CN109668900B - Novel coating machine and coating method thereof - Google Patents

Novel coating machine and coating method thereof Download PDF

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Publication number
CN109668900B
CN109668900B CN201910043144.8A CN201910043144A CN109668900B CN 109668900 B CN109668900 B CN 109668900B CN 201910043144 A CN201910043144 A CN 201910043144A CN 109668900 B CN109668900 B CN 109668900B
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optical detection
detection device
coating machine
novel
coating
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CN201910043144.8A
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CN109668900A (en
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刘子琪
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Shenzhen China Star Optoelectronics Semiconductor Display Technology Co Ltd
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Shenzhen China Star Optoelectronics Semiconductor Display Technology Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/94Investigating contamination, e.g. dust

Abstract

A novel coater, comprising: the device comprises a transmission device, a wiping device, a gold bar and an optical detection device; wherein the transmission comprises: the device comprises a workbench, rollers, a guide rail and a conveyor belt; the wiping device is arranged above the transmission device and keeps a certain distance with the conveyor belt; the metal strip is arranged on the conveying belt and used for coating the substrate on the conveying belt; the optical detection device is arranged on the workbench, and the optical detector can emit light waves and receive light waves and can also compare the emitted and received light wave signals; the optical detection device is also provided with two signal lamps, and the signal lamps are used for feeding back detected signals; has the advantages that: through providing a neotype coating machine, can detect mouthful golden liquid outlet before carrying out the coating action at every turn, when guaranteeing that mouthful golden liquid outlet department does not have the foreign matter, the work of scribbling begins again, has improved the success rate of coating.

Description

Novel coating machine and coating method thereof
Technical content
The application relates to the field of coating, in particular to a novel coating machine and a coating method thereof.
Background
In the process of preparing a TFT-LCD (thin film transistor-liquid crystal display) substrate, coating is an important link. In the coating process, if the gold of the coating machine is not wiped cleanly, and the gold liquid outlet is still put into use when foreign matters remain, the problems of film breaking, scratch and the like on the surface of the produced substrate can be caused, the quality of the substrate can be seriously influenced, and therefore the wiping and the detection of the gold are very important links in the coating process. In the existing coating machine, a device capable of detecting the metal outlet before the substrate is coated is not provided.
Therefore, in the existing coating machine technology, the problem that the gold foil in the coating machine cannot be detected whether to contain foreign matters or whether the content of the foreign matters reaches the standard before coating exists, and improvement is urgently needed.
Disclosure of Invention
The application relates to a novel coating machine and a coating method thereof, which are used for solving the problem that a gold foil in the coating machine in the prior art cannot be detected whether to contain foreign matters or whether the content of the foreign matters reaches the standard before coating.
In order to solve the above problems, the technical solution provided by the present application is as follows:
the application provides a novel coating machine, include: the device comprises a transmission device, a wiping device, a gold bar and an optical detection device; wherein the content of the first and second substances,
the transmission device includes: the device comprises a workbench, rollers, a guide rail and a conveyor belt;
the wiping device is arranged above the transmission device and keeps a certain distance with the conveyor belt;
the metal strip is arranged on the conveying belt and used for coating the substrate on the conveying belt;
the optical detection device is arranged on the workbench, and the optical detector can emit light waves and receive light waves and can also compare the emitted and received light wave signals. The optical detection device is also provided with two signal lamps, and the signal lamps are used for feeding back detected signals.
According to a preferred embodiment provided by the application, the length of the wiping device is greater than or equal to the length of the gold liquid outlet.
According to a preferred embodiment provided by the application, the mouth metal and the wiping device can move along the X-axis direction and the Z-axis direction, and the optical detection device can move along the Y-axis direction.
According to a preferred embodiment provided by the present application, the optical detection device emits light in the wavelength range of: 400-770 nm.
According to a preferred embodiment provided by the present application, the optical detection device can emit spectral lines of a plurality of different light resistances.
According to a preferred embodiment provided by the application, the optical detection device is formed by a cube or a cuboid and a cylinder.
According to a preferred embodiment provided by the present application, two signal lamps are further disposed on the optical detection device.
According to a preferred embodiment provided by the present application, the two signal lights are a red light and a green light.
According to a preferred embodiment provided herein, the table includes a first rail and a second rail.
The application also provides a coating method of the novel coating machine, which comprises the novel coating machine, wherein the coating method comprises the following steps:
s10, moving the wiping device and the Koujin so that the wiping device wipes the Koujin liquid outlet;
s20, removing the wiping device and aligning the gold mouth with the optical detection device;
s30, the optical detection device moves along the direction of the guide rail and emits light waves;
s40, when the green light on the optical detection device is turned on, the gold plate moves along the first direction to be aligned with the edge of the substrate;
and S50, moving the substrate on the conveyor belt along a first direction, and simultaneously coating the photoresist liquid on the gold.
Has the advantages that: compared with the prior art, the application provides a neotype coating machine that contains transmission, mouthful gold, wiping arrangement and optical detection device, can detect mouthful gold liquid outlet before carrying out the coating action at every turn, ensures that mouthful gold liquid outlet is the restart of no foreign matter and carries out coating work, has improved the quality of coating base plate.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a novel coater provided in an embodiment of the present application.
Fig. 2 is an enlarged view of a partial structure of a novel coater according to an embodiment of the present disclosure.
Fig. 3 is a schematic flow chart of a coating method of the novel coater according to an embodiment of the present disclosure.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. It is to be understood that the embodiments described are only a few embodiments of the present application and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
In the description of the present application, it is to be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the present application and for simplicity in description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed in a particular orientation, and be operated in a particular manner, and are not to be construed as limiting the present application. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", may explicitly or implicitly include one or more of the described features. In the description of the present application, "a plurality" means two or more unless specifically limited otherwise.
Referring to fig. 1, a schematic structural diagram of a novel coater provided by the present application is shown. 1 is a wiping device, 2 is a transmission device, 3 is koujin, 4 is an optical detection device, 21 is a roller, 22 is a first guide rail, 23 is a second guide rail, 24 is a workbench, 25 is a conveyor belt, 26 is a first height adjusting part, 27 is a second height adjusting part, 31 is a koujin liquid outlet, 32 is a support rod, 321 is a first support rod, 322 is a bolt connection, and 323 is a second support rod.
The application provides a novel coating machine, include: the transmission device 2, the wiping device 1, the mouth metal 3 and the optical detection device 4; wherein the transmission 2 comprises: a table 24, rollers 21, guide rails 21, 22, and a conveyor belt 25; the wiping device 1 is arranged above the transmission device 2 and keeps a certain distance with the conveyor belt 25; the opening metal 3 is arranged right opposite to the conveyor belt 25 and used for coating the substrate on the conveyor belt 25; the optical detection device 4 is arranged on the workbench 24, and the optical detector 4 can emit light waves and receive light waves and can also compare the emitted and received light wave signals. The application provides a device for detecting mouthful golden 3 liquid outlet 31 foreign matter is optical detection device, can also use other devices of the same type such as sound wave detection device simultaneously.
In a preferred embodiment provided by the present application, the length of the wiping device 1 is greater than or equal to the length of the metal outlet 31 of the metal nozzle 3. The wiping device 1 and the metal outlet 31 are matched with each other in shape to form a cuboid.
According to a preferred embodiment provided by the present application, the mouthpiece 3 and the wiping device 1 are movable in the X-axis direction and the Z-axis direction, and the optical detection device 4 is movable in the Y-axis direction. The movement of the wiping device 1 in the Z-axis direction is regulated by a first height adjustment 26 and a second height adjustment 27 provided on the side of the table 24, while the wiping device 1 can also slide in the X-axis direction. The tab 3 slides left and right along the second guide rail 23 in the X-axis direction, slides up and down along the second support bar 323 in the Z-axis direction, and is fixed by the bolt 322. The optical detection device 4 can slide back and forth along the first guide rail 22. The roller 21 can rotate clockwise or anticlockwise, and the conveyor belt 25 is driven by the roller 21 to move along the X-axis negative direction or positive direction.
According to a preferred embodiment provided by the present application, the optical detection device 4 emits light in the wavelength range of: 400-770nm, the spectral lines of various photoresists can be emitted according to actual requirements and selected.
According to a preferred embodiment provided by the present application, the metal 3 is composed of a triangular prism (i.e. metal outlet 31) and a polygonal solid view, which may be a polygonal solid view such as a triangular prism, a rectangular parallelepiped or a pentagonal prism. The mouth gold 3 is connected with the workbench 24 through a support frame 32. The supporting frame 32 includes a first supporting rod 321 and a second supporting rod 323. The first support bar 321 can slide up and down along the second support bar 323. The first support bar 321 and the second support bar 323 are fixed by bolts 322, as shown in fig. 2.
According to a preferred embodiment provided by the present application, the optical detection device 4 is formed by a cube or a cuboid and a cylinder. The optical detection device 4 can slide back and forth on the first guide rail 22. The optical detection device 4 is also provided with two signal lamps. The two signal lamps are a red lamp and a green lamp. When the optical detection device 4 detects the gold 3, the optical detection device 4 moves along the first guide rail 22 and emits a light wave, and if a green light on the optical detection device 4 is turned on, it indicates that the gold 3 liquid outlet 31 is clean, or the content of particles in the gold 3 liquid outlet 31 is within an allowable range, that is, the gold 3 liquid outlet 31 does not affect the quality of the substrate during coating; when the red light on the optical detection device 4 is turned on and the optical detection device 4 stops sliding, the amount of the foreign matters in the metal outlet 31 corresponding to the place where the metal outlet stays exceeds the allowable range, and the coating machine stops coating.
According to a preferred embodiment provided by the present application, the wiping device 1 has a groove in the center, the width of the groove is equal to or slightly greater than the width of the kou jin 3 liquid outlet 31, the taper of the two end faces of the groove is equal to the taper of the kou jin 3 liquid outlet 31, and the material of the wiping device is soft.
In a preferred embodiment provided herein, the table 24 includes a first rail 22 and a second rail 23. The first guide rail 22 is a moving rail of the optical detection device 4, and the second guide rail 23 is a moving rail of the mouthpiece 3.
Referring to fig. 3, the present application further provides a coating method of the novel coating machine, including any one of the novel coating machines described above, the coating method including the following steps: s10, moving the wiping device 1 and the Koujin 3 so that the wiping device 1 wipes the Koujin 3 liquid outlet 31; s20, removing the wiping device 1 while aligning the mouthpiece 3 with the optical detection device 4; s30, the optical detection device 4 moves along the first guide rail 22 and emits light waves; s40, when the green light on the optical detection device 4 is lighted, the gold 3 moves along the positive direction of the X axis and is aligned with the edge of the substrate; and S50, moving the substrate on the conveyor belt 25 along the X-axis negative direction, and simultaneously coating the photoresist liquid on the gold 3. Wherein the step "S10" includes: s101, moving the wiping device 1 along the positive direction of the X axis, and moving the gulch 3 along the negative direction of the X axis so that the wiping device 1 is close to the gulch 3; and S102, moving the wiping device 1 and the metal nozzle 3 along the Z-axis direction, so that the center of the wiping device 1 is over against the liquid outlet 31 of the metal nozzle 3. The step "S20" includes: s201, moving the Koujin 3 in the positive direction of the Z axis to enable the liquid outlet 31 of the Koujin 3 to leave the groove of the wiping device 1; s202, moving the wiping device 1 along the negative X-axis direction to enable the wiping device 1 and the gold mouth 3 to keep a certain distance in the X-axis direction; s203, moving the metal 3 along the negative direction of the X axis so that the liquid outlet 31 of the metal 3 is opposite to the optical detection device 4.
The above detailed description is made on a novel coating machine and a coating method thereof provided in the embodiments of the present application, and the principle and the embodiments of the present application are explained by applying specific examples, and the description of the above embodiments is only used to help understanding the technical scheme and the core idea of the present application; those of ordinary skill in the art will understand that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications or substitutions do not depart from the spirit and scope of the present disclosure as defined by the appended claims.

Claims (10)

1. A novel coating machine is characterized by comprising: the device comprises a transmission device, a wiping device, a gold bar and an optical detection device; wherein the content of the first and second substances,
the transmission device includes: the device comprises a workbench, rollers, a guide rail and a conveyor belt;
the wiping device is arranged above the transmission device and keeps a certain distance with the conveyor belt;
the metal strip is arranged on the conveying belt and used for coating the substrate on the conveying belt;
the optical detection device is arranged on the workbench, and the optical detector can emit light waves and receive light waves and can also compare the emitted and received light wave signals; the optical detection device is also provided with two signal lamps, and the signal lamps are used for feeding back detected signals.
2. The novel coating machine as claimed in claim 1, wherein the length of the wiping device is greater than or equal to the length of the gold liquid outlet.
3. The novel coating machine as claimed in claim 1, wherein the tinsel and the wiping device are movable in X-axis direction and Z-axis direction, and the optical detection device is movable in Y-axis direction.
4. The novel coating machine as claimed in claim 3, wherein the optical detection device emits light in a wavelength range of: 400-770 nm.
5. The novel coating machine as claimed in claim 4, wherein the optical detection device can emit spectral lines of a plurality of different light resistances.
6. The novel coating machine as claimed in claim 5, wherein the optical detection device is formed by a cube or a rectangular parallelepiped and a cylinder.
7. The novel coating machine as claimed in claim 6, wherein two signal lamps are further provided on the optical detection device.
8. The novel coater according to claim 7, wherein the two signal lights are a red light and a green light.
9. The novel coater of claim 1, wherein the table comprises a first guide and a second guide.
10. The coating method of the novel coating machine is characterized by comprising the novel coating machine, and the coating method comprises the following steps:
s10, moving the wiping device and the Koujin so that the wiping device wipes the Koujin liquid outlet;
s20, removing the wiping device and aligning the gold mouth with the optical detection device;
s30, the optical detection device moves along the direction of the first guide rail and emits light waves;
s40, when the green light on the optical detection device is turned on, the gold is moved along the positive direction of the X axis and is aligned with the edge of the substrate;
and S50, moving the substrate on the conveyor belt along the negative direction of the X axis, and simultaneously coating the photoresist on the gold.
CN201910043144.8A 2019-01-17 2019-01-17 Novel coating machine and coating method thereof Active CN109668900B (en)

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Application Number Priority Date Filing Date Title
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Application Number Priority Date Filing Date Title
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CN109668900B true CN109668900B (en) 2021-07-06

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Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1940537A (en) * 2005-09-26 2007-04-04 东京毅力科创株式会社 Photological foreign body checkout gear and treatment fluid applying apparatus containing same
KR20070107874A (en) * 2006-05-04 2007-11-08 삼성전자주식회사 Apparatus for cleaning a chemical solution supplying nozzle
US7447559B2 (en) * 2003-10-08 2008-11-04 Samsung Electronics Co., Ltd. Apparatus and method of forming a photoresist pattern, and repair nozzle
CN101468545A (en) * 2007-12-26 2009-07-01 精工爱普生株式会社 Pattern formation device
TW201210699A (en) * 2010-09-06 2012-03-16 Yi Hua Machine Engineering Co Ltd Cleaning method and apparatus for slit-type coating nozzle of panel coating machine
CN103558230A (en) * 2013-11-11 2014-02-05 合肥京东方光电科技有限公司 Optical inspection equipment
CN105214906A (en) * 2015-08-26 2016-01-06 武汉华星光电技术有限公司 A kind of method of apparatus for coating and the wrong report of removing foreign matter thereof
CN105487267A (en) * 2016-02-03 2016-04-13 苏州市金悦自动化设备有限公司 API optical self-cleaning and detection equipment
CN106770355A (en) * 2016-12-09 2017-05-31 武汉华星光电技术有限公司 The detection device for foreign matter and method of a kind of CF coating machines, CF coating machines
CN107450286A (en) * 2017-08-07 2017-12-08 深圳市华星光电技术有限公司 Coating mouth gold scrapes scrape along photoresistance and scrapes device
CN107961931A (en) * 2017-12-29 2018-04-27 信利(惠州)智能显示有限公司 Cleaning device
CN108580133A (en) * 2018-06-01 2018-09-28 深圳市华星光电半导体显示技术有限公司 Coating apparatus mouth gold Wiping mechanism

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7447559B2 (en) * 2003-10-08 2008-11-04 Samsung Electronics Co., Ltd. Apparatus and method of forming a photoresist pattern, and repair nozzle
CN1940537A (en) * 2005-09-26 2007-04-04 东京毅力科创株式会社 Photological foreign body checkout gear and treatment fluid applying apparatus containing same
KR20070107874A (en) * 2006-05-04 2007-11-08 삼성전자주식회사 Apparatus for cleaning a chemical solution supplying nozzle
CN101468545A (en) * 2007-12-26 2009-07-01 精工爱普生株式会社 Pattern formation device
TW201210699A (en) * 2010-09-06 2012-03-16 Yi Hua Machine Engineering Co Ltd Cleaning method and apparatus for slit-type coating nozzle of panel coating machine
CN103558230A (en) * 2013-11-11 2014-02-05 合肥京东方光电科技有限公司 Optical inspection equipment
CN105214906A (en) * 2015-08-26 2016-01-06 武汉华星光电技术有限公司 A kind of method of apparatus for coating and the wrong report of removing foreign matter thereof
CN105487267A (en) * 2016-02-03 2016-04-13 苏州市金悦自动化设备有限公司 API optical self-cleaning and detection equipment
CN106770355A (en) * 2016-12-09 2017-05-31 武汉华星光电技术有限公司 The detection device for foreign matter and method of a kind of CF coating machines, CF coating machines
CN107450286A (en) * 2017-08-07 2017-12-08 深圳市华星光电技术有限公司 Coating mouth gold scrapes scrape along photoresistance and scrapes device
CN107961931A (en) * 2017-12-29 2018-04-27 信利(惠州)智能显示有限公司 Cleaning device
CN108580133A (en) * 2018-06-01 2018-09-28 深圳市华星光电半导体显示技术有限公司 Coating apparatus mouth gold Wiping mechanism

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