CN205426806U - Optical element surface quality detection device and testing platform thereof - Google Patents
Optical element surface quality detection device and testing platform thereof Download PDFInfo
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- CN205426806U CN205426806U CN201520987387.4U CN201520987387U CN205426806U CN 205426806 U CN205426806 U CN 205426806U CN 201520987387 U CN201520987387 U CN 201520987387U CN 205426806 U CN205426806 U CN 205426806U
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Abstract
The utility model discloses an optical element surface quality detection device and testing platform thereof, wherein the optical element surface quality detection platform is including being used for the connection base of fixed connection on the microscope body, the rotation is equipped with the revolving stage on connecting the base, the rotation axis of revolving stage extends along upper and lower orientation, be equipped with the mounting structure who is used for placing the optical element that waits to detect on the revolving stage, mounting structure have be used for right the holding surface that optical element supported. Utilize rotatable testing platform to guarantee to be surveyed the component all the time in the view field range of microscope objective, reach quick detecting element's the surface quality such as scale and the purpose of index, avoid the problem to optical element production fish tail.
Description
Technical field
This utility model relates to a kind of optical element surface quality detection device and inspection platform thereof.
Background technology
The detection method of optics graticle surface quality and groove is: observed and detect optics graticle, index dial, electronics mask plate face scribe line quality and groove index by microscope.Owing to the field range of microscope objective is little, it is desirable to detect the surface quality of the elements such as whole optics graticle, traditional mode is to move repeatedly optics graticle or article carrying platform makes measured surface within microscopical field range.Move optics graticle, index dial frequently, graticle or index dial may be produced and scratch optics graticle surface.
Summary of the invention
The purpose of this utility model is to provide a kind of optical element surface quality detection platform, to solve to move the technical problem that the generation of its surface may be scratched by optical element frequently when detection.This utility model also provides for a kind of detection device using this detection platform simultaneously.
In order to realize object above, in this utility model, the technical scheme of optical element surface quality detection platform is as follows: optical element surface quality detection platform, including the connection base for being fixedly connected on microscope body, it is rotatably equipped with turntable on described connection base, the pivot center of described turntable is vertically extending, described turntable is provided with the mounting structure for placing optical element to be detected, and described mounting structure has for the supporting surface to described optical element support.
Described connection base is provided with lower light hole, it is equipped with light hole on described turntable, light source on described microscope body can pass sequentially through lower light hole, upper light hole is radiated on the optical element to be detected being arranged on turntable, and described upper light hole includes two arcuate sockets independent, that be oppositely arranged.
Described turntable is assemblied on connection base by axis of rotation, and the upper surface of described rotating shaft is less than the supporting surface of described turntable.
Described turntable is provided with up/down perforation, up big and down small shoulder hole, and described rotating shaft is up big and down small multidiameter, and described rotating shaft is inserted in described shoulder hole.
Described mounting structure is the mounting groove being located on turntable, and the groove bottom wall of described mounting groove forms described supporting surface.
The technical scheme of this utility model optical element surface quality detection device is as follows: optical element surface quality detection device, including microscope body, microscope body includes object stage, light source it is provided with below object stage, object stage is provided with detection platform, described detection platform includes the connection base being fixedly connected on object stage, it is rotatably equipped with turntable on described connection base, the pivot center of described turntable is vertically extending, described turntable is provided with the mounting structure for placing optical element to be detected, described mounting structure has for the supporting surface to described optical element support.
Described connection base is provided with lower light hole, it is equipped with light hole on described turntable, described light source can pass sequentially through lower light hole, upper light hole is radiated on the optical element to be detected being arranged on turntable, and described upper light hole includes two arcuate sockets independent, that be oppositely arranged.
Described turntable is assemblied on connection base by axis of rotation, and the upper surface of described rotating shaft is less than the supporting surface of described turntable.
Described turntable is provided with up/down perforation, up big and down small shoulder hole, and described rotating shaft is up big and down small multidiameter, and described rotating shaft is inserted in described shoulder hole.
Described mounting structure is the mounting groove being located on turntable, and the groove bottom wall of described mounting groove forms described supporting surface.
The beneficial effects of the utility model: in use, optical element surface quality detection platform is placed on microscopical object stage and in microscope objective field range, the measured optical unit is placed on the platform, detected element is all the time in the field range of microscope objective to utilize rotatable detection platform to ensure, reach surface quality and the purpose of index such as scale of quick detecting element, it is to avoid optical element is produced the problem scratched.
Accompanying drawing explanation
Fig. 1 is the structural representation of the detection platform in this utility model optical element surface quality detection device；
Fig. 2 is the A-A sectional view of Fig. 1；
Fig. 3 is the structural representation of this utility model optical element surface quality detection device.
Detailed description of the invention
The embodiment of this utility model optical element surface quality detection device: as Figure 1-3, optical element surface quality detection device includes that microscope body 1, microscope body include object lens 5, eyepiece, object stage, is provided with light source 7 below object stage.Object stage is provided with detection platform, detection platform includes the connection base 2 being fixedly connected on object stage, connect and be rotatably equipped with turntable 3 on base 2, the pivot center of turntable 3 is vertically extending, turntable 3 is provided with the mounting structure for placing optical element to be detected, and mounting structure has for the supporting surface to optical element support.Mounting structure is the mounting groove 6 being located on turntable, and the groove bottom wall of mounting groove forms above-mentioned supporting surface.In the present embodiment, using graticle 4 as optical element to be detected.
So that microscope is more it is observed that groove on graticle, connect base 2 and be provided with lower light hole, light hole 8 it is equipped with on turntable 3, light source can pass sequentially through lower light hole, upper light hole is radiated on the graticle being arranged on turntable, and upper light hole includes two arcuate sockets independent, that be oppositely arranged.In most of stroke during turntable 3 rotates, lower light hole can connect with upper light hole, the light that light source 7 is launched can pass through these about two light hole deflection scale plates 4 through reflection, and enters in microscopical object lens 5, and then can be observed by eyepiece.
Turntable 3 is rotated by rotating shaft 10 and is assemblied on connection base 2, and turntable is provided with up/down perforation, up big and down small shoulder hole 11, and rotating shaft 10 is up big and down small multidiameter, and rotating shaft 10 is inserted in shoulder hole 11.Further, in order to prevent rotating shaft from scratching graticle surface, the upper surface of rotating shaft is less than the supporting surface of turntable.
When in use, graticle to be detected is placed in mounting groove, cellophane can be placed in advance in mounting groove, to protect graticle.Rotating shaft drives turntable to rotate so that the upper light hole on turntable is constantly in microscopical objective lens field of view.Observed by microscopical eyepiece and be placed on this region of device score quality and the line width drawing plate, detected quality and the line width etc. of next partial optical graticle by rotating table, check the quality of whole optics graticle with this.In whole checking process, optics graticle simply indirectly rotates, it is to avoid scratch the measured optical unit surface.Shorten the detection time of detection optics graticle, improve whole inspection work efficiency.Meanwhile, move mode when microscope test platform is measured can be widened, by original along both horizontally and vertically moving, increase a kind of 360 ° of detection move modes rotated.
This utility model optical element surface quality detection device can also be used for detecting the optical elements such as index dial.
In other embodiments, mounting structure is not mounting groove yet, the boss of support can be set on turntable, three, four or other quantity multiple, each boss is on same circumference, each boss is provided with ledge structure, and each step surface is in the same plane for forming the supporting surface in above-described embodiment.
In other embodiments, can be fixedly installed, on base, the fixing axle extended up and down connecting, turntable arranges rotation pilot hole, turntable rotates and is assemblied on this fixing axle.
The embodiment of this utility model optical element surface quality detection platform, optical element surface quality detection platform is i.e. identical with the detection platform structure in above-described embodiment, supports the use with microscope, and detailed description of the invention no longer describes in detail.
Claims (10)
1. optical element surface quality detection platform, it is characterized in that: include the connection base for being fixedly connected on microscope body, it is rotatably equipped with turntable on described connection base, the pivot center of described turntable is vertically extending, described turntable is provided with the mounting structure for placing optical element to be detected, and described mounting structure has for the supporting surface to described optical element support.
Optical element surface quality detection platform the most according to claim 1, it is characterized in that: described connection base is provided with lower light hole, it is equipped with light hole on described turntable, light source on described microscope body can pass sequentially through lower light hole, upper light hole is radiated on the optical element to be detected being arranged on turntable, and described upper light hole includes two arcuate sockets independent, that be oppositely arranged.
Optical element surface quality detection platform the most according to claim 1, it is characterised in that: described turntable is assemblied on connection base by axis of rotation, and the upper surface of described rotating shaft is less than the supporting surface of described turntable.
Optical element surface quality detection platform the most according to claim 3, it is characterised in that: described turntable is provided with up/down perforation, up big and down small shoulder hole, and described rotating shaft is up big and down small multidiameter, and described rotating shaft is inserted in described shoulder hole.
5. according to the optical element surface quality detection platform described in Claims 1-4 any one, it is characterised in that: described mounting structure is the mounting groove being located on turntable, and the groove bottom wall of described mounting groove forms described supporting surface.
6. optical element surface quality detection device, including microscope body, microscope body includes object stage, light source it is provided with below object stage, it is characterized in that: object stage is provided with detection platform, described detection platform includes the connection base being fixedly connected on object stage, it is rotatably equipped with turntable on described connection base, the pivot center of described turntable is vertically extending, described turntable is provided with the mounting structure for placing optical element to be detected, and described mounting structure has for the supporting surface to described optical element support.
Optical element surface quality detection device the most according to claim 6, it is characterized in that: described connection base is provided with lower light hole, it is equipped with light hole on described turntable, described light source can pass sequentially through lower light hole, upper light hole is radiated on the optical element to be detected being arranged on turntable, and described upper light hole includes two arcuate sockets independent, that be oppositely arranged.
Optical element surface quality detection device the most according to claim 6, it is characterised in that: described turntable is assemblied on connection base by axis of rotation, and the upper surface of described rotating shaft is less than the supporting surface of described turntable.
Optical element surface quality detection device the most according to claim 8, it is characterised in that: described turntable is provided with up/down perforation, up big and down small shoulder hole, and described rotating shaft is up big and down small multidiameter, and described rotating shaft is inserted in described shoulder hole.
10. according to the optical element surface quality detection device described in claim 6 to 9 any one, it is characterised in that: described mounting structure is the mounting groove being located on turntable, and the groove bottom wall of described mounting groove forms described supporting surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201520987387.4U CN205426806U (en) | 2015-12-02 | 2015-12-02 | Optical element surface quality detection device and testing platform thereof |
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| CN201520987387.4U CN205426806U (en) | 2015-12-02 | 2015-12-02 | Optical element surface quality detection device and testing platform thereof |
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| CN205426806U true CN205426806U (en) | 2016-08-03 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106645183A (en) * | 2017-03-05 | 2017-05-10 | 北京创思工贸有限公司 | Optical component surface defect detection device and method |
| CN108570411A (en) * | 2018-05-02 | 2018-09-25 | 阜阳师范学院 | A kind of genetics assessment system before Embryonic limb bud cell |
| CN109211907A (en) * | 2018-10-24 | 2019-01-15 | 北京控制工程研究所 | A kind of fitting device detecting silver ion migration |
-
2015
- 2015-12-02 CN CN201520987387.4U patent/CN205426806U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106645183A (en) * | 2017-03-05 | 2017-05-10 | 北京创思工贸有限公司 | Optical component surface defect detection device and method |
| CN106645183B (en) * | 2017-03-05 | 2019-03-15 | 北京创思工贸有限公司 | A kind of detection device and method of optical element surface defect |
| CN108570411A (en) * | 2018-05-02 | 2018-09-25 | 阜阳师范学院 | A kind of genetics assessment system before Embryonic limb bud cell |
| CN109211907A (en) * | 2018-10-24 | 2019-01-15 | 北京控制工程研究所 | A kind of fitting device detecting silver ion migration |
| CN109211907B (en) * | 2018-10-24 | 2022-01-04 | 北京控制工程研究所 | Tool device for detecting silver ion migration |
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