
A laser oscillating section 332 formed to face the particle detector 333 at the lower end of the vacuum pump 331 in a rectangular shape and oscillating the laser in the direction of the particle detector 333,
A photodetector 333 formed to face the laser oscillating portion 332 at the lower end of the vacuum pump 331 in a rectangular shape and measuring and dataizing the number and size of the particles scattered by the laser and transmitting the data to the MAP display controller 340, Wherein the filtering performance of the clean-room-use filter is measured by the filter.
A step S100 of inserting and fixing a filter to be measured and a particle blocking plate in a rectangular groove formed in the upper surface of the lower plate and then tightening the coupling ring and the coupling portion by pulling the reaction frame in the lower direction to tightly bond the chamber and the lower frame ,
Controlling the blowing fan, the exhaust fan, and the vacuum pump through the MAP display control unit to form a downward flow in the chamber and controlling the wind speed and the wind pressure to be constant (S200)
(S300) of injecting particle particles used for measurement into the upper end of the blowing fan and forcibly collecting the particles in the filter through the downward flow of the blowing fan,
A step (S400) for transferring the particle counter in the zigzag direction alternately in the x-axis direction and the y-axis direction to count the particles that pass through the filter without being trapped in the filter,
A step S500 of intuitively inspecting the number and the size of the particles passing through according to the area by numerically displaying the number and size of the particles passing through the MAP display unit in a 2D and 3D map,
Determining the number and size of particles passing through the measured filter, and selecting a filter having a performance that does not meet the use criterion or a filter having a defect such as tearing or unforming (S600) A method for measuring the filtering performance of a filter.

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