KR101555542B1 - inspecting machine for flat panel - Google Patents

Abstract

In the present invention, light transmitted through or reflected from a flat panel is incident on a flat panel again using a retroreflector, and irregularly reflected and refracted light is blocked by a knife edge in a deformed portion of the flat panel, A goggle type flat panel inspection apparatus is disclosed.

Description

≪ Desc / Clms Page number 1 > inspecting machine for flat panel &

The present invention relates to a flat panel inspection apparatus for inspecting a defective element formed on a surface or inside of a flat panel which is an opaque or transparent object to be inspected.

Those used in wafers, LCD panels, automotive coated steel plates, etc., which are essential for semiconductors, have a planar structure, and their defectiveness greatly affects the quality of the final product. Therefore, the process of inspecting these defects is a very important process in the production process, and various inventions have been made on the inspection equipment.

FIG. 1 is a configuration diagram for disclosing the entire configuration of a test method and apparatus for testing a cell-structure-related plate-related plate element for a flat panel according to the disclosure of Japanese Patent Application No. 10-2006-0054885. As shown in Fig. 1, an inspection apparatus for inspecting a flat panel Unloading stage 51 and inspection stage 52 of a flat panel structure and a panel loaded between the both stages by the moving means 55 such as a carrier in the loading / unloading stage 51 After moving to the inspection stage 52, an image that is aligned on the work table 53 and transmitted through the panel upon lighting of the backlight unit 54 is acquired and processed by a camera to determine whether or not the image is defective. As described above, the invention disclosed in Japanese Patent Laid-Open No. 10-2006-0054885 can occupy a very large installation space because of the bulky inspection system and can not be worn by an individual. Therefore, There is no problem.

SUMMARY OF THE INVENTION The present invention has been made to overcome the above problems and it is an object of the present invention to provide a testing apparatus which can be manufactured in a small size and low cost.

Another object of the present invention is to provide an inspection apparatus which can be manufactured in a small size so as to be directly worn by an observer and can accurately inspect an accurate flat panel.

In order to solve the above-mentioned problems, a specific solution to the above problem is to provide a flat panel display which irradiates light onto a flat panel and reflects the light reflected by the flat panel to the flat panel by a retroreflector, A panel inspection apparatus comprising: at least one light source for emitting light toward a flat panel; An image-forming lens group including at least one image-forming lens provided between the flat panel and the image-forming unit along an optical axis of light emitted from the light sources; And a knife edge that blocks irregularly reflected or refracted light from being incident on the top of the plate due to deformed portions formed on the flat panel.

Also, in the present invention, it is preferable that the image forming unit is a human eye or an area CCD.

In the present invention, the knife edge may be provided at a second principal point of the image forming lens group, and the knife edge may be inclined to the optical axis so that light incident from the light source is reflected parallel to the optical axis.

Further, in the present invention, a half mirror is provided at a second principal point of the image forming lens group, so that light incident from the light source is reflected to the flat panel.

Further, in the present invention, the image forming lens group may further include a plurality of knife edges provided on the optical axis and provided at a second principal point of the image forming lens group, wherein the knife edge receives light from the light source, And is incident on the flat panel.

Also, in the present invention, the retroreflective plate is a grid-type retroreflector formed by alternately forming a reflecting portion for retroreflecting light at an incident angle in a staggered pattern and a grid portion for absorbing light in a staggered shape, It is preferable that the grid is a cut-off grid consisting of slits between the grid portion and the grid portions.

In the present invention, it is preferable that the cut-off grid is provided at the focal point of the imaging lens group.

Further, in the present invention, a beam splitter is provided between the imaging lens group and the imaging unit, and the beam splitter reflects light from the light source to form parallel light on the optical axis, And a slit for transmitting light and an absorbing grid portion are alternately and repeatedly formed on the surface of the beam splitter opposed to the light source and the surface opposite to the image forming portion.

Further, in the present invention, a beam splitter is provided between the imaging lens group and the imaging unit, and the beam splitter reflects light from the light source to form parallel light on the optical axis, and transmits light incident from the imaging lens group And a slit for transmitting light and an absorbing grid portion are alternately and repeatedly formed on the opposed surface of the imaging lens of the beam splitter.

In the present invention, it is preferable that polarizing plates are provided between the light source and the beam splitter, and between the imaging top and the beam splitter.

The present invention having the above-mentioned problems and the solution is manufactured in the form of a goggles worn by an observer so that a flat panel can be conveniently inspected.

Further, the present invention can eliminate the sparkling phenomenon that occurs on the surface of the flat panel during the inspection of the transparent flat panel, so that the deformed part formed inside the flat panel can be accurately detected.

Further, the present invention is not to form an image in units of lines but to form an image in units of regions, and to have a high gradient, thereby increasing the inspection speed and accuracy and reducing the fatigue of the observer.

FIG. 1 is a configuration diagram for disclosing the entire configuration of a test method and apparatus for testing a cell-structure-related plate-related plate element for a flat panel according to the disclosure of Japanese Patent Application No. 10-2006-0054885.
2 is a configuration diagram of the first embodiment of the present invention.
FIG. 3 is a configuration diagram for explaining the effect of the knife edge applied to the present invention. FIG. 4 is an inspection target for obtaining a three-dimensional image in the image photographing apparatus according to the present invention. Fig.
6 is a configuration diagram for explaining the configuration of the second embodiment of the present invention.
Fig. 7 is a block diagram for explaining the principle of a stroboscopic applied in the second embodiment of the present invention. Fig.
FIG. 8 is a configuration diagram illustrating a focusing shuriner effect applied to the third embodiment of the present invention.
9 is a configuration diagram of a third embodiment of the present invention.
Fig. 10 is a configuration diagram for explaining a fourth embodiment of the present invention.
11 is a configuration diagram for explaining a fifth embodiment of the present invention.
12 is a perspective view explaining the effect of the present invention.
13 is a perspective view of a fifth embodiment of the present invention.
14 is a perspective view of a sixth embodiment of the present invention.
15 is an optical path diagram of a seventh embodiment of the present invention.
16 is an optical path diagram of an eighth embodiment of the present invention.
17 is an optical path diagram of a ninth embodiment of the present invention.
18 is an optical path diagram of a ninth embodiment of the present invention.
19 is a perspective view of a tenth embodiment of the present invention.
20 is a perspective view of an eleventh embodiment of the present invention.
21 is a perspective view of a twelfth embodiment of the present invention.
22 is an optical path diagram of a thirteenth embodiment of the present invention.
FIG. 23A is a layout diagram of the point light source LED, and FIG. 23B is a layout diagram of the line LED.
24 (a) and 24 (b) are configuration diagrams showing the shapes of the light sources reflected by the partial total reflection mirror.
25 is a configuration diagram of a fourteenth embodiment of the present invention.
Fig. 26 is a configuration diagram in which a fourteenth embodiment of the present invention is installed in the field. Fig.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

2 is a configuration diagram of the first embodiment of the present invention.

The inspection apparatus 100 of the first embodiment is a device that can inspect both a flat plate of a transparent body or a flat plate of an opaque material in accordance with the installation position of the recurrent reflector 103. In the state shown in Fig. 2, the retroreflective plate 103 is installed to inspect the flat panel 101 of the opaque body. In the case of inspecting a flat panel of a transparent body, the retroreflective panel 103 is provided on the opposite side of the inspection apparatus 100 with respect to the flat panel 101, and the opaque flat panel 101 is inspected It is installed on the same side as the inspection apparatus 100 with an inclination relative to the flat panel panel 101.

2 is a view for inspecting an opaque flat panel 101 by the inspection apparatus 100. The inspection apparatus 100 is provided with light sources 105 and 106. Light sources 105 and 106 Is reflected by the flat panel panel 101 and is incident on the retroreflector plate 103. [

The light incident on the retroreflective plate 103 from the flat panel 101 is totally reflected by the flat panel 101 and is reflected by the flat panel 101. Therefore, The light reflected back from the light source 101 is entirely received by the inspection apparatus 100.

When the incident light is reflected again by using the recursive reflector 103, the loss of light does not occur, and the small-sized light sources 105 and 106 can efficiently inspect the flat panel 101 .

FIG. 3 is a view illustrating the effect of the knife edge applied to the present invention.

As shown in FIG. 3 (a), when the light is irradiated from the light source 25 which is a point light source to the screen 9, the brightness of the screen 9 is referred to as one unit. At this time, an anomalous state such as density deformation, foreign matter, deformation (hereinafter referred to as "deformation portion ") that gives a change in refractive index gives change in the refraction angle. When the light irradiated from the light source 25 is refracted by the deformed portion 11, the light does not reach the position where the light path (dotted line) when the deformed portion 11 is absent, The brightness of the portion reaching the screen 9 is increased by two units and the brightness of the portion where the light refracted by the deforming portion 11 reaches the screen 9 increases by two units.

As described above, a small obstacle occurs in the optical path between the screen 9 and the light source 25, and the angle of the light is changed, so that an image formed in a state in which the light of the image and the light source 25 do not coincide with each other is referred to as a direct shadow image Direct Shadow Image "), and this image shows only the beginning of the change of light refraction, that is, the inflection point.

The direct shadow image is changed into a 0 unit portion in which the brightness is sharply reduced by the deformation portion 11 and a 2 unit portion in which the brightness is abruptly increased, so that a sharp difference in brightness occurs between the bright portion and the dark portion of the image. The sharp brightness difference between the bright part and the dark part of the image emphasizes only the periphery of the deformation part 11, so that clear three-dimensional information can not be obtained. That is, when the brightness is abruptly changed, only the outline of the deformed portion 11 can be obtained on the screen 9 because the gradient of the amount of light with respect to the boundary surface of the portion in which the brightness is rapidly changed can be obtained, So that it is impossible to obtain an image capable of reading out the substantially three-dimensional shape of the deformed portion 11. [

On the other hand, as shown in FIG. 3 (b), the Schlieren image using the knife edge 13 according to the present invention shows a sharp difference in brightness between the brightest portion and the darkest portion Do not.

3 (b), a light source 25 which is a point light source is positioned at the left focal point of the field lens 15, and light emitted from the light source 25 passes through the field lens 15 Passes through the right focal point and is irradiated onto the screen 9. The path of the light passing through the deformed portion 11 is refracted from the normal path (dotted line) so that the knife edge 15 located at the right focal point (13) and is not formed on the screen (9) and is terminated.

3B, the intensity of the light emitted from the light source 25 is equal to the intensity of the light emitted from the light source 25 in FIG. 3A. In FIG. 3B, Since only half of light passing through the field lens 15 by the knife edge 13 reaches the screen 9, the brightness at each point on the screen 9 in Fig. 3 (a) The brightness at each point of the screen 9 in (b) of Fig. 3 is 0.5 units. 3 (a), the light refracted by the deformed portion 11 strengthens the brightness of the other point on the screen 9 by two units. However, in FIG. 3 (b), the light refracted by the deformed portion 11 The light is blocked by the knife edge 13, so that the other points of the screen 9 are not reinforced.

That is, in the case where the deformed portion 11 is absent in Fig. 3 (b), the deformed portion 11 is formed at a position where the dotted line, which is a normal path on which light reaches on the screen 9, If there is a light beam, the light does not enter by the knife edge 13, so that it has brightness of 0 unit, and other points on the screen 9 maintain a brightness of 0.5 unit. 3 (b), when the knife edge 13 is used to cut off some rays of light, the change in brightness on the screen 9 by the deformed portion 11 becomes small, Gradients can be extracted.

Therefore, when the knife edge 13 is used as shown in FIG. 3 (b), a sharp image of a three-dimensional shape with gradients can be obtained as well as an outline of the object to be inspected. When a part of the optical path is blocked by using the knife edge 13 on the focal plane in which the light source 25 is gathered, a change in the intensity of the light amount with respect to the defect on the surface or inside of the inspection object changes according to the change in the angle gradient of the optical path. (Schlieren Effect).

4 is a diagram illustrating a principle of quantifying reflected light from an object to be inspected to obtain a three-dimensional image in the image photographing apparatus according to the present invention.

4 shows the path of the reflected light when the deformed portion 39 of the convex surface of the flat panel 101 passes through the observer's view. The flat panel 101 has a viewing range of (a) (A), (d), (d), and (e), the CCD is installed in the eye of the observer for convenience of explanation. The average brightness of the CCD image B which is reflected by the portion without the deformation portion 39 and has not been deformed is obtained and the intensity value has the same intensity value as the intermediate brightness in the graph C of brightness.

The state of (b) shows a state where the light incident from the recursive reflection plate 103 is refracted at the front portion of the deformed portion 39 and is blocked by the knife edge 13. At this time, the image of the darkest portion of the image B And has the lowest intensity in the graph C.

Since the light incident from the retroreflective plate 103 is reflected by the plane of the steep portion of the deformed portion 39, the state of (c) is such that the deformed portion 39 is not blocked by the knife edge 13 As in the non-existent state, the image B has a medium brightness value and the graph C has a medium intensity value.

The state of (D) shows a state in which the light incident from the retroreflective plate 103 is reflected at the rear portion of the deformed portion 39 and overlaps with the other light rays to reinforce the light. In the image B, At this time, the brightness intensity value of the graph C is also formed at the best.

In addition, the state of (E) has the same image and the same graph as the state of the first (A) with the deformed portion 39 passed.

Since the light reflected by the flat panel 101 and then reflected again by the retroreflector 103 is collected again at the reflection position of the flat panel 101 and then reflected by the flat panel 101 and picked up by the CCD, 101 can be obtained even when there is vibration or inclination. When the light reflected by the recursive reflection plate 103 is irregularly reflected by the deformation portion 39, the reflected light reflected by the normal portion and the reflected light irregularly reflected by the deformation portion 39 are reinforced and canceled The light that is canceled is blocked by the knife edge 13, so that only reinforcement occurs.

Accordingly, the difference between the brightness of the point to be reinforced and the brightness of the point to be canceled is made small to increase the sensitivity of the image to the deforming portion 39 and to obtain a gradient with respect to the intensity of the light amount so as to obtain sharp three- do.

This effect is obtained even when the observer's eye is located at the CCD position, and the observer can recognize the deformation portion 39 instantly by recognizing the deformation portion 39 three-dimensionally.

Fig. 5 is a configuration diagram showing an optical system of a first embodiment of the present invention, and Fig. 6 is a configuration diagram for explaining an installation position of a knife edge in the first embodiment of the present invention.

An objective lens group 118 composed of two or more objective lenses 119 and 120 is provided on the optical axis of the alternative lens 110 and the objective lens group 118 of the objective lens group 118 is provided in the inspection apparatus 100, A converging lens 115 and a light source 105 are provided on the vertical line of the optical axis of the alternative lens 110. [ A knife edge 113 is provided at the second principal point of the objective lens group 118 to block part of the amount of light that is reflected from the flat panel 101 and directed toward the alternative lens 110, So that the observer can see the gradient of intensities of light.

The second principal point will be described with reference to Fig. In general, a plurality of lenses are used in place of a single lens in order to remove the chromatic aberration of the lens and improve the lens performance. In this case, the center of the plurality of lenses is referred to as a second principal point. In the first embodiment, the knife edge 113 is provided at the second spout. The focal length of the lens group consisting of a plurality of lenses means the distance from the lens to the center point of the circle based on the curved surface of the lens but the focal length of the camera lens is the distance between the second principal point of the lens and the film surface Means the distance on the optical axis. Here, the second principal point is defined as a point at which the waterline intersects the optical axis when the waterline is drawn at the point where the extension line of the parallel light ray incident on the lens and the line that is refracted at the last lens and extends to the lens toward the focal point converge to the lens.

In the inspection apparatus 100, two sets of optical systems provided on the optical axis of two eyes of the observer are provided, but since they have the same configuration, one optical system will be described.

The light emitted from the light source 105 is reflected so as to exit in parallel with the optical axis of the observer's eye at the knife edge 113 which simultaneously serves as the partial total reflection mirror and the knife edge. At this time, the knife edge 113 is installed at the second principal point of the objective lens group 118 and the focus of the condenser lens 115 and reflects the light of the incident light source 105 parallel to the optical axis of the observer's eye, , But it is preferable that the end portions are provided so as to be as close as possible to the optical axis so as to perform the knife edge function.

 The light of the light source reflected by the knife edge 113 is incident on the flat panel 101 of the opaque material and is reflected and the light reflected by the flat panel 101 is retroreflected by the retroreflective plate 103, A part of the light that is irregularly reflected by the defective portion of the flat panel 101 is blocked by the knife edge 113 So that the observer perceives the gradient of the amount of light to be large, so that the observer can recognize the defective part in three dimensions and easily detect it. Therefore, the surface state of a transparent or highly reflective flat panel can be seen in detail.

5 shows a configuration in which the flat panel 101 is opaque. However, when the flat panel 101 is transparent, the retroreflective panel 103 is disposed on the opposite side of the observer's eye with respect to the flat panel 101, The same effect can be obtained by providing the panel 101 in parallel with the plate panel 101 so that the light transmitted through the panel panel 101 is reflected by the retroreflector 103 and re-incident on the flat panel panel 101.

Fig. 7 is a configuration diagram for explaining the configuration of the second embodiment of the present invention, and Fig. 8 is a configuration diagram for explaining the principle of the stroboscope applied in the second embodiment of the present invention.

In the second embodiment shown in FIG. 7, the flat panel 101 is a sample which can be used for printed matter, steel, paper, packaging, electric wires or the like because the same pattern is repeatedly printed at the same intervals and cut by a post process , A unit of repetitive pattern is defined as a unit flat panel.

In the second embodiment, since the unit flat panel panel repeatedly passes the observer's view when the unit flat panel is moved at a uniform velocity, the time required for the unit flat panel to pass through at a fixed position is defined as one period (T) The movement period of the unit flat panel can be detected by the period detection unit 203 such as an optical mouse that performs the role of an encoder or a noncontact encoder. The strobe light 201 is synchronized with the period, So that the unit flat panel 101 moving at a constant speed can be checked in a stationary state.

Since the configuration of the optical system is the same as that of the first embodiment, the same reference numerals are assigned to the same components, and a description thereof will be omitted.

In the second embodiment, the strobe light 201 is flickered in synchronization with the moving period of the unit flat panel of the flat panel 101 by the lighting control device 205, By the principle of Robescope, the observer sees a still image.

8, when the eight-divided rotating disk rotates at a uniform speed, the illuminator is turned on in synchronization with one cycle, that is, when the observer does not recognize the rotating state of the rotating disk, Is recognized as a stopped state.

The second embodiment differs from the first embodiment in that the period detection means 203 for detecting the period synchronized with the position of the unit flat panel by the movement of the flat panel 101, the strobe light 201, An illumination control device 205 for lighting the strobe light 201 according to the detected period, and an optical system similar to that of the first embodiment.

According to the second embodiment configured as described above, when the unit flat panel panel repeatedly passes the observer's view, the observer perceives that the unit flat panel panel is in a stopped state and recognizes the deformed portion in three dimensions, Unit flat panel can be detected.

FIG. 9 is a configuration diagram illustrating a focusing shurylene effect applied to the third embodiment of the present invention.

The parallel light that has passed through the grid 413 in which the slit is formed at a predetermined interval of the light by the plane light source 411 passes through the cutoff grid 417 and is incident on the CCD 419.

At this time, when the deformed portion 415 for refracting light is positioned between the grid 413 and the cutoff grid 417, the refracted light is blocked by the cutoff grid 417 and is not incident on the CCD 419, The grid 417 has the same effect as the knife edge of the first embodiment. At this time, when the CCD 419 is to acquire an area scan image of an area instead of acquiring a line scanned image, the deformation unit 415 is not located in a specific line, The cutoff grid 417 has the effect of providing the life edge in the entire area.

Since the eye of the observer who inputs the image for the wide area plays the same role as the area CCD rather than the line CCD, the grid 413 forming the parallel light incident at a predetermined interval and the cut- It is possible to sensitively observe the deformed portion.

10 is a configuration diagram of a third embodiment of the present invention.

In the third embodiment, a grid light source 509 provided with a grid-shaped light source having slits at regular intervals at a position sufficiently away from the transparent flat panel panel 501 through which light is transmitted, and the light emitted from the grid light source 509, Passes through the panel 501 to form a focus by an imaging lens 503 and a cut-off grid 505 at a focus position to superpose the light of the grid light source 509. At this time, the background of the CCD 507 is defined by a dark field and a bright field according to the degree of overlapping. Since the flat panel 501 is installed close to the imaging lens 503, the flat panel 501 ) Is formed in the CCD 507. [0064] FIG.

When a deformed portion is present on the flat panel panel 501, when the incoming light is refracted due to a density gradient, an image including information on the degree of defect or deformation is acquired in the CCD 507 due to a difference in sensitivity and contrast. The observer also finds a deformation part with a sensitive contrast difference.

10, a grid light source 509 is provided with a surface light source on its back surface, a strip-shaped grid having a predetermined width Ho on the entire surface of the surface light source, and a slit is formed between the grid and the grid, The divergent light is incident on the flat panel 501 in parallel, and the cut-off grid 505 has a slit formed between the grid having the width Hi and the grid to allow light to pass therethrough. The grid width Hi of the cut-off grid 505 is geometrically shown to be smaller than the grid width Ho of the grid light source 509. However, when the magnification of the imaging lens 503 is applied, So that all the light of the grid light source 509 passes through the cut-off grid 505.

11 is a configuration diagram for explaining a fourth embodiment of the present invention.

In the fourth embodiment, in place of the grid light source 509 in the third embodiment, a grid-type retroreflector 603 in which a grid for absorbing incident light and a retroreflector for retroreflecting incident light are provided at regular intervals is provided, 503 and the cut-off grid 505. The light emitted from the point light source 601 is incident on the total reflection partial mirror 605 through the condenser lens 607, The light reflected by the partial mirror 605 is incident on the grid-shaped retroreflector 603 through the flat panel 501. The light incident on the grid of the retroreflective plate 603 is absorbed and the light incident on the retroreflective plate is retroreflected again to be incident on the flat plate panel 501. As a result, 501 function the same as the grid light source 509 of the third embodiment.

The fourth embodiment can be made inexpensively while having the same effect by using the point light source and the grid-type retroreflector in comparison with the third embodiment which requires an expensive surface light source.

12 is a configuration diagram for explaining a fifth embodiment of the present invention.

The fourth embodiment is an apparatus for inspecting flat panel panels that are transparent, or the fifth embodiment is an apparatus for inspecting flat panel panel 101 which is opaque, and the same principle as that of the fourth embodiment is applied.

The light from the point light source 411 is reflected parallel to the optical axis of the CCD 401 in the total reflection partial mirror 407 inclined to the optical axis of the CCD 401 through the condenser lens 413 and reflected by the total reflection partial mirror 407 The reflected light passes through the imaging lens 407 and is incident on the flat panel 101 and then reflected by the grid type retroreflector 405. The light incident on the grid type retroreflector 405 Off grid that is re-incident on the flat panel 101 and is reflected again by the flat panel 101 to be provided at the focal point of the imaging lens 407 and the imaging lens 407 And forms a background on the CCD 401. [ On the other hand, the image of the flat panel 101 is formed on the CCD 401 by the imaging lens 407.

In Fig. 10, the magnification M, the grid width Ho, Hi are determined by the following equations.

13 is a perspective view explaining the effect of the present invention.

The flat panel inspection apparatus 100 of the present invention shown in FIG. 13 is a binocular type inspection apparatus having a periodically flickering light source of the second embodiment.

Since the flat panel inspection apparatus 100 constructed as described above can use a retroreflective plate 103 to inspect even a small amount of light, the observer can distinguish the deformed portions in three dimensions by using the two eyes, can see.

Also, it is possible to prevent the type of deformation part from changing or disappearing according to the viewing angle at the time of surface inspection of a material having high reflection.

In addition, it is more portable than general strobe type inspection devices, and can be usefully used for inspecting automobile paint condition, post-plate condition, etc. while changing the view freely freely.

14 is a perspective view of a fifth embodiment of the present invention.

The inspection apparatus 100 of the first embodiment shown in FIG. 2 is configured such that the retroreflective plate 103 is installed separately from the inspection apparatus 100, but the inspection apparatus 170 of the fifth embodiment is provided with a recursive A reflection plate 173 is provided.

15 is a perspective view of a sixth embodiment of the present invention.

The inspection apparatus 180 of the sixth embodiment is configured such that a retroreflective plate 183 is provided on the inspection apparatus main body 181 and that a small and fine flat panel can be inspected.

 The operation principles of the fifth and sixth embodiments are the same as those of the first to fourth embodiments, and thus a detailed description thereof will be omitted.

16 is an optical path diagram of a seventh embodiment of the present invention.

The inspection apparatus 200 of the seventh embodiment is configured such that the light incident from the light source 203 is reflected by the beam splitter 201 and is incident on the flat panel 101 while the imaging lens 208 serves as a projection lens, 101 are retroreflected by the retroreflector 205, re-incident on the flat panel 101, reflected by the retroreflective lens 208, and incident on the beam splitter 201. The light incident on the beam splitter 201 passes through the beam splitter 201 and is incident on the CCD 207 so that an image of the flat panel 101 is picked up by the CCD 207.

At this time, the light from the light source 203 is incident on the surface of the beam splitter 201 in parallel with the light through the lens 204, and the surface of the beam splitter 201, on which the light from the light source 203 is incident, Is formed or installed. A cut-off grid 209 is formed or installed on the surface of the beam splitter 201 through which light is emitted from the CCD.

In the seventh embodiment configured as described above, the light of the light source 203 passes through the grid 206 and is incident on the beam splitter 201. [ At this time, since the grid 206 passes through a grid surface through which light can not pass and a slit between the grid surface and the grid surface through which light passes, the light passing through the grid 206 is light passing through the slit As a result, even if the retroreflective plate 205 is a uniform reflective surface on which the grid is not formed, the light incident on the retroreflective plate 205 serves as a grid-shaped retroreflector as shown in FIG. 16 .

By forming the grid 306 on the incident surface of the light of the light source 203 of the beam splitter 201 as described above, the retroreflective plate 205 having the uniform reflective surface functions as if a grid were formed on the reflective surface.

17 is an optical path diagram of an eighth embodiment of the present invention.

The eighth embodiment is the same as the seventh embodiment except that the cutoff grid 211 is formed on the opposite surface of the image forming lens 208 of the beam splitter 201 or the other configuration is the same as that of the seventh embodiment.

The light emitted from the light source 203 is projected on the retroreflective plate 205 through the image forming lens 208 that serves as a projection lens for projecting light when the grids 211 are projected through the condenser lens 206, The grid image is formed on the retroreflective plate by the retroreflective plate 205 and the grid 211 is formed on the grid 211 through the focusing lens 208. At this time, The surface information can be obtained by changing the optical path according to the surface condition of the flat panel panel 101 to be inspected by performing a cut-off function.

The eighth embodiment having such a structure produces the same effect as the seventh embodiment, but the structure is simple since the grid is installed or formed only on one side of the beam splitter 201. [

18 is an optical path diagram of a ninth embodiment of the present invention.

17, except that polarizing filters 213 and 215 are provided between the beam splitter 201 and the CCD 207 between the light source 203 and the beam splitter 201, 8 embodiment.

By providing the polarization filters 213 and 215 as described above, the image formed on the CCD can acquire only the image of the surface of the flat panel 101, and when the flat panel 101 is a transparent film, And the surface image overlap with each other to prevent the image of the flat surface from being mixed with the image on the inside.

19 is a perspective view of a tenth embodiment of the present invention.

The inspection apparatus 300 of the tenth embodiment includes a handle 312 and a main body having a lower body that can be mounted on the floor, and an optical device provided on the upper part of the handle.

The inspection apparatus 300 includes two light sources 301 and 303 for emitting light to the flat panel, objective lenses 305 and 307 provided inside the two barrels, 309, and 311, and the knife edge described in the first embodiment or the like is installed inside the barrel.

The light sources 301 and 303 provided in the inspection apparatus 300 emit light into the inside of the barrel to form the same optical path as in the first embodiment, And may be configured to be reflected by the knife edge installed at the second nap of the group 307, 309 and irradiated to the flat panel through the barrel.

In addition, the inspection apparatus 300 shows a state in which a recursive reflection plate is not installed, and a recursive reflection plate should be installed on the flat panel to be inspected in an inclined manner. However, a retroreflective plate may be attached to the inspection apparatus 300, and the light reflected from the flat panel may be retroreflected from the retroreflective plate installed in the inspection apparatus 300 and incident on the flat panel.

20 is a perspective view of an eleventh embodiment of the present invention.

In the eleventh embodiment, light from a light source 803 is reflected by a half mirror 807 through a condenser lens 805, is reflected by an opaque flat panel 809, enters a retroreflector 801, Reflected light from the reflection plate 801 is reflected by the flat panel 809 and is transmitted through the half mirror 807 to be incident on the observer's eye and is a device for inspecting the flat panel by a simple structure .

21 is a perspective view of a twelfth embodiment of the present invention.

The twelfth embodiment applies the same construction and principle except that a transparent flat panel panel 810 is used instead of the opaque flat panel 809 of the eleventh embodiment.

The light from the light source 803 is reflected by the half mirror 807 and transmitted through the transparent flat panel panel 810 to be retroreflected by the retroreflective plate 801 and then transmitted through the transparent flat panel panel 810 to be reflected by the half mirror 807, And is incident on the observer's eye.

FIG. 22 is an optical path diagram of the thirteenth embodiment of the present invention. FIG. 23 (a) is a layout diagram of the point light source LED, And is a configuration diagram showing the shape of a light source reflected by the total reflection mirror.

The thirteenth embodiment shown in FIG. 22 uses the point light source LEDs of the light emission type shown in FIG. 23 (a) as the light source 901 or uses the light emitting type line LEDs shown in FIG. 23 (b) And reflected by the total reflection mirror 905 through the condenser lens 903 and reflected from the opaque flat panel panel 917 to the retroreflective reflector 919 through the objective lens 911 and reflected by the retroreflective reflector 919 Reflected light passes through a partial total reflection mirror 905 through an objective lens 911 and is incident on an area CCD 915 while guiding the objective lens 913.

The shape of the reflected light reflected by the partial total reflection mirror 905 at this time is the same as that of FIG. 24A when it is the light source of FIG. 23A and the shape of the reflected light of FIG. 24B when it is the light source of FIG. And is incident on the objective lens 911.

At this time, when the light source of FIG. 23 (a) is incident, the transmissive portion is formed like a grid on the grating and the rectangular reflective portion surrounded by the transmissive portion is formed. When the light source of FIG. 23 (b) is incident, the transmission portion and the reflection portion are formed in a line shape in the same shape as the light source, thereby increasing the image gradient.

25 is a configuration diagram of a fourteenth embodiment of the present invention.

In the fourteenth embodiment, the alternative lens 110 of the first embodiment is replaced with the transmissive screen 114, and a large area can be seen at various times through the transmissive screen at one time, It is effective for application.

Since the other constituent parts are the same as those in Fig. 5, the same reference numerals are given thereto, and a description thereof will be omitted.

Fig. 26 is a configuration diagram in which a fourteenth embodiment of the present invention is installed in the field. Fig.

The warning lamp 937 is turned on when the automatic inspection apparatus 931 detects the deformation of the flat panel 101. When the warning lamp 937 is turned on in this way, The retroreflector plate 103 is inspected by the retroreflected light through the retroreflector 933 and the retroreflector 103 'is inspected through the inspection apparatus 935 of the fourteenth embodiment. The flat panel panel 101 is inspected by the retroreflected light.

Claims (10)

A flat panel inspection apparatus for inspecting a flat panel by causing light to be incident on a flat panel and retroreflecting light reflected from the flat panel on the flat panel by a recursive reflection plate,
At least one light source for emitting light towards the flat panel;
An image-forming lens group including at least one image-forming lens provided between the flat panel and the image-forming unit along an optical axis of light emitted from the light sources;
And a knife edge that blocks irregularly reflected or refracted light from being incident on the top of the plate due to deformed portions formed on the flat panel,
The retroreflective plate is a grid-type retroreflector formed by alternately forming a reflecting portion for retroreflecting light at an incident angle in a staggered pattern and a grid portion for absorbing light in a staggered shape, and the knife edge is installed in a stowed shape Off grid formed by slits between the grid portion and the grid portions. The flat panel inspection apparatus according to claim 1, wherein the image forming unit is a human eye or an area CCD. [3] The image forming apparatus according to claim 2, wherein the knife edge is provided at a second principal point of the image forming lens group, and the knife edge is inclined to the optical axis so that light incident from the light source is reflected parallel to the optical axis. Panel inspection device. The flat panel inspection apparatus according to claim 1, wherein a half mirror is provided at a second principal point of the image forming lens group, and the light incident from the light source is reflected to the flat panel. 2. The image forming apparatus according to claim 1, wherein the image forming lens group further includes a plurality of knife edges provided on the optical axis and provided at a second principal point of the image forming lens group, and the knife edge receives light from the light source, And the reflected light is incident on the flat panel. delete The flat panel inspection apparatus according to claim 1, wherein the cut-off grid is provided at a focal point of the imaging lens group. [Claim 3] The optical system according to claim 2, wherein a beam splitter is provided between the image forming lens group and the image forming unit, the beam splitter forms light parallel to the optical axis by reflecting light from the light source, Wherein the slit and the absorbing grid are alternately repeatedly formed on the surface of the beam splitter opposite to the light source and the surface of the beam splitter opposite to the image forming unit. [3] The apparatus according to claim 2, wherein a beam splitter is provided between the imaging lens group and the imaging unit, the beam splitter forms light parallel to the optical axis by reflecting light from the light source, And a slit for transmitting light and an absorbing grid portion are alternately and repeatedly formed on the opposing face of the imaging lens of the beam splitter. The flat panel inspection apparatus according to claim 8, wherein polarizing plates are provided between the light source and the beam splitter, and between the imaging top and the beam splitter.

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