CN203069531U - Device for detecting surface defect of transparent optical element - Google Patents
Device for detecting surface defect of transparent optical element Download PDFInfo
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- CN203069531U CN203069531U CN 201320030118 CN201320030118U CN203069531U CN 203069531 U CN203069531 U CN 203069531U CN 201320030118 CN201320030118 CN 201320030118 CN 201320030118 U CN201320030118 U CN 201320030118U CN 203069531 U CN203069531 U CN 203069531U
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Abstract
The utility model discloses a device for detecting a surface defect of a transparent optical element. By employing a total internal reflection type illumination method, namely illuminating beams are introduced into the transparent optical element, repeated total reflection is performed between the front and rear surfaces in the transparent optical element, multiple areas of the front and rear surfaces of the transparent optical element are simultaneously illuminated, and dark field imaging is performed by utilizing scattered light and refracted light caused by the surface defect so as to detect the surface defect. By utilizing the total internal reflection type illumination, the light energy is repeatedly utilized, the dark field imaging detection can be simultaneously performed in multiple areas, and the device is particularly suitable for high-sensitivity detection on the defect of the surface and the subsurface of the large-caliber transparent optical element.
Description
Technical field
The utility model relates to the defects detection field of optical material, it specifically is a kind of pick-up unit of transparent optical element surface imperfection, this method and apparatus can be used for the fast detecting of optical surface and subsurface defect, be specially adapted to optical elements of large caliber, such as the meter level yardstick optical element that is used for laser constraint inertia nuclear fusion system.
Background technology
Transparent optical material is very important element in all kinds of optical systems.Transparent optical material commonly used has all kinds of glass, fused quartz, and various crystalline material.When transparent optical element uses in a lot of optical systems, usually can plate such as some thin layers such as anti-reflection film or high-reflecting films on the surface, also can fit tightly with other optical element materials sometimes, realize some specific function.More than these are used all relevant optics properties of materials have been proposed very high request, to have very high optics flatness as material surface, do not pollute the no excessive defect in surface and inferior surface etc.And the production and processing of related elements will be passed through multiple working procedure, inevitably can produce various pollutions and defective in process.The yardstick of these pollutions and defective is much all in micron dimension, sub-micron even nanometer scale, and common naked eyes detection method can't effectively be identified.It is therefore very necessary to research and develop quick, highly sensitive pollution and defect inspection method.
Detection method of surface flaw commonly used has the light field imaging technique, namely utilizes the zone to be detected on the beam lighting material, by the light beam of material reflection or transmission through imaging system, the image in the zone to be detected that has so just obtained.Come defect recognition by analyzing image.This technology has certain limitation to transparent optical material.Because material has good optical transparence, when the defective yardstick hour, cause through the variation of the light beam of defective locations also less, also less with the light beam contrast through area free from defect like this, be difficult to identification at image, namely adopt the light field imaging technique, resolution is restricted, and can't effectively identify more small defective.
The utility model content
The technical problems to be solved in the utility model provides a kind of device for fast detecting of surface imperfection of transparent optical element, utilize illuminating bundle illumination when the repeatedly total reflection of sample interior realizes multizone, utilize one or more sets imaging systems to carry out the details in a play not acted out on stage, but told through dialogues imaging, solved namely that to utilize the light field imaging technique to carry out transparent optical element defects detection contrast low, resolution is restricted, can not effectively identify the problem of tiny flaw, also improved optical elements of large caliber, such as the detection efficiency of the meter level yardstick optical element that is used for laser constraint inertia nuclear fusion system.
The technical solution of the utility model is:
The pick-up unit of transparent optical element surface imperfection includes lighting source, is arranged at the illuminating bundle cosmetic treatment apparatus between lighting source transmitting terminal and the transparent optical element incident side, relatively the image-forming detecting system of transparent optical element surface setting.
The pick-up unit of described transparent optical element surface imperfection also includes the illuminating bundle absorption plant that relative transparent optical element outgoing side arranges.
The pick-up unit of described transparent optical element surface imperfection also includes the image acquisition and processing terminal that is arranged at the image-forming detecting system rear end.
Described image-forming detecting system includes imaging device and sniffer, and described sniffer is arranged at the rear end of imaging device.
Described image-forming detecting system is one or more sets, overlaps the image-forming detecting system zones of different setting on relative transparent optical element surface respectively more.
Described imaging device is selected lens or lens combination for use; Described sniffer is selected the CCD camera for use.
Advantage of the present utility model:
(1), the utility model adopts the lighting system of inner total reflection formula to carry out the defects detection on transparent optical element sample surfaces and inferior surface in conjunction with the details in a play not acted out on stage, but told through dialogues imaging technique, because illuminating bundle is bound in transparent optical element sample the inside fully, the scattered light that defectiveness causes and refract light can enter detection system, avoid the interference of parasitic light to detecting like this, increased substantially flaw detection sensitivity;
(2), the utility model adopts the details in a play not acted out on stage, but told through dialogues imaging mode, light field imaging mode relatively, the contrast of the defect area that obtains and the image of area free from defect obtains very big enhancing, identification is higher;
(3), the utility model adopts the mode of inner total reflection illumination, a plurality of zones obtain illumination simultaneously on the transparent optical element sample, can adopt many cover image-forming detecting systems that parallel detection is carried out in the field of illumination like this, increase substantially detection speed and detection efficiency.
Description of drawings
Fig. 1 is structural representation of the present utility model, and wherein, 1 is lighting source, and 2 is the illuminating bundle cosmetic treatment apparatus, and 3 is transparent optical element, and 4 is the illuminating bundle absorption plant, and 5 is imaging device, and 6 is sniffer, and 7 is the image acquisition and processing terminal.
Fig. 2 is that the utility model is realized the scanning synoptic diagram one that throws light on fully on forward and backward surface.
Fig. 3 is that the utility model is realized the scanning synoptic diagram two that throws light on fully on forward and backward surface.
Fig. 4 is the structural representation in the utility model specific embodiment, wherein, 1 is lighting source, and 2 is the illuminating bundle cosmetic treatment apparatus, and 3 is transparent optical element, 4 is the illuminating bundle absorption plant, 5 is first imaging device, and 6 is first sniffer, and 7 is the image acquisition and processing terminal, 8 is second imaging device, and 9 is second sniffer.
Embodiment
See Fig. 1, the pick-up unit of transparent optical element surface imperfection:
Include lighting source 1, be arranged at the illuminating bundle cosmetic treatment apparatus 2 between lighting source 1 transmitting terminal and the transparent optical element 3 incident sides, be arranged at the image-forming detecting system of transparent optical element 3 near surfaces, be arranged at the image acquisition and processing terminal 7 of image-forming detecting system rear end, relatively the illuminating bundle absorption plant 4 of transparent optical element 3 outgoing sides setting;
Image-forming detecting system includes imaging device 5 and sniffer 6 respectively, and imaging device 5 is selected lens or lens combination for use; Sniffer 6 is selected the CCD camera for use.
The detection method of transparent optical element surface imperfection may further comprise the steps:
(1), illuminating bundle is incided transparent optical element inside from the side of transparent optical element, illuminating bundle satisfies the optical total-reflection condition at the incident angle of sample surfaces, illuminating bundle carries out repeatedly total reflection between the inner forward and backward surface of transparent optical element, light beam is all realized illumination through surf zone, reflected the back from transparent optical element outgoing side outgoing until front surface or rear surface through transparent optical element;
(2), change the incident angle of illuminating bundle, the light incident side of incident angle and the relative transparent optical element of incident direction described in the step (1) is in the face of title; Perhaps incide sample interior with suitable angle from incident side or the outgoing side of the element described in the step (1) with another bundle illuminating bundle, the described optical total-reflection condition of step (1) is satisfied in the selection of incident angle equally; Illuminating bundle carries out repeatedly total reflection between the inner forward and backward surface of transparent optical element, light beam is all realized illumination through surf zone;
(3), the transparent optical element surface arranges one or more sets image-forming detecting systems relatively; When the field of illumination of transparent optical element surface and inferior surperficial light beam did not have defective, illuminating bundle carried out total reflection fully between the front and rear surfaces of transparent optical element inside, do not have the luminous energy outgoing, does not namely have illuminating bundle to enter image-forming detecting system;
(4), when there is defective in the beam lighting zone on transparent optical element surface and inferior surface, to cause the scattering of illuminating bundle, perhaps illuminating bundle does not satisfy total reflection condition at the incident angle of defect area, part illuminating bundle will be by the surperficial outgoing of refraction from transparent optical element, defective causes that the scattered light of outgoing and refract light enter image-forming detecting system, obtains the darkfield image of defect area.
During actual the use, for bigbore transparent optical element sample, but since the size in the zone that the size in transparent optical element zone to be detected is observed greater than the imaging system imaging need carry out the subregion imaging to the transparent optical element sample and detect.Can divide picture by translation system scanning into to the transparent optical element sample surfaces by imaging system is installed on the translation system, handle obtaining the region-wide image of transparent optical element sample surfaces again by image.Simultaneously, be that mode by as shown in Figures 2 and 3 realizes to the illumination of all standing of transparent optical element sample surfaces.
In actual the use, for improving detection speed and efficient, also can adopt many cover imaging systems to carry out parallel detection, see Fig. 4, adopt the pick-up unit of the heavy caliber transparent optical element surface imperfection of many cover imaging systems, include lighting source 1, be arranged at the illuminating bundle cosmetic treatment apparatus 2 between lighting source 1 transmitting terminal and the transparent optical element 3 incident sides, be arranged at two cover image-forming detecting systems of transparent optical element 3 rear surface sidepieces and relative transparent optical element 3 rear surfaces, be arranged at the image acquisition and processing terminal 7 of two cover image-forming detecting system rear ends, relatively the illuminating bundle absorption plant 4 of transparent optical element 3 outgoing sides setting;
Two cover image-forming detecting systems include the rear end that first imaging device 5 and first sniffer 6, second imaging device 8 and second sniffer, 9, the first sniffers 6 and second sniffer 9 are arranged at first imaging device 5 and second imaging device 8 respectively respectively.
Wherein, first imaging device 5 and second imaging device 8 are all selected lens or lens combination for use; First sniffer 6 and second sniffer 9 are all selected the CCD camera for use.
Only draw among the figure two the cover imaging systems.Can adopt many cover imaging systems in actual the use as required.Many cover imaging systems can be relatively arranged on sidepiece and the relative different zone of transparent optical element front and rear surfaces of the front and rear surfaces zones of different of transparent optical element sample.
Can adopt the little imaging device of depth of focus in actual use, system only can obtain clear and legible image to surface and inferior surf zone like this.
Claims (6)
1. the pick-up unit of transparent optical element surface imperfection, include lighting source, it is characterized in that: also comprise the illuminating bundle cosmetic treatment apparatus that is arranged between lighting source transmitting terminal and the transparent optical element incident side, relatively the image-forming detecting system of transparent optical element surface setting.
2. the pick-up unit of transparent optical element surface imperfection according to claim 1 is characterized in that: the pick-up unit of described transparent optical element surface imperfection also includes the illuminating bundle absorption plant that relative transparent optical element outgoing side arranges.
3. the pick-up unit of transparent optical element surface imperfection according to claim 1, it is characterized in that: the pick-up unit of described transparent optical element surface imperfection also includes the image acquisition and processing terminal that is arranged at the image-forming detecting system rear end.
4. the pick-up unit of transparent optical element surface imperfection according to claim 1, it is characterized in that: described image-forming detecting system includes imaging device and sniffer, and described sniffer is arranged at the rear end of imaging device.
5. the pick-up unit of transparent optical element surface imperfection according to claim 1 is characterized in that: described image-forming detecting system is one or more sets, overlaps the image-forming detecting system zones of different setting on relative transparent optical element surface respectively more.
6. the pick-up unit of transparent optical element surface imperfection according to claim 4, it is characterized in that: described imaging device is selected lens or lens combination for use; Described sniffer is selected the CCD camera for use.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320030118 CN203069531U (en) | 2013-01-21 | 2013-01-21 | Device for detecting surface defect of transparent optical element |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320030118 CN203069531U (en) | 2013-01-21 | 2013-01-21 | Device for detecting surface defect of transparent optical element |
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| CN203069531U true CN203069531U (en) | 2013-07-17 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 201320030118 Expired - Lifetime CN203069531U (en) | 2013-01-21 | 2013-01-21 | Device for detecting surface defect of transparent optical element |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103105403A (en) * | 2013-01-21 | 2013-05-15 | 合肥知常光电科技有限公司 | Method and device for detecting surface defect of transparent optical component |
| CN103630554A (en) * | 2013-11-06 | 2014-03-12 | 江苏大学 | Detection device and method for defects on double faces of lens |
| CN108362213A (en) * | 2018-02-05 | 2018-08-03 | 武汉华星光电半导体显示技术有限公司 | A kind of detection device and method in the film gap based on display panel |
| CN109283197A (en) * | 2018-08-27 | 2019-01-29 | 杭州元色科技有限公司 | The detection method and detection device of clear sheet surface and internal flaw |
| CN109839387A (en) * | 2019-03-25 | 2019-06-04 | 中国工程物理研究院激光聚变研究中心 | The method of the surface contamination of express statistic optical elements of large caliber and damage |
| CN112129775A (en) * | 2020-09-23 | 2020-12-25 | 哈尔滨工业大学 | Dodging bar-shaped light source and optical element damage detection device based on same |
-
2013
- 2013-01-21 CN CN 201320030118 patent/CN203069531U/en not_active Expired - Lifetime
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103105403A (en) * | 2013-01-21 | 2013-05-15 | 合肥知常光电科技有限公司 | Method and device for detecting surface defect of transparent optical component |
| CN103630554A (en) * | 2013-11-06 | 2014-03-12 | 江苏大学 | Detection device and method for defects on double faces of lens |
| CN103630554B (en) * | 2013-11-06 | 2017-02-08 | 江苏大学 | Detection device and method for defects on double faces of lens |
| CN108362213A (en) * | 2018-02-05 | 2018-08-03 | 武汉华星光电半导体显示技术有限公司 | A kind of detection device and method in the film gap based on display panel |
| CN108362213B (en) * | 2018-02-05 | 2020-07-03 | 武汉华星光电半导体显示技术有限公司 | Display panel-based film gap detection device and method |
| CN109283197A (en) * | 2018-08-27 | 2019-01-29 | 杭州元色科技有限公司 | The detection method and detection device of clear sheet surface and internal flaw |
| CN109839387A (en) * | 2019-03-25 | 2019-06-04 | 中国工程物理研究院激光聚变研究中心 | The method of the surface contamination of express statistic optical elements of large caliber and damage |
| CN112129775A (en) * | 2020-09-23 | 2020-12-25 | 哈尔滨工业大学 | Dodging bar-shaped light source and optical element damage detection device based on same |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
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Granted publication date: 20130717 |
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| CX01 | Expiry of patent term |