CN112129775A - Dodging bar-shaped light source and optical element damage detection device based on same - Google Patents
Dodging bar-shaped light source and optical element damage detection device based on same Download PDFInfo
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- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
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- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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- G01N21/84—Systems specially adapted for particular applications
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- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N2021/9511—Optical elements other than lenses, e.g. mirrors
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Abstract
A light homogenizing bar-shaped light source and an optical element damage detection device based on the light source belong to the technical field of optical element damage detection. The problem of current heavy-calibre optical element detect that there is the poor detection light source homogeneity influence the testing result accuracy is solved. The laser comprises a glass rod and a laser, wherein the glass rod consists of an arc surface and a plane, the radian of the arc surface is more than 180 degrees, the plane is an isosceles trapezoid, and the plane is a rough scattering surface; a laser is arranged at one end of the round glass rod, a light beam of the laser is emitted from one end face of the round glass rod along the axial direction, and a reflective strip or a reflective layer is pasted on the end face of the other end; the light beam of the laser is reflected by the arc surface or the reflecting strip or the reflecting layer attached to the other end and then is emitted out through the rough scattering surface. And the damage of the device can be detected by adopting camera imaging. And the damage of the device can be detected by adopting camera imaging. The method is suitable for detecting the damage of the optical element.
Description
Technical Field
The invention belongs to the field of optics.
Background
In high-energy laser devices, damage detection of large-aperture optical elements is of great significance to safe and healthy operation of the devices. In the damage detection of the large-aperture optical element, the uniformity of illumination and the amount of stray light have direct influence on the precision and accuracy of damage identification. However, the conventional optical element detection is usually realized by arranging point light sources in parallel to form a linear light source, as shown in fig. 1 and fig. 2, but the uniformity of the light source in this way is poor, which directly affects the measurement result and causes a problem of poor measurement accuracy.
Disclosure of Invention
The invention provides a light homogenizing bar-shaped light source and an optical element damage detection device based on the light source, aiming at solving the problem that the detection result accuracy is influenced by poor uniformity of a detection light source in the detection of the existing large-aperture optical element.
The invention relates to a light homogenizing bar-shaped light source which comprises a glass bar and a laser, wherein the glass bar consists of an arc surface and a plane, the radian of the arc surface is more than 180 degrees, the plane is in an isosceles trapezoid shape, and the plane is a rough scattering surface;
a laser is arranged at one end of the round glass rod, a light beam of the laser is emitted from one end face of the round glass rod along the axial direction, and a reflective strip or a reflective layer is pasted on the end face of the other end; the light beam of the laser is reflected by the arc surface or the reflecting strip or the reflecting layer attached to the other end and then is emitted out through the rough scattering surface.
Further, the laser is arranged on the short side of the trapezoidal surface.
Furthermore, the LED lamp also comprises a rectangular bottom plate, two rectangular pressing plates and a light shield;
the side of rectangle bottom plate is opened along length direction has the rectangular channel, the rectangular channel is seted up along the central line of rectangle bottom plate, the rectangular channel is used for installing circular glass stick, and two parallel buckles of rectangle clamp plate are established on the rectangle bottom plate, and leave the gap between two rectangle clamp plates, gap and rectangular channel central line between two rectangle clamp plates correspond, and the scattering surface of circular glass stick corresponds with the gap between two rectangle clamp plates, and the one end at the rectangle bottom plate is installed to the laser instrument, and the lens hood cover is established in the outside of laser instrument.
Furthermore, one end of the light shield is hermetically connected with one ends of the two rectangular pressing plates.
Further, the laser employs an LD laser.
The optical element damage detection device based on the light source comprises a camera, two light homogenizing bar-shaped light sources are respectively arranged along the upper end surface and the lower end surface of a device to be detected, the rough scattering surfaces of the light homogenizing bar-shaped light sources are attached to the device to be detected, and lasers of the two light homogenizing bar-shaped light sources are positioned on two sides of the longitudinal central shaft of the device to be detected; the image acquisition surface of the camera is arranged towards the element to be measured.
The invention adopts the property of total reflection of the incident light beam in the round glass rod, the scattering rough surface is arranged on one side, and the uniformity of the light source is adjusted again by adjusting the size of the scattering rough surface, thereby effectively ensuring the detection requirement of the large-aperture optical device and simultaneously ensuring the uniformity of the light source. When the light source is adopted to detect the damage of the device, the damage image of the device can be acquired by a camera only by attaching the light source to two sides of the device to be detected without optical signal processing for multiple times. The accuracy and the effect of detecting the damage of the device are effectively improved.
Drawings
FIG. 1 is a schematic diagram of the conventional method for detecting damage and no damage of optical elements by light source imaging
FIG. 2 is a schematic diagram of a prior art method for detecting damage to an optical element by imaging with a light source in case of damage;
FIG. 3 is a schematic diagram of a light distributing rod with gradually changing width for a light emitting surface;
FIG. 4 is a schematic representation of the propagation of light energy from a bar light source;
FIG. 5 is a schematic diagram of light propagation for a rough scattering surface;
FIG. 6 is a schematic view of a rectangular base plate and a round glass rod mounting structure;
FIG. 7 is a schematic diagram of the overall structure of a bar-shaped light source;
FIG. 8 is a schematic representation of a bar light source configuration;
fig. 9(a) is a total reflected optical field distribution pattern in the integrator when h1 is 0.1mm and h2 is 0 mm;
FIG. 9(b) is the total reflected optical field distribution pattern in the dodging bar when h1 is 0.1mm and h2 is 0.0125 mm;
fig. 9(c) is a total reflected optical field distribution diagram in the light homogenizing bar when h1 is 0.1mm and h2 is 0.025 mm;
fig. 9(d) is the total reflected optical field distribution pattern in the light homogenizing bar when h1 is 0.1mm and h2 is 0.0375 mm;
fig. 9(e) is a total reflected optical field profile in the integrator when h1 is 0.1mm and h2 is 0.05 mm;
FIG. 9(f) is the total reflected optical field profile in the integrator when h1 is 0.1mm and h2 is 0.0625 mm;
FIG. 9(g) is the total reflected optical field distribution pattern in the integrator when h1 is 0.1mm and h2 is 0.075 mm;
FIG. 9(h) is the total reflection optical field distribution pattern in the light homogenizing bar when h1 is 0.1mm and h2 is 0.0875 mm;
FIG. 9(i) is a graph of the total reflected optical field in the integrator when h1 is 0.1mm and h2 is 0.1 mm;
FIG. 10 is a graph of uniformity of illumination of a light bar versus polishing parameters;
FIG. 11 is a diagram of a three-dimensional model for illumination stray light analysis;
FIG. 12(a) is a simulation of light propagation in the optical assembly of the terminal without occlusion;
FIG. 12(b) is a simulation of light propagation in the optical assembly of the terminal with obscuration;
FIG. 13(a) is a diagram showing the illuminance distribution of stray light on the outer surface of the left optical element when there is no shielding;
FIG. 13(b) is a graph showing the illuminance distribution of stray light on the outer surface of the left optical element when there is a blockage;
FIG. 14(a) is a diagram showing the illuminance distribution of stray light on the outer surface of the right optical element when there is no shielding;
FIG. 14(b) is a diagram showing the illuminance distribution of stray light on the outer surface of the right optical element when there is no shielding;
FIG. 15 is a schematic view showing the grating etching direction perpendicular to the illumination direction;
FIG. 16 is a schematic view showing the grating etching direction parallel to the illumination direction.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that the embodiments and features of the embodiments may be combined with each other without conflict.
The first embodiment is as follows: the following description is given with reference to fig. 1, and the light homogenizing rod-shaped light source in the present embodiment includes a glass rod 1 and a laser 2, where the glass rod 1 is composed of an arc surface and a plane, a radian of the arc surface is greater than 180 degrees, the plane is an isosceles trapezoid, and the plane is a rough scattering surface;
a laser 2 is arranged at one end of the round glass rod 1, a light beam of the laser 2 is emitted from one end face of the round glass rod 1 along the axial direction, and a reflective strip or a reflective layer is attached to the end face of the other end; and the light beam of the laser 2 is reflected by the arc-shaped surface or the reflecting strip or the reflecting layer attached to the other end and then is emitted out through the rough scattering surface.
Further, the laser 2 is disposed on the short side of the trapezoidal surface.
In order to realize damage identification of optical elements, a method of total internal reflection illumination in a dark field is generally adopted at present, and the principle is shown in fig. 1. The illumination light source enters the optical element to be measured at an angle less than or equal to alpha, the refraction angle is beta, the incident angle of the refracted light reaching the surface of the element again is theta, and if the theta angle is larger and meets the total reflection condition, no light is emitted from the surface of the element. The camera does not image the element at this time. When the surface of the element is damaged, the condition of total reflection on the surface of the element is no longer satisfied, so light leaks out from the damaged part, and the part of light is imaged on a camera to achieve the purpose of detecting the damage as shown in fig. 2. In the process, the uniformity of the illumination light source has an important influence on the experimental result, so that a strip-shaped light source based on the light homogenizing rod is designed, as shown in fig. 3, the light homogenizing rod adopts a quartz glass round rod, a part of the quartz glass round rod is axially ground to form a rough scattering light-emitting surface (P2), and the scattering light-emitting surface is parallel to the central axis of the light homogenizing rod. Laser emitted by LD is injected into one end (P1) of the light homogenizing rod, and a small reflector (or a coating reflection film) is adhered to the other end. Light enters from the P1 and exits from the P2 plane. In the light homogenizing rod, the arc-shaped surface meets the condition of internal total reflection, and no light leaks out. The P2 surface is a scattering interface, and light is reflected, diffusely reflected, transmitted, diffusely transmitted, and absorbed by the interface, as shown in fig. 4 and 5. The scattering surface of the dodging rod is clung to the element to be measured.
Further, as described with reference to fig. 6, 7 and 8, the light shield further includes a rectangular bottom plate 3, two rectangular pressing plates 5 and a light shield 4;
open the side of rectangle bottom plate 3 along length direction has the rectangular channel, the rectangular channel is seted up along the central line of rectangle bottom plate 3, the rectangular channel is used for installing circular glass stick 1, and two parallel buckles of rectangle clamp plate 5 are established on rectangle bottom plate 3, and leaves the gap between two rectangle clamp plates 5, gap and rectangular channel central line between two rectangle clamp plates 5 correspond, and the scattering surface of circular glass stick 1 corresponds with the gap between two rectangle clamp plates 5, and the one end at rectangle bottom plate 3 is installed to laser instrument 2, and the outside at laser instrument 2 is established to 4 covers of lens hood.
Further, one end of the light shield 4 is hermetically connected with one ends of the two rectangular pressing plates 5.
In the embodiment, the light shield 4 is adopted to fix the laser light source and the round glass rod 1, so that the light leakage is reduced.
Further, the laser 2 employs an LD laser.
In a second specific embodiment, the optical element damage detection apparatus is implemented based on the uniform light bar-shaped light source in the first specific embodiment, and includes a camera, two uniform light bar-shaped light sources are respectively disposed along an upper end surface and a lower end surface of a device to be measured, a rough scattering surface of the uniform light bar-shaped light source is attached to the device to be measured, and lasers 2 of the two uniform light bar-shaped light sources are located on two sides of a longitudinal central axis of the device to be measured; the image acquisition surface of the camera is arranged towards the element to be measured.
The size of the light emitting surface of the light homogenizing rod is in important relation with the illumination uniformity of a light source in an optical element and the full utilization of light energy, and parameters of the light homogenizing rod are optimized in order to improve the two indexes.
As more light energy is scattered outwards from the rough surface close to the light injection end, the energy scattered from the rough surface is gradually reduced along with the increase of the distance from the light injection end. In order to make the light homogenizing rod form a relatively uniform light field, the width of the light emitting surface of the light injection end can be reduced, the width of the light emitting surface of the other end is increased, and a light emitting surface with gradually changed width is formed between the two ends, as shown in the following figure, a small reflector is placed at the end d1 or a layer of reflective film is plated, and illumination light is injected at the end d 2. The light scattering property of the light-emitting surface was set to diffuse Reflectance (RTS) and diffuse transmittance (TTS) 50% and 50%. The slope surface was simulated in the following 3 cases: in the first case, 9 data of 0-0.1 mm are obtained at equal intervals by the grinding thickness h1 of the slope surface (the plane of the isosceles trapezoid) d1 end and the grinding thickness d2 end; a slope surface isosceles trapezoid plane) d1 end grinding thickness h1 is 0.2mm, and d2 end grinding thickness is equal to 9 data of 0-0.2 mm at equal intervals; the plane of the isosceles trapezoid with the slope surface in the third case) is d1 end grinding thickness h1 equal to 0.4mm, and d2 end grinding thickness is equal to 9 data of 0-0.4 mm at equal intervals. Under the condition of double dodging rods for illumination, corresponding internal total reflection optical field distribution is obtained through simulation. r is as shown in FIGS. 9(a) to 9 (i). The relationship between the illumination uniformity of the obtained dodging bar and the grinding parameters is shown in fig. 10, and it can be seen from the analysis results, that the d1 end grinding thickness h1 is 0.1mm, and the d2 end grinding thickness h2 is 0.05mm, which corresponds to the optimal illumination uniformity.
1. Stray light analysis using a light homogenizing bar light source
It has been found in experiments that the light leakage problem of the light source can cause serious stray light. In order to control the influence of the illumination stray light of the element, the influence is analyzed by adopting a simulation and experiment method.
(1) Simulation conditions are as follows: lighting by two light homogenizing rods, wherein the light injection end of each light homogenizing rod is ground by 0.05mm, the reflecting surface end of each light homogenizing rod is ground by 0.1mm, and the light injection power P of each light homogenizing rod is 2 x 1.579W which is 3.158W;
(2) the simulation method comprises the following steps: monte Carlo Ray Tracing (MCRT) energy decays to 1% and Tracing is stopped.
(3) Simulation software: the model of the TracePro7.3.4(Lambda Research Corporation, Littleton, America) simulation is shown in FIG. 11, the light beam tracking result is shown in FIG. 12, wherein FIG. 12(a) shows the non-shielding light beam tracking result, FIG. 12(b) shows the shielding light beam tracking result, it can be seen that the main light leakage occurs at the joint of the LD laser and the optical rod, and the light propagation simulation in the terminal optical component is shown in FIGS. 12(a) and 12(b) (10% of the total light quantity is shown)
And (3) simulation results:
a) when the light source is not shielded, the stray light power received by the outer surface of the left optical element is as follows: pleft is 0.010W, and the power ratio η left (Pleft/P) × 100%, (0.3167% ≈ 0.32%); the power of the stray light received by the outer surface of the right optical element is as follows: right ═ 0.035W, the proportion η right ═ (right/P) × 100% >, 1.1083% ≈ 1.11%;
b) when the light source is shielded, the stray light power received by the outer surface of the left optical element is as follows: pleft is 0.003W, and power ratio η left is (Pleft/P) × 100% is 0.095% and is approximately equal to 0.10%; the power of the stray light received by the outer surface of the right optical element is as follows: right ═ 0.021W, and η right ═ (right/P) × 100% >, 0.6650% ≈ 0.67%.
TABLE 1 ratio of stray light power received by the two side optical elements to total power of the light source
TABLE 2 ratio of stray light power leaked from light source to total power of light source
| Left side of | Right side | On the upper part | Lower part | Front side | Rear end | Gross leak | Leakage ratio | |
| Without shielding | 0.010 | 0.035 | 0.022 | 0.022 | 0.275 | 0.278 | 0.642 | 20.33％ |
| With a shield | 0.003 | 0.021 | 0.010 | 0.010 | 0.018 | 0.017 | 0.079 | 2.49％ |
And (4) simulation analysis conclusion: according to the light blocking design of the scheme, the LD, the light bar and the terminal component mirror frame are subjected to integrated closed shading design, so that stray light can be effectively controlled.
In addition to light leakage from the light source itself, there are also factors that introduce stray light, such as: light leakage phenomena occur between the light emitting surface of the light source and the element, at the boundary of the element and the like, and leaked light is reflected among different elements, so that the detection result is influenced; if a grating element is present in the element, stray light is also introduced under the influence of diffraction.
As shown in the following figure, since the total reflection condition is not satisfied at the element boundary, there may be light leakage, and the leaked light may be reflected in a different element, as shown in the red box of the left figure of the following figure. If the bar-shaped stray light is damaged, the bar-shaped stray light cannot be identified, and the damage detection accuracy is influenced. If the shielding is performed at the frame of the element, such stray light can be effectively eliminated, as shown in the right drawing, the lower half part of the frame where the light source is installed is shielded, and the lower half part of the stray light at the center of the element is eliminated. When the element is a grating element, there may also be significant stray light. When the illumination direction of the illumination light source is vertical to the grating etching direction, emergent light of the illumination light source irradiates to a point A, the internal total reflection condition is not met, the illumination light can be emitted from the point, and the emergent light forms stray light to influence a damage identification result. The grating etching direction is perpendicular to the illumination direction as shown in fig. 15.
If the illumination direction is changed, the illumination direction is parallel to the grating etching direction, as shown in the following figure, at this time, the illumination light irradiates the grating etching place, the incident angle is unchanged, so the internal total reflection condition is still satisfied, and no light leaks out. The etching direction of the grating is parallel to the illumination direction, as shown in FIG. 16
In consideration of the above factors, we have designed the following total internal reflection illumination method to achieve uniform illumination:
1. a strip-shaped light source based on a light homogenizing rod is designed, the structure of the light source is shown in the following figure, an LD laser 2 emits laser, and a light outlet is aligned with the light homogenizing rod. The light homogenizing rod is a quartz glass round rod, a part of the quartz glass round rod is ground along the axial direction to form a rough scattering light emitting surface, the scattering light emitting surface is parallel to the central axis of the light homogenizing rod, and the scattering light emitting surface is designed to be a light emitting surface with gradually changed width. Laser emitted by LD is injected into one end of the light homogenizing rod, and a small reflector (or a plated reflecting film) is adhered to the other end of the light homogenizing rod. The LD laser 2 and the light homogenizing rod are both fixed on the bottom plate, and the pressing plate is used for fixing the light homogenizing rod. The light shield 4 shields the LD laser 2 and the joint with the light uniformizing bar for reducing light leakage of the light source.
Although the invention herein has been described with reference to particular embodiments, it is to be understood that these embodiments are merely illustrative of the principles and applications of the present invention. It is therefore to be understood that numerous modifications may be made to the illustrative embodiments and that other arrangements may be devised without departing from the spirit and scope of the present invention as defined by the appended claims. It should be understood that features described in different dependent claims and herein may be combined in ways different from those described in the original claims. It is also to be understood that features described in connection with individual embodiments may be used in other described embodiments.
Claims (6)
1. The light homogenizing rod-shaped light source is characterized by comprising a glass rod (1) and a laser (2), wherein the glass rod (1) consists of an arc surface and a plane, the radian of the arc surface is greater than 180 degrees, the plane is in an isosceles trapezoid shape, and the plane is a rough scattering surface;
a laser (2) is arranged at one end of the round glass rod (1), a light beam of the laser (2) is emitted from one end face of the round glass rod (1) along the axial direction, and a reflective strip or a reflective layer is adhered to the end face of the other end of the round glass rod; and the light beam of the laser (2) is reflected by the arc-shaped surface or a reflecting strip or a reflecting layer attached to the other end and then is emitted out through the rough scattering surface.
2. An dodging stick light source according to claim 1, wherein the laser (2) is arranged on the short side of the trapezoidal face.
3. A light homogenizing bar light source according to claim 1 or 2, characterized by further comprising a rectangular base plate (3), two rectangular press plates (5) and a light shield (4);
the side of rectangle bottom plate (3) is opened along length direction has the rectangular channel, the central line along rectangle bottom plate (3) is seted up to the rectangular channel, the rectangular channel is used for installing circular glass stick (1), and two parallel buckles of rectangle clamp plate (5) are established on rectangle bottom plate (3), and leaves the gap between two rectangle clamp plates (5), gap and rectangular channel central line between two rectangle clamp plates (5) correspond, and the scattering surface of circular glass stick (1) corresponds with the gap between two rectangle clamp plates (5), and the one end at rectangle bottom plate (3) is installed in laser instrument (2), and the outside at laser instrument (2) is established to lens hood (4) cover.
4. A light homogenizing bar light source according to claim 3, characterized in that one end of the light shield (4) is hermetically connected with one end of the two rectangular pressing plates (5).
5. A light homogenizing bar light source according to claim 3, characterized in that the laser (2) is LD laser.
6. The optical element damage detection device based on the light homogenizing bar-shaped light source of any one of claims 1 to 5, characterized in that the device comprises a camera, two light homogenizing bar-shaped light sources are respectively arranged along the upper end surface and the lower end surface of the device to be detected, the rough scattering surface of the light homogenizing bar-shaped light source is attached to the device to be detected, and the lasers (2) of the two light homogenizing bar-shaped light sources are positioned on two sides of the longitudinal central axis of the device to be detected; the image acquisition surface of the camera is arranged towards the element to be measured.
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