CN203069524U - Detection and classification device for surface defect of big-aperture optical element - Google Patents
Detection and classification device for surface defect of big-aperture optical element Download PDFInfo
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- CN203069524U CN203069524U CN 201320048368 CN201320048368U CN203069524U CN 203069524 U CN203069524 U CN 203069524U CN 201320048368 CN201320048368 CN 201320048368 CN 201320048368 U CN201320048368 U CN 201320048368U CN 203069524 U CN203069524 U CN 203069524U
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Abstract
The utility model discloses a detection and classification device for a surface defect of a big-aperture optical element. The big-aperture optical element is illuminated by an intense illuminating beam and a dim illuminating beam; the intense illuminating beam interacts with an absorption defect and excites to produce fluorescent light; the dim illuminating beam interacts with a non-absorption defect to cause beam scattering; and information of the absorption defect and the non-absorption defect of the big-aperture optical element is obtained by respectively detecting the fluorescent light and scattered light. According to the detection and classification device, multiple regions inside the big-aperture optical element are simultaneously illuminated and detected by using an illumination mode of total internal reflection, and thus the detection efficiency is improved. Only surface and subsurface defects are detected at a detection end by using an imaging system with small focal depth or using a confocal imaging method. The detection and classification device is suitable for optical nondestructive inspection, optical precision detection and optical microscopic imaging and defect analysis, and is in particular suitable for a plurality of fields of surface and subsurface defect detection of a transparent big-aperture optical element in an intense laser system, and the like.
Description
Technical field
The utility model relates to optical material defect detection field, specifically is a kind of detection sorter of optical elements of large caliber surface imperfection.
Background technology
For a lot of optical materials, for example be usually used in fused silica glass in the strong laser system and KDP crystal etc., in the process of material, as cutting, grinding, polishing etc., inevitably can introduce surface and subsurface defect and pollution, therefore the optical quality on its surface and inferior surface often gets much than the intrinsic property difference of associated materials, thereby make the surface of related elements and inferior surface in a lot of the application, become the limiting element bottleneck of performance, the easiest of the weak link of damage from laser such as in strong laser system, becoming.
For the surface and subsurface defect of optical material, can be divided into absorption defective and non-absorption defective usually: absorb defective and cause the variation of defect area optical properties of materials by the absorption to luminous energy, thereby change the variation of the beam properties that sees through; But not the absorption defective can cause the scattering of light beam etc.; Different defectives is different to the influence of optical system, can carry out fast detecting classification to above defective, to the performance that improves optical material, and the performance that promotes whole optical system on this basis have great significance.
And some defect inspection methods of using always at present, as the high-resolution scatter measurement method, the high-resolution fluorescent measurement, atomic force microscope, scanning tunnel microscope, Near-field Optical Microscope, and high-resolution photoacoustic microscope, and all kinds of high-resolution photo-thermal microscopes etc., only can effectively detect a certain class defective: the high-resolution scatter measurement method is mainly to because the unevenness sensitivity that light refractive index or face shape defective cause is difficult to use in the absorption Analysis on defects.The high-resolution fluorescent measurement can better detection optical absorption defective, but for non-absorption defective and insensitive.Optoacoustic and various photo-thermal microscopic method can effectively detect absorbing defective, but can't be suitable for non-absorption defective.And atomic force microscope, scanning tunnel microscope, what high-resolution means such as Near-field Optical Microscope were mainly surveyed is the unevenness of optical elements of large caliber surface topography and light refractive index, general and insensitive to the optical absorption defective.
The utility model content
The technical problems to be solved in the utility model provides a kind of detection sorter of optical elements of large caliber surface imperfection, utilize a branch of than light laser and a branch of more weak illumination beam optical elements of large caliber, than light laser with absorb defective and act on mutually and excite generation fluorescence, act on the scattering that causes light beam mutually than the low light level and non-absorption defective, by the detection respectively of fluorescence and scattered light being obtained to absorb on the optical elements of large caliber information of defective and non-absorption defective, realization is to the classification and Detection of different defectives, owing to adopt the lighting system of inner total reflection formula, to the detection of throwing light on simultaneously of a plurality of zones, optical elements of large caliber inside, improved detection efficiency.
The technical solution of the utility model is:
The detection sorter of optical elements of large caliber surface imperfection includes strong illumination light source, weak illumination light source, is arranged at strong illumination light beam cosmetic treatment apparatus between strong illumination light source transmitting terminal and the optical elements of large caliber incident side, is arranged at weak illumination beam shaping treating apparatus between weak strong illumination light source transmitting terminal and the optical elements of large caliber incident side, the image-forming detecting system that arranges of optical elements of large caliber surface relatively.
The detection sorter of described optical elements of large caliber surface imperfection also includes intense illumination beam switch, the weak illumination beam-switching that is arranged at weak illumination light source rear end, the high reflective mirror that is arranged at strong illumination light beam cosmetic treatment apparatus rear end that is arranged at strong illumination light source rear end, the dichroic mirror that is arranged at weak illumination beam shaping treating apparatus rear end and the relative high reflective mirror reflecting surface setting of its reflecting surface, the illuminating bundle absorption plant of relative optical elements of large caliber outgoing side setting.
Described image-forming detecting system is one or more sets, overlaps the image-forming detecting system zones of different setting of relative optical elements of large caliber front and rear surfaces respectively more.
Described image-forming detecting system includes imaging device, filtering apparatus, sniffer and the image acquisition and processing terminal that arranges in turn, and the relative optical elements of large caliber of described imaging device surface arranges.
Described imaging device is selected lens or lens combination for use; Described sniffer is selected the CCD camera for use; Described filtering apparatus is selected strong illumination light beam filtering apparatus or weak illumination light beam filtering apparatus for use.
Advantage of the present utility model:
The fluorescence that the effect that the utility model utilizes strong illumination light beam and optical elements of large caliber surface and inferior surface to absorb defective produces carries out the image information that imaging detects to obtain to absorb defective, utilize scattering and the refract light of the effect generation of weak illumination light beam and optical elements of large caliber surface and inferior surperficial non-absorption defective to carry out the image information that imaging detects to obtain non-absorption defective, realized the classification and Detection to different defectives;
The utility model adopts the details in a play not acted out on stage, but told through dialogues imaging mode, relative light field imaging mode, and the contrast of the absorption defect area that obtains and non-absorption defect area image increases greatly, and identification is higher; And, adopt the mode of inner total reflection illumination, a plurality of zones obtain illumination simultaneously on the optical elements of large caliber, can adopt a cover image-forming detecting system to scan fast to detect or overlap image-forming detecting system more parallel detection is carried out in the field of illumination, as shown in Figure 4, can improve the efficient of detection greatly, be specially adapted to the detection classification of optical elements of large caliber surface imperfection.
The utility model adopts the lighting system of inner total reflection formula, to the detection of throwing light on simultaneously of a plurality of zones, optical elements of large caliber inside, has improved detection efficiency; Adopt the little imaging system of depth of focus or utilize the method for co-focusing imaging, only optical elements of large caliber surface and subsurface defect are detected, obtain clear and legible darkfield image.The utility model is applicable to optics nondestructive examination, optical precision detection, optical microphotograph imaging and defect analysis, is specially adapted to a plurality of fields such as the interior heavy caliber transparent optical element surface of strong laser system and subsurface defect detection.
Description of drawings
Fig. 1 is the structural representation of the detection sorter of the utility model optical elements of large caliber surface imperfection, wherein, 1 is the strong illumination light source, 2 is the intense illumination beam switch, 3 is strong illumination light beam cosmetic treatment apparatus, and 4 is high reflective mirror, and 5 is dichroic mirror, 6 is the weak illumination light source, 7 is the weak illumination beam-switching,, 8 is weak illumination beam shaping treating apparatus, 9 is optical elements of large caliber, 10 is the illuminating bundle absorption plant, and 11 is imaging device, and 12 is filtering apparatus, 13 is sniffer, and 14 is the image acquisition and processing terminal.
Fig. 2 is the synoptic diagram one that throws light on fully in the forward and backward surface of the utility model optical elements of large caliber.
Fig. 3 is the synoptic diagram two that throws light on fully in the forward and backward surface of the utility model optical elements of large caliber.
Fig. 4 is the structural representation of the detection sorter of the optical elements of large caliber surface imperfection of employing two cover image-forming detecting systems in the utility model specific embodiment, wherein, 1 is the strong illumination light source, 2 is the intense illumination beam switch, 3 is strong illumination light beam cosmetic treatment apparatus, and 4 is high reflective mirror, and 5 is dichroic mirror, 6 is the weak illumination light source, 7 is the weak illumination beam-switching,, 8 is weak illumination beam shaping treating apparatus, 9 is optical elements of large caliber, 10 is the illuminating bundle absorption plant, and 11 is first imaging device, and 12 is first filtering apparatus, 13 is first sniffer, 14 is the first image acquisition and processing terminal, and 15 is second imaging device, and 16 is second filtering apparatus, 17 is second sniffer, and 18 is the second image acquisition and processing terminal.
Embodiment
See Fig. 1, the detection sorter of optical elements of large caliber surface imperfection:
Include strong illumination light source 1, weak illumination light source 6, be arranged at the intense illumination beam switch 2 of strong illumination light source 1 rear end, be arranged at the weak illumination beam-switching 7 of weak illumination light source 6 rear ends, be arranged at the strong illumination light beam cosmetic treatment apparatus 3 of intense illumination beam switch 2 rear ends, be arranged at the weak illumination beam shaping treating apparatus 8 of weak illumination beam-switching 7 rear ends, be arranged at the high reflective mirror 4 of strong illumination light beam cosmetic treatment apparatus 3 rear ends, be arranged at the dichroic mirror 5 that relative high reflective mirror 4 reflectings surface of weak illumination beam shaping treating apparatus 8 rear ends and its reflecting surface arrange, the image-forming detecting systems that the illuminating bundle absorption plant 10 that relative optical elements of large caliber 9 outgoing sides arrange and relative optical elements of large caliber 9 surfaces arrange;
Image-forming detecting system includes imaging device 11, filtering apparatus 12, sniffer 13 and the image acquisition and processing terminal 14 that arranges in turn, and imaging device 11 relative optical elements of large caliber 9 surfaces arrange; Imaging device 11 is selected lens or lens combination for use; Sniffer 13 is selected the CCD camera for use; Filtering apparatus 12 is selected strong illumination light beam filtering apparatus or weak illumination light beam filtering apparatus for use.
The detection sorting technique of optical elements of large caliber surface imperfection may further comprise the steps:
(1), strong illumination light beam (Ultra-Violet Laser light beam) is incided optical elements of large caliber inside from the incident side of optical elements of large caliber, and in the optical elements of large caliber internal transmission until the surface of inciding optical elements of large caliber, the incident angle that incides the relative optical elements of large caliber of the strong illumination light beam surface of optical elements of large caliber surface satisfies the optical total-reflection condition, thereby make the strong illumination light beam before optical elements of large caliber inside, carry out repeatedly total reflection between the rear surface, surf zone to strong illumination light beam process has all been realized illumination, reflects the back from the outgoing side outgoing of optical elements of large caliber until front surface or rear surface through optical elements of large caliber;
(2), weak illumination light beam (with the inconsistent homogeneous beam of strong illumination light beam wavelength) is incided optical elements of large caliber inside from the incident side of optical elements of large caliber, and in the optical elements of large caliber internal transmission until the surface of inciding optical elements of large caliber, the incident angle that incides the relative optical elements of large caliber of the weak illumination light beam surface of optical elements of large caliber surface satisfies the optical total-reflection condition, thereby make the weak illumination light beam before optical elements of large caliber inside, carry out repeatedly total reflection between the rear surface, surf zone to weak illumination light beam process has all been realized illumination, reflects the back from the outgoing side outgoing of optical elements of large caliber until front surface or rear surface through optical elements of large caliber;
(3), the optical elements of large caliber surface arranges one or more sets image-forming detecting systems relatively; When there is defective in the strong beam field of illumination on optical elements of large caliber surface and inferior surface, to cause the strong illumination light beam and absorb the defective interaction, excite generation fluorescence, absorb the defect area excited fluorescent and enter image-forming detecting system, obtain to absorb the darkfield image of defect area;
(4), when there is defective in the low light level bundle field of illumination on optical elements of large caliber surface and inferior surface, to cause that weak illumination light beam and non-absorption defective interact, cause the scattering of weak illumination light beam, perhaps the weak illumination light beam does not satisfy total reflection condition at non-absorption defect area, part weak illumination light beam will be by the surperficial outgoing of refraction from optical elements of large caliber, scattered light and refract light that non-absorption defective causes enter image-forming detecting system, obtain the darkfield image of non-absorption defect area.
Wherein, filtering apparatus 12 contains a series of optical filter, can filter strong illumination light beam, weak illumination light beam and allow in the fluorescence a certain band light beam pass through, by the suitable filtering apparatus of suitable selection, excite the fluorescence of generation and the scattering refract light of weak illumination light beam to survey respectively to the strong illumination light beam; When detecting fluorescence, in the end of probe acquisition is the darkfield image that absorbs defect area; When detecting the scattering refract light of weak illumination light beam, in the end of probe acquisition is the darkfield image of non-absorption defect area.
The utility model can also utilize intense illumination beam switch 2 and weak illumination beam-switching 7 to cooperate and close, allow strong illumination light beam and weak illumination light beam alternately optical elements of large caliber 9 be thrown light on, to the detection that hockets of fluorescence and weak illumination scattering of light refract light, obtain to absorb the information of defective and non-absorption defective respectively.
Wherein, strong illumination light beam or weak illumination light beam throw light on fully to the carrying out of optical elements of large caliber front and rear surfaces, and its implementation is:
A, see Fig. 2, make strong illumination light beam or weak illumination light beam incide the inside of optical elements of large caliber at a certain angle by the shaping processing, and strong illumination light beam or weak illumination light beam cover the incident side fully, incide the strong illumination light beam of optical elements of large caliber inside or weak illumination light beam then and carry out repeatedly total reflection until from the outgoing of outgoing side between the optical elements of large caliber front and rear surfaces;
B, see Fig. 3, change the incident angle of strong illumination light beam or weak illumination light beam, incident angle after the change and the incident side normal symmetry that changes the preceding relative optical elements of large caliber of incident angle, strong illumination light beam behind the change incident angle or weak illumination light beam incide optical elements of large caliber from the incident side inside, and strong illumination light beam or weak illumination light beam cover the incident side fully, incide the strong illumination light beam of optical elements of large caliber inside or weak illumination light beam then and carry out repeatedly total reflection until from the outgoing of outgoing side between the optical elements of large caliber front and rear surfaces; Or the incident angle of change strong illumination light beam or weak illumination light beam, strong illumination light beam or weak illumination light beam incide the inside of optical elements of large caliber from the outgoing side, and strong illumination light beam or weak illumination light beam cover the outgoing side fully, incide the strong illumination light beam of optical elements of large caliber inside or weak illumination light beam then and carry out repeatedly total reflection until from the outgoing of incident side between the optical elements of large caliber front and rear surfaces.
In actual the use, strong illumination light beam or weak illumination light beam cover the incident side of optical elements of large caliber fully or the implementation of outgoing side is two kinds, be respectively: handle by shaping the spot size make strong illumination light beam or weak illumination light beam more than or equal to the size of optical elements of large caliber incident side or outgoing side, thereby realize strong illumination light beam or weak illumination light beam in optical elements of large caliber incident side or the covering fully of outgoing side; Or with spot size less than the strong illumination light beam of optical elements of large caliber incident side or outgoing lateral dimension or weak illumination light beam along optical elements of large caliber incident side or the scanning of outgoing side, thereby realize strong illumination light beam or weak illumination light beam in optical elements of large caliber incident side or the covering fully of outgoing side.
In actual the use, for improving detection speed and efficient, also can adopt many cover imaging systems to carry out parallel detection, see Fig. 4, adopt the pick-up unit of the heavy caliber transparent optical element surface imperfection of two cover image-forming detecting systems, include strong illumination light source 1, weak illumination light source 6, be arranged at the intense illumination beam switch 2 of strong illumination light source 1 rear end, be arranged at the weak illumination beam-switching 7 of weak illumination light source 6 rear ends, be arranged at the strong illumination light beam cosmetic treatment apparatus 3 of intense illumination beam switch 2 rear ends, be arranged at the weak illumination beam shaping treating apparatus 8 of weak illumination beam-switching 7 rear ends, be arranged at the high reflective mirror 4 of strong illumination light beam cosmetic treatment apparatus 3 rear ends, be arranged at the dichroic mirror 5 that relative high reflective mirror 4 reflectings surface of weak illumination beam shaping treating apparatus 8 rear ends and its reflecting surface arrange, the image-forming detecting systems that the illuminating bundle absorption plant 10 that relative optical elements of large caliber 9 outgoing sides arrange and relative optical elements of large caliber 9 surfaces arrange;
Two cover image-forming detecting systems front surface and the rear surface of relative optical elements of large caliber 9 respectively arrange, include first imaging device 11, first filtering apparatus 12, first sniffer 13 and the first image acquisition and processing terminal, 14, the second imaging devices 15, second filtering apparatus 16, second sniffer 17 and the second image acquisition and processing terminal 18 respectively.
The two cover image-forming detecting systems that only draw among Fig. 4 can adopt many cover image-forming detecting systems as required in actual the use, overlap image-forming detecting system more and can be relatively arranged near the zones of different front and rear surfaces of optical elements of large caliber 9; And can adopt the little imaging device of depth of focus in actual use, system only can obtain clear and legible image to surface and inferior surf zone like this.
Claims (5)
1. the detection sorter of optical elements of large caliber surface imperfection is characterized in that: include strong illumination light source, weak illumination light source, be arranged at strong illumination light beam cosmetic treatment apparatus between strong illumination light source transmitting terminal and the optical elements of large caliber incident side, be arranged at weak illumination beam shaping treating apparatus between weak strong illumination light source transmitting terminal and the optical elements of large caliber incident side, the image-forming detecting system that arranges of optical elements of large caliber surface relatively.
2. the detection sorter of optical elements of large caliber surface imperfection according to claim 1, it is characterized in that: the detection sorter of described optical elements of large caliber surface imperfection also includes the intense illumination beam switch that is arranged at strong illumination light source rear end, be arranged at the weak illumination beam-switching of weak illumination light source rear end, be arranged at the high reflective mirror of strong illumination light beam cosmetic treatment apparatus rear end, be arranged at the dichroic mirror that the relative high reflective mirror reflecting surface of weak illumination beam shaping treating apparatus rear end and its reflecting surface arranges, the illuminating bundle absorption plant that relative optical elements of large caliber outgoing side arranges.
3. the detection sorter of optical elements of large caliber surface imperfection according to claim 1, it is characterized in that: described image-forming detecting system is one or more sets, overlaps the image-forming detecting system zones of different setting of relative optical elements of large caliber front and rear surfaces respectively more.
4. the detection sorter of optical elements of large caliber surface imperfection according to claim 1, it is characterized in that: described image-forming detecting system includes imaging device, filtering apparatus, sniffer and the image acquisition and processing terminal that arranges in turn, and the relative optical elements of large caliber of described imaging device surface arranges.
5. the detection sorter of optical elements of large caliber surface imperfection according to claim 4, it is characterized in that: described imaging device is selected lens or lens combination for use; Described sniffer is selected the CCD camera for use; Described filtering apparatus is selected strong illumination light beam filtering apparatus or weak illumination light beam filtering apparatus for use.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320048368 CN203069524U (en) | 2013-01-29 | 2013-01-29 | Detection and classification device for surface defect of big-aperture optical element |
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| CN 201320048368 CN203069524U (en) | 2013-01-29 | 2013-01-29 | Detection and classification device for surface defect of big-aperture optical element |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103105400A (en) * | 2013-01-29 | 2013-05-15 | 合肥知常光电科技有限公司 | Method and device for detecting and classifying surface defects of large-aperture optical element |
| CN105158269A (en) * | 2015-09-29 | 2015-12-16 | 中国科学院上海光学精密机械研究所 | Three-dimensional rapid dark field detection device and method for defects of large-caliber planar optical element |
| CN106645183A (en) * | 2017-03-05 | 2017-05-10 | 北京创思工贸有限公司 | Optical component surface defect detection device and method |
-
2013
- 2013-01-29 CN CN 201320048368 patent/CN203069524U/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103105400A (en) * | 2013-01-29 | 2013-05-15 | 合肥知常光电科技有限公司 | Method and device for detecting and classifying surface defects of large-aperture optical element |
| CN103105400B (en) * | 2013-01-29 | 2015-08-26 | 合肥知常光电科技有限公司 | The detection sorting technique of optical elements of large caliber surface imperfection |
| CN105158269A (en) * | 2015-09-29 | 2015-12-16 | 中国科学院上海光学精密机械研究所 | Three-dimensional rapid dark field detection device and method for defects of large-caliber planar optical element |
| CN106645183A (en) * | 2017-03-05 | 2017-05-10 | 北京创思工贸有限公司 | Optical component surface defect detection device and method |
| CN106645183B (en) * | 2017-03-05 | 2019-03-15 | 北京创思工贸有限公司 | A kind of detection device and method of optical element surface defect |
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