KR102357186B1 - Filter Assembly having Test Material Distributor - Google Patents

Abstract

One aspect of the present invention relates to a filter assembly having a test substance distributor, and more particularly, to a filter assembly having a test substance distributor applied to a clean working room installed in a semiconductor manufacturing process, an operating room of a hospital, etc.
According to an embodiment of the present invention, it is possible to provide a filter assembly capable of testing all the filter boxes at once by connecting the pipe line of the tester to the clean work room only once.

Description

Filter Assembly having Test Material Distributor

One aspect of the present invention relates to a filter assembly having a test substance distributor, and more particularly, to a filter assembly having a test substance distributor applied to a clean room installed in a semiconductor manufacturing process, an operating room of a hospital, etc.

The content described in this section merely provides background information on the embodiments of the present invention and does not constitute the prior art.

A clean work room refers to a room free from dust, and is also called a clean room (淸淨室).

When a product or technology is advanced, even the smallest environmental conditions in the place where the product is made have a big impact on the quality. A dust-free environmental condition is also very important in operating rooms, etc. where medical actions such as surgery are performed to open patients.

One of the environmental conditions is the presence or absence of dust. Since there should be no invisible fine particles, isolate the room to prevent dust from entering the room, Persons inside must be dressed in special clothes that do not emit dust, or a device must be installed to forcibly remove dust from the room.

In order to maintain a clean work room, a method of filtering the air supplied to the clean work room by installing a filter assembly is generally used. A filter assembly is also required in the case of a method of blocking the inflow of dust or sucking in filtered clean air by creating positive or negative pressure inside the clean work room.

If the clean work room does not work properly, defects may occur in the semiconductor manufacturing process, and problems such as patient infection may occur in the operating room. Therefore, it is important to evaluate the performance of the filter assembly installed in the clean work room.

DOP (Di-Octyl-Phthalate) test can be performed to evaluate the performance of HEPA (High Efficiency Particulate Air) filters installed on indoor ceilings in clean work rooms. This is a suitable test method for testing the intrinsic properties of the HEPA filter. The DOP is an oily liquid with a high boiling point, and in order to test the filtration efficiency of the HEPA filter, a cloud of condensed DOP vapor may be used.

On the other hand, since the HEPA filter can filter out about 9997% of particles larger than about 03 μm, it is necessary to introduce particles larger than about 03 μm into the HEPA filter in a sufficient amount to ensure this. ), which one to use is an important issue. Therefore, this DOP is only one candidate material that can satisfy these requirements.

And since DOP particles generally have a uniformity of about 03㎛ in diameter, use this as a test powder and measure the number of particles upstream and downstream of the HEPA filter with a light scattering dust meter to determine the efficiency.

In testing the performance of HEPA filters, there are many cases where the test substance, that is, DOP gas, is replaced with PAO (Poly-alpha olefin).

There are often multiple filter boxes installed in a clean work room, and if any one of them is defective, the clean work room will not work properly, so you need to test each of the plurality of filter boxes.

The filter box test should be performed periodically in accordance with an event such as a filter replacement or the lifespan of the filter.

In the process of testing the filter box, in order to inject the test substance into the filter box, the operator connects the pipe of the tester to one filter box and performs the test. so it is inconvenient

In particular, when the area of the clean work room is large and a lot of filter boxes are installed, it is very inconvenient to test the operation of the clean work room because the connection and disconnection of the pipe must be repeated, and it is a problem because it takes a lot of time. In addition, in the process of connecting and disconnecting the pipe to the filter box, if the pipe is not connected correctly, the test result becomes unreliable and becomes a problem.

The above-mentioned background art is technical information that the inventor possessed for the derivation of the embodiments of the present invention or acquired in the process of derivation, and it cannot be said that it is necessarily known technology disclosed to the general public prior to the filing of the embodiments of the present invention. none.

Accordingly, one aspect according to the present invention is proposed to solve the above-mentioned problems, and an object of the present invention is to provide a filter assembly capable of testing all filter boxes at once by connecting the pipe line of the tester to a clean work room only once. .

Another object of the present invention is to provide a filter assembly capable of selecting and testing only a desired filter box by connecting the pipe of the tester only once.

In addition, another object of the present invention is to provide a filter assembly capable of automatically testing a desired filter box when a predetermined condition is met, such as when a predetermined time has elapsed or replacement of the filter box is confirmed because whether the valve opens or closes is already programmed. .

The technical problems to be achieved by the present invention are not limited to the technical problems mentioned above, and other technical problems not mentioned can be clearly understood by those of ordinary skill in the art to which the present invention belongs from the description below. will be.

In order to achieve the above object, an aspect of the present invention is a filter assembly installed in a clean work room to purify air in the clean work room, In the filter assembly installed in the clean work room to purify the air in the clean work room, ,

housing; a filter box installed inside the housing and filtering the air flowing into the housing;

a test substance inlet through which the test substance flows in communication with the test device;

a test material outlet through which the test material is discharged in communication with the test device;

a test substance distributor connected to the test substance inlet and the test substance outlet, and distributing the test substance to selectively test the filter box; and

It is possible to provide a filter assembly comprising a; a pipe for connecting the test substance distributor and the filter box, and for moving the test substance.

A plurality of the filter boxes may be provided, and the plurality of filter boxes may each be connected to the conduit.

The filter box includes a first casing unit, a second casing unit assembled inside the first casing unit, a mounting frame installed inside the second casing unit, a motor installed in the center of the mounting frame, and connected to the motor. It may be characterized in that it comprises a blowing fan, a filter module installed in the opening of the first casing portion.

A test nozzle for spraying a test material for testing the performance of the filter module may be formed on the inner surface of the first casing unit.

A flow control valve may be installed in each of the pipelines drawn out from the test substance distributor to supply a test substance to a filter box selected from among the plurality of filter boxes.

The conduit may be configured as a pair including a test substance supply pipe and a return pipe, and the flow control valve may be installed on the test substance supply pipe.

Another aspect of the present invention may provide a clean working room in which the above-described filter assembly is installed.

Another aspect of the present invention is a plurality of filter boxes that are evaluated by the performance of the test device;

a test substance distributor provided with an inlet and an outlet to which a test substance supply line drawn from the test device and a test substance return line are connected to selectively supply a test substance to the plurality of filter boxes; and

It is possible to provide a filter assembly comprising a; a plurality of test substance distribution lines drawn out from the test substance distributor and connected to each of the plurality of filter boxes.

As described above, according to an embodiment of the present invention, it is possible to provide a filter assembly capable of testing all the filter boxes at once by connecting the pipe line of the tester to the clean work room only once.

In addition, according to another embodiment of the present invention, it is possible to provide a filter assembly capable of selecting and testing only a desired filter box by connecting the pipe of the tester only once.

In addition, according to another embodiment of the present invention, a filter assembly capable of automatically testing a desired filter box is provided when a predetermined condition is met, such as when a predetermined time elapses or replacement of the filter box is confirmed because whether the valve opens or closes is already programmed. can do.

In addition, the effects of the present invention have various effects such as having excellent versatility according to the embodiments, and such effects can be clearly identified in the description of the embodiments to be described later.

The following drawings attached to the present specification illustrate one embodiment of the present invention, and together with the detailed description of the present invention serve to further understand the technical spirit of the present invention, the present invention is a matter described in such drawings should not be construed as being limited only to
1 shows a schematic configuration of a filter assembly according to an embodiment of the present invention connected to a test device.
2 shows a filter box according to an embodiment of the present invention.
FIG. 3 is a cross-sectional view showing the inside of the filter box of FIG. 2 .
4 shows a state in which the filter module is installed in the filter box of FIG.
5 shows a test device for evaluating the performance of the filter box and a filter box connected to the test device and being tested.
6 shows a state in which the filter assembly according to an embodiment of the present invention is connected to a test device.
7 shows a filter box according to an embodiment of the present invention.
FIG. 8 shows a side view of the filter box of FIG. 7 .
9 shows a clean work room in which a filter assembly according to an embodiment of the present invention is installed.

Advantages and features of the present invention, and a method for achieving them will become apparent with reference to the detailed description in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments presented below, it can be implemented in a variety of different forms, and should be understood to include all transformations, equivalents, and substitutes included in the spirit and scope of the present invention. . The embodiments presented below are provided so that the disclosure of the present invention is complete, and to completely inform those of ordinary skill in the art to which the present invention pertains to the scope of the invention. In describing the present invention, if it is determined that a detailed description of a related known technology may obscure the gist of the present invention, the detailed description thereof will be omitted.

The terms used in the present application are only used to describe specific embodiments, and are not intended to limit the present invention. The singular expression includes the plural expression unless the context clearly dictates otherwise.

In the present application, terms such as “comprise” or “have” are intended to designate that a feature, number, step, operation, component, part, or combination thereof described in the specification exists, but one or more other features It is to be understood that this does not preclude the possibility of the presence or addition of numbers, steps, operations, components, parts, or combinations thereof. Terms such as first, second, etc. may be used to describe various elements, but the elements should not be limited by the terms. The above terms are used only for the purpose of distinguishing one component from another.

Hereinafter, embodiments according to the present invention will be described in detail with reference to the accompanying drawings. do.

1 shows a schematic configuration of a filter assembly 10 according to an embodiment of the present invention connected to a test device 100 .

The filter assembly 10 according to an embodiment of the present invention is installed in a clean work room to purify air (A) in the clean work room, and includes a housing; a filter box 300 installed inside the housing and filtering the air (A) flowing into the housing;

a test material inlet 210 through which the test material is introduced in communication with the test device 100; The test material outlet 220 through which the test material is discharged in communication with the test device 100;

a test substance distributor 200 connected to the test substance inlet 210 and the test substance outlet 220 and distributing the test substance to selectively test the filter box 300; and

The test substance distributor 200 and the filter box 300 are connected, and the conduit 400 for moving the test substance; may be configured to include.

2 shows a filter box 300 according to an embodiment of the present invention. FIG. 3 is a cross-sectional view showing the inside of the filter box 300 of FIG. 2 . 4 shows a state in which the filter module 370 is installed in the filter box 300 of FIG.

The filter box 300 according to an embodiment of the present invention includes a cover part 310 , a suction port 340 formed on an upper surface of the cover part 310 , and a test substance formed on a side surface of the cover part 310 . The supply part 320 and the test substance discharge part 330, the filter module 370 coupled to the opening formed on the lower surface of the cover part 310, and the test substance supply part 320 communicate with the inside of the cover part 310 It may be configured to include a test nozzle 360 protruding from the furnace, and a blowing fan 350 disposed between the suction port 340 and the test nozzle 360 .

The filter box 300 may function to filter the air (A) flowing into the clean work room through the air duct and discharge it to the work space inside the clean work room, and a plurality of generally may be installed on the ceiling of the clean work room. .

When explaining the operation of the filter box 300 according to an embodiment of the present invention, air (A) is introduced from the suction port 340 by the rotation of the blowing fan 350, and the introduced air (A) is the filter module It is filtered while passing through (370) to supply clean air to the clean work room.

A test material supply unit 320 and a test material discharge unit 330 may be installed on the side of the cover unit 310 of the filter box 300 , and these are connected to the test device 100 to receive the test material and receive the supplied test material. The material may be discharged again and delivered to the test device 100 .

The filter module 370 installed in the filter box 300 may include, for example, a HEPA filter. In order to supply clean air to the clean room, it is necessary to filter the dust so that the amount of dust contained in the air (A) is maintained below a certain level. The amount of dust contained in the air (A) must be reduced to a significant level in the case of operation characteristics, such as semiconductor manufacturing or open surgery on a patient in an operating room. Therefore, by applying a HEPA filter, the amount of dust in the clean room can be maintained at a set level.

In the filter box 300 according to this embodiment, the test material supply unit 320 , the test material discharge unit 330 , and the test nozzle 360 may be used to test the filter box 300 .

5 shows the test device 100 for evaluating the performance of the filter box 300 and the filter box 300 connected to the test device 100 and being tested.

The test device 100 includes a test substance receiving unit 110 for accommodating a test substance, a test substance supply line 130 for supplying a test substance to a test subject, and a test substance recovery for recovering a test substance from the test subject Line 140, the probe unit 150 for checking whether or not leakage, the probe unit 150 for checking whether the test substance is leaking from the filter box 300, and a control unit for controlling the test device 100 120 may be included. Here, the test substance may be, for example, PAO.

The filter box 300 should periodically perform a performance evaluation test. When oil leaks in the filter box 300 , fine dust may flow into the inside, which may cause serious problems such as a problem in semiconductor manufacturing yield or infection of a patient undergoing surgery. Therefore, if the filter assembly 10 itself is provided with a test configuration to test the performance of the filter box 300 by itself, it is possible to continuously test the filter performance on a regular basis so that the clean workshop can be operated in an optimal state.

In particular, the HEPA filter has a fixed lifespan, so it needs to be replaced periodically. Therefore, when the filter is replaced, the performance of the newly replaced filter can be guaranteed by performing a filter performance test as well. These tests must be performed regularly and must be performed under special circumstances, such as when a filter is being replaced.

A method in which the test device 100 tests the filter box 300 as an object to be tested will be described. First, the operator connects the test material supply line 130 and the test material recovery line 140 of the test device 100 to the test material supply unit 320 and the test material discharge unit 330 of the filter box 300, respectively.

Then, the blower fan 350 of the filter box 300 is operated, and the test material accommodated in the test material receiving unit 110 of the test device 100 is transferred to the filter box 300 through the test material supply line 130 . ) is supplied to Then, the test substance is injected from the test nozzle 360 communicating with the test substance supply unit 320 . Since the test substance sprayed from the test nozzle 360 is sprayed in the form of an aerosol, the blower fan 350 is operated to induce spraying toward the filter module 370 .

According to an embodiment of the present invention, the edge of the filter module 370 is filled with a sealing liquid, and when the filter module 370 is coupled to the end of the cover part 310 of the filter box 300, the sealing liquid is applied. The rim is sealed through.

When the filter module 370 and the sealing part are normal, no leakage occurs even if the test substance is sprayed, and the sprayed test substance is recovered to the test device 100 through the test substance recovery line 140 . Therefore, the test device 100 can determine normal when the amount of the supplied test substance and the recovered test substance is the same or is maintained within a certain range.

However, if the filter module 370 itself is defective or the sealing between the filter module 370 and the filter box 300 is defective in the initial or in the process of being used, the test substance leaks from the filter module 370, sealing part, etc. can be In this case, the operator can check whether the test substance is leaking by bringing the probe unit 150 close to the filter module 370 , the contact area between the filter module 370 and the filter box 300 , and the entire filter box 300 . have.

6 shows a state in which the filter assembly 10 according to an embodiment of the present invention is connected to the test device 100 .

6 shows a state in which a plurality of filter boxes 300 are provided, and the first filter box 300a, the second filter box 300b, and the third filter box 300c are respectively connected to the test substance distributor 200 by conduits. (400) shows the connection through.

The test substance distributor 200 according to this embodiment is a configuration that performs a function of selectively distributing test substances, and is more effective when a plurality of filter boxes 300 are provided.

A test substance inlet 210 and a test substance outlet 220 may be connected to one side of the test substance distributor 200, and a first pipe line 410 connected to the first filter box 300a on the other side, a first filter box A first conduit 410 connected to the 300a and a first conduit 410 connected to the first filter box 300a may be connected to each other. Inside the test substance distributor 200 , the first pipe 410 , the second pipe 420 , and the third pipe 430 may be connected to the test substance inlet 210 and the test substance outlet 220 in parallel, respectively.

The first conduit 410 , the second conduit 420 , and the third conduit 430 may be configured as a pair consisting of a test material supply line and a test material return line, respectively.

The test substance supply pipe of the first pipe line 410, the test substance supply pipe of the second pipe line 420, and the test substance supply pipe of the third pipe line 430 have a first flow path control valve 231 and a second flow path control valve, respectively. A flow path control valve 232 and a third flow path control valve 233 may be installed. The operator may operate the flow control valves 232 , 232 , and 233 to perform an oil leakage test on the selected filter box 300 .

In the filter assembly 10 composed of a plurality of filter boxes 300 without a general test substance distributor 200, in order to test the filter box 300, an operator must perform the test substance supply line 130 of the test device 100 and the test substance recovery line 140 are connected to the test substance supply part and the test substance discharge part of the filter box 300, respectively, and the valve is opened to supply the test substance, and all the supplied test substances pass through the test substance recovery line 140 It is possible to check whether there is a leak by analyzing whether the ride is returned or not.

However, in this structure, in order to test all of the first filter box 300a, the second filter box 300b, and the third filter box 300c, the operator provides the test substance supply line 130 to the first filter box 300a. After the test of the filter box 300 is performed by connecting the test material recovery line 140 to the filter box 300, it is disconnected again after the test is connected to the second filter box 300b, and then disconnected again, and again the third filter box 300c ), which is very inconvenient and takes a lot of time, because the operator has to repeat connection and disconnection, such as disconnecting again after testing, and there may be a problem that the connection is not made correctly in the repeated connection process.

The structure of the filter assembly 10 having a plurality of filter boxes 300 and the test substance distributor 200 according to an embodiment of the present invention is to connect the test device 100 to the test substance inlet 210 of the test substance distributor 200. ) and the test substance outlet 220, the second flow path control valve 232 and the third flow path control valve 233 are closed, and when the first flow path control valve 231 is opened, the test substance distributor 200 ) supplies the test substance only to the first filter box 300a (refer to FIG. 6), and when only the second flow path control valve 232 is opened, the test substance distributor 200 opens only the second filter box 300b to the test substance. is supplied, and when only the third flow path control valve 233 is opened, the test substance distributor 200 supplies the test substance only to the third filter box 300c.

Therefore, according to the structure of the filter assembly 10 having a plurality of filter boxes 300 and the test substance distributor 200 according to an embodiment of the present invention, an operator can use the test substance supply line 130 and the test substance recovery line ( 140) is economical because it is possible to test each filter box 300 by controlling only the valve without having to repeat the connection and disconnection of the filter box 300.

The test substance dispenser 200 according to an embodiment of the present invention may be a separate configuration or may be installed together on one side of a housing in which a plurality of filter boxes 300 are installed.

The test substance dispenser 200 according to an embodiment of the present invention may include a distribution control unit 240 in some cases, and the distribution control unit 240 automatically controls the valve when a predetermined time arrives by programming to control a plurality of filters The box 300 may be tested sequentially, and in some cases, a problematic filter box 300 may be found and only the corresponding filter box 300 may be tested.

According to an embodiment, a detachment detection sensor capable of sensing whether the filter module 370 is detached may be installed in the filter box 300 . When the detachment detection sensor detects that the filter module 370 is replaced, it may be configured to transmit a sensing signal. That is, the detachment detection sensor firstly detects that the filter module 370 is removed from the filter box 300, and secondly, when detecting that a new filter module 370 is installed in the filter box 300, a sensing signal The distribution control unit 240 receiving the sensing signal may be programmed to automatically perform the filter performance test of the filter box 300 by controlling the flow control valve corresponding to the filter box 300 .

In this configuration, when the operator connects the test device 100 and replaces the filter module 370 of the first filter box 300a, the test substance distributor 200 automatically switches the filter module 370 to the first Since the test is performed by finding the filter box 300a, the workload of the operator can be remarkably reduced.

In particular, when a large amount of filter boxes 300 are installed in a clean work room, even if the filter modules 370 of several filter boxes 300 are randomly replaced, the replaced filter boxes 300 are accurately found and the corresponding filter boxes 300 Since the test is performed on the , work efficiency can be improved, and it is possible to secure economical and accurate test results.

According to an embodiment, an oil leak sensor may be installed adjacent to the plurality of filter boxes 300 , and in this case, it is not necessary for the operator to manually move the probe unit 150 in the test device 100 to check for leaks. In the box 300 test process, the manual part of the operator can be drastically reduced.

The test substance distributor 200 including the distribution control unit 240, the detachment detection sensor, and the oil leak sensor are installed in one filter assembly 10 having a plurality of filter boxes 300 to be installed as one product in a clean work room. can That is, by installing only one filter assembly 10 when an operator installs a clean work room, it is possible to provide a clean work room capable of one-stop automated filter testing.

7 shows a filter box 500 according to an embodiment of the present invention. FIG. 8 shows a side view of the filter box 500 of FIG. 7 .

According to an embodiment, the filter box 500 includes a first casing part 510 , a second casing part 520 assembled inside the first casing part 510 , and a mounting frame installed inside the second casing part 520 . 550, a motor 540 installed in the center of the mounting frame 550, a blower fan 530 connected to the motor 540, and a filter module 370 installed in the opening of the first casing part 510. may be included.

According to an exemplary embodiment, the second casing unit 520 may be configured to be slidably detachable from the first casing unit 510 . That is, the operator does not need to separate the mounting frame 550 when separating the blower fan 530 from the filter box 500 , and a bolt for fixing the second casing part 520 to the first casing part 510 . By loosening and sliding the second casing part 520 including the blowing fan 530 inside the first casing part 510 to separate the second casing part 520 itself, the blowing fan 530 is convenient. can be removed This structure has the effect of reducing the workload of the operator by making the filter box 500 easy to separate.

9 shows a clean work room 600 in which the filter assembly 10 according to an embodiment of the present invention is installed.

Meanwhile, according to another embodiment of the present invention, it is possible to provide a clean work room 600 in which the above-described filter assembly 10 is installed.

A filter assembly 10 may be installed on the ceiling of the clean work room 600 , and a blower 630 , an intake duct 610 , and an exhaust duct 620 may be installed on the side surfaces. The air (A) introduced through the intake duct 610 is moved to the ceiling by the blower 630, is filtered by a plurality of filter boxes 300 installed on the ceiling, and enters the inside (P) of the clean work room 600. The clean air thus introduced may again exit the interior P of the clean work room 600 through the vent and be discharged to the outside through the exhaust duct 620 .

In addition, according to another embodiment of the present invention, a plurality of filter boxes 300 that are evaluated for performance from the test device 100; In order to selectively supply a test substance to the plurality of filter boxes 300, a test substance distributor ( 200); and

It is possible to provide a filter assembly 10 including a; a plurality of test substance distribution lines drawn out from the test substance distributor 200 and connected to each of the plurality of filter boxes 300 .

In the specification of the present invention (especially in the claims), the use of the term "above" and similar referential terms may be used in both the singular and the plural. In addition, when a range is described in the present invention, each individual value constituting the range is described in the detailed description of the invention as including the invention to which individual values belonging to the range are applied (unless there is a description to the contrary). same as

The steps constituting the method according to the present invention may be performed in an appropriate order unless the order is explicitly stated or there is no description to the contrary. The present invention is not necessarily limited to the order in which the steps are described. The use of all examples or exemplary terms (eg, etc.) in the present invention is merely for the purpose of describing the present invention in detail, and the scope of the present invention is limited by the examples or exemplary terms unless defined by the claims. it's not going to be In addition, those skilled in the art will recognize that various modifications, combinations, and changes can be made in accordance with design conditions and factors within the scope of the appended claims or their equivalents.

Therefore, the spirit of the present invention should not be limited to the above-described embodiments, and the scope of the spirit of the present invention is not limited to the scope of the scope of the present invention. will be said to belong to

10: filter assembly
100: test device
110: test substance receiving unit
120: control unit
130: test substance supply line
140: test material recovery line
150: probe unit
200: divider
210: test substance inlet
220: test substance outlet
231: first flow control valve
232; 2nd flow control valve
233: the third flow control valve
240: distribution control unit
300: filter box
300a: first filter box
300b: second filter box
300c: the third filter box
310: cover part
320: test material supply unit
330: test substance discharge unit
340: intake
350: blow fan
360: test nozzle
370: filter module
A: Air
400: pipeline
410: first conduit
420: second conduit
430: third conduit
500: second embodiment of the filter box
510: first casing part
520: second casing part
530: Blowing fan of the second embodiment
540: motor
550: mounting frame
600: clean work room
610: intake duct
620: exhaust duct
630: blower

Claims (8)

In the filter assembly installed in the clean work room to purify the air inside the clean work room,
housing;
a filter box installed inside the housing and filtering the air flowing into the housing;
a test substance inlet through which the test substance flows in communication with the test device;
a test material outlet through which the test material is discharged in communication with the test device;
a test substance distributor connected to the test substance inlet and the test substance outlet, and distributing the test substance to selectively test the filter box; and
a pipe connecting the test substance distributor and the filter box and moving the test substance;
including,
A plurality of the filter boxes doedoe, the plurality of filter boxes are respectively connected to the conduit,
A flow path control valve is installed in each of the pipelines drawn out from the test substance distributor to supply a test substance to a filter box selected from among the plurality of filter boxes,
The conduit consists of a pair including a test material supply conduit and a return conduit, and the flow control valve is installed on the test material supply conduit,
The filter box includes a first casing unit, a second casing unit assembled inside the first casing unit, a mounting frame installed inside the second casing unit, a motor installed in the center of the mounting frame, and connected to the motor. A filter assembly comprising a blowing fan and a filter module installed in the opening of the first casing. delete delete According to claim 1,
A filter assembly, characterized in that a test nozzle for spraying a test substance for testing the performance of the filter module is formed on the inner surface of the first casing part. delete delete A clean working room in which the filter assembly according to any one of claims 1 to 4 is installed. A plurality of filter boxes whose performance is evaluated by the test device;
a test substance distributor having an inlet and an outlet to which a test substance supply line drawn from the test device and a test substance return line are connected to selectively supply test substances to the plurality of filter boxes; and
a plurality of test substance distribution lines drawn out from the test substance distributor and connected to each of the plurality of filter boxes;
including,
The filter box includes a first casing unit, a second casing unit assembled inside the first casing unit, a mounting frame installed inside the second casing unit, a motor installed in the center of the mounting frame, and connected to the motor. A filter assembly comprising a blowing fan and a filter module installed in the opening of the first casing.

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