JP3900906B2 - Gas cleaning system and cleaning method - Google Patents

Description

[0001]
[Industrial application fields]
The present invention relates to a gas cleaning system for a containing space in which a gas in the containing space is collected, a specific substance is detected, and the operation of a cleaning device is controlled by a control unit, and a cleaning method therefor.
[0002]
[Prior art]
Conventionally, a gas cleaning system and a cleaning method for such a containing space (for example, a clean room) constantly circulate a gas (for example, air) in the containing space, and a specific substance (a specified fineness) in the gas by a cleaning device. For example, particles such as dust, boron compounds, acidic substances, alkaline substances, organic compounds and gaseous substances). That is, it is generally known that the inspection for knowing the change in the contamination state due to the specific substance in the containing space is performed by sampling (detecting) and confirming (measurement) gas sequentially.
That is, the concentration of particles can be continuously monitored, but other substances (boron compounds, acidic substances, alkaline substances, organic compounds, gaseous substances, etc.) are batch-managed.
As configurations relating to the present invention, configurations described in JP-A-5-218171 and JP-A-6-193911 are known.
[0003]
[Problems to be solved by the invention]
In other words, conventional gas cleaning systems and cleaning methods for contained spaces (for example, clean rooms, clean stockers, clean boxes and other spaces that require cleanliness) detect changes in the contamination state due to specific substances in the contained spaces. (Batch management) requires a date and time, and therefore, if the contamination in the containing space suddenly changes and progresses, the countermeasures against contamination will be delayed, making it difficult to maintain (especially promptly) the quality of the product. There was a problem.
According to the present invention, a dilute concentration of a specific substance in a gas (for example, air, nitrogen gas, argon gas) is constantly monitored (detected), the result is known in a short time, and quick treatment is possible.
[0004]
[Means for Solving the Problems]
The clean room gas cleaning system of the present invention is a clean room of an environment in which a specific substance in the air is removed by an air cleaning device, an air sampling unit for taking in air in the clean room, and air in the clean room taken in from the air sampling unit A dissolving part for dissolving and collecting for each specific sampling air volume, a concentrating part for concentrating and collecting the air in the clean room taken from the air sampling part for each specific sampling air volume, and in the clean room of the dissolving part and the concentrating part The sampling of air is separately sampled for the specific sampling air volume and the specific number of simultaneous samplings for each specific sampling count within a specific sampling time, and the sampling of the air in the clean room of the dissolving unit and the concentrating unit is performed separately. A progressive feed sampling unit that sequentially feeds and switches, and the dissolution unit and the concentration unit fed forward by the sequential feed collection unit A detection unit that separately detects and measures a specific substance in the air, a control unit that receives and outputs measurement data of the detection unit, and a distribution switching unit that receives an output from the control unit operates the air purifier Is controlled .
[0005]
DETAILED DESCRIPTION OF THE INVENTION
As will be described in detail below, according to the present invention described in claim 1,
(1) It is possible to monitor in real time the in-line increase / decrease and change of specific substances in the gas in the contained space, and keep it below a certain concentration.
(2) Therefore, even if a specific substance in the gas in the contained space suddenly increases due to any cause, the malfunction of the product is minimized by agile first aid by linking the alarm / display device. Can be suppressed.
[0006]
(3) The operation control for each air purifier by the distribution switching unit that receives the output from the control unit is capable of priority-oriented distribution switching operation as necessary, so that efficient energy-saving operation is possible. Can do. That is, operation control for each cleaning device arranged in the containing space includes air volume (output and damper opening / closing degree) control, operation / pause selection control, temperature / humidity control, operation area (model) selection control, etc. It shall be possible to select.
(4) According to the above item (3), since the control unit adds up the operation time (cumulative use time of the filter) of each cleaning device in the priority-oriented distribution switching operation, expensive filter replacement (life) time As a result, accurate individual correspondence can be realized. The same effect can be obtained by linking to the CIM (computer integrated production) function.
[0007]
【Example】
Hereinafter, as a reference example of the containing space of the present invention, for example, a clean room will be described with reference to the drawings.
[0008]
FIG. 1 is a simulation diagram showing an overall configuration for purifying air in a clean room. In FIG. 1, reference numeral 1 denotes external air (including a small amount of NOx, SOx, etc., generically referred to as gas, hereinafter the same), and this external air 1 is supplied from the first collection unit 23 to the air purifier (A) 2 (first 1 is collectively referred to as a cleaning device (hereinafter the same), and is collectively referred to as a first sampling step (hereinafter the same). The taken-in external air 1 passes through an air cleaning device (A) 2 (generically referred to as a first cleaning device; hereinafter the same), and is cleaned, adjusted for humidity and temperature (collectively referred to as a first cleaning step), and is clean room. 6 (generally referred to as containing space; hereinafter the same) is supplied from the second sampling unit 24 as external air 20 (collectively referred to as secondary gas; hereinafter the same), from the second sampling unit 24 (collectively referred to as the second sampling step; hereinafter the same). Subsequently, the external air 20 passes through each air purifier (c) 3, air purifier (g) 4, and air purifier (n) 5 arranged in the upper part of the clean room 6, and then a specific substance (specific Fine particles (for example, particles such as dust, boron compounds, acidic substances, alkaline substances, organic compounds and gaseous substances) are removed and cleaned, and then supplied into the clean room 6 and in the cleaned air Production processing and assembly inspection of semiconductors (parts and materials) are performed.
Of course, a new specific substance (mainly organic solvent or the like) may be generated in the process of production processing / assembly inspection and the like, and the air in the clean room 6 may be contaminated.
[0009]
In FIG. 1, reference numeral 7 denotes return air from the clean room 6, which passes through the air cleaning device (a) 8 or the air cleaning device (f) 8 f and becomes return air 7 ′ and merges with the external air 20. Then, a specific substance (specific fine particles. For example, boron, acidic substance, alkaline substance, organic substance is circulated through the air purifying apparatus (c) 3, the air purifying apparatus (g) 4, and the air purifying apparatus (n) 5 again. Components such as a solvent) are removed, and humidity and temperature are adjusted so that the air 21 in the clean room 6 (generically referred to as a tertiary gas; hereinafter the same) is kept clean.
In the figure, the air purifier (c) 3, the air purifier (g) 4, and the air purifier (n) 5 are assigned numbers to (c-1), (c-2), and (c-3). ,..., (G-1) (g-2) (g-3)..., (N-1) (n-2) (n-3).
The air cleaning device (c) 3, the air cleaning device (g) 4, the air cleaning device (n) 5, the air cleaning device (a) 8, and the air cleaning device (f) 8f are collectively referred to as a second cleaning device. (same as below).
Further, the air cleaning device (A) 2, the air cleaning device (c) 3, the air cleaning device (g) 4, the air cleaning device (n) 5, the air cleaning device (a) 8, and the air cleaning device (f) 8f. Are collectively referred to as a cleaning device.
In FIG. 1, reference numeral 9 denotes an air sampling unit (collectively referred to as a third sampling step, hereinafter the same), which collects the air 21 in the clean room 6 (hereinafter referred to as a third sampling step). The air 22 (collectively referred to as a quaternary gas; hereinafter the same) is introduced into the collection detection section 10 (collectively referred to as a detection section; hereinafter the same) through the section 25 (collectively referred to as a fourth collection step). The fine particle amount (concentration) of the specific substance in the air 22 is detected and measured (generically referred to as a detection step; hereinafter the same), and the next control unit 11 calculates and verifies this detection (measurement data) and switches the distribution. Output to the unit 12 (generally referred to as a control process, the same applies hereinafter), and each of the arranged air purifier (c) 3, air purifier (g) 4, air purifier (n) 5, and air purifier 8 (1) Distribution and switching (collectively referred to as distribution switching process; the same applies hereinafter),
▲ 2 ▼ ON / OFF,
(3) Control the operation of the fan drive output, temperature, humidity, etc.
[0010]
Furthermore, the control part 11 detects the humidity and temperature of the air 21 in the clean room 6 by the sampling detection part 10 (measurement data), and controls the operation of the air purifier (a) 8 and the air purifier (f) 8f. .
In addition, it is better to provide the air sampling units 9 at a plurality of locations in the same clean room 6.
[0011]
FIG. 2 is a schematic diagram showing the configuration of the air cleaning device 2, the air cleaning device 3, and the air cleaning device 4 for purifying the air in the clean room 6 of the reference example of the present invention. In FIG. 2- (A), the air purifier (A) 2 is also called an air washer, and the pure water 13 is brought into a sprayed state (for example, a shower or sprayed state) to contact the external air 1. Although specific fine particles and gaseous substances are dissolved and removed, the humidity is adjusted at the same time, and the temperature is adjusted (by means of a heat exchanger of an air conditioner, etc.) although not shown. The filter 14 filters and removes other substances (components) that cannot be dissolved and removed in the pure water 13. The fan 15 a takes in the external air 1 and passes through the air cleaning device (A) 2 to blow the external air 20 to the upper part in the clean room 6.
[0012]
The air cleaning device (a) 8 (FIG. 1) has substantially the same configuration and operation as the air cleaning device (A) 2 and is not shown or described.
The air purifier (f) 8f has, for example, a fan only (not shown), and is arranged in parallel with the air purifier (a) 8, and the wind of the return air 7 corresponding to the state of the cleaned air 21 A road is selected (operation control).
The pure water 13 used in the air cleaning device (a) 8 has a specific resistance of at least 15 MΩ · cm (at 25 ° C.) or more in order to prevent new contamination by components already dissolved in the pure water 13.
[0013]
In FIG. 2- (B), the air purifying device (c) 3 is also collectively referred to as a chemical filter, and is an embodiment having a three-layer structure of a chemical filter 16, an activated carbon filter 17, and a boron-less filter 18 made of PTFE. In this example, the external air 20 and the return air 7 'are passed through to remove specific substances (fine particles and the like).
[0014]
The chemical filter 16 uses at least one of an anion-removing chemical filter, a cation-removing chemical filter, and the like that remove specific components such as acids, alkalis, and organic compounds.
[0015]
The fan 15 b takes in the external air 20 and the return air 7 ′, passes the air cleaning device (c) 3, and blows air into the clean room 6.
[0016]
Further, in the air cleaning device (c) 3, an example in which the filter has a three-layer structure has been shown. However, depending on the situation, the chemical filter 16 and the PTFE boronless filter 18 or the activated carbon filter 17 and PTFE are used. A combination of two layers of the boronless filter 18 (none of which is shown) may be used.
[0017]
In FIG. 2- (C), the air purifier (g) 4 passes the collected air 20 through a PTFE boronless filter 18 to remove specific fine particles.
The fan 15 c takes in the external air 20 and the return air 7 ′, passes through the air cleaning device (g) 4, and blows air into the clean room 6.
[0018]
The boron-less filter 18 made of PTFE used for the air purifying device (c) 3 and the air purifying device (g) 4 is a glass fiber HEPA filter (High Efficiency Particulate) when the purpose is not to remove boron in the air. Air filter) or ULPA filter (Ultra Low Penetration Air filter) may be used instead.
[0019]
The air purifier (n) 5 (FIG. 1) is configured by arbitrarily selecting various filters according to the purpose, and is similar to the air purifier (c) 3, the air purifier (g) 4, and the like. The illustration and explanation are omitted.
[0020]
FIGS. 3 and 4 are schematic views showing the configuration of the collection detecting unit 10 that automatically collects and detects (measures) the air 21 in the clean room 6 according to an embodiment of the present invention. FIG. 4 is a process flowchart of the detection unit 10.
3 and FIG. 4 show a dissolving part that dissolves and collects the air 21 in the clean room 6 in pure water for each specific sampling air volume, and a concentrating part that separately collects and concentrates the air 21 for each specific sampling air volume. The forward sampling section that collects and sequentially switches the sampling and detection and measurement / measurement of the dissolution section and the concentration section, and calculates and verifies a specific substance in the air 22 by the next control section 11.
[0021]
First, FIG. 3 (A) shows an example of progressive sampling, in which the air 21 in the clean room 6 is progressively sampled every four specific simultaneous samplings (not shown, but each specific sampling air volume is 1 liter, for example) in the melting part, for example. It shows how
FIG. 3 (B) shows an example of the sampling method in which the air in the clean room 6 is, for example, in the melting part, the specific sampling frequency is 4 times within a specific sampling time of 1 hour, and the specific simultaneous sampling number is 4 (not shown, for example, specific The method is shown in which the sampling is carried out in order for each sampling air volume (one liter). That is, (1) sampling No. 3, 4, 5 and 6 are sampled at the same time in the figure (ie, the specific simultaneous sampling number. Horizontal black circle mark. Although not shown, the specific sampling air volume is, for example, 1 liter).
(2) Sampling No. 3 has already been collected 4 times within a specific sampling time of 1 hour (that is, the number of specific samplings, vertical black circles), and the next 5th time is passed to the test (measurement, black squares).
[0022]
That is, in this embodiment, the concentration change per hour of the specific collection time of the specific substance in the air 21 in the clean room 6 (accumulation of the number of specific collections of 4 times) is fed forward and monitored. Specific sampling time (1 hour), specific sampling frequency (4 times), specific sampling air volume (1 liter), specific simultaneous sampling number (4), depending on the situation (production activities, time schedule, etc.) It can be set to be variable.
[0023]
In other words, according to the situation, for example, (1) If you collect a small number of specific simultaneous sampling (increase the specific sampling air volume), you can grasp the rough concentration change of a specific substance for a certain time,
(2) Increasing the number of specific samples collected (by reducing the specific sampling air volume) and collecting them frequently can grasp the concentration change of the specific substance in a short time.
[0024]
Although the above describes an example of the method for collecting the dissolution part, the concentration part is also collected by the same method, but is collected separately from the dissolution part, and the setting different from the dissolution part depending on the situation (for example, The specific simultaneous sampling number may be 5, and the specific sampling air volume may be 2 liters each).
[0025]
Specifically, depending on the availability of production in the clean room 6, the amount of production, the optimum environment (concentration of specific substances, etc.) required by the production type, etc., daily, weekly, monthly, seasonal and events Develop an annual time schedule, and freely change and set the air sampling for the forward feeding of the dissolving part and the concentrating part.
Note that each of these condition settings for the dissolving part and the concentrating part can be varied and set separately.
In addition, the reason for collecting in order is that the contamination state in the clean room 6 can be continuously and automatically detected and measured in real time and in-line, and therefore an immediate countermeasure can be taken even if an abnormality occurs.
[0026]
About the example of a dissolution part, the contents of collection and detection of FIG. 4- (A) dissolution part are:
(1) For collection (dissolution), the air 21 in the clean room 6 is sucked into the pure water in the impinger (bubbling) by the suction a pump P by a specific sampling air volume (according to the flow meter F).
In this collection (dissolution), the number of specific collections within a predetermined specific collection time is accumulated and aspirated.
(2) For detection (measurement), for example, the dissolved water in the impinger is sucked by a robot or the like,
(3) Next, a specific substance in the air 22 is tested.
(4) On the other hand, cleaning (aging) is performed in parallel with (3) above (after (2) above), and the inside of the impinger is restored cleanly in preparation for the next collection (dissolution).
(5) Filling (pure water) is fed forward to prepare for the next sampling (dissolution) of the specific sampling air volume.
This completes one cycle of collection (dissolution), but the same contents are sequentially fed one after another and automatically repeated.
[0027]
About the Example of a concentration part, the content of collection | recovery and detection of FIG. 4- (B) concentration part is:
{Circle around (1)} In collection (concentration), the air 21 in the clean room 6 is adsorbed to the adsorbent in the sampler by the suction b pump P by a specific sampled air volume (according to the flow meter F).
As the adsorbent, metal oxides (zeolite, alumina, silica gel, etc.), activated carbon, activated clay, etc. are used.
In this collection (concentration), the number of specific collections within a predetermined specific collection time is accumulated and sucked.
(2) Desorption is carried out by heating with an inert gas in the collector,
(3) Detected (measured)
(4) Next, the specific substance in the air 22 is tested.
(5) On the other hand, washing (aging) is performed in parallel with (3) and (4) above (after (2) above), and heated by passing an inert gas through the collector, and the next collection (concentration) ) To prepare for the next sampling (concentration) of the specific sampling air volume.
This completes one cycle of collection (concentration), but the same contents are sequentially fed one after another and automatically repeated.
[0028]
The detection (measurement) items of the dissolution part and the concentration part are determined by a specific substance designated based on the optimum environmental conditions in the clean room 6.
Further, the number (or the number of instruments) of the tester (or test instrument) for detection (measurement) is determined depending on the measurement capability, the measurement capacity, and the like.
[0029]
FIG. 5 is a flowchart showing each process of the air sampling unit 9, the sampling detection unit 10, and the control unit 11 in the clean room 6 according to an embodiment of the present invention.
The simultaneous sampling by the sequential feeding sampling unit shows an example in which No. 1 and 2 are sampled simultaneously (that is, the specific simultaneous sampling number .-- line. The same applies to FIG. 5 below).
Further, the control unit 11 obtains and calculates the detection (measurement data) of the specific substance in the air 22 by the sampling / detection unit 10, tests the difference from the reference (standard) value, and each air purifier 3. 4, 5, 8.
[0030]
FIG. 6 is a block diagram showing a configuration of a cleaning method for cleaning the air 21 in the clean room 6 according to an embodiment of the present invention.
[0031]
In this example, the operation control of each of the air cleaning devices 3, 4, 5, 8 by the distribution switching unit 12 is (c-1) and (c-3) of the air cleaning device 3, for example. 4 (g-1), (n-1) and (n-2) of the air cleaning device 5 and each operation of the air cleaning device 8 are selected (--wire. Other air cleaning devices are not operated). It was.
[0032]
That is, the control unit 11 performs the ON / OFF control of the operation (1) of each selected air purifying device 3, 4, 5, 8.
(2) Air flow (control of fan 15 drive output, air path / blower outlet opening / closing degree, etc.),
(3) Control operation such as temperature and humidity.
[0033]
Further, in the embodiment of FIG. 6, the control unit 11, in addition to the operation control output to each air purifier 3, 4, 5, 8 of the distribution switching unit 12, for example,
(1) Detection (measurement) value of specific substances in the air
(2) Air pollution status
(3) Notification and display of repair inspection (operating time and replacement time of each filter) can also be performed.
[0034]
FIG. 7 is a process flowchart of a cleaning method for cleaning the air 21 in the clean room 6 according to an embodiment of the present invention.
The description will be omitted because it overlaps with the above.
[0035]
In the above description of one embodiment of the present invention, the specific sampling time and the specific sampling frequency of the dissolving part and the concentrating part of the air sampling part 9 are set to be the same. It is obvious that the specific sampling time and the specific sampling frequency of the concentration part and the concentration unit may be set differently (not shown).
[0036]
In other embodiments (not shown),
That is, in the above-described embodiment, the sampling of the air 21 in the clean room 6 includes the specific sampling time (1 hour), the specific sampling frequency (4 times), the specific sampling air volume (1 liter), and the specific simultaneous sampling number (4 This) was set to be flexible according to the situation, but in addition, specific sampling time (10:00 am), sampling time interval (every 15 minutes), specific sampling air volume (1 liter), specific simultaneous It is obvious that the same effect can be obtained even if the number of samples (4) is set to be variable according to circumstances.
[0037]
According to the reference example of the present invention, in the concentrating part and the dissolving part for collecting the air 21 in the clean room 6, the specific sampling time, the specific sampling frequency, the specific sampling air volume, and the specific simultaneous sampling number are changed in order and specified. Since the concentration of the substance is detected and measured by the detector,
1. Detection items such as whether there is production operation in the clean room 6 throughout the day, week, month, season, event, year, etc., some or fluctuations in production quantity, optimum environmental conditions according to the time schedule for each production type, etc. Thus, the sampling conditions of the air sampling unit 9 can be freely changed and selected, and optimal production operation can be realized.
2. Concentration detection of dilute specific substances in the air 21 in the clean room 6 and monitoring of the change thereof are controlled by variably selecting and controlling two conditions of the specific sampling air volume and the specific number of simultaneous samplings. Realization of environmental management.
[0038]
And since it has the concentration part which concentrates and collects the air 21 and 22 in the clean room 6,
(1) Automatic detection of concentration components of specific substances in the clean room 6 can be automated in-line, and their concentration detection and changes can be monitored in real time. Can be done.
[0039]
Since the clean room 6 has a dissolution part for dissolving and collecting the airs 21 and 22,
(1) Automate in-line detection of dissolved components of specific substances in the clean room 6 and monitor their concentration detection and changes in real time. If equipped with a display / alarm device, etc., quick response measures in case of sudden changes Can be done.
[0040]
【The invention's effect】
As explained in detail above, according to the present invention,
(1) It is possible to monitor in real time the in-line increase / decrease and change of specific substances in the gas in the contained space, and keep it below a certain concentration.
(2) Therefore, even if a specific substance in the gas in the contained space suddenly increases due to any cause, the malfunction of the product is minimized by agile first aid by linking the alarm / display device. Can be suppressed.
[0041]
(3) The operation control for each air purifier by the distribution switching unit that receives the output from the control unit is capable of priority-oriented distribution switching operation as necessary, so that efficient energy-saving operation is possible. Can do. That is, operation control for each cleaning device arranged in the containing space includes air volume (output and damper opening / closing degree) control, operation / pause selection control, temperature / humidity control, operation area (model) selection control, etc. It shall be possible to select.
(4) According to the above item (3), since the control unit adds up the operation time (cumulative use time of the filter) of each cleaning device in the priority-oriented distribution switching operation, expensive filter replacement (life) time As a result, accurate individual correspondence can be realized. The same effect can be obtained by linking to the CIM (computer integrated production) function.
[Brief description of the drawings]
Summary showing the structure of an air cleaning apparatus for cleaning the air in the clean room of reference example of FIG. 1 is a simulated view showing an overall configuration of cleaning the air in the clean room of Example of the present invention the present invention; FIG In the figure
FIG. 3A is a diagram showing an air purifier (A), FIG. 3B is a diagram showing an air purifier (c), and FIG. 3C is a diagram showing an air purifier (g). In the schematic diagram showing the configuration of the sampling detection unit that detects the air in the clean room,
FIG. 4A is a schematic diagram showing a configuration of a sampling detection unit that detects air in a clean room according to an embodiment of the present invention.
FIG. 5A is a diagram showing sampling / detection of a dissolving section. FIG. 5B is a diagram showing sampling / detection of a concentration section. FIG. 5 is a processing flowchart of a sampling detection section for detecting air in a clean room according to an embodiment of the present invention. FIG. 6 is a block diagram showing a configuration of a cleaning method for cleaning air in a clean room according to an embodiment of the present invention. FIG. 7 is a process of a cleaning method for cleaning air in a clean room according to an embodiment of the present invention. Flow chart [Explanation of symbols]
1 ... External air (gas)
2 ... Air purifier (A) (first purifier)
3. Air cleaning device (c) (second cleaning device)
4. Air cleaning device (g) (second cleaning device)
5 ... Air purifier (n) (second purifier)
6 ... Clean room (containing space)
8 ... Air purifier (a) (second purifier)
8f ... Air purifier (f) (second purifier)
9 ... Air sampling part (third sampling part)
10 ... Collection detector (detector)
DESCRIPTION OF SYMBOLS 11 ... Control part 12 ... Distribution switching part 21 ... Air (tertiary gas)
22 ... Air (quaternary gas)
25 ... Fourth collection unit

Claims (2)

A clean room in an environment where specific substances in the air have been removed by an air purifier, an air sampling unit for taking in air in the clean room, and dissolving and collecting the air in the clean room taken in from the air sampling unit for each specific sampling air volume A concentration unit for concentrating and collecting the air in the clean room taken from the air sampling unit for each specific sampling air volume, and sampling the air in the clean room of the dissolution unit and the concentration unit is a specific sampling time The specific sampling air volume and the specific simultaneous sampling number are sampled separately for each specific sampling number of times, and the sampling of the air in the clean room of the dissolving unit and the concentrating unit is sequentially switched and switched sequentially. And detection for separately detecting and measuring a specific substance in the air of the dissolving part and the concentrating part that are sequentially fed by the progressive feeding part When the control unit and the gas cleaning system of the clean room where the distribution switching section receives the output from the control unit is to control the operation of the air cleaning device for computing output by receiving measurement data of the detection portion.   In a clean room in an environment where a specific substance in the air has been removed by an air cleaning device, an air sampling part for taking in air in the clean room, a concentration part for collecting air taken in from the air sampling part, and a specific sampling time in a dissolving part 2. The clean room gas cleaning system according to claim 1, wherein the specific sampling frequency, the specific sampling air volume, and the specific simultaneous sampling number are sequentially sampled and the concentration of the specific substance in the air is detected and measured by the detection unit.

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