CN105214906A - A kind of method of apparatus for coating and the wrong report of removing foreign matter thereof - Google Patents
A kind of method of apparatus for coating and the wrong report of removing foreign matter thereof Download PDFInfo
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- CN105214906A CN105214906A CN201510530707.8A CN201510530707A CN105214906A CN 105214906 A CN105214906 A CN 105214906A CN 201510530707 A CN201510530707 A CN 201510530707A CN 105214906 A CN105214906 A CN 105214906A
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- coating
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Abstract
The invention provides a kind of apparatus for coating, comprising: coating base station; Coating mechanism, for being coated with photoresist; Foreign matter inspection sensor, for detecting foreign matter, is sent to imageing sensor by the institute's optical signalling detected; Imageing sensor, for receiving the described optical signalling that described foreign matter inspection sensor sends, and converts described optical signalling to picture signal and is sent to display screen; Display screen, for receive and show described imageing sensor send described picture signal.This device can avoid foreign matter to report by mistake.A kind of method that the present invention provides removing foreign matter of apparatus for coating to report by mistake in addition, comprising: the optical signalling of foreign matter inspection sensor inspected object, and sends it to described imageing sensor; Imageing sensor converts the described optical signalling received to picture signal and is sent to described display screen; The described picture signal received shows by display screen, judges for staff.The method efficiently avoid the loss of time and photoresist.
Description
[technical field]
The present invention relates to LCDs technical field, a kind of method of particularly apparatus for coating and the wrong report of removing foreign matter thereof.
[background technology]
In the manufacture craft of liquid crystal panel, coating process is very important.In the prior art, the mode of painting work adopts slot coated method, namely utilizes the mouth gold with high-fineness to be sprayed by photoresist liquid, set certain gap between mouth gold and glass substrate, while mouth gold moves and keeps this gap, by photoresist liquid coating on the glass substrate.In the equipment of prior art, adopt guide plate to protect through the front of mouth gold of being everlasting, the bottom of guide plate is lower than mouth gold, if find particle foreign matter in coating process, then coating process stops, and such guide plate just can make mouth gold damage from the shock of particle foreign matter.This equipment of prior art can protect mouth gold from damage well; but owing to glass substrate existing the required object of a lot of metal frame and so on; this object usually can cause foreign matter to examine the warning of sensor, thus makes the board machine of delaying cause the loss of waste of time and photoresist.
[summary of the invention]
The object of the present invention is to provide a kind of method that removing foreign matter of apparatus for coating is reported by mistake, the method can reduce the event of foreign matter wrong report in coating process, improves coating efficiency and reduces the loss of photoresist.The present invention provides a kind of apparatus for coating in addition, and this device can improve the loss of coating efficiency and less photoresist.
Technical scheme of the present invention is as follows:
A kind of apparatus for coating, comprising:
Coating base station, for bearing glass substrate;
Coating mechanism, for being coated with photoresist on described glass substrate;
Foreign matter inspection sensor, for detecting the object on described glass substrate, by the described glass substrate detected the optical signalling of object be sent to imageing sensor, and at the light value of the described optical signalling detected lower than the threshold value alarm of setting;
Imageing sensor, for receiving the described optical signalling that described foreign matter inspection sensor sends, and converts described optical signalling to picture signal and is sent to display screen; And
Display screen, for receive and show described imageing sensor send described picture signal.
Preferably, described foreign matter inspection sensor is located at the bottom of the framed bent of described coating mechanism, described imageing sensor is located at the middle part of the framed bent of described coating mechanism, described foreign matter inspection sensor and described imageing sensor are in the same side of the framed bent of described coating mechanism, and described imageing sensor is connected by electric wire with described display screen.
Preferably, also comprise a coating guide rail mechanism, the framed bent of described coating mechanism to be located on described coating guide rail mechanism and to be moved back and forth along described coating guide rail mechanism.
Preferably, the lower surface of the framed bent of described coating mechanism is provided with mouth gold and guide plate, and the bottom of described guide plate is lower than the tip of described mouth gold.
Preferably, the bottom of described guide plate is lower than the tip 18 ~ 22um of described mouth gold.
Preferably, described foreign matter inspection sensor comprises a light source and a sensor, described light source two bottoms that are located at the same side of described framed bent relative to described sensor.
Preferably, described light source is LED light source, described LED light source parallel radiation is to described sensor, when the light sent of described LED light source runs into irradiated object, described irradiated object blocks the described light of sensor described in a part of directive, and by described for part light scattering on described imageing sensor.
A method for the removing foreign matter wrong report of apparatus for coating described above, comprises the following steps:
The detection of described foreign matter inspection sensor is carried on the optical signalling of the object on the described glass substrate on described coating base station, and described optical signalling is sent to described imageing sensor;
Described imageing sensor converts the described optical signalling received to picture signal and is sent to described display screen; And
The described picture signal received shows by described display screen, and whether the object judged on described glass substrate for staff is particle foreign matter.
Preferably, described step also comprises: when described foreign matter inspection sensor is detecting the threshold value alarm of the light value of described optical signalling lower than setting.
Preferably, described step also comprises: when described foreign matter inspection sensor alarm, the image of described staff according to described display screen judges, if determine, described image is particle foreign matter, then carry out machine process of delaying, and be coated with after described foreign bodies removal again, otherwise ignored, proceed coating.
Beneficial effect of the present invention:
The method of the removing foreign matter wrong report of a kind of apparatus for coating of the present invention, the optical signalling that foreign matter is examined the object that sensor detects by the method is converted to picture signal and judges for staff, the event of foreign matter wrong report in coating process can be reduced, reduce the time of coating waste, improve coating efficiency and reduce the loss of photoresist.The present invention provides a kind of apparatus for coating in addition, and this device can improve the loss of coating efficiency and less photoresist.
[accompanying drawing explanation]
Fig. 1 is the overall structure schematic diagram of a kind of apparatus for coating of the present invention;
Fig. 2 is the step schematic diagram of the method for the removing foreign matter wrong report of a kind of apparatus for coating of the present invention;
Fig. 3 is the schematic cross-section of a kind of apparatus for coating of prior art.
[detailed description of the invention]
The explanation of following embodiment is graphic with reference to what add, can in order to the specific embodiment implemented in order to illustrate the present invention.The direction term that the present invention mentions, such as " on ", D score, "front", "rear", "left", "right", " interior ", " outward ", " side " etc., be only the direction with reference to annexed drawings.Therefore, the direction term of use is in order to illustrate and to understand the present invention, and is not used to limit the present invention.In the drawings, the unit that structure is similar represents with identical label.
Embodiment 1
As shown in Figure 1, for the overall structure schematic diagram of a kind of apparatus for coating of the present invention, as can be seen from Figure 1, a kind of apparatus for coating of the present invention, comprises coating base station 8, coating mechanism (not indicating in figure), foreign matter inspection sensor 4, imageing sensor 6 and display screen 7.In the present embodiment, described foreign matter inspection sensor 4 is located at the bottom of the framed bent 3 of described coating mechanism, described imageing sensor 6 is located at the middle part of the framed bent 3 of described coating mechanism, described foreign matter inspection sensor 4 and described imageing sensor 6 are in the same side of the framed bent 3 of described coating mechanism, and described imageing sensor 7 is connected by electric wire with described display screen 7.In addition, the apparatus for coating of the present embodiment also comprises a coating guide rail mechanism (not indicating in figure), and the framed bent 3 of described coating mechanism to be located on described coating guide rail mechanism and to be moved back and forth along described coating guide rail mechanism.The effect of each several part of the apparatus for coating of the present embodiment is as follows:
Coating base station 8 is for bearing glass substrate 1, and it plays effect fixing for glass substrate 1, makes glass substrate 1 keep motionless in applied process, and coating just can be evenly like this.
Coating mechanism is used for being coated with photoresist 2 being carried on the glass substrate 1 on described coating base station 8, and the framed bent 3 of described coating mechanism is located on described coating guide rail mechanism.In coating process, the framed bent 3 of described coating mechanism moves back and forth along described coating guide rail mechanism.In the present embodiment, the lower surface of the framed bent 3 of described coating mechanism is provided with mouth gold 31 and guide plate 32, and the bottom of described guide plate 32 is lower than the tip of described mouth gold 31, and the bottom of the preferred described guide plate 32 of the present embodiment is lower than the tip 18 ~ 22um of described mouth gold 31.Guide plate 32 in the present embodiment can avoid particle foreign matter 5 lesion ports gold 31, plays the effect of protection mouth gold 31.
Foreign matter inspection sensor 4 for detecting the object on described glass substrate 1, the optical signalling of the object on the described glass substrate 1 detected is sent to imageing sensor 6, and the described optical signalling detected light value lower than setting threshold value alarm.In the present embodiment, described foreign matter inspection sensor 4 comprises light source 41 and a sensor 42, described light source 41 two bottoms that are located at the same side of the framed bent 3 of described coating mechanism relative to described sensor 42.The present embodiment also preferred described light source 41 is LED light source 41, described LED light source 41 parallel radiation is to described sensor 42, when the light sent of described LED light source 41 runs into irradiated object, described irradiated object blocks the described light of sensor 42 described in a part of directive, and by described for part light scattering on described imageing sensor 6.
The described optical signalling that imageing sensor 6 sends for receiving described foreign matter inspection sensor 4, and convert described optical signalling to picture signal and be sent to display screen 7.
Display screen 7 for receiving and showing the described picture signal that described imageing sensor 6 sends, for staff judges whether particle foreign matter 5 provides foundation for object that described picture signal reflects.
As shown in Figure 3, for the schematic cross-section of a kind of apparatus for coating of prior art, as can be seen from Figure 3, this apparatus for coating of prior art is compared with apparatus for coating of the present invention, maximum difference is, the apparatus for coating of prior art does not arrange imageing sensor 6, only has coating base station 8, coating mechanism and foreign matter inspection sensor 4.Owing to there is no imageing sensor 6, carry out in the process be coated with at apparatus for coating, run into object once foreign matter inspection sensor 4 and send alarm signal, staff cannot judge that described object is particle foreign matter 5 or metal frame, therefore need the machine of delaying to stop coating, whether then entering in board detects by an unaided eye is really particle foreign matter 5, so will reduce coating efficiency, also can waste photoresist 2, and apparatus for coating of the present invention just in time compensate for this weak point of prior art.
Embodiment 2
As shown in Figure 2, for the step schematic diagram of the method that the removing foreign matter of a kind of apparatus for coating of the present invention is reported by mistake, apparatus for coating described in the present embodiment is the apparatus for coating described in embodiment 1, as can be seen from Figure 2, the method of the removing foreign matter wrong report of a kind of apparatus for coating described above of the present invention, comprises the following steps:
Step S101: after coating process starts, the framed bent 3 of described coating mechanism moves back and forth along described coating guide rail mechanism.Because described coating mechanism, foreign matter inspection sensor 4 and described imageing sensor 6 are integrated, so meanwhile, described foreign matter inspection sensor 4 is synchronized with the movement with the framed bent 3 of described coating mechanism, detect the optical signalling of the object on the described glass substrate 1 be carried on described coating base station 8 simultaneously, and described optical signalling is sent to described imageing sensor 6.When described foreign matter inspection sensor 4 is detecting the threshold value alarm of the light value of described optical signalling lower than setting.
Step S102: described imageing sensor 6 will receive the described optical signalling sended over from described foreign matter inspection sensor 4, and described optical signalling is converted to picture signal and be sent to described display screen 7.
Step S103: the described picture signal received shows by described display screen 7, whether the object judged on described glass substrate 1 for staff is particle foreign matter 5.Preferably, described step also comprises: when described foreign matter inspection sensor 4 is reported to the police, the image of described staff according to described display screen 7 judges, if determine, described image is particle foreign matter 5, then carry out machine process of delaying, and be coated with again after described particle foreign matter 5 is removed, if when determining that described image is the required object of glass substrate 1 of metal frame and so on, then ignored, proceeded coating.
In sum; although the present invention discloses as above with preferred embodiment; but above preferred embodiment is also not used to limit the present invention; those of ordinary skill in the art; without departing from the spirit and scope of the present invention; all can do various change and retouching, the scope that therefore protection scope of the present invention defines with claim is as the criterion.
Claims (10)
1. an apparatus for coating, is characterized in that, comprising:
Coating base station, for bearing glass substrate;
Coating mechanism, for being coated with photoresist on described glass substrate;
Foreign matter inspection sensor, for detecting the object on described glass substrate, the optical signalling of the object on the described glass substrate detected is sent to imageing sensor, and the described optical signalling detected light value lower than setting threshold value alarm;
Imageing sensor, for receiving the described optical signalling that described foreign matter inspection sensor sends, and converts described optical signalling to picture signal and is sent to display screen; And
Display screen, for receive and show described imageing sensor send described picture signal.
2. apparatus for coating according to claim 1, it is characterized in that, described foreign matter inspection sensor is located at the bottom of the framed bent of described coating mechanism, described imageing sensor is located at the middle part of the framed bent of described coating mechanism, described foreign matter inspection sensor and described imageing sensor are in the same side of the framed bent of described coating mechanism, and described imageing sensor is connected by electric wire with described display screen.
3. apparatus for coating according to claim 1, is characterized in that, also comprises a coating guide rail mechanism, and the framed bent of described coating mechanism to be located on described coating guide rail mechanism and to be moved back and forth along described coating guide rail mechanism.
4. apparatus for coating according to claim 1, is characterized in that, the lower surface of the framed bent of described coating mechanism is provided with mouth gold and guide plate, and the bottom of described guide plate is lower than the tip of described mouth gold.
5. apparatus for coating according to claim 4, is characterized in that, the bottom of described guide plate is lower than the tip 18 ~ 22um of described mouth gold.
6. apparatus for coating according to claim 1, is characterized in that, described foreign matter inspection sensor comprises a light source and a sensor, described light source two bottoms that are located at the same side of described framed bent relative to described sensor.
7. apparatus for coating according to claim 6, it is characterized in that, described light source is LED light source, described LED light source parallel radiation is to described sensor, when the light sent of described LED light source runs into irradiated object, described irradiated object blocks the described light of sensor described in a part of directive, and by described for part light scattering on described imageing sensor.
8. a method for the removing foreign matter wrong report of the apparatus for coating as described in claim 1 ~ 7, is characterized in that, comprise the following steps:
The detection of described foreign matter inspection sensor is carried on the optical signalling of the object on the described glass substrate on described coating base station, and described optical signalling is sent to described imageing sensor;
Described imageing sensor converts the described optical signalling received to picture signal and is sent to described display screen; And
The described picture signal received shows by described display screen, and whether the object judged on described glass substrate for staff is particle foreign matter.
9. the method for removing foreign matter wrong report according to claim 8, it is characterized in that, described step also comprises: when described foreign matter inspection sensor is detecting the threshold value alarm of the light value of described optical signalling lower than setting.
10. the method for removing foreign matter wrong report according to claim 9, it is characterized in that, described step also comprises: when described foreign matter inspection sensor alarm, the image of described staff according to described display screen judges, if determine, described image is particle foreign matter, then carry out machine process of delaying, and be coated with after described foreign bodies removal again, otherwise ignored, proceeded coating.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510530707.8A CN105214906A (en) | 2015-08-26 | 2015-08-26 | A kind of method of apparatus for coating and the wrong report of removing foreign matter thereof |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201510530707.8A CN105214906A (en) | 2015-08-26 | 2015-08-26 | A kind of method of apparatus for coating and the wrong report of removing foreign matter thereof |
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| CN105214906A true CN105214906A (en) | 2016-01-06 |
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| CN106186717A (en) * | 2016-08-04 | 2016-12-07 | 武汉华星光电技术有限公司 | Glass substrate apparatus for coating |
| CN108170004A (en) * | 2017-12-27 | 2018-06-15 | 深圳市华星光电技术有限公司 | Photoresist real-time detection apparatus, photoresist real-time detection method and light blockage coating equipment |
| CN108303431A (en) * | 2017-01-11 | 2018-07-20 | 由田新技股份有限公司 | Automatic optical detection system for surface foreign matter detection |
| CN109668900A (en) * | 2019-01-17 | 2019-04-23 | 深圳市华星光电半导体显示技术有限公司 | A kind of novel coating machine and its coating method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106186717A (en) * | 2016-08-04 | 2016-12-07 | 武汉华星光电技术有限公司 | Glass substrate apparatus for coating |
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| CN108303431A (en) * | 2017-01-11 | 2018-07-20 | 由田新技股份有限公司 | Automatic optical detection system for surface foreign matter detection |
| CN108170004A (en) * | 2017-12-27 | 2018-06-15 | 深圳市华星光电技术有限公司 | Photoresist real-time detection apparatus, photoresist real-time detection method and light blockage coating equipment |
| CN109668900A (en) * | 2019-01-17 | 2019-04-23 | 深圳市华星光电半导体显示技术有限公司 | A kind of novel coating machine and its coating method |
| CN109668900B (en) * | 2019-01-17 | 2021-07-06 | 深圳市华星光电半导体显示技术有限公司 | Novel coating machine and coating method thereof |
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