CN106645183B - A kind of detection device and method of optical element surface defect - Google Patents
A kind of detection device and method of optical element surface defect Download PDFInfo
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- CN106645183B CN106645183B CN201710125838.7A CN201710125838A CN106645183B CN 106645183 B CN106645183 B CN 106645183B CN 201710125838 A CN201710125838 A CN 201710125838A CN 106645183 B CN106645183 B CN 106645183B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8854—Grading and classifying of flaws
- G01N2021/888—Marking defects
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N2021/9511—Optical elements other than lenses, e.g. mirrors
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Abstract
The invention discloses a kind of detection devices of optical element surface defect, including pedestal, have light source；Longitudinal rail is set on pedestal；Microscope is set on longitudinal rail, and microscopical top is provided with ccd image sensor；Objective table, including objective table one and objective table two with diaphragm, objective table one and objective table two are all set on longitudinal rail, and are sequentially located at microscopical lower section；There is the adjustable relative displacement on the direction X/Y/Z between objective table one and objective table two；Furthermore, the bottom of objective table one has cmos image sensor, cmos image sensor and ccd image sensor are connect with external image processor, and image processor is promoted to handle and/or observe ccd image sensor and cmos image sensor acquired image using image processing techniques.The utility model has the advantages that the present invention can be realized the quick detection of minor diameter larger radius of curvature beauty defects.
Description
Technical field
The present invention relates to optical devices technologies fields, it particularly relates to which a kind of detection of optical element surface defect fills
It sets and method.
Background technique
With the development of science and technology, the quality requirement to optical element surface is higher and higher.Its surface defect, scratch, broken side
Presence etc. various defects will cause to scatter in various degree, since scattering will consume light energy significantly while may also introduce serious
Diffraction and cause the new damage and failure film layer of optical element, so often due to one or several biggish defects and understand
Seriously affect the operation of whole system.Therefore its detection method cannot be averaged with the method for detection surface roughness using sampling
Etc statistical method, but must search for all possible defects in element effective aperture.It is most basic and the most commonly used is visual
Method refers in the case where dark-ground illumination with the naked eye or the width of magnifying glass observation scratch and length divides the grade of defect.
But although the resolution ratio of human eye is high, for small part higher curvature radius, just but there is limitation in face, and detection efficiency is low, Er Qiejiu
Depending on will cause because of fatigue, eyesight is seriously damaged.
For the problems in the relevant technologies, currently no effective solution has been proposed.
Summary of the invention
The purpose of the present invention is to propose to the detection devices and method of a kind of optical component beauty defects, to overcome existing correlation
The above problem present in technology.
The technical scheme of the present invention is realized as follows:
According to an aspect of the invention, there is provided a kind of detection device of optical element surface defect.
The detection device of the optical element surface defect includes pedestal, has light source；Longitudinal rail is set to the pedestal
On；Microscope is set on the longitudinal rail, and the microscopical top is provided with ccd image sensor；Loading
Platform, including objective table one and objective table two with diaphragm, the objective table one and the objective table two are all set in described indulge
On direction guiding rail, and it is sequentially located at the microscopical lower section；Have between the objective table one and the objective table two in X/Y/Z
Adjustable relative displacement on direction, also, the objective table one and the objective table two be in the case where relative displacement adjusts,
The diaphragm of the objective table one and the objective table two is located at the light source, the ccd image sensor and the microscope
In coaxial optical path；In addition, the bottom of the objective table one has cmos image sensor, the cmos image sensor and described
Ccd image sensor connect with external image processor, promote described image processor using image processing techniques processing with/
Or observe the ccd image sensor and cmos image sensor acquired image.
Wherein, it is fixedly connected between the objective table one and the longitudinal rail, the objective table two is led with the longitudinal direction
It is flexibly connected between rail, also, is provided on the longitudinal rail and is moved on the direction X/Y/Z for adjusting the objective table two
Regulating device.
Wherein, the regulating device includes coarse adjustment knob and vernier knob.
Wherein, the coarse adjustment knob and the vernier knob are coaxial arrangement.
According to another aspect of the present invention, a kind of detection method of optical element surface defect is provided, for above-mentioned
The detection device of optical element surface defect.
Detection method includes the following steps for the optical element surface defect:
Optical element sample upper piece to be measured is fixed on the diaphragm of the objective table one；
Optical element sample bottom sheet to be measured is fixed on the diaphragm of the objective table two；
The relative displacement of the objective table one and the objective table two on the direction X/Y/Z is adjusted, and passes through cmos image
Sensor observes the air gap between optical element sample upper piece to be measured and optical element sample bottom sheet to be measured, and physics is avoided to touch
It hits；
Clear water is dripped in the upper surface point one of optical element sample bottom sheet to be measured, continues to adjust the objective table one and the load
Relative displacement of the object platform two on the direction X/Y/Z promotes the optical element sample upper piece to be measured and the optical element to be measured
The contact of sample bottom sheet；
Microscope is adjusted, promotes optical element sample to be measured to appear in the visual field, and adjust light source incidence angle, promotes
Image clearly in ccd image sensor has no large area hickie；
Ccd image sensor acquired image is handled using image processing techniques by image processor,
Unified 2-D gray image is extracted, and observes and determines the defect feature in the presence of the unified 2-D gray image.
Wherein, described image processing technique include: median filtering image processing techniques, greyscale transformation image processing techniques,
Threshold segmentation image processing techniques, mathematical morphology expansion and refined image processing technique and edge extracting image procossing skill
Art.
Beneficial effects of the present invention: the present invention can be realized the quick detection of minor diameter larger radius of curvature beauty defects, tool
Have the advantages that analysis precision is high, applicability is wide, analysis speed is fast, amount of samples is few, while avoiding testing staff's eye burden,
It improves work efficiency, reduces job costs.
Detailed description of the invention
It in order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, below will be to institute in embodiment
Attached drawing to be used is needed to be briefly described, it should be apparent that, the accompanying drawings in the following description is only some implementations of the invention
Example, for those of ordinary skill in the art, without creative efforts, can also obtain according to these attached drawings
Obtain other attached drawings.
Fig. 1 is the structural schematic diagram of the detection device of optical element surface defect according to an embodiment of the present invention；
Fig. 2 is the flow diagram of the detection method of optical element surface defect according to an embodiment of the present invention.
In figure:
1, pedestal；2, light source；3, longitudinal rail；4, microscope；5, ccd image sensor；6, objective table one；7, objective table
Two；8, cmos image sensor；9, coarse adjustment knob；10, vernier knob.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art's every other embodiment obtained belong to what the present invention protected
Range.
According to an embodiment of the invention, providing a kind of detection device of optical element surface defect.
As shown in Figure 1, the detection device of optical element surface defect according to an embodiment of the present invention includes pedestal 1, have
Light source 2；Longitudinal rail 3 is set on the pedestal 1；Microscope 4 is set on the longitudinal rail 3, and described micro-
The top of mirror 4 is provided with ccd image sensor 5；Objective table, it is described including objective table 1 and objective table 27 with diaphragm
Objective table 1 and the objective table 27 are all set on the longitudinal rail 3, and are sequentially located at the lower section of the microscope 4；
There is the adjustable relative displacement on the direction X/Y/Z, also, the load between the objective table 1 and the objective table 27
Object platform 1 and the objective table 27 are in the case where relative displacement adjusts, the light of the objective table 1 and the objective table 27
It is late to be located in coaxial optical path with the light source 2, the ccd image sensor 5 and the microscope 4；In addition, the objective table one
6 bottom has cmos image sensor 8, the cmos image sensor 8 and the ccd image sensor 5 and external figure
As processor connection, described image processor is promoted to handle and/or observe the ccd image sensor using image processing techniques
5 and 8 acquired image of cmos image sensor.
When concrete application, for having on the direction X/Y/Z between objective table 1 described above and the objective table 27
For adjustable relative displacement, can be realized by following scheme: the objective table 1 and the longitudinal rail 3 it
Between be fixedly connected, be flexibly connected between the objective table 27 and the longitudinal rail 3, also, be arranged on the longitudinal rail 3
There is the regulating device moved on the direction X/Y/Z for adjusting the objective table 27.
Specifically, the regulating device includes coarse adjustment knob 9 and vernier knob 10.Also, the coarse adjustment knob 9 and described
Vernier knob 10 is coaxial arrangement.
According to an embodiment of the invention, a kind of detection method of optical element surface defect is additionally provided, for above-mentioned
The detection device of optical element surface defect.
As shown in Fig. 2, detection method includes the following steps for optical element surface defect according to an embodiment of the present invention:
Optical element sample upper piece to be measured is fixed on the diaphragm of the objective table 1 by step S201；
Optical element sample bottom sheet to be measured is fixed on the diaphragm of the objective table 27 by step S203；
Step S205 adjusts the relative displacement of the objective table 1 and the objective table 27 on the direction X/Y/Z, and leads to
It crosses between the air that cmos image sensor 8 is observed between optical element sample upper piece to be measured and optical element sample bottom sheet to be measured
Gap avoids physical impacts；
Step S207 drips clear water in the upper surface point one of optical element sample bottom sheet to be measured, continues to adjust the objective table
One 6 and relative displacement of the objective table 27 on the direction X/Y/Z, promote the optical element sample upper piece to be measured and described
Optical element sample bottom sheet contact to be measured；
Step S209 adjusts microscope 4, promotes optical element sample to be measured to appear in the visual field, and adjust light source 2 and enter
Firing angle degree promotes the image clearly in ccd image sensor 5 to have no large area hickie；
Step S211, by image processor, using image processing techniques, to 5 acquired image of ccd image sensor
It is handled, extracts unified 2-D gray image, and observed and determine the defect in the presence of the unified 2-D gray image
Sick feature.
When concrete application, above-mentioned image processing techniques includes: median filtering image processing techniques, greyscale transformation image procossing
At technology, Threshold segmentation image processing techniques, mathematical morphology expansion and refined image processing technique and edge extracting image
Reason technology.
In order to facilitate above-mentioned technical proposal of the invention is understood, individually below by specific image processing techniques to this hair
Bright above-mentioned technical proposal is described in detail.
After ccd image sensor 5 collects image, it is stored in local disk, then image is successively located as follows
Reason:
Median filtering:
Using the intermediate value (or median) of gray scale in regional area as output gray level, remove and surrounding pixel gray value
The bigger pixel of difference, the instead gray value with surrounding pixel relatively.The present invention uses adaptive median filtering side
Method carries out noise reduction, and the output of filter is a monodrome, which is used to replacing the pixel value at point (x, y), point (x, y) be to
Window sxx is determined by a particular point after centralization.Algorithm is as follows:
Zmin is enabled to indicate the minimum luminance value in sxr；Zm indicates the maximum brightness value in sx；Zn indicate sx, in brightness
Intermediate value；Brightness value at hole indicates coordinate (x, y).This adaptive median filter algorithm works in two levels, is expressed as A layers
With B layers:
A layers: if, then B layers are gone to;
Otherwise increase window size；
If window size < Smax, A layers are repeated;
Otherwise Zmed is exported；
B layers: if, then export;
Otherwise Zmed is exported.
Wherein, Smax indicates the size of the maximum adaptive filter window allowed.The value of Zmin and Zmax is counted
The noise contribution of class Swashing type is considered by algorithm afterwards, even if they are not minimum and highest possible pixel in the picture
Value.This algorithm can remove impulse noise, other smooth non-impulse noises, and reduce the mistakes such as object boundary refinement or roughening
Very.
A layers of purpose is to determine whether the output Zmed of median filter is an impulsive noise.If conditionEffectively, then Zmed is not just pulse.In this case, B layers of detection are gone to, window center is had a look
Whether spot hole itself is a pulse.If conditionIt is true, then Zxy and Zmed are not just pulses,
Reason is not that pulsion phase is same with Zmed.In this case, algorithm exports a constant pixel value Zxy.By not changing this
The point of " by-level " a bit, to reduce the distortion in image.If conditionIt is false, then Zmin=Zxy
With Zmax=Zxy.In either case, pixel value is all an extreme value and algorithm output intermediate value Zmed, knows Zmed from A layers
It is not impulsive noise.
Assuming that A layers have found a pulse really, then algorithm will increase window size and repeat A layers, which can be after
It is continuous until algorithm finds a non-pulse intermediate value (going to B layers), or reach maximum window size.If having reached maximum
Window size, algorithm export Zxy value.Algorithm does not export a value, and window Sxy is just moved to next position of image.Then
Algorithm reinitializes, in new location of pixels application.
Greyscale transformation:
Filtered picture carries out linear space filtering to input picture with Prewit operator (1) side, obtains partial derivative,
Input original image is filtered with Prewit operator (2), is obtained, by result such as formula, gradient is calculated.Gradient image is obtained, such defect target is enhanced, is easy to distinguish with background.
Wherein, Prewit operator (1) formula is as follows:
；
Wherein, Prewit operator (1) formula is as follows:
。
Threshold segmentation:
The present invention selects a global threshold using iterative method:
The initial value for selecting an average gray value T first, with T segmented image, the pixel by all gray values greater than T is returned
Enter Gl group, be otherwise included into G2 group, calculates separately pixel average gray value μ 1 and μ 2 in Gl and G2.What then order was new closes value Tl=(μ 1
+ μ 2)/2, then by the value of Tl is assigned to T, divides original image with T again, repeats the above steps, until the resulting Tl value of successive iteration
Difference between threshold value T used in preceding primary segmentation is less than the parameter ε of predefined, then segmentation terminates, and Tl is exactly automatic
The threshold value of selection.When the area that background and target occupy in the picture is close, then the initial value of good T is exactly being averaged for image
Gray value.
Mathematical morphology expansion and refinement:
By closing value segmentation.The defect image of binaryzation is obtained.I.e. background pixel is black.Value is 0；Defect
Object pixel is white, and being worth is 1.Image is expanded again (), corrosion (), it opens and closure, further refined image makes defect edge show especially out.
Edge extracting:
The present invention is marked target area using 8 connection types, scans label connected region algorithm with line and realizes tool
Body step:
1. from left to right, scan image from top to bottom.
If 2. picture element be 1:
If a left side, upper left, upper, upper right point have a label, replicates this label and give p point.
If at least one own mark-on number in four adjoint points, and the label of the pixel of all mark-ons number is identical, then
The label is added for p point.
If at least there are two own mark-ons number in four adjoint points, and label is different, then these labels have been used for same group
Member, it should which they are merged.In this case, then according to a left side, upper left, upper, upper right sequence detection, by what is encountered for the first time
Label distributes to picture element p, and will be used as equivalent labels in these identical label input equivalent tables.
Otherwise a new label is distributed to this picture element and input this label in equivalent table.
3. returning to step 2 if it need to consider more to put.
4. each equivalence in equivalent table is focused to find out minimum label.
5. scan image replaces each label with the minimum mark in equivalent table, algorithm terminates.
In conclusion the present invention can be realized minor diameter larger radius of curvature table by means of above-mentioned technical proposal of the invention
The quick detection of face defect has the advantages that analysis precision is high, applicability is wide, analysis speed is fast, amount of samples is few, avoids simultaneously
Testing staff's eye burden, improves work efficiency, reduces job costs.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention
Within mind and principle, any modification, equivalent replacement, improvement and so on be should all be included in the protection scope of the present invention.
Claims (6)
1. a kind of detection device of optical element surface defect characterized by comprising
Pedestal has light source；
Longitudinal rail is set on the pedestal；
Microscope is set on the longitudinal rail, and the microscopical top is provided with ccd image sensor；
Objective table, including objective table one and objective table two with diaphragm, the objective table one and the objective table two are respectively provided with
In on the longitudinal rail, and it is sequentially located at the microscopical lower section；
Relative displacement, also, the objective table can occur between the objective table one and the objective table two on the direction X/Y/Z
One with the objective table two in the case where relative displacement occurs, the diaphragm of the objective table one and the objective table two with it is described
Light source, the ccd image sensor and the microscope are located in coaxial optical path；
In addition, the bottom of the objective table one has cmos image sensor, the cmos image sensor and the ccd image
Sensor is connect with external image processor, and described image processor is using described in image processing techniques processing and/or observation
Ccd image sensor and cmos image sensor acquired image.
2. the detection device of optical element surface defect according to claim 1, which is characterized in that the objective table one with
It is fixedly connected, is flexibly connected between the objective table two and the longitudinal rail, also, the longitudinal direction between the longitudinal rail
The regulating device for moving the objective table two on the direction X/Y/Z is provided on guide rail.
3. the detection device of optical element surface defect according to claim 2, which is characterized in that the regulating device packet
Include coarse adjustment knob and vernier knob.
4. the detection device of optical element surface defect according to claim 3, which is characterized in that the coarse adjustment knob and
The vernier knob is coaxial arrangement.
5. a kind of detection method of optical element surface defect, which is characterized in that utilize optical element table as claimed in claim 4
The detection device of face defect is detected, comprising the following steps:
Optical element sample upper piece to be measured is fixed on the diaphragm of the objective table one；
Optical element sample bottom sheet to be measured is fixed on the diaphragm of the objective table two；
Make the objective table one and the objective table two that relative displacement occur on the direction X/Y/Z, and is sensed by cmos image
Device observes the air gap between optical element sample upper piece to be measured and optical element sample bottom sheet to be measured, avoids physical impacts；
Clear water is dripped in the upper surface point one of optical element sample bottom sheet to be measured, continues to make the objective table one and the objective table two
Relative displacement occurs on the direction X/Y/Z, promotes the optical element sample upper piece to be measured and the optical element sample to be measured
Bottom sheet contact；
Microscope is adjusted, promotes optical element sample to be measured to appear in the visual field, and adjust light source incidence angle, promotes CCD
Image clearly in imaging sensor has no large area hickie；
Ccd image sensor acquired image is handled using image processing techniques by image processor, is extracted
Unified 2-D gray image, and observe and determine the defect feature in the presence of the unified 2-D gray image.
6. the detection method of optical element surface defect according to claim 5, which is characterized in that described image handles skill
Art includes: median filtering image processing techniques, greyscale transformation image processing techniques, Threshold segmentation image processing techniques, mathematics shape
State expansion and refined image processing technique and edge extracting image processing techniques.
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| CN108037142B (en) * | 2017-12-04 | 2021-01-19 | 江苏维普光电科技有限公司 | Mask optical defect detection method based on image gray value |
| CN109060659A (en) * | 2018-08-08 | 2018-12-21 | 西安工业大学 | A kind of detection system and detection method of optical element surface defect three-dimensional information |
| CN111289519B (en) * | 2018-12-07 | 2022-11-04 | 长春长光华大智造测序设备有限公司 | End face detection device for light homogenizing rod |
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| CN205426806U (en) * | 2015-12-02 | 2016-08-03 | 中国航空工业集团公司洛阳电光设备研究所 | Optical element surface quality detection device and testing platform thereof |
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| US7769225B2 (en) * | 2005-08-02 | 2010-08-03 | Kla-Tencor Technologies Corp. | Methods and systems for detecting defects in a reticle design pattern |
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| DE3932685A1 (en) * | 1989-09-29 | 1991-04-18 | Albert Sturm | Visual observation of thin molecular layers - of metabolism products on specimen body sing cuvette filled with liquid, and illumination via light conductor |
| CN101261234A (en) * | 2008-03-26 | 2008-09-10 | 广州中国科学院工业技术研究院 | Surface flaw detection device |
| CN203069524U (en) * | 2013-01-29 | 2013-07-17 | 合肥知常光电科技有限公司 | Detection and classification device for surface defect of big-aperture optical element |
| CN205426806U (en) * | 2015-12-02 | 2016-08-03 | 中国航空工业集团公司洛阳电光设备研究所 | Optical element surface quality detection device and testing platform thereof |
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