TWI491871B - Illumination system for use in optical inspection, illumination system-based inspection system, and illumination system-based inspection method - Google Patents

Illumination system for use in optical inspection, illumination system-based inspection system, and illumination system-based inspection method Download PDF

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Publication number
TWI491871B
TWI491871B TW102124264A TW102124264A TWI491871B TW I491871 B TWI491871 B TW I491871B TW 102124264 A TW102124264 A TW 102124264A TW 102124264 A TW102124264 A TW 102124264A TW I491871 B TWI491871 B TW I491871B
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TW
Taiwan
Prior art keywords
illumination
light source
detection
light
wavelength band
Prior art date
Application number
TW102124264A
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Chinese (zh)
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TW201502500A (en
Inventor
Guang Shiah Wang
Hui Yu Chen
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Machvision Inc
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21LIGHTING
    • F21SNON-PORTABLE LIGHTING DEVICES; SYSTEMS THEREOF; VEHICLE LIGHTING DEVICES SPECIALLY ADAPTED FOR VEHICLE EXTERIORS
    • F21S8/00Lighting devices intended for fixed installation
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21LIGHTING
    • F21VFUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V19/00Fastening of light sources or lamp holders
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8806Specially adapted optical and illumination features
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/08Monitoring manufacture of assemblages

Description

Illumination system for optical detection and detection system and detection method using same

The present invention relates to a related art of optical detection, and more particularly to an illumination system for optical detection and a detection system and detection method using the same.

The light source system plays a pivotal role in automatic optical inspection (AOI). For example, precision automated optical inspection is required in the manufacture of liquid crystal displays, wafers of semiconductor integrated circuits, and related circuits.

A defect condition detection for a wire on a circuit substrate is a part of automatic optical detection. Traditionally, the detection light is forwardly irradiated to the object to be tested. Since the wire is generally made of a metal material (for example, a copper material), The high reflection capability determines whether the wire is broken or broken by the presence or absence of the reflected light of the illumination light in the forward direction.

However, when such a method is often contaminated with dust or other attachments on the metal wires, the attachments may scatter the positively incident illumination light, so that the metal wires under the attachments cannot be forwardly incident. The illuminating light is reflected back, which in turn causes a misjudgment of the wire having the adhering matter, and also causes a processing cost in the subsequent further detection.

One of the objects of the present invention is to quickly obtain the defect condition of the object to be tested by the special configuration of the illumination system.

Another object of the present invention is to reduce false positives in the detection system.

Still another object of the present invention is to provide a detection system with image data for quickly identifying oxidized areas and dust in an optical image.

To achieve the above and other objects, the present invention provides an illumination system for optical detection, which provides illumination light to a detection area, comprising: a first light source group generated from a positive projection from above the detection area to the detection area a first illumination light; the second light source group is configured to generate two second illumination rays respectively generated from the detection area and obliquely projected to the detection area; and the third light source The group is configured to generate two third illumination rays respectively generated obliquely from above the detection area to the detection area, wherein an incident angle of the third illumination light incident on the detection area An incident angle greater than the second illumination ray, the third illumination ray comprising a wavelength segment having a wavelength shorter than the first illumination ray and the second illumination ray.

In order to achieve the above and other objects, the present invention further provides an optical detection system comprising the illumination system and an image capture device as described above, wherein the image capture device is disposed above the detection area for capturing the image. The first to third light source groups of the illumination system project the reflected light behind the detection area to optically detect the detection area.

To achieve the above and other objects, the present invention provides an optical detection method using an optical detection system as described above for optical detection of a test object in a detection zone, comprising the steps of: first to first The first to third illumination rays of the three light source groups are projected onto the object to be tested in the detection area; the color scan camera generates the captured first wavelength segment and the second wavelength segment The image data of the wavelength; performing the first determining step, determining whether there is a dark portion representing the defect according to the image data of the first wavelength segment, and generating a detection result of the normal detection of the detection region when the determination result is "No", and determining When the result is YES, the second determination step is performed; and the second determination step is performed, and the image data of the second wavelength segment is determined to be determined as a defect by the first determination step in the image data of the first wavelength segment. Whether the dark portion is still a dark portion, and when the determination result is "YES", the detection result of the defect in the dark portion is generated, and when the determination result is "No", the dark portion determined in the first determination step is generated. For the test results without defects.

In an embodiment of the present invention, the image data of the first wavelength segment is image data of the red wavelength segment, and the image data of the second wavelength segment is image data of the blue wavelength segment.

In an embodiment of the invention, the third illumination light is illumination light having only a blue wavelength band.

In an embodiment of the present invention, the light paths of the two illumination rays of the second light source group are symmetric with respect to the center of the detection area, and the light paths of the two illumination rays of the third light source group are opposite. The center of the detection zone is symmetrical to each other.

In an embodiment of the invention, the first to third light source groups generate corresponding illumination light through the LED linear light source or the fiber linear light source.

Accordingly, the present invention provides a high-speed color linear scanning camera that combines illumination of different angles of illumination with light of different wavelengths, and can be used to distinguish between oxidation and dust on a circuit board or other substrates. Defects can reduce the probability of misjudgment of the system during inspection.

100‧‧‧First light source group

102‧‧‧First light source

104‧‧‧Second optical component of the first source group

106‧‧‧First optical component

110‧‧‧First lighting

200‧‧‧Second light source group

202‧‧‧second light source

204‧‧‧Second optical component of the second source group

210‧‧‧second illumination

300‧‧‧ Third Light Source Group

302‧‧‧ Third light source

304‧‧‧Second optical component of the third source group

308‧‧‧Blue wavelength band filter

310‧‧‧ Third illumination

500‧‧‧Detection area

600‧‧‧Image capture device

701‧‧‧Background material

702‧‧‧ Defects

703‧‧‧ Copper Zone

801‧‧‧Background material

802‧‧‧ dust particles

803‧‧‧ Copper Zone

804‧‧‧Bronze area

901‧‧‧Background material

902‧‧‧Oxidized area

903‧‧‧Bronze area

S10~S42‧‧‧Steps

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a system diagram of a detection system in an embodiment of the present invention.

Fig. 2 is a schematic view showing a detailed system of the detecting system in an embodiment of the present invention.

Figure 3 is a flow chart showing an optical detecting method in an embodiment of the present invention.

Figure 4a is an image capture of the broken copper wire under the red wavelength band.

Figure 4b is an image capture of the broken copper wire under the blue wavelength band.

Figure 5a is an image capture of dust on a copper wire under the red wavelength band.

Figure 5b is an image capture of dust on a copper wire under the blue wavelength band.

Figure 6a is an image capture of an oxidized region on a copper line under the red wavelength band.

Figure 6b is an image capture of an oxidized region on a copper line under the blue wavelength band.

In order to fully understand the object, features and advantages of the present invention, the present invention will be described in detail by the following specific embodiments and the accompanying drawings.

The present invention uses three sets of light source groups arranged on a test object (for example, a circuit substrate) arranged at different illumination angles and the use of reflected light beams of different wavelength ranges to detect defects and enhance optical The discrimination between the oxidized area and the dust in the image reduces the probability of misjudgment of the image taking system.

Referring first to Figure 1, a system diagram of a detection system in accordance with an embodiment of the present invention is shown. The illumination system for optical detection in this embodiment of the present invention is for providing illumination light to a detection area 500. The illumination system includes: a first light source group 100, a second light source group 200, and a third light source group 300. The illumination system illuminates the detection area 500 such that the optical detection system including the illumination system and the image capture device 600 can pass through the image capture device 600 through the first to third light source groups 100 of the illumination system. ~300 is projected to the detection area 500 to capture light, and the detection area 500 can be optically detected.

The first light source group 100 is configured to generate a first illumination ray 110 that is forwardly projected from the detection area 500 to the detection area 500. The first illumination ray 110 may be light having only the first wavelength band or include There is light in the first wavelength band (for example, white light).

The second light source group 200 is configured to generate two second illumination rays 210, each of which is obliquely projected from above the detection region 500 to the detection region 500. The second illumination light 210 can be light having only the first wavelength band or light (eg, white light) including the first wavelength band. The first wavelength segment of the illumination light of the first light source group 100 and the second light source group 200 is preferably a red wavelength band.

The third light source group 300 is configured to generate two third illumination rays 310, each of which is obliquely projected from above the detection region 500 to the detection region 500. The incident angle of the third illumination ray 310 incident on the detection area 500 is greater than the incident angle of the second illumination ray 210, and the third illumination ray 310 includes the wavelength shorter than the first illumination ray 110 and the first The wavelength range of the illumination light 210. The third illumination light 310 is preferably an illumination light having only a blue wavelength band, and the incident angle of the third illumination light 310 incident on the detection area 500 is preferably 60 to 80 degrees. The angle between the horn illumination ray 310 and the normal on the detection zone 500.

As shown in FIG. 1 , the incident angle of the third illumination light 310 of the third light source group 300 incident on the detection area 500 is greater than the incident angle of the second illumination light 210 of the second light source set 200 . The angle of incidence is the angle between the illumination light and the normal on the detection zone 500. In addition, in the arrangement of the second light source group 200 and the third light source group 300 relative to the detection area 500, the two light source groups 200, 300 are preferably symmetric with respect to a normal line on the detection area 500 and are symmetric with each other. Configuration method. Taking the detection area 500 as a reference point, the arrangement position of the first light source group 100 shown in FIG. 1 is higher than the second light source group 200 and the third light source group 300, but those skilled in the art should Understand that this is only one kind By way of example and not limitation, any group of light sources that can be obliquely incident on the detection zone 500 can be used as the second source set 200 or the third set of light sources 300.

Next, please refer to FIG. 2, which is a schematic diagram of a detailed system of the detection system in an embodiment of the present invention. The second drawing is described in a detailed configuration of the structure, and those skilled in the art should understand that it is an example and not a limitation, and any other configuration device or system that satisfies the lighting conditions of the present invention does not. Deviation from the technical scope of the present invention.

As shown in FIG. 2, the first light source group 100 can include a first light source 102, a first optical element 106, and a second optical element 104. As described above, the first light source 102 can provide illumination light including a red wavelength band or only a red wavelength band. For example, the first light source 102 can be directly a red light generator or a white light. The generator is additionally provided with a filter element to achieve illumination light having the red wavelength band.

The second light source group 200 and the third light source group 300, which will be described later in the present invention, each use the same second optical element 104, which is defined by the same noun in the following description, but in the drawings Then distinguish them by different component symbols. The first optical component 106 of the first light source group 100 is disposed above the detection area 500 for guiding the light of the output of the first light source 102 to the detection area 500 to become the forwardly projected first illumination light 110. The second optical component 104 is disposed at the light output end of the first light source 102 for concentrating the output light of the first light source 102 onto the detection area 500. The first optical component 106 can be, for example, a semi-reflective semi-transmissive optical component or other optical component that can achieve the same function; the second optical component 104, 204, 304 can be, for example, a discontinuous concentrating curved surface. An optical element, two Fresnel lens groups each joined by a discontinuous curved surface, or other optical element that achieves the same function.

As shown in FIG. 2, the second light source group 200 can include: two second light sources 202 And two second optical elements 204. The second light source 202 can employ a white light generator as previously described. The second optical component 204 is disposed at the light output end of each of the second light sources 202 for concentrating the output light of each of the second light sources 202 onto the detection area 500. In addition, the second light source group 200 can also utilize a filter element to cause the emitted light to have only a wavelength range of red light (not shown).

As shown in FIG. 2, the third light source group 300 can include two third light sources 302, two second optical elements 304, and two blue wavelength band filter elements 308. The third light source 302 can employ a white light generator as previously described. The second optical component 304 is disposed at the light output end of each of the third light sources 302 for concentrating the output light of each of the third light sources 302 onto the detection area 500. The blue wavelength band filter element 308 is configured in a preferred embodiment. In actual implementation, the third illumination light 310 includes a shorter wavelength than the first illumination light 110 and the second illumination light. The wavelength of the wavelength band of 210 can complete the configuration of the illumination system of the present invention; and even, a light source that directly outputs the blue wavelength band is used as the third light source 302, so that the blue wavelength band filter element 308 does not need to be added. The second optical component 304 is disposed at the light output end of the third light source 302 for concentrating the output light of the third light source 302 onto the detection area 500. In a preferred embodiment, two blue wavelength band filter elements 308 are disposed between the corresponding third light source 302 and the second optical element 304 to filter the output light of the third light source 302 to have only blue light. A third illumination ray 310 of the wavelength band.

Next, please refer to FIG. 3, which is a flow chart of an optical detecting method in an embodiment of the present invention for optical detection in which a test object is located in a detection area.

First, in step S10, the illumination light of the first to third light source groups is irradiated to the detection area, and the first to third illumination rays of the first to third light source groups are projected onto the object to be tested in the detection area. on.

Next, in step S20: capturing the image data, the color scanning camera generates the captured image The image data including the wavelengths of the first wavelength segment and the second wavelength segment is obtained.

Next, in step S30, a first determining step is performed, according to whether the image data of the first wavelength segment has a dark portion representing a defect, and the image data of the first wavelength segment does not have a dark portion representing a defect (ie, When the determination result is "NO", the detection result of the detection area detection is normal, and the determination in step S32 is that there is no defect, and when the image data of the first wavelength band has a dark portion representing a defect (that is, the determination result is " If yes, the process proceeds to step S40.

Next, in step S40, a second determining step is performed, based on the image data of the second wavelength segment, whether the dark portion determined as the defect by the first determining step S30 in the image data of the first wavelength segment is still When the dark portion is still in the dark portion (that is, when the determination result is "YES"), the detection result of the defect in the dark portion is generated (step S42), and when it is not the dark portion, the bright portion is obtained (that is, the determination result is "NO". When it is determined that the dark portion determined in the first determination step is a detection result having no defect, the process proceeds to step S32, and the determination is that there is no defect.

In an embodiment, in an optical detection system including an illumination system and an image capture device 600, the image capture device 600 is a color scan camera (for example, a linear color camera), and the color scan camera captures the image. An image data includes image data of a red wavelength band, a green wavelength band, and a blue wavelength band, and the image data obtained by the color scan camera is a red wavelength band, a green wavelength band, and The image data of the blue wavelength band, wherein the image data of the first wavelength segment is the image data of the red wavelength segment, and the image data of the second wavelength segment is the image data of the blue wavelength segment.

Then, the first wavelength segment and the image data are respectively the image data of the red wavelength segment and the red wavelength segment, and the second wavelength segment and the image data are respectively the image data of the blue wavelength segment and the blue wavelength segment. Take an example for practical explanation. Wherein, the image capturing device 600 adopts high speed Color line scan camera.

Next, please refer to Figure 4a and Figure 4b at the same time. Figure 4a is the image of the copper wire broken under the red wavelength band; the 4th picture is the image of the copper wire broken under the blue wavelength band. Capture data. First, the first determination step, the 4a picture is the image data of R Chanel in which the mixed image is obtained by the color line scan camera and then the mixed image is segmented. In Fig. 4a, the copper line region 703 is seen as a bright area, and the background material 701 is a dark area. The defect 702 is located just above the copper line area 703 and is a dark area. The general inspection system will consider that the defect 702 is not illuminated, that is, the copper wire representing the area is broken, so that the light that has not been reflected after the light reaches the color line enters the color line scanning camera. However, the second determination step is performed, and the 4th picture is the image data of B Chanel in which the mixed image is obtained by the color line scan camera and then the mixed image is segmented. It can be seen in Fig. 4b that the copper line region 703 is still a bright area, and the background material 701 is still a dark area. The defect 702 is located just above the copper line area 703, and is also a dark area, and it can be confirmed that it is a true copper wire disconnection, which is a true defect. Accordingly, in the second determination step, the recognition accuracy of the detection system of the present invention can be improved by the assistance of the illumination light having only the second wavelength band.

Next, please refer to Figure 5a and Figure 5b at the same time. Figure 5a is for image data with dust on the copper wire under the red wavelength band; Figure 5b is for dust image on the copper wire under the blue wavelength band. Capture data. Fig. 5a is an image data of R Chanel in which the mixed image is obtained by a color line scanning camera and then the mixed image is segmented. In Fig. 5a, the copper line region 803 and the copper face region 804 are seen as bright areas, and the background material 801 is dark areas. The dust particles 802 are located just above the copper line area 803, and the brightness thereof is a darker area than the height of the copper line area. If only the image of R Chanel is viewed, it is impossible to distinguish whether it is a false defect. . Therefore, the second determination step is performed, 5b The picture shows B Chanel's image data after the mixed image is obtained by the color line scanning camera. It can be seen from Fig. 5b that the copper line region 803 and the copper face region 804 are bright areas, and the background material 801 is a dark area. The dust particles 802 are located just above the copper line area 803, which is the area that is illuminated. This is because the hybrid light source architecture of the present invention is at a low angle (having a large angle of incidence) through a blue filter element, which can be brightened by this low angle blue light (blue light wavelength is shorter, scattering The situation is more pronounced), thus causing a strong contrast with R Chanel, according to which, by comparing the two images of R Chanel and B Chanel, it can be known as a false defect (dust). Therefore, in the second determination step, due to the illumination light having only the second wavelength band, the phenomenon that the dust particles scatter the incident light can improve the identification accuracy of the detection system of the present invention.

Next, please refer to Fig. 6a and Fig. 6b at the same time. Fig. 6a is an image capturing data with an oxidized region on a copper wire under the red wavelength band; and Fig. 6b is an oxidized region on a copper wire under the blue wavelength band. Image capture data. Figure 6a shows the mixed image obtained by the color line scan camera and then splits the mixed image into the image data of R Chanel. In Fig. 6a, it is seen that the copper surface area 903 is a bright area, and the background material 901 is a dark area. The oxidized region 902 is located above the copper surface region 903 and is a gray region. If you only look at R Chanel to judge, then this area will be considered a defect. Therefore, the second determination step is performed, and the 6b image is a mixed image obtained by the color line scanning camera, and then the mixed image is segmented out of the image data of B Chanel. In Fig. 6b, it is seen that the copper surface area 903 is a bright area, and the background material 901 is a dark area. The oxidized area 902 is located above the copper surface area 903. Since the brightness of the 902 area is close to that of the copper surface area 903, it can be known as a false defect by comparing the two images of R Chanel and B Chanel. The trapped (oxidized), non-copper area 903 really has a disconnection phenomenon.

The second optical elements 104, 204, and 304 of the present invention may be, for example, an optical element having a discontinuous condensing curved surface, two Fresnel lens groups each joined by a discontinuous curved surface, or the like. Functional optics.

In summary, the present invention utilizes a high-speed color linear scanning camera that combines illumination of different angles of illumination with light of different wavelengths to analyze not only oxidation and dust on the circuit board or defects on other substrates. It can also reduce the probability of misjudgment of the system during inspection.

The invention has been described above in terms of the preferred embodiments, and it should be understood by those skilled in the art that the present invention is not intended to limit the scope of the invention. It should be noted that variations and permutations equivalent to those of the embodiments are intended to be included within the scope of the present invention. Therefore, the scope of protection of the present invention is defined by the scope of the patent application.

100‧‧‧First light source group

110‧‧‧First lighting

200‧‧‧Second light source group

210‧‧‧second illumination

300‧‧‧ Third Light Source Group

310‧‧‧ Third illumination

500‧‧‧Detection area

600‧‧‧Image capture device

Claims (4)

  1. An optical detection method is an optical detection system of an illumination system having first to third light source groups, and an image capture device is disposed above the detection area for capturing first to third light source groups of the illumination system Projecting light reflected after the detection area to perform optical detection of the object to be tested in the detection area, the optical detection method comprising the steps of: projecting the first to third illumination rays of the first to third light source groups to the In the object to be tested in the detection area, the first and second light source groups generate illumination light having a wavelength band of a first wavelength band and an incident angle of the illumination light generated by the second light source group is greater than that generated by the first light source group The third light source group generates illumination light having a wavelength band of a second wavelength band and the incident angle of the illumination light generated by the third light source group is greater than that generated by the second light source group, wherein the first wavelength segment is greater than the a second wavelength segment; the color scanning camera generates the image data of the wavelength range of the first wavelength segment and the second wavelength segment that is captured; performing the first determining step, according to the image resource of the first wavelength segment Determining whether there is a dark portion representing a defect, and when the determination result is "No", a detection result that the detection area detection is normal is generated, and when the determination result is "Yes", the second determination step is entered; and the second determination step is performed, Determining, according to the image data of the second wavelength segment, whether the dark portion determined as the defect by the first determining step is still a dark portion in the image data of the first wavelength segment, and the determination result is "YES", the dark portion is When the detection result of the defect and the determination result are "NO", the detection result of the dark portion determined in the first determination step is a defect having no defect.
  2. The optical detection method of claim 1, wherein the first wavelength band is a red wavelength band and the second wavelength band is a blue wavelength band.
  3. An optical detection system includes an image capturing device and an illumination system. The image capturing device is disposed above the detection area for projecting the first to third light source groups of the illumination system to the detection area. The reflected light is then optically detected by the optical detection system, wherein the optical detection system is operative to perform the steps of the optical detection method of the first aspect of the patent application.
  4. The optical detection system of claim 3, wherein the illumination light generated by the first and second light source groups is illumination light having only a red wavelength band, and the illumination light generated by the third light source group is Illumination light with only the blue wavelength band.
TW102124264A 2013-07-05 2013-07-05 Illumination system for use in optical inspection, illumination system-based inspection system, and illumination system-based inspection method TWI491871B (en)

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TW102124264A TWI491871B (en) 2013-07-05 2013-07-05 Illumination system for use in optical inspection, illumination system-based inspection system, and illumination system-based inspection method
CN201310316555.2A CN104279456A (en) 2013-07-05 2013-07-25 Illumination system for optical detection, detection system and method using the same
KR20130094758A KR20150005405A (en) 2013-07-05 2013-08-09 Illumination System for Use in Optical Inspection, Illumination System-based Inspection System, and Illumination System-based Inspection Method
JP2013167443A JP2015014582A (en) 2013-07-05 2013-08-12 Illumination system used in optical inspection, inspection system and inspection method using the same

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