CN108072659B - Multi-optical vision apparatus - Google Patents
Multi-optical vision apparatus Download PDFInfo
- Publication number
- CN108072659B CN108072659B CN201610998669.3A CN201610998669A CN108072659B CN 108072659 B CN108072659 B CN 108072659B CN 201610998669 A CN201610998669 A CN 201610998669A CN 108072659 B CN108072659 B CN 108072659B
- Authority
- CN
- China
- Prior art keywords
- vision
- light
- bright
- scotopic
- imaging area
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
Abstract
The present invention relates to a multi-optic vision apparatus. More particularly, the present invention relates to a multi-optic vision apparatus that detects defects of an object. The present invention can obtain images of a plurality of optical characteristics such as a bright visual image, a dark visual image, and a differentiated visual image by one-time imaging without illumination control or illumination synchronization at the time of detecting a defect of an object, so that interference between illumination devices can be minimized and failure of defect detection of the object can be reduced by using supplementary image data.
Description
Technical Field
The present invention relates to a multi-optic vision apparatus. More particularly, the present invention relates to a multi-optic vision apparatus that detects defects of an object.
Background
In general, a technology of determining that an object has a defect through an image after the object is imaged using a camera has been implemented in various fields. For example, defects such as chips or protrusions of an object are detected by imaging in many industries such as imaging in flat panel displays, glass substrates, LCDs, automotive glass, and the like.
For imaging defects in many industries, line scan cameras are used, and lighting devices are installed to irradiate light. However, the line scan camera is sensitive to the illumination angle of the line and the angle of the line scan camera, and if the rotation axis is slightly out of phase (more than 0.1 degrees), the brightness of the right and left images is different, while the image shape is different even if the right angle is slightly changed. In addition, the illumination must be precisely controlled in the line scanning camera according to the time when the object is imaged and the transmission time of the object, and when these several times are not aligned, a desired image cannot be obtained.
The background art of the present invention is disclosed in korean patent laid-open publication No.2012-0129547 (11/28/2012). In patent laid-open No.2012-0129547, it is configured that a plurality of illumination devices are sequentially and rapidly lighted, and an image according to the illumination devices can be obtained by a multi-line scanning camera. However, patent laid-open No.2012-0129547 requires the illumination of the optical angle and the synchronization of the imaging frequency of the camera. In addition, in patent laid-open publication No.2012 and 0129547, a change in the synchronization value is heavily dependent on the multi-line scanning camera and the illumination characteristics, and a controller capable of sequentially and rapidly illuminating a plurality of illumination devices corresponding to the multi-line scanning camera for high-speed imaging is required.
The above information disclosed in this background section is only for enhancement of understanding of the background of the invention and therefore it may contain information that does not form the prior art that is already known in this country to a person of ordinary skill in the art.
Disclosure of Invention
The present invention provides a multi-optical vision apparatus that obtains images of a plurality of optical characteristics with a single imaging without illumination control or illumination synchronization, and reduces detection errors by using supplementary image data when detecting defects.
The present invention provides a multi-optical vision apparatus that simply obtains multiple images through a temporally and spatially simplified instrument and maximizes defect detection efficiency by minimizing interference between illumination devices.
According to one aspect of the invention, a multi-optic vision apparatus is disclosed.
A multi-optical vision apparatus according to an exemplary embodiment of the present invention includes: a dark vision illumination device that irradiates light so that a defect on a viewing object is bright and the periphery of the defect is dark; a bright visual illumination device that irradiates light so that a defect on a viewing object is dark and the periphery of the defect is bright; distinguishing a visual lighting device which irradiates light to stereoscopically show a defect on an object; an area scanning camera that continuously images the object such that the scotopic vision illumination device, the bright vision illumination device, and the differentiated vision illumination device simultaneously and respectively illuminate light to generate an image; and a controller that edits the image to obtain a scotopic vision image, a highlight vision image, and a differentiated vision image of the object, respectively.
The present invention can obtain images such as a bright visual image, a dark visual image, and a plurality of optical characteristics distinguishing the visual images by one-time imaging without illumination control or illumination synchronization when detecting a defect of an object.
The present invention can minimize interference between the lighting devices and can reduce failure of detection of defects of the object by using the supplementary image data.
The present invention simplifies the test instrument and simply obtains multiple images for multiple illuminators, thereby being time or space efficient.
Drawings
Fig. 1 to 6 are views illustrating a multi-optical vision apparatus according to an exemplary embodiment of the present invention.
Fig. 7 and 8 are views illustrating a multi-optical vision apparatus according to another exemplary embodiment of the present invention.
Fig. 9 is a view illustrating an image obtaining method of a multi-optical vision apparatus according to an exemplary embodiment of the present invention.
Fig. 10 to 12 are views illustrating defects detected in the multi-optical vision apparatus according to the exemplary embodiment of the present invention.
Detailed Description
It will be apparent to those skilled in the art that various modifications and variations can be made to the present invention without departing from the spirit and scope of the invention, and that specific exemplary embodiments are illustrated in the accompanying drawings and described in the detailed description. Thus, it is intended that the present invention cover the modifications and variations of this invention provided they come within the scope of this invention and their equivalents. In describing the exemplary embodiments of the present specification, a detailed description of well-known technologies associated with the present invention will be omitted when it is determined that the detailed description may obscure the present invention. The numbers (e.g., first, second, etc.) used in the description of the present specification are identification symbols for distinguishing one constituent element from other constituent elements only. In the present specification, it should be understood that when an element is referred to as being "connected" or "coupled" to another element, it may be directly connected or coupled to the other element or may be connected or coupled to the other element with another element interposed therebetween, especially if not described to the contrary. Now, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the description of the present invention, the same reference numerals are used for the same devices regardless of the figure numbers in order to facilitate a comprehensive understanding.
Fig. 1 to 6 are views illustrating a multi-optical vision apparatus according to an exemplary embodiment of the present invention.
Referring to fig. 1, the multi-optical vision apparatus includes a moving device 100, an illumination device 200, an area scanning camera 300, and a controller 400.
The mobile device 100 moves the object 110 for testing. The mobile device 100 may move the object 110 back and forth, left and right, or up and down based on a plane. The mobile device 100 may further include a fixing device (not shown) that fixes the object 110.
The lighting device 200 irradiates light to the object to correctly detect the defect of the object 110.
Referring to fig. 2, the illumination device 200 includes a light source unit 202, a condenser lens 204, a light transmission unit 206, and a diffuse reflection blocking shield plate 208.
The light source unit 202 generates light, and may be, for example, a Light Emitting Diode (LED). For example, the light source unit 202 may be an LED having a luminous flux (Lx) of 260 flux, a CCT range of 8300k, and a viewing angle of 125 degrees.
The condenser lens 204 condenses light generated from the light source unit 202 at a predetermined distance. For example, the condenser lens 204 condenses light at a distance of 80 mm.
The light transmission unit 206 guides the light to be intensively irradiated to the object 110.
In order to concentrate light to an irradiation area, the diffuse reflection blocking shield plate 208 surrounds the remaining portion except for the portion of the condenser lens 204 to the light transmission unit 206 to block light. When a plurality of lighting apparatuses according to the present invention are simultaneously irradiated to an object, the diffuse reflection blocking shield plate 208 prevents light from interfering in each irradiated area, thereby further improving the accuracy of defect detection of the object.
Referring to fig. 3, the lighting device 200 includes a scotopic vision lighting device 210, a bright vision lighting device 220, and a differentiated vision lighting device 230.
The scotopic vision illumination device 210, the bright vision illumination device 220, and the differentiated vision illumination device 230 are separated according to an irradiation angle of light and a reflection angle of light from the subject 110, and are installed to maintain a predetermined interval from an irradiation area to which light is irradiated. In the scotopic vision lighting device 210, the bright vision lighting device 220, and the differentiated vision lighting device 230, the illumination angle and the illumination brightness may be changed depending on the physical properties of the test object. For example, for the scotopic vision lighting device 210, the bright vision lighting device 220, and the differentiating vision lighting device 230, in the case where the printed surface of the window glass of the smartphone is the subject, the scotopic vision lighting device 210 may have an illumination angle based on the right plane of 107 degrees, the bright vision lighting device 220 may have an illumination angle based on the right plane of 53 degrees, and the differentiating vision lighting device 230 may have an illumination angle based on the right plane of 165 degrees. For example, for the scotopic vision lighting device 210, the bright vision lighting device 220, and the distinguishing vision lighting device 230, in the case where the metal material is the object, the illumination brightness value is reduced to 1/3, the scotopic vision lighting device 210 may have an illumination angle of 112 degrees based on the right plane, the bright vision lighting device 220 may have an illumination angle of 48 degrees based on the right plane, and the distinguishing vision lighting device 230 may have an illumination angle of 165 degrees based on the right plane, as compared with the case of the printed surface of the window glass of the smartphone. The scotopic vision illumination device 210, the bright vision illumination device 220, and the differentiated vision illumination device 230 differentiate the interval of the installation position between each illumination device according to the viewing angle (field of view, FOV) of the area scanning camera 300. This is to minimize the interference of light by maintaining the interval of the irradiation region to which each of the lighting devices is irradiated. The reason why the multi-optical vision apparatus according to the present invention includes three illumination devices is to further increase the accuracy of defect detection of an object by obtaining images of a plurality of optical characteristics such as a bright vision image, a dark vision image, and a differentiated vision image through separate imaging without illumination control or illumination synchronization to use supplementary image data.
Next, the dark vision illumination device 210, the bright vision illumination device 220, and the differentiating vision illumination device 230 will be described with reference to fig. 4 to 6, respectively.
Referring to fig. 4, the scotopic vision illumination device 210 illuminates light so that the surroundings are seen dark, while the defect to be detected on the subject 110 is seen bright. The illumination angle and the illumination wavelength of the scotopic vision illuminator 210 may vary depending on the physical properties of the object, however, the illumination angle of the scotopic vision illuminator 210 is predetermined to produce diffuse reflection for the defect to be detected.
Referring to fig. 5, the bright visual lighting device 220 irradiates light so that an object including a region surrounding a defect is seen. In this way, the defect can go from dark to light, while the defect to be detected on the object 110 is dark. The illumination angle and the illumination wavelength of the bright visual illumination device 220 may vary depending on the physical properties of the object, however, the illumination angle of the bright visual illumination device 220 is predetermined to produce a regular reflection for the defect to be detected.
Referring to fig. 6, the differentiating vision illuminating device 230 irradiates light so that the object 110 is seen to be bright as a whole and shadows the defect to be detected. Light from the differentiating visual illumination device 230 is reflected by the surface of the object such that the light is scattered in different directions. The horizontal component of the scattered light may contact the location of the gradient change of the surface of the object, whereby the amount of light that may be incident on an imaging device such as the area scanning camera 300 may be increased. Therefore, a bright image like fig. 6 can be obtained. The illumination angle and the illumination wavelength of the distinguishing visual illumination means 230 may vary depending on the physical properties of the object, however, the illumination angle of the distinguishing visual illumination means 230 is predetermined to generate interference of light for stereoscopically showing the defect to be detected.
The area scan camera 300 images the object 110 illuminated at each position of the illumination apparatus 200 simultaneously and separately. The area scan camera 300 sets an imaging area of a subject in advance by a viewing angle and generates image data including a scotopic vision imaging area, a bright vision imaging area, and a differentiated vision imaging area by imaging the subject once. That is, the area scan camera 300 may image the subject only once to obtain an image dataset of the subject that includes a scotopic vision imaging region, a photopic vision imaging region, and a differential vision imaging region. Herein, the scotopic vision imaging area, the bright vision imaging area, and the distinguishing vision imaging area are respectively maintained at predetermined intervals to minimize interference of the respectively irradiated lights. In the case where the subject is moved by the moving device 100, the area scanning camera 300 is placed in the vertical direction of the subject to continuously image the subject at predetermined time intervals. Herein, the predetermined time interval may vary depending on the moving speed of the object and the size of the imaging area of the object. For example, the area scan camera 300 can produce an image of a pixel size of 2048 × 2048, and there is an advantage of imaging the entire subject in a short period of time with short imaging recovery. In addition, the area scanning camera 300 is not sensitive to the line illumination angle and the camera angle as the line scanning camera does, and it is not necessary to precisely light the illumination device depending on the imaging time of the camera and the moving time of the object. In addition, since the area scan camera 300 is not sensitive to the rotation axis of the illumination apparatus, the area scan camera 300 is fixed in the vertical direction of the plane, since the optical characteristic image is obtained in a state where the illumination apparatus is turned on, continuous illumination control is unnecessary, and a controller for additional high-speed imaging and synchronous illumination control is not necessary.
The controller 400 processes the images to the area scan camera 300 to obtain a scotopic vision image, a light vision image, and a differentiated vision image of the subject, respectively. The controller 400 separates a scotopic vision imaging area, a light vision imaging area, and a differentiated vision imaging area from each image data of one imaging of the subject, and adds the separated scotopic vision imaging area, light vision imaging area, and differentiated vision imaging area to generate a scotopic vision image, a light vision image, and a differentiated vision image of the subject.
The multi-optical vision apparatus may further include a defect detection unit (not shown) for comparing and analyzing the generated scotopic vision image, the bright vision image, and the differentiated vision image of the object to detect defects of the object.
Fig. 7 and 8 are views illustrating a multi-optical vision apparatus according to another exemplary embodiment of the present invention.
A multi-optical vision apparatus according to another exemplary embodiment of the present invention is the same as the multi-optical vision apparatus described with reference to fig. 1 to 6 except for the configuration of the illumination device 200. Accordingly, the multi-optical vision apparatus will be described while focusing on the illumination device 200.
Referring to fig. 7 and 8, a multi-optic vision apparatus according to another exemplary embodiment of the present invention includes a distinguishing visual illumination device 230 and a bright/dark visual illumination device 240.
The distinguishing visual lighting device 230 illuminates light to create shadows of defects of the object 110. The illumination angle of the discrimination vision illumination device 230 is predetermined to generate interference of light for three-dimensionally showing the defect to be detected, and may be 36.3 degrees based on the right plane, for example.
The bright/dark vision illuminating device 240 simultaneously illuminates bright vision light for a bright vision imaged image of a subject and dark vision light for a dark vision imaged image of the subject while distinguishing an illuminated area of the subject. The bright/dark visual lighting device 240 uses diffused reflection of the condenser lens 204 and irradiates light to a dual path including a path in which light is refracted and condensed in the lens and a path in which light is diffused and irradiated. The bright/dark visual lighting device 240 may distinguish the configuration of the light transmission unit 206 and the diffuse reflection blocking shield plate 208 to obtain a diffuse reflection path.
The multi-optical vision apparatus according to another exemplary embodiment of the present invention reduces the number of illumination devices by the bright/dark vision illumination device 240, thereby reducing the number of test instruments and the cost thereof.
Fig. 9 is a view illustrating an image obtaining method of a multi-optical vision apparatus according to an exemplary embodiment of the present invention.
Referring to fig. 9, if the test object moves, the multi-optical vision apparatus continuously images the object 110 irradiated with light from the scotopic vision illumination device 210, the bright vision illumination device 220, and the differentiating vision illumination device 230. In addition, according to another exemplary embodiment, the multi-optical vision apparatus may continuously image the subject 110 irradiated with light from the distinguishing visual illumination device 230 and the bright/dark visual illumination device 240. The multi-optic vision device produces an image that includes a scotopic vision imaging area, a bright vision imaging area, and a distinct vision imaging area. Herein, the sizes of the image and the imaging area may be set in advance by the angle of view of the area scanning camera 300. The multi-optic vision device stores N (natural number) imaged images. Herein, N varies depending on an imaging region predetermined in advance by the angle of view of the region scanning camera 300, and may be a value of the area of all regions of the subject divided by the area of the scotopic vision imaging region, the area of the bright vision imaging region, or the area of the differentiated vision imaging region. The multi-optical vision apparatus separates a scotopic vision imaging region, a photopic vision imaging region, and a discriminative vision imaging region from the N images sequentially imaged and stored, and adds the separated scotopic vision imaging region, photopic vision imaging region, and discriminative vision imaging region to generate a scotopic vision image, photopic vision image, and discriminative vision image of the subject, respectively.
Fig. 10 to 12 are views illustrating defects detected in the multi-optical vision apparatus according to the exemplary embodiment of the present invention.
Referring to fig. 10 to 12, the multi-optical vision apparatus can further correctly detect the defect of the object 110. For example, the multi-optical vision apparatus may detect an Optically Clear Adhesive (OCA) defect, a protrusion defect, a surface foreign matter defect, a scratch defect, and a debris defect, which may be generated in the display apparatus.
An Optically Clear Adhesive (OCA) defect 1110, such as a defect due to an OCA wrinkle adhered to the lower end of the window, can be detected by distinguishing visual data.
A protrusion defect 1120 such as a slightly protruding defect of the glass on the top of the window can also be detected by distinguishing visual data.
Surface foreign object defects 1130, such as defects where suspended foreign matter adheres to the window, can be detected by bright visual images.
The scratch defect 1140, which is a defect such as a shape of a window surface scratch, can be detected by a scotopic vision image.
A debris defect 1150, such as a defect that an outer portion of a window is damaged, may be detected by a bright visual image.
The multi-optical vision apparatus according to the present invention simultaneously generates a scotopic vision image, a bright vision image, and a differentiated vision image by the area scanning camera 300, and can rapidly and correctly detect the above-mentioned several defects by comparing the scotopic vision image, the bright vision image, and the differentiated vision image. For example, defects of the object may be classified into invisible defects and visible defects depending on the optical settings. The present invention can simultaneously determine these defects by comparing scotopic visual images, bright visual images, and differentiating visual images. For example, in a photopic vision optical setting, there is a characteristic that suspended impurities (which are not defects) that are not actual defects are represented darkly and the internal actual impurities are represented brightly, and the suspended impurities can be removed by using the characteristic. That is, by applying the black area data in the bright visual image to the other dark visual images and the locations of the distinct visual images, it is possible to prevent erroneous determination of (over-detected) defects in the other optical settings.
On the other hand, the image obtaining method of the multi-optical vision apparatus according to the exemplary embodiment of the present invention may be implemented as a program instruction format executable by a device that processes various electronic information, and may be recorded on a storage medium. The storage medium may include program instructions, file data, and data structures, or a combination thereof. The program instructions recorded on the storage medium may be those designed and constructed for the purposes of the present invention or those known and useful to those of ordinary skill in the computer software art. Examples of storage media include magnetic media such as hard disk drives, floppy disks, or magnetic tape, optical media such as CD-ROMs or DVDs, magnetic optical media such as floptical disks, and hardware devices such as ROMs, RAMs, or flash memories, particularly configured to store and execute program instructions. In addition, the medium may be a transmission medium such as an optical line or a metal line, a waveguide (including a carrier wave transmitting a signal specifying a program instruction), or other data structure. Examples of program instructions include high-level language code that is executable by a device that electronically processes information, such as a computer, using an interpreter other than machine language code generated by a compiler. The hardware device may be configured as at least one software module operable to perform the operations of the present invention.
While the invention has been described in connection with what is presently considered to be practical exemplary embodiments, it is to be understood that the invention is not to be limited to the disclosed embodiments, but on the contrary, is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the appended claims. < symbolic description >100 mobile device
200 lighting device
210 dark vision lighting device
220: bright vision lighting device
230: distinguishing visual illumination device
240: bright/dark vision lighting device
300: area scanning camera
400: and a controller.
Claims (9)
1. A multi-optic vision apparatus comprising:
a scotopic vision lighting device that irradiates light so that a defect on a viewing object is bright and the periphery of the defect is dark;
a bright visual lighting device that irradiates light so that the defect on the object is seen to be dark and the periphery of the defect is seen to be bright;
distinguishing a visual lighting device which irradiates light to stereoscopically show the defect on the object;
an area scanning camera that images the object while the scotopic vision illumination device, the bright vision illumination device, and the differentiated vision illumination device simultaneously and respectively provide light to generate image data, the image data including a scotopic vision imaging area, a bright vision imaging area, and a differentiated vision imaging area; and
a controller editing the image data to obtain a scotopic vision image, a photopic vision image, and a discriminative vision image of the subject, respectively, by separating a scotopic vision imaging area, a photopic vision imaging area, and a discriminative vision imaging area from each image data of the subject and editing the separated scotopic vision imaging area, photopic vision imaging area, and discriminative vision imaging area.
2. The multi-optic vision device of claim 1,
the scotopic vision illuminating device, the bright vision illuminating device, and the distinguishing vision illuminating device are separated according to an angle of light irradiation to the subject, and are installed to maintain a predetermined interval of an irradiation area of each light irradiation to the subject.
3. The multi-optic vision device of claim 2,
at least one irradiation region and interval of each light irradiation are predetermined depending on a viewing angle of the region scanning camera.
4. The multi-optic vision apparatus of claim 1,
the scotopic vision illuminating device, the bright vision illuminating device, and the distinguishing vision illuminating device distinguish an angle of light irradiation and an irradiation brightness of light depending on a physical property of the object.
5. The multi-optic vision apparatus of claim 1,
at least one of the scotopic vision illumination device, the bright vision illumination device, and the differentiated vision illumination device comprises:
a light source unit generating light;
a condensing lens condensing the generated light;
a light transmission unit that concentrates and irradiates the condensed light; and
the diffuse reflection blocks the shielding plate, concentrating light to prevent interference of light irradiated from other lighting devices.
6. The multi-optic vision apparatus of claim 1,
the area scan camera generates N images including a scotopic vision imaging area, a bright vision imaging area, and a differentiated vision imaging area having a predetermined interval, where N is a natural number.
7. The multi-optic vision device of claim 6, further comprising
A moving device to move the object for testing,
wherein the N is changed depending on an imaging area predetermined by a moving speed of the moving device moving the object and a viewing angle of the area scanning camera.
8. The multi-optic vision apparatus of claim 3,
the scotopic vision illumination device and the bright vision illumination device are integrated into one illumination device such that illumination areas are distinguished by refraction of different angles and light is simultaneously illuminated to the object.
9. The multi-optic vision apparatus of claim 1, further comprising
A defect detection unit comparing and analyzing the scotopic vision image, the bright vision image and the differentiated vision image of the object to detect a defect of the object.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610998669.3A CN108072659B (en) | 2016-11-11 | 2016-11-11 | Multi-optical vision apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610998669.3A CN108072659B (en) | 2016-11-11 | 2016-11-11 | Multi-optical vision apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108072659A CN108072659A (en) | 2018-05-25 |
| CN108072659B true CN108072659B (en) | 2022-05-31 |
Family
ID=62161951
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610998669.3A Active CN108072659B (en) | 2016-11-11 | 2016-11-11 | Multi-optical vision apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108072659B (en) |
Citations (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11108637A (en) * | 1997-10-03 | 1999-04-23 | Dakku Engineering Kk | Quality inspection device |
| WO2004019108A1 (en) * | 2002-08-23 | 2004-03-04 | Leica Microsystems Semiconductor Gmbh | Device and method for inspecting an object |
| JP2005181070A (en) * | 2003-12-18 | 2005-07-07 | Nippon Sheet Glass Co Ltd | Flaw detecting method of transparent plate-shaped body and flaw detector therefor |
| JP2006226715A (en) * | 2005-02-15 | 2006-08-31 | Dainippon Printing Co Ltd | Visual inspection device |
| CN101473218A (en) * | 2006-05-12 | 2009-07-01 | 康宁股份有限公司 | Apparatus and method for characterizing defects in a transparent substrate |
| JP2009180561A (en) * | 2008-01-29 | 2009-08-13 | Nikon Corp | Surface defect inspection method and device therefor |
| CN101526481A (en) * | 2007-06-03 | 2009-09-09 | 卡姆特有限公司 | Defect detecting method using a multiple illumination path system |
| KR20120129547A (en) * | 2011-05-20 | 2012-11-28 | 주식회사 에이치비테크놀러지 | Specimen inspecting apparatus using multi-line senser camera and multi-light |
| CN104067110A (en) * | 2011-12-02 | 2014-09-24 | 法国圣戈班玻璃厂 | Device for analysing blemishes of a transparent substrate |
| CN104279456A (en) * | 2013-07-05 | 2015-01-14 | 牧德科技股份有限公司 | Illumination system for optical detection, detection system using illumination system and detection method |
| CN105115979A (en) * | 2015-09-09 | 2015-12-02 | 苏州威盛视信息科技有限公司 | Image mosaic technology-based PCB working sheet AOI (Automatic Optic Inspection) method |
| CN105424600A (en) * | 2014-07-17 | 2016-03-23 | 奥宝科技股份有限公司 | Telecentric bright field and annular dark field seamlessly fused illumination |
| CN105486690A (en) * | 2015-12-23 | 2016-04-13 | 苏州精濑光电有限公司 | Optical detection device |
| KR20160047360A (en) * | 2014-10-22 | 2016-05-02 | 동우 화인켐 주식회사 | System and method for defect detection |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06235624A (en) * | 1992-12-15 | 1994-08-23 | Hitachi Ltd | Inspecting method and apparatus for transparent sheet |
| JP4230566B2 (en) * | 1998-07-21 | 2009-02-25 | 東芝ソリューション株式会社 | Defect integration processing apparatus and defect integration processing method |
| US6198529B1 (en) * | 1999-04-30 | 2001-03-06 | International Business Machines Corporation | Automated inspection system for metallic surfaces |
| US20010030744A1 (en) * | 1999-12-27 | 2001-10-18 | Og Technologies, Inc. | Method of simultaneously applying multiple illumination schemes for simultaneous image acquisition in an imaging system |
| US8462328B2 (en) * | 2008-07-22 | 2013-06-11 | Orbotech Ltd. | Efficient telecentric optical system (ETOS) |
| EP3088874B1 (en) * | 2013-12-27 | 2023-03-15 | JFE Steel Corporation | Surface defect detection method and surface defect detection device |
-
2016
- 2016-11-11 CN CN201610998669.3A patent/CN108072659B/en active Active
Patent Citations (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11108637A (en) * | 1997-10-03 | 1999-04-23 | Dakku Engineering Kk | Quality inspection device |
| WO2004019108A1 (en) * | 2002-08-23 | 2004-03-04 | Leica Microsystems Semiconductor Gmbh | Device and method for inspecting an object |
| JP2005181070A (en) * | 2003-12-18 | 2005-07-07 | Nippon Sheet Glass Co Ltd | Flaw detecting method of transparent plate-shaped body and flaw detector therefor |
| JP2006226715A (en) * | 2005-02-15 | 2006-08-31 | Dainippon Printing Co Ltd | Visual inspection device |
| CN101473218A (en) * | 2006-05-12 | 2009-07-01 | 康宁股份有限公司 | Apparatus and method for characterizing defects in a transparent substrate |
| CN101526481A (en) * | 2007-06-03 | 2009-09-09 | 卡姆特有限公司 | Defect detecting method using a multiple illumination path system |
| JP2009180561A (en) * | 2008-01-29 | 2009-08-13 | Nikon Corp | Surface defect inspection method and device therefor |
| KR20120129547A (en) * | 2011-05-20 | 2012-11-28 | 주식회사 에이치비테크놀러지 | Specimen inspecting apparatus using multi-line senser camera and multi-light |
| CN104067110A (en) * | 2011-12-02 | 2014-09-24 | 法国圣戈班玻璃厂 | Device for analysing blemishes of a transparent substrate |
| CN104279456A (en) * | 2013-07-05 | 2015-01-14 | 牧德科技股份有限公司 | Illumination system for optical detection, detection system using illumination system and detection method |
| CN105424600A (en) * | 2014-07-17 | 2016-03-23 | 奥宝科技股份有限公司 | Telecentric bright field and annular dark field seamlessly fused illumination |
| KR20160047360A (en) * | 2014-10-22 | 2016-05-02 | 동우 화인켐 주식회사 | System and method for defect detection |
| CN105115979A (en) * | 2015-09-09 | 2015-12-02 | 苏州威盛视信息科技有限公司 | Image mosaic technology-based PCB working sheet AOI (Automatic Optic Inspection) method |
| CN105486690A (en) * | 2015-12-23 | 2016-04-13 | 苏州精濑光电有限公司 | Optical detection device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108072659A (en) | 2018-05-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US10600173B2 (en) | Multi-optic vision device utilizing area-scanning for detecting defects | |
| CN100590426C (en) | Device and method for detecting scratches | |
| CN108475145B (en) | Image recognition device, image recognition method, and image recognition unit | |
| US20110310244A1 (en) | System and method for detecting a defect of a substrate | |
| US20050219523A1 (en) | Foreign matter detecting system | |
| CN105259189A (en) | Glass defect imaging system and method | |
| US9683946B2 (en) | Method and device for detecting defects and method and device for observing defects | |
| US20070090279A1 (en) | System and method for an optical navigation device configured to generate navigation information through an optically transparent layer and to have skating functionality | |
| KR100635989B1 (en) | Surface inspection apparatus | |
| CN101730896B (en) | Vision system, method for installing vision system and method for manufacturing vision system | |
| CN110441323A (en) | The method for polishing and system of product surface | |
| KR960005092B1 (en) | Bonding wire inspection method | |
| WO2009056882A1 (en) | Method and device for imaging a fragmentation pattern formed in a ply of toughened glass | |
| CN109540899B (en) | Inspection apparatus and inspection method | |
| CN107003290A (en) | Method and apparatus for the optical sensing of chromatographic sample | |
| KR20150021965A (en) | An optical device including a camera, a diaphragm and illumination means | |
| JP2007279047A (en) | Optical inspection system | |
| CN108072659B (en) | Multi-optical vision apparatus | |
| CN104204771A (en) | A digital imaging system for biopsy inspection | |
| CN108700529A (en) | Equipment for printing image inspection | |
| KR20130004079A (en) | Inspection apparatus of attached panel shaped member and method thereof | |
| KR101555542B1 (en) | inspecting machine for flat panel | |
| CN114326074A (en) | Method and microscope for generating a sample overview image | |
| CN209416269U (en) | Detection device | |
| US20110228354A1 (en) | Form reading device and form detecting method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |