CN108362213B - Display panel-based film gap detection device and method - Google Patents
Display panel-based film gap detection device and method Download PDFInfo
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- CN108362213B CN108362213B CN201810114708.8A CN201810114708A CN108362213B CN 108362213 B CN108362213 B CN 108362213B CN 201810114708 A CN201810114708 A CN 201810114708A CN 108362213 B CN108362213 B CN 108362213B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
Abstract
The application provides a detection device and a detection method for a film gap based on a display panel. The detection device includes: the device comprises a laser light source, a focusing lens, a sample moving device and a data acquisition device; the sample moving device is used for placing a display panel to be detected and is arranged opposite to the light-emitting surface of the focusing lens and one side of the display panel covering the thin film layer, so that after the thin film layer receives laser emitted by the laser source and focused by the focusing lens, the laser is scattered and penetrates through the thin film layer to the laser beam on the lower surface of the substrate, and is reflected and penetrates through the thin film layer through the lower surface of the substrate, and an aperture is formed on the thin film layer; the data acquisition device is used for acquiring the image information of the aperture and judging whether the aperture has dark spots or not so as to determine whether a gap exists between the film layer and the substrate or not. The detection device is beneficial to rapidly and nondestructively detecting whether an air gap exists between the film and the substrate of the display panel.
Description
Technical Field
The application relates to the field of film detection, in particular to a device and a method for detecting a film gap based on a display panel.
Background
At present, since the organic light emitting material inside the display panel is sensitive to water and oxygen, the display panel needs to be subjected to a multi-layer organic/inorganic thin film encapsulation process after the preparation of the display panel. The effect of the encapsulation process will directly affect the lifetime of the display panel.
If bubbles exist between the film and the substrate or the phenomenon of splitting and layering occurs in the process of carrying out multilayer organic/inorganic film packaging treatment, the packaging effect of the display panel is seriously influenced, so that the service life of the display panel is reduced; meanwhile, if an air gap exists between the film and the substrate, the light extraction rate of the device is reduced.
Disclosure of Invention
The application provides a detection device and a detection method for a film gap based on a display panel, which aim to solve the problem that the film gap of the display panel cannot be detected in the prior art.
In order to solve the above technical problem, the present application provides a detection apparatus for a film gap based on a display panel, the display panel includes a device layer and a film layer covering a substrate surface of the device layer, the detection apparatus includes: the device comprises a laser light source, a focusing lens, a sample moving device and a data acquisition device; the sample moving device is used for placing a display panel to be detected and is arranged opposite to the light-emitting surface of the focusing lens and one side of the display panel covering the thin film layer, so that after the thin film layer receives laser emitted by the laser source and focused by the focusing lens, the laser is scattered and penetrates through the thin film layer to the laser beam on the lower surface of the substrate, and is reflected and penetrates through the thin film layer through the lower surface of the substrate, and an aperture is formed on the thin film layer; the data acquisition device is used for acquiring the image information of the aperture and judging whether the aperture has dark spots or not so as to determine whether a gap exists between the film layer and the substrate or not.
In order to solve the above technical problem, the present application further provides a method for detecting a film gap based on a display panel, where the display panel includes a device layer and a film layer covering a surface of a device substrate, and the method includes: focusing laser generated by a laser light source on the surface of one side, covered by the thin film layer, of the display panel to be detected through the focusing lens, so that the thin film layer receives the laser emitted by the laser light source and focused by the focusing lens, scatters the laser beam which penetrates through the thin film layer and is refracted to the lower surface of the substrate, and reflects the laser beam through the lower surface of the substrate and penetrates through the thin film layer to form an aperture on the thin film layer; the focusing lens is arranged on a light transmission path of the laser light source, and the display panel to be detected is placed on the sample moving device; and acquiring image information of the aperture through the data acquisition device, and judging whether the aperture has a dark spot or not to determine whether a gap exists between the thin film layer and the substrate or not.
In the application, laser is emitted from a laser light source and vertically irradiates on a focusing lens; the laser is focused by a focusing lens and irradiates the surface of the display panel; laser is scattered on the surface of the display panel and penetrates through the thin film layer to form laser beams with a certain angle; part of light rays in the laser beam are reflected to the upper surface of the substrate on the lower surface of the substrate and penetrate through the thin film layer, so that an aperture is formed on the thin film layer; the data acquisition device acquires image information of the aperture and detects whether dark spots exist in the aperture, and if the dark spots exist, a gap exists between the film layer and the substrate; if no dark spot exists, no gap exists between the thin film layer and the substrate. By adopting the method, whether the air gap exists between the film and the substrate of the display panel can be detected rapidly and nondestructively.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts. Wherein:
FIG. 1 is a schematic structural diagram of an embodiment of a device for detecting a film gap based on a display panel according to the present invention;
FIG. 2 is a schematic cross-sectional view of one embodiment of the movement of the display panel to be inspected on the sample moving device in FIG. 1;
FIG. 3 is a cross-sectional view of one embodiment of light propagation of the display panel-based film gap detection apparatus of FIG. 1;
FIG. 4 is a schematic diagram illustrating an effect of the apparatus for detecting a film gap based on the display panel of FIG. 1;
FIG. 5 is a schematic structural diagram of another embodiment of a display panel-based film gap detection apparatus according to the present invention;
fig. 6 is a flowchart illustrating an embodiment of a method for detecting a film gap based on a display panel according to the present invention.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. It is to be understood that the specific embodiments described herein are merely illustrative of the application and are not limiting of the application. It should be further noted that, for the convenience of description, only some of the structures related to the present application are shown in the drawings, not all of the structures. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
Referring to fig. 1, fig. 1 is a schematic structural diagram of an embodiment of a detection apparatus for detecting a film gap based on a display panel according to the present application, in which the display panel includes a device layer and a film layer covering a substrate surface of the device layer, the detection apparatus 100 includes:
a laser light source 11, a focusing lens 12, a sample moving device 13 and a data acquisition device 14.
The laser light source 11 is used for generating laser light including visible laser light and invisible laser light. Based on the characteristics of directional laser light emission and high brightness, the laser is selected as the light source in the scheme, so that the brightness contrast of the diaphragm with alternate light and dark can be improved, and the detection difficulty is reduced. The laser light source 11 is a laser or a laser pen, and the laser includes any one of a gas laser, a solid laser, a semiconductor laser, and a dye laser.
The focusing lens 12 is disposed on a light transmission path of the laser light source 11. The focusing lens 12 is a convex lens, and the main optical axis of the focusing lens 12 is parallel to the incident direction of the laser light. In the present embodiment, the distance between the focusing lens 12 and the sample moving device 13 is adjusted so that the display panel to be detected on the sample moving device 13 is at the focal point of the focusing lens 12. The arrangement mode can enable laser to be focused by the focusing lens 12, light can be totally irradiated on one point of the display panel to be detected, the light-dark contrast of the aperture can be enhanced, and the utilization rate of the light can be improved.
The sample moving device 13 is disposed on a plane where the focal point of the focusing lens 12 is located, and the sample placement stage is perpendicular to the propagation direction of the laser light. The sample moving device 13 is used for placing the display panel to be detected. One side of the display panel to be detected covering the thin film layer is arranged opposite to the light-emitting surface of the focusing lens 12.
In this embodiment, the sample moving device 13 can automatically move or control the movement of the placed display panel to be detected, please refer to fig. 2, and fig. 2 is a schematic cross-sectional view of an embodiment of the movement of the display panel to be detected on the sample moving device in fig. 1. As shown in fig. 2, the movement of the display panel to be detected is divided into a longitudinal movement and a transverse movement. The size of the longitudinal movement of the display panel to be detected is the diameter of the maximum bright area light ring in the aperture; the size of the lateral movement of the display panel to be detected is not limited herein. Further, the moving speed of the display panel to be detected is consistent with the image acquisition frequency of the data acquisition device 14. In other aspects, other movement schemes may be used, and are not described herein.
FIG. 3 is a cross-sectional view of an embodiment of light propagation of the device of FIG. 1 based on the film gap of the display panel. The laser 31 emitted from the laser light source 11 is focused by the focusing lens 12, and then irradiates the thin film layer 321 of the display panel 32 to be detected, which is arranged on the sample moving device 13, and is scattered and reflected in the display panel to be detected, so that a concentric ring aperture with alternate light and shade is formed on the side of the thin film layer opposite to the substrate 322.
In one embodiment, the laser 31 is focused by the focusing lens 12 onto the surface of the thin film layer 321 consisting of nanoparticles. Because the nanoparticles have strong scattering effect, the laser 31 becomes a cone beam with a cone angle theta after being focused through the thin film layer 321, and
in order to make the light beam focused by the laser 31 through the focusing lens 12 totally reflect in the substrate 322, it is necessary to make a part of the light beam in the cone-shaped light beam formed by the laser 31 after passing through the thin film layer 321 meet the condition of totally reflecting in the substrate, therefore, in this embodiment, the cone angle of the cone-shaped light beam is greater than or equal to twice the critical angle of totally reflecting on the surface of the substrate 322, when the scattered light beam propagates to the lower surface of the substrate 322, if the incident angle of the scattered light beam on the lower surface of the substrate 322 is greater than or equal to the critical reflection angle α, the part of the scattered light beam totally reflects on the lower surface of the substrate 322, and the scattered light beam reflects to the upper surface of the substrate 322, because the refractive index of the thin film layer 321 is greater than air, the scattered light beam reflected to the upper surface can propagate to the thin film layer to form a bright area, and the incident angle of the part of the light beam on the lower surface of the substrate 322 is less than the critical reflection angle α, the part of the scattered light beam cannot totally reflect to the upper surface of the thin film layer 322 and cannot totally reflect to the upper surface
Determining that h is the thickness of the substrate 322 and n is the refractive index of the substrate 322; the first-order bright area has a radius d, which can be determined by the formula d-2 htan (θ/2) -k. If the substrate 322 is of a moderate thickness, a large bright area will appear on the film, which can greatly improve the detection efficiency.
In the light propagation process, if there is an air gap or air bubble between the thin film layer 321 and the substrate 322, the uniformity of the propagation medium is directly affected, and further the propagation of the light is affected, so that the light cannot propagate straight, and dark spots will appear in the bright area on the surface of the thin film layer 321 on the original light propagation path. Similarly, if the thin film layer 321 fails to completely cover the surface of the substrate 322, dark spots will appear in the uncovered areas; if the cover film layer 321 in the display panel 32 to be inspected is formed by stacking a plurality of films, and delamination separation occurs in a region between the films, a dark spot will appear above the region. Therefore, the detection device can be used to detect whether there is a gap between the thin film layer 321 and the substrate 322, and whether the thin film completely covers the substrate; meanwhile, whether the delamination phenomenon exists among the multiple layers of films can be detected.
Referring to fig. 4, a detailed state of the display is shown, and fig. 4 is a schematic diagram of an experimental phenomenon according to an embodiment of the present disclosure. Including dark areas 41, light areas 42 and bubbles 43. If a bubble 43 is detected in the bright area 42 this indicates that the display panel to be inspected is defective.
The data acquisition device 14 is used for acquiring the data of the concentric ring aperture with alternate light and shade formed on the surface of the display panel 32 to be detected. In one embodiment, as shown in fig. 5, the data acquisition device 14 includes a CCD detector 141, an image acquisition card 142 and a PC terminal 143 coupled to each other. The CCD detector 141 is used for photographing the pattern formed on the surface of the display panel 32 to be detected in real time and transmitting the photographed pattern to the image acquisition card 142; the image acquisition card is used for acquiring image data including bright area data, dark area data and dark point data and transmitting the data to the PC terminal 143; the PC terminal 143 is configured to process the image data, determine whether the image aperture has a dark spot to determine whether a gap exists between the thin film layer and the substrate, wherein the refractive index of the thin film layer is greater than the refractive index of air, and output the image data and the determination result for viewing and inspection by a user. The pattern formed on the surface of the display panel 32 to be detected can be photographed in real time by using a laser camera or the like, which is not limited herein.
The embodiment provides a device for rapidly and nondestructively detecting whether an air gap exists between a film and a substrate, and the device is also suitable for detecting whether the phenomenon of splitting and layering occurs between multiple layers of films. Specifically, a concentric ring aperture with alternate light and shade is formed on the surface of a display panel to be detected through a laser light source, a focusing lens, a sample moving device and a data acquisition device, whether dark points exist in a bright area of the concentric ring aperture or not is detected, and if dark points exist, the display panel has defects. The data acquisition device comprises a CCD detector, an image acquisition card and a PC terminal.
By the device, whether an air gap exists between the film and the substrate of the display panel can be effectively, quickly and nondestructively detected.
The present application further provides a method for detecting a film gap based on a display panel, and please refer to fig. 6 for specific steps. The detection method specifically comprises the following steps:
s601: and focusing the laser generated by the laser light source through the focusing lens on the surface of one side of the display panel to be detected, which covers the thin film layer, so as to form an aperture on the thin film layer.
Specifically, after the thin film layer receives laser light emitted by a laser light source and focused by a focusing lens, the laser light is scattered to transmit the laser light from the thin film layer to the lower surface of the substrate, and the laser light is reflected by the lower surface of the substrate and transmits through the thin film layer, so that a diaphragm is formed on the thin film layer. The focusing lens is arranged on a light transmission path of the laser light source, and the display panel to be detected is placed on the sample moving device.
S602: and acquiring image information of the aperture through the data acquisition device, and judging whether the aperture has a dark spot or not to determine whether a gap exists between the thin film layer and the substrate or not.
Specifically, in the light propagation process, if there is an air gap or air bubble between the thin film layer and the substrate, the uniformity of the propagation medium is directly affected, and further the propagation of light is affected, so that light cannot propagate linearly, and dark spots appear in the area of the bright area on the surface of the thin film layer on the original light propagation path. Similarly, if the thin film layer does not completely cover the substrate surface, dark spots will appear in the uncovered areas; if the covering thin film layer in the display panel to be detected is formed by stacking a plurality of thin films, and the interlayer region of the thin films is subjected to delamination and splitting, a dark spot is also shown above the region.
Therefore, the data acquisition device can be used for acquiring the image information of the aperture and judging whether dark spots exist in the bright area of the aperture so as to detect whether a gap exists between the film and the substrate and whether the film completely covers the substrate; meanwhile, whether the delamination phenomenon exists among the multiple layers of films can be detected.
By the detection method in the embodiment, whether an air gap exists between the film and the substrate can be rapidly and nondestructively detected, and whether the phenomenon of splitting and layering occurs between multiple layers of films can be detected.
The above description is only an embodiment of the present invention, and not intended to limit the scope of the present invention, and all modifications of equivalent structures and equivalent processes performed by the present specification and drawings, or directly or indirectly applied to other related technical fields, are included in the scope of the present invention.
Claims (9)
1. A detection apparatus for detecting a film gap based on a display panel, the display panel including a device layer and a film layer covering a substrate surface of the device layer, the detection apparatus comprising:
the device comprises a laser light source, a focusing lens, a sample moving device and a data acquisition device; the focusing lens is arranged on a light transmission path of the laser light source, the sample moving device is used for placing a display panel to be detected, and a light-emitting surface of the focusing lens is arranged opposite to one side, which covers the thin film layer, of the display panel, so that after the thin film layer receives laser emitted by the laser light source and focused by the focusing lens, the laser is scattered and penetrates through the thin film layer to a laser beam on the lower surface of the substrate, and is reflected and penetrates through the thin film layer through the lower surface of the substrate, and an aperture is formed on the thin film layer;
the laser scatters the laser beams penetrating through the thin film layer to the lower surface of the substrate, the laser beams with the included angle with the incident direction of the laser larger than the critical angle of total reflection are totally reflected on the lower surface of the substrate, and the laser beams with the included angle with the incident direction of the laser smaller than the critical angle of total reflection are reflected and refracted on the lower surface of the substrate;
the data acquisition device is used for acquiring the image information of the aperture and judging whether the aperture has dark spots or not so as to determine whether a gap exists between the film layer and the substrate or not.
2. The testing device of claim 1, wherein the sample moving device moves at a rate consistent with an image acquisition frequency of the data acquisition device.
3. The inspection device of claim 1, wherein the data acquisition device is configured to acquire image information of an annular aperture formed on a side of the thin film layer facing away from the substrate, and determine whether the aperture has a dark spot to determine whether a gap exists between the thin film layer and the substrate, wherein a refractive index of the thin film layer is greater than a refractive index of air.
4. A testing device according to claim 3 wherein said alternating bright and dark circular apertures are concentric circular ring apertures.
5. The detection device according to claim 1, wherein the size of the longitudinal movement of the display panel to be detected is the diameter of the maximum bright area light ring.
6. The detection device according to claim 1, wherein the data acquisition device comprises a detector and an image acquisition card, the detector is coupled to the image acquisition card, the detector is configured to take a picture of the aperture in real time, and the image acquisition card is configured to receive image information of the aperture taken by the detector and send the image information to an external controller to determine whether the aperture has a dark spot.
7. The detection device of claim 6, wherein the detector is any one of a Charge Coupled Device (CCD) detector or a laser camera.
8. The detection device of claim 1, wherein the laser light source comprises any one of a laser or a laser pointer.
9. A detection method based on a thin film gap of a display panel, wherein the display panel comprises a device layer and a thin film layer covering the substrate surface of the device layer, and the detection method comprises the following steps:
focusing laser generated by a laser light source on the surface of one side, covered with the thin film layer, of the display panel to be detected through a focusing lens, so that after the thin film layer receives the laser emitted by the laser light source and focused through the focusing lens, the laser scatters and penetrates through the thin film layer to the laser beam on the lower surface of the substrate, and the laser is reflected and penetrates through the thin film layer through the lower surface of the substrate, and an aperture is formed on the thin film layer; the focusing lens is arranged on a light transmission path of the laser light source, and the display panel to be detected is placed on the sample moving device;
and acquiring image information of the aperture through a data acquisition device, and judging whether the aperture has a dark spot or not so as to determine whether a gap exists between the film layer and the substrate or not.
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| CN201810114708.8A CN108362213B (en) | 2018-02-05 | 2018-02-05 | Display panel-based film gap detection device and method |
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| CN201810114708.8A CN108362213B (en) | 2018-02-05 | 2018-02-05 | Display panel-based film gap detection device and method |
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103105403A (en) * | 2013-01-21 | 2013-05-15 | 合肥知常光电科技有限公司 | Method and device for detecting surface defect of transparent optical component |
| CN203069531U (en) * | 2013-01-21 | 2013-07-17 | 合肥知常光电科技有限公司 | Device for detecting surface defect of transparent optical element |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1774624A (en) * | 2003-04-16 | 2006-05-17 | 皇家飞利浦电子股份有限公司 | Method for measuring thin films |
| CN101832945A (en) * | 2010-04-29 | 2010-09-15 | 中国科学院上海技术物理研究所 | Online detection method and device for defects of coated glass film |
| DE102015006012B4 (en) * | 2015-05-13 | 2017-02-02 | Oligo Lichttechnik Gmbh | Luminaire for optical inspection of surfaces |
| CN206618705U (en) * | 2017-02-24 | 2017-11-07 | 湖南远见视觉科技有限责任公司 | A kind of optical film defect detecting device |
| CN207650122U (en) * | 2018-01-05 | 2018-07-24 | 合肥鑫晟光电科技有限公司 | The foreign matter detection system of display base plate |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103105403A (en) * | 2013-01-21 | 2013-05-15 | 合肥知常光电科技有限公司 | Method and device for detecting surface defect of transparent optical component |
| CN203069531U (en) * | 2013-01-21 | 2013-07-17 | 合肥知常光电科技有限公司 | Device for detecting surface defect of transparent optical element |
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