CN110108720A - Optical detection apparatus - Google Patents
Optical detection apparatus Download PDFInfo
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- CN110108720A CN110108720A CN201910464853.3A CN201910464853A CN110108720A CN 110108720 A CN110108720 A CN 110108720A CN 201910464853 A CN201910464853 A CN 201910464853A CN 110108720 A CN110108720 A CN 110108720A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8822—Dark field detection
- G01N2021/8825—Separate detection of dark field and bright field
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8835—Adjustable illumination, e.g. software adjustable screen
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8838—Stroboscopic illumination; synchronised illumination
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8854—Grading and classifying of flaws
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/066—Modifiable path; multiple paths in one sample
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/069—Supply of sources
- G01N2201/0696—Pulsed
Abstract
The invention discloses a kind of optical detection apparatus, comprising: lighting system, detection system and control system；Lighting system includes the first light source for bright field illumination, the second light source for dark-ground illumination and the third light source as backlight；Control system includes light source control subsystem, and light source control subsystem provides illumination according to the first pulse train for controlling first light source, second light source provides illumination and third light source according to the second pulse train and provides illumination according to third pulse train；The pulse signal of first pulse train, the second pulse train and third pulse train is repeated in setting and does not overlap；Control system further includes detection control subsystem, and detection control subsystem obtains detection signal according to the 4th pulse train for controlling detection system；Each pulse signal of 4th pulse train is respectively in the pulse signal duration of the first pulse train, the second pulse train and third pulse train.In this way, detection time-consuming can be reduced, cost is reduced.
Description
Technical field
The present embodiments relate to technical field of optical detection more particularly to a kind of optical detection apparatus.
Background technique
Line scanning optical detection equipment generally comprises bright field detection system, dark field detection or backlight detection system, point
Not Yong Yu different defects detection.Light source used in each detection system is different, can only generally make when detecting to undetected object
With a kind of detection system, cannot effectively be detected to avoid related defects caused by the imaging interference of other detection systems.
For example, some defects can show in bright field detection system, but originally may be used if using backlight detection system simultaneously
It may not be shown with the defect shown.If detecting the various surface defects of determinand, repeatedly different inspections is generallyd use
Examining system is separately detected, and causes existing line scanning optical detection equipment time-consuming when carrying out determinand surface defects detection
Relatively long, higher cost.
Summary of the invention
The embodiment of the present invention provides a kind of optical detection apparatus, to reduce the surface defect progress complete detection to determinand
The consumed time, reduce cost.
The embodiment of the present invention proposes a kind of optical detection apparatus, which includes: lighting system, detection system
And control system；The lighting system and the detection system are electrically connected with the control system respectively；
The lighting system includes first light source, second light source and third light source；The first light source is shone for light field
Bright, the second light source is used for dark-ground illumination, and the third light source is used as backlight；
The control system includes light source control subsystem, and the light source control subsystem is for controlling the first light source
Illumination is provided according to the first pulse train, controls the second light source according to the second pulse train offer illumination and control third
Light source provides illumination according to third pulse train；First pulse train includes multiple first pulse signals, second arteries and veins
Rushing sequence includes multiple second pulse signals, and the third pulse train includes multiple third pulse signals, first pulse
Signal, second pulse signal, the third pulse signal are repeated in setting and do not overlap；
The control system further includes detection control subsystem, and the detection control subsystem is for controlling the detection system
System obtains detection signal according to the 4th pulse train；Each pulse signal of 4th pulse train is respectively in first pulse
In the pulse signal duration of sequence, second pulse train and the third pulse train；
The detection system includes signal acquisition subsystem, and the signal acquisition subsystem is used for according to the 4th pulse
Sequence successively obtains corresponding with first pulse train, second pulse train and the third pulse train
The detection signal.
Further, the signal acquisition subsystem includes line scan camera.
Further, the detection system further includes light splitting subsystem, and the light splitting subsystem is used for first light
The light beam splitting that source issues goes out the on-axis rays parallel with the optical axis of the signal acquisition subsystem；
The on-axis rays are used to provide bright field illumination according to first pulse train.
Further, the second light source is the light source symmetrical along the optical axis of the signal acquisition subsystem.
Further, the second light source is annular light source.
Further, the light of the third light source be parallel rays, and the direction of beam propagation of the parallel rays with
The optical axis direction of the signal acquisition subsystem is parallel.
Further, the first light source issues the first coloured light, and the second light source issues the second coloured light, the third light
Source issues third coloured light；The color of first coloured light, second coloured light and the third coloured light is different.
Further, the control system includes driver, stroboscopic controller, image pick-up card and data processor；
The driver is electrically connected with the input terminal of the stroboscopic controller, the control terminal of described image capture card, the first light source
Control terminal, the control terminal of the control terminal of the second light source and the third light source it is defeated with the stroboscopic controller respectively
Outlet electrical connection, the input terminal of described image capture card are electrically connected with the signal acquisition subsystem, described image capture card
Output end is electrically connected with the data processor；
The driver is used to provide start pulse signal to the stroboscopic controller；
The stroboscopic controller is used to provide first pulse train to described first according to the start pulse signal
Light source, offer second pulse train to the second light source, offer third pulse train to the third light source and mention
For the 4th pulse train to described image capture card；
Described image capture card obtains detection signal according to the 4th pulse train for controlling the signal acquisition subsystem,
And the detection signal is transmitted to data processor；
Testing result is presented for handling the detection signal in the data processor.
Further, which further includes microscope carrier；
The third light source is located at the side that the microscope carrier deviates from the signal acquisition subsystem；The microscope carrier is away from described
One side surface of third light source is for carrying sample to be tested；The second light source, the first light source and signal acquisition
System is respectively positioned on the same side of the microscope carrier, and is successively arranged far from the microscope carrier.
Further, the microscope carrier drives the sample to be tested in the flat of the optical axis perpendicular to the signal acquisition subsystem
It is moved in face.
Optical detection apparatus provided in an embodiment of the present invention passes through setting lighting system, detection system and control system；According to
Bright system includes the first light source for bright field illumination, the second light source for dark-ground illumination and the third light as backlight
Source；And setting control system includes light source control subsystem, light source control subsystem is for controlling first light source according to first
Pulse train provides illumination, control second light source and provides illumination and control third light source according to third according to the second pulse train
Pulse train provides illumination；The pulse signal of first pulse train, the second pulse train and third pulse train, which is repeated in, to be set
It sets and does not overlap；Control system further includes detection control subsystem, and detection control subsystem is for controlling detection system according to the
Four pulse trains obtain detection signal；Each pulse signal of 4th pulse train is respectively in the first pulse train, the second pulse sequence
, it can be achieved that the surface defect of online complete detection sample to be tested in the pulse signal duration of column and third pulse train
Type, and the pulse control signal between different light sources does not overlap in time, so that each lighting system is to other lighting systems
Corresponding presentation information does not constitute interference, so as to reduce to consumed in the surface defect progress complete detection of sample to be tested
Time reduces cost.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to do one simply to introduce, it should be apparent that, the accompanying drawings in the following description is this hair
Bright some embodiments for those of ordinary skill in the art without creative efforts, can be with root
Other attached drawings are obtained according to these attached drawings.
Fig. 1 is a kind of structural schematic diagram of optical detection apparatus provided in an embodiment of the present invention；
Fig. 2 is a kind of schematic diagram of the driver' s timing of optical detection apparatus provided in an embodiment of the present invention；
Fig. 3 is the structural schematic diagram of another optical detection apparatus provided in an embodiment of the present invention；
Fig. 4 is the structural schematic diagram of another optical detection apparatus provided in an embodiment of the present invention；
Fig. 5 is the reflectance spectrum schematic diagram of four kinds of different materials provided in an embodiment of the present invention；
Fig. 6 is the structural schematic diagram of another optical detection apparatus provided in an embodiment of the present invention.
Specific embodiment
The present invention is described in further detail with reference to the accompanying drawings and examples.It is understood that this place is retouched
The specific embodiment stated is used only for explaining the present invention rather than limiting the invention.It also should be noted that in order to just
Only the parts related to the present invention are shown in description, attached drawing rather than entire infrastructure.
Fig. 1 is a kind of structural schematic diagram of optical detection apparatus provided in an embodiment of the present invention, and Fig. 2 is the embodiment of the present invention
A kind of schematic diagram of the driver' s timing of the optical detection apparatus provided.Referring to Figures 1 and 2, which includes: photograph
Bright system 110, detection system 120 and control system 130；Lighting system 110 and detection system 120 respectively with control system 130
Electrical connection；Lighting system 110 includes first light source 111, second light source 112 and third light source 113；First light source 111 is used for
Bright field illumination, second light source 112 are used for dark-ground illumination, and third light source 113 is used as backlight；Control system 130 includes light source control
Subsystem 131, light source control subsystem 131 provide illumination, control according to the first pulse train S1 for controlling first light source 111
Second light source 112 processed provides illumination and control third light source 113 according to third pulse train S3 according to the second pulse train S2
Illumination is provided；First pulse train S1 includes multiple first pulse signals, and the second pulse train S2 includes multiple second pulse letters
Number, the pulse signal of third pulse train S3 includes multiple third pulse signals；First pulse signal, the second pulse signal,
Three pulse signals are repeated in setting and do not overlap；Control system 130 further includes detection control subsystem 132, detection control
System 132 obtains detection signal according to the 4th pulse train S4 for controlling detection system 120；Each arteries and veins of 4th pulse train S4
Rush signal respectively the first pulse train S1, the second pulse train S2 and third pulse train S3 pulse signal it is lasting when
In；Detection system 120 includes signal acquisition subsystem 121, and signal acquisition subsystem 121 is used for according to the 4th pulse train S4
Successively obtain detection signal corresponding with the first pulse train S1, the second pulse train S2 and third pulse train S3.
Wherein, during optical detection, for lighting system 110 for providing illumination, illuminating ray exposes to sample to be tested
20, light is penetrated or is reflected by sample to be tested 20, and rear light is detected examining system 120 and receives, and control system 130 is according to detection system
120 received detection signals can determine the surface defect type of sample to be tested 20.
Wherein, first light source 111 provides bright field illumination, for detect the scuffing on 20 surface of sample to be tested, foreign matter or other
The distinguishable defect of light field.Second light source 112 provides dark-ground illumination, for detecting the raised brim of sample to be tested 20 or other are dark
The distinguishable defect in field.Third light source 113 is used as backlight, can detect the chamfered shape or the detection of other backlights of sample to be tested 20
Distinguishable feature.
Wherein, control system 130 includes light source control subsystem 131 and detection control subsystem 132, light source control subsystem
131 control first light source 111 of system, second light source 112 and third light source 113 are respectively according to the first pulse train S1, the second pulse
Sequence S2 and third pulse train S3 provides illumination；It detects control subsystem 132 and controls signal acquisition subsystem 121 according to the 4th
Pulse train S4 obtains detection signal.Wherein, the 4th pulse train S4 and the first pulse train S1, the second pulse train S2 and
Three-pulse sequence S3 cooperation, so that successively to obtain three light sources corresponding for the sequencing of signal acquisition subsystem 121 temporally
Detect signal.On-line checking while to realize three kinds of light source modes, and merely with the same signal acquisition subsystem 121
The acquisition that detection signal can be completed, that is, realize the surface defect type of online complete detection sample to be tested, between different light sources
Pulse control signal do not overlap in time, thus each lighting system presentation information corresponding to other lighting systems not structure
Detection accuracy, drop are improved at interference so as to reduce to the time consumed in the surface defect progress complete detection of sample to be tested
Low testing cost；Meanwhile in addition to the light source in lighting system 110, other building blocks of optical detection apparatus 10 can be total to
With can simplify the structure of optical detection apparatus 10, advantageously reduce the installation cost of optical detection apparatus 10；In addition, can basis
The type of sample to be tested 20 flexibly switches setting, to realize the detection of different defect types using different light source modes, that is, improves
The detection flexibility of optical detection apparatus 10.
It should be noted that only with the first pulse train S1, the second pulse train S2 and third pulse train S3 in Fig. 2
Include two pulse signals, and shows according to the sequencing of the first pulse signal, the second pulse signal and third pulse signal
The driver' s timing relationship for illustrating optical detection apparatus 10 of example property, but not optical detection provided in an embodiment of the present invention is filled
Set 10 restriction.In other embodiments, also first pulse train can be set according to the actual demand of optical detection apparatus 10
The quantity and precedence relationship of the pulse signal of S1, the second pulse train S2 and third pulse train S3, the embodiment of the present invention pair
This is not construed as limiting；Meanwhile settable different light source mode, that is, different pulse train quantity and sequential relationship are corresponded to, with reality
Now to the detection of sample to be tested, the embodiment of the present invention does not repeat this and is also not construed as limiting.Meanwhile the size of pulse signal can also root
It is arranged according to the actual demand of optical detection apparatus 10, the embodiment of the present invention is not construed as limiting this.
Optionally, signal acquisition subsystem 121 includes line scan camera.
In this way, characterizing testing result using line-scanning image.Illustratively, line scan camera can be linear scan
CCD camera, linear scan CMOS camera or skilled person will appreciate that other kinds of line scan camera, the present invention is real
It applies example and this is not construed as limiting.
Optionally, with continued reference to Fig. 1 and Fig. 2, detection system 120 further includes light splitting subsystem 122, is divided subsystem 122
Light beam splitting for issuing first light source 111 goes out the on-axis rays parallel with the optical axis of signal acquisition subsystem 121；Coaxially
Light is used to provide bright field illumination according to the first pulse train S1.
In this way, first light source 111 can be regarded as to coaxial light source, bright field illumination is realized.
Illustratively, light splitting subsystem 122 may include dichroic reflector, Amici prism or skilled person will appreciate that
Other types can be used for the optical element being divided, and can be arranged according to the actual demand of optical detection apparatus 10, the embodiment of the present invention
This is not construed as limiting.
Optionally, with continued reference to Fig. 1, second light source 112 is the light symmetrical along the optical axis of signal acquisition subsystem 121
Source.
In this way, uniform dark-ground illumination can be provided for optical detection.
Illustratively, Fig. 3 is the structural schematic diagram of another optical detection apparatus provided in an embodiment of the present invention.Referring to figure
3, second light source 112 can be annular light source.
In this way, being conducive to improve the exposure intensity and uniformity for the second light source 112 for providing dark-ground illumination.
Optionally, with continued reference to Fig. 1 and Fig. 3, the light of third light source 113 is parallel rays, and the light beam of parallel rays
The direction of propagation is parallel with the optical axis direction of signal acquisition subsystem 121.
So set, being conducive to improve the light utilization of third light source 113, while being conducive to improve corresponding detection letter
Number it is clear, improve detection accuracy.
Optionally, Fig. 4 is the structural schematic diagram of another optical detection apparatus provided in an embodiment of the present invention.Reference Fig. 4,
First light source 111 issues the first coloured light, and second light source 112 issues the second coloured light, and third light source 113 issues third coloured light；First
The color of coloured light, the second coloured light and third coloured light is different.
Illustratively, the first coloured light, the second coloured light and third coloured light can be selected from red light, green light and blue light, and two
Two is different.It on this basis, may include three groups of photoelectric sensors, respectively first sensor in signal detection subsystem 121
1211, second sensor 1212 and 3rd sensor 1213.The first coloured light, the second light source 112 of the sending of first light source 111 issue
The second coloured light and the third coloured light that issues of third light source 113 by after sample to be tested 20, respectively by first sensor 1211, the
Two sensors 1212 and 3rd sensor 1213 are received and are imaged respectively, and three kinds of light illumination modes work at the same time and believe between each other
It number does not interfere, so that the time needed for reducing detection improves detection effect while can realizing the complete detection of sample to be tested 20
Rate.
Illustratively, the light source applications of different color light (light for also being understood as different wave length) are provided to the embodiment of the present invention
Optical detection apparatus in further include application in terms of following two.
In a first aspect, for different materials, due to its chemical component difference, when light is irradiated to sample to be tested 200
When surface, the absorption and scattering that the light of different wave length can be different degrees of by sample to be tested 200 macroscopically show different colours
Illumination is mapped to light reflectivity difference when same sample to be tested 200.
Illustratively, Fig. 5 is the reflectance spectrum schematic diagram of four kinds of different materials provided in an embodiment of the present invention.Wherein, horizontal
Axis represents wavelength (λ), and unit is nanometer (nm)；The longitudinal axis represents reflectivity (R), and unit is percentage (%)；L1 represents silver, L2 generation
Table aluminium, L3 represent gold, and L4 represents copper.Silver, aluminium as shown in Fig. 5, Jin Hetong reflectance spectrum can be seen that, for wavelength compared with
The light of long (such as 700nm-1000nm), the reflectivity of four kinds of materials are all very high；And shorter for wavelength (such as 400nm-
The reflectivity of light 500nm), aluminium and silver is significantly larger than Jin Hetong.According to the significant difference of the reflectivity of this different materials, choosing
The emission wavelength for selecting suitable light source can effectively distinguish the sample to be tested 200 of unlike material.If in sample to be tested 200 just
It is made of the biggish metal of two of them diversity ratio, when target to be detected is the sample of one of metal, i.e., can utilize this
Kind method realization fast and accurately detects.
Second aspect, in hue circle, it is symmetrically complementary colours about the center of circle that the color being closer, which is Xiang Jinse, from
It is distant for contrastive colours.In light environment, exposed to using the color same or similar with the true qualities of sample to be tested 200
When the surface of sample to be tested 200, brightness of the sample to be tested 200 in image can be relatively high；Conversely, as right using its
Colorimetric carries out illumination, then brightness of the sample to be tested 200 in image can compare lower.Therefore, selection is by light source
The selection of luminescent color can reinforce the bright dark contrast effect in image, jamming pattern can also be removed, to improve measurement essence
Accuracy.
Illustratively, it for red sample to be tested, can be irradiated with red light.It will not enumerate in the present embodiment, it can
The selection of other coloured light is carried out with reference to this thought, the embodiment of the present invention is not construed as limiting this.
It should be noted that on this basis, signal detection subsystem 121 can scan CCD camera, colour for color linear
Linear scan CMOS camera or skilled person will appreciate that other kinds of photochromic can distinguish different and detect respectively
Signal detection component, the embodiment of the present invention is not construed as limiting this.
Optionally, Fig. 6 is the structural schematic diagram of another optical detection apparatus provided in an embodiment of the present invention.Referring to Fig. 2
And Fig. 6, control system 130 include driver 141, stroboscopic controller 142, image pick-up card 143 and data processor 144；
Driver 141 is electrically connected with the input terminal of stroboscopic controller 142, the control of the control terminal, first light source 111 of image pick-up card 143
The control terminal at end processed, the control terminal of second light source 112 and third light source 113 respectively with the output end of stroboscopic controller 142 electricity
Connection, the input terminal of image pick-up card 143 are electrically connected with signal acquisition subsystem 121, the output end and number of image pick-up card 143
It is electrically connected according to processor 144；Driver 141 is used to provide start pulse signal S0 to stroboscopic controller 142；Stroboscopic controller
142 are used for according to start pulse signal S0 the first pulse train S1 of offer to first light source 111, provide the second pulse train S2 extremely
Second light source 112 provides third pulse train S3 to third light source 113 and provides the 4th pulse train S4 to image pick-up card
143；Image pick-up card 143 obtains detection signal according to the 4th pulse train S4 for controlling signal acquisition subsystem 121, and will
Detection signal is transmitted to data processor 144；Data processor 144 is used for processing detection signal, and testing result is presented.
Wherein, when scanning sample to be tested 20, the parsing of driver 141 according to actual needs, with predetermined movement step-length hair
Start pulse signal S0 out, and it is supplied to stroboscopic controller 142 (i.e. light source control subsystem 131), stroboscopic controller 142 is connecing
After receiving start pulse signal S0, the first pulse train S1, the second pulse train S2 and third pulse train S3 are on the one hand issued
Respectively to first light source 111, second light source 112 and third light source 113, so that three light sources are sequentially repeated in offer
Bright field illumination, dark-ground illumination and back lighting；On the other hand the 4th pulse train S4 (illustrative, can be differential signal) be issued
To image pick-up card 143 (i.e. detection control subsystem 132), image pick-up card 143 controls 121 (example of signal detection subsystem
Property, can be line scan camera) exposure, form scan image.In this way, can in the same scan image centralized displaying it is to be measured
The number of drawbacks of sample 20, detection speed is fast, and precision is higher.
Optionally, with continued reference to Fig. 6, which further includes microscope carrier 150；Third light source 113 is located at microscope carrier
The side of 150 divergence signals acquisition subsystem 121；Microscope carrier 150 is away from a side surface of third light source 113 for carrying to test sample
Product 20；Second light source 112, first light source 111 and signal acquisition subsystem 121 are respectively positioned on the same side of microscope carrier 150, and successively remote
It is arranged from microscope carrier 150.
In this way, sample to be tested 20 is supported or fixed using microscope carrier 150.
Optionally, with continued reference to Fig. 6, microscope carrier 150 drives sample to be tested 20 in the light perpendicular to signal acquisition subsystem 121
It is moved in the plane of axis.
So, it can be achieved that sample to be tested 20 movement, to realize the detection of the different location of sample to be tested 20, to reach
Whole face detection to sample to be tested 20.
Illustratively, the plane, signal acquisition are shown with the plane that first direction X and second direction Y are determined in Fig. 6
The optical axis direction of system 121 is third direction Z, and third direction Z is perpendicular to plane determined by first direction X and second direction Y.
In other embodiments, also microscope carrier 20 can be determined according to the relative positional relationship of each building block of optical detection apparatus 20
Moveable direction, the embodiment of the present invention are not construed as limiting this.
It should be noted that merely exemplary in Fig. 1, Fig. 3, Fig. 4 and Fig. 6 show in optical detection apparatus 10, shine
The signal of bright system 110, detection system 120 and control system 130 transmits relationship, but not to its relative space position relationship
It limits.In other embodiments, the relative space position of its building block can be set according to the actual demand of detection device 10
Relationship, the embodiment of the present invention are not construed as limiting this.
Note that the above is only a better embodiment of the present invention and the applied technical principle.It will be appreciated by those skilled in the art that
The invention is not limited to the specific embodiments described herein, be able to carry out for a person skilled in the art it is various it is apparent variation,
It readjusts and substitutes without departing from protection scope of the present invention.Therefore, although being carried out by above embodiments to the present invention
It is described in further detail, but the present invention is not limited to the above embodiments only, without departing from the inventive concept, also
It may include more other equivalent embodiments, and the scope of the invention is determined by the scope of the appended claims.
Claims (10)
1. a kind of optical detection apparatus characterized by comprising lighting system, detection system and control system；The illumination system
System and the detection system are electrically connected with the control system respectively；
The lighting system includes first light source, second light source and third light source；The first light source is used for bright field illumination, institute
Second light source is stated for dark-ground illumination, the third light source is used as backlight；
The control system includes light source control subsystem, the light source control subsystem for control the first light source according to
First pulse train provides illumination, controls the second light source according to the second pulse train offer illumination and control third light source
Illumination is provided according to third pulse train；First pulse train includes multiple first pulse signals, the second pulse sequence
Column include multiple second pulse signals, and the third pulse train includes multiple third pulse signals, first pulse signal,
Second pulse signal, the third pulse signal are repeated in setting and do not overlap；
The control system further includes detection control subsystem, and the detection control subsystem is pressed for controlling the detection system
Detection signal is obtained according to the 4th pulse train；Each pulse signal of 4th pulse train is respectively in the first pulse sequence
In the pulse signal duration of column, second pulse train and the third pulse train；
The detection system includes signal acquisition subsystem, and the signal acquisition subsystem is used for according to the 4th pulse train
It successively obtains corresponding with first pulse train, second pulse train and the third pulse train described
Detect signal.
2. optical detection apparatus according to claim 1, which is characterized in that the signal acquisition subsystem includes linearly sweeping
Retouch camera.
3. optical detection apparatus according to claim 1, which is characterized in that the detection system further includes light splitting subsystem
System, the light beam splitting that the light splitting subsystem is used to issue the first light source go out the optical axis with the signal acquisition subsystem
Parallel on-axis rays；
The on-axis rays are used to provide bright field illumination according to first pulse train.
4. optical detection apparatus according to claim 1, which is characterized in that the second light source is along the signal acquisition
The symmetrical light source of the optical axis of subsystem.
5. optical detection apparatus according to claim 4, which is characterized in that the second light source is annular light source.
6. optical detection apparatus according to claim 1, which is characterized in that the light of the third light source is directional light
Line, and the direction of beam propagation of the parallel rays is parallel with the optical axis direction of the signal acquisition subsystem.
7. optical detection apparatus according to claim 1, which is characterized in that the first light source issues the first coloured light, institute
It states second light source and issues the second coloured light, the third light source issues third coloured light；First coloured light, second coloured light and institute
The color for stating third coloured light is different.
8. optical detection apparatus according to claim 1, which is characterized in that the control system includes driver, stroboscopic
Controller, image pick-up card and data processor；The driver is electrically connected with the input terminal of the stroboscopic controller, described
The control terminal of image pick-up card, the control terminal of the first light source, the control terminal of the second light source and the third light source
Control terminal be electrically connected respectively with the output end of the stroboscopic controller, the input terminal of described image capture card is obtained with the signal
Subsystem is taken to be electrically connected, the output end of described image capture card is electrically connected with the data processor；
The driver is used to provide start pulse signal to the stroboscopic controller；
The stroboscopic controller be used to be provided according to the start pulse signal first pulse train to the first light source,
It provides described in second pulse train to the second light source, offer third pulse train to the third light source and offer
4th pulse train is to described image capture card；
Described image capture card obtains detection signal according to the 4th pulse train for controlling the signal acquisition subsystem, and will
The detection signal is transmitted to data processor；
Testing result is presented for handling the detection signal in the data processor.
9. optical detection apparatus according to claim 1, which is characterized in that further include microscope carrier；
The third light source is located at the side that the microscope carrier deviates from the signal acquisition subsystem；The microscope carrier deviates from the third
One side surface of light source is for carrying sample to be tested；The second light source, the first light source and the signal acquisition subsystem
It is respectively positioned on the same side of the microscope carrier, and is successively arranged far from the microscope carrier.
10. optical detection apparatus according to claim 9, which is characterized in that the microscope carrier drives the sample to be tested to exist
Perpendicular to being moved in the plane of the optical axis of the signal acquisition subsystem.
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