CN100378431C - Line width measuring method - Google Patents
Line width measuring method Download PDFInfo
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- CN100378431C CN100378431C CNB2006100049545A CN200610004954A CN100378431C CN 100378431 C CN100378431 C CN 100378431C CN B2006100049545 A CNB2006100049545 A CN B2006100049545A CN 200610004954 A CN200610004954 A CN 200610004954A CN 100378431 C CN100378431 C CN 100378431C
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- E—FIXED CONSTRUCTIONS
- E03—WATER SUPPLY; SEWERAGE
- E03B—INSTALLATIONS OR METHODS FOR OBTAINING, COLLECTING, OR DISTRIBUTING WATER
- E03B7/00—Water main or service pipe systems
- E03B7/09—Component parts or accessories
- E03B7/10—Devices preventing bursting of pipes by freezing
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- E—FIXED CONSTRUCTIONS
- E03—WATER SUPPLY; SEWERAGE
- E03B—INSTALLATIONS OR METHODS FOR OBTAINING, COLLECTING, OR DISTRIBUTING WATER
- E03B7/00—Water main or service pipe systems
- E03B7/09—Component parts or accessories
- E03B7/10—Devices preventing bursting of pipes by freezing
- E03B7/12—Devices preventing bursting of pipes by freezing by preventing freezing
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L53/00—Heating of pipes or pipe systems; Cooling of pipes or pipe systems
Abstract
A line width measuring method capable of securing constant differences between peaks and bottoms of the brightness is proposed. An object to be measured includes a transparent substrate 21, an opaque pattern 22 formed thereon and a semitransparent film 23 formed on both the transparent substrate and the opaque pattern. When a line width of the semitransparent film is measured by using a line width measuring device for measuring a line width thereof by simultaneously illuminating both sides of the object to be measured with a reflected beam and a transmitted beam, illuminated regions 26 and 27 are respectively defined on the transparent substrate and the opaque pattern so that the illuminated regions are individually illuminated and then the line width of the semitransparent film is measured.
Description
Technical field
The present invention relates to measure line width measuring method in the wire width measuring device of live width of semi-transparent film by the both sides of reflected light and transmitted light illumination measurement simultaneously test portion, this measurements test portion is the opaque pattern of formation and striding transparency carrier and opaque pattern and form semi-transparent film on transparency carrier.
Background technology
The wire width measuring device that utilizes reflected light and transmitted light that the live width of measuring test portion is measured is sold on market.
At first, illustrate with reflected light and transillumination according to Fig. 3 and measure the brightness waveform that obtains under the situation of test portion.
In Fig. 3, measure test portion and constitute by the metal pattern (or metal film) 32 that is formed on the glass 31.When lighting indirect illumination and transillumination in fact simultaneously and measuring the live width of metal pattern (no transmission) 32, be to light indirect illumination simultaneously and transillumination carries out, but, be divided into the brightness waveform that only obtains, illustrate with the brightness waveform that only obtains by transillumination by indirect illumination for principle of specification.In addition, situation of measuring with indirect illumination and the situation of only measuring with transillumination are only in fact also arranged.
Having only under the situation of indirect illumination, shown in Fig. 3 (a), when reflected light 33 illumination metal patterns (no transmission) 32 sides used from not shown reflection source, by ND (the Neutral Density of the reflected light of measuring the test portion reflection via the adapter with an automatic light meter top, not shown that is positioned at the measurement test portion, neutral density) optical filter (transmissivity continually varying optical filter) incides in the not shown video camera.The brightness waveform 34 that obtains as the output of this video camera is Fig. 3 (b), adjusts the ND optical filter in the above-mentioned adapter with an automatic light meter, so that the peak value of this brightness waveform 34 becomes setting (vision signal 0.7V).
In addition, having only under the situation of transillumination, shown in Fig. 3 (c), when use transmitted light 35 from not shown transmitted light source throw light on glass 31 on metal pattern (no transmission) 32 when forming the opposition side of sides, seen through the ND optical filter (transmissivity continually varying optical filter) of the transmitted light of measurement test portion, incided in the above-mentioned video camera via the above-mentioned adapter with an automatic light meter that is positioned at the top of measuring test portion.The brightness waveform 36 that obtains as the output of above-mentioned video camera is Fig. 3 (d), adjusts the transmitted light 35 from above-mentioned transmitted light source, so that the peak value of this brightness waveform 36 becomes setting (vision signal 0.7V).
Thereby, shown in Fig. 3 (e), light at the same time under the situation of reflected light 33 and transmitted light 35, brightness waveform 37 becomes the waveform shown in Fig. 3 (f) as the output of above-mentioned video camera and when lighting when obtaining.Promptly, by synthesizing of Fig. 3 (b) and Fig. 3 (d), the peak value of reflected light 33 is identical setting (vision signal 0.7V) with the peak value of transmitted light 35, and catoptrical peak value is with identical according to the contrast between the peak value of the bottom of the contrast between the bottom of the groove of the sloping portion of metal pattern (no transmission) 32 and this groove and transmitted light, can obtain the corresponding brightness waveform of shape with the sloping portion of metal pattern (no transmission) 32.
Can enumerate the patent documentation 1 of my company's application as the patent documentation of relevant wire width measuring device.But patent documentation 1 has only been put down in writing reflected light, is not as wire width measuring device prerequisite of the present invention, that throw light on simultaneously with reflected light and transmitted light.
Patent documentation 1: TOHKEMY 2003-279318 communique
But the transmissivity of in fact measuring the catoptrical reflectivity of test portion and transmitted light is more because of the different situation of sample, and brightness waveform can be different when lighting when obtaining as the output of above-mentioned video camera in this case.
According to Fig. 4 explanation resulting brightness waveform when lighting simultaneously under the different situation of the transmissivity of the catoptrical reflectivity of measuring test portion and transmitted light.
Fig. 4 (a) is the high situation of transmissivity of the luminance factor transmitted light 35 of reflected light 33, in this case, if the peak value of brightness waveform 37a when lighting when being adjusted into the ND optical filter in the adapter with an automatic light meter shown in Fig. 4 (b), then the brightness waveform of transmitted light 35 parts becomes very little.
Fig. 4 (c) is the transmissivity of the transmitted light 35 on the contrary situation higher than the reflectivity of reflected light 33, in this case, if the peak value of brightness waveform 37b when lighting when will be adjusted into shown in Fig. 4 (d) from the transmitted light 35 of transmitted light source, then the brightness waveform of reflected light 33 parts becomes very little.
Thereby, in this case, catoptrical peak value and inequality according to the contrast between the peak value of the bottom of the contrast between the bottom of the groove of the sloping portion of metal pattern (no transmission) 32 and this groove and transmitted light can not obtain the corresponding brightness waveform of shape with the sloping portion of metal pattern (no transmission) 32.
The measuring principle of the live width of measuring test portion then, is described according to Fig. 5.Fig. 5 (a) measures test portion, is formed with pattern (film) 50 on glass substrate.Fig. 5 (b) is with resulting brightness waveform under the situation of the glass substrate of the transversal measurement test portion of sweep trace Li of video camera and pattern 50.If the maximum brightness level in the Luminance Distribution 51 is 100%, establishing minimum brightness level 52 is 0%, and establishing a pixel of intensity level 53 of the intensity level 50% in the middle of being equivalent to and the alternate position spike between b pixel is Nab.In addition, establishing by the measurement multiplying power of video camera and the subject from video camera to the measurement test portion is k apart from the coefficient that determines.At this moment, the live width X that measures the pattern 50 of test portion can obtain with following formula (1).
X＝k×Nab ……(1)
Thereby, for the live width X of the pattern 50 of measuring test portion, need obtain the intensity level of the centre of brightness waveform exactly.
But, if the catoptrical reflectivity of measurement test portion and the different sample of transmissivity of transmitted light are arranged, then as shown in Figure 4, catoptrical peak value and inequality according to the contrast between the peak value of the bottom of the contrast between the bottom of the groove of the sloping portion of metal pattern (no transmission) 32 and this groove and transmitted light can not obtain the corresponding brightness waveform of shape with the sloping portion of metal pattern (no transmission) 32.Thus, because the intensity level of the centre of resulting brightness waveform departs from correct position, so live width accurately that can not measured pattern.
Fig. 6 is expression as the measurement test portion of the measuring object of the reality figure with the brightness waveform that is obtained by in the past wire width measuring device.Fig. 6 (a) is that Fig. 6 (b) is its sectional view as the vertical view of the measurement test portion of actual measuring object.Shown in Fig. 6 (a) and (b), as the measurement test portion of the measuring object of reality, be on the transparency carrier 21 that is representative, to form opaque pattern 22 and striding the test portion that transparency carrier 21 and opaque pattern 22 have formed semi-transparent film (ITO) 23 with the LCD substrate.
Both sides at this measurement test portion that throws light on simultaneously with reflected light and transmitted light are measured under the situation of semi-transparent film (ITO) 23, are that the power of fixation reflex light and the power proportions of transmitted light are measured in the past.The ratio of power is by the reflectivity and the transmissivity of the sample of measuring test portion, be according to the operator feel decide, so because of people a guy difference, the situation that also has the deterioration power proportions because of reflection source and transmitted light source to change, in this case, as shown in Figure 4, can not get the same brightness waveform all the time, thereby be difficult to keep the state of same contrast.
Fig. 6 (c) is the example of resulting brightness waveform 25, and the peak value of the brightness waveform that obtains by transmitted light under the situation of the relatively poor sample of transmissivity reduces, its result, and the contrast of contrast and the brightness waveform that obtains by reflected light is different understands variation.
Thereby the live width data are inhomogeneous along with the sample of measuring test portion, the reproduction difficulty of measurement, and can not do the measurement accurately of live width.
Summary of the invention
The purpose of this invention is to provide a kind of line width measuring method that can keep stable contrast state.
The present invention measures the live width of semi-transparent film with the both sides of reflected light and transmitted light illumination measurement simultaneously test portion in wire width measuring device, this measurement test portion is to form opaque pattern on transparency carrier, and striding above-mentioned transparency carrier and above-mentioned opaque pattern and forming above-mentioned semi-transparent film, when measuring the live width of above-mentioned semi-transparent film, after above-mentioned transparency carrier and above-mentioned opaque pattern specified the light modulation zone respectively, the peak value of the brightness waveform by making reflected light and transmitted light respectively reaches the mode light modulation respectively of predetermined value separately, measures the live width of above-mentioned semi-transparent film then.
In addition, the present invention is used in wire width measuring device from the semi-transparent film of the indirect lighting measurement test portion that reflects light source, use opposition side simultaneously from the above-mentioned semi-transparent film of the above-mentioned measurement test portion of the transillumination of transmitted light source, measure the live width of above-mentioned semi-transparent film, above-mentioned measurement test portion is to form opaque pattern on transparency carrier, and striding above-mentioned transparency carrier and above-mentioned opaque pattern and forming above-mentioned semi-transparent film, when measuring the live width of above-mentioned semi-transparent film, above-mentioned transparency carrier and above-mentioned opaque pattern are specified the light modulation zone and the catoptrical light modulation zone of transmitted light respectively; Adjust in the light modulation adapter optical filter or from the reflected light of above-mentioned reflection source, so that the peak value of the brightness waveform that obtains from above-mentioned catoptrical light modulation zone becomes predetermined value; And adjust in the above-mentioned light modulation adapter above-mentioned optical filter or from the transmitted light of above-mentioned transmitted light source, so that the peak value of the brightness waveform that obtains from the light modulation zone of above-mentioned transmitted light becomes predetermined value; Measure the live width of above-mentioned semi-transparent film then.
The invention effect
According to the present invention, can access the line width measuring method of the contrast state that can keep stable.
Description of drawings
Fig. 1 has been to use the structural drawing of embodiment of the wire width measuring device of line width measuring method of the present invention;
Fig. 2 is the figure that is used for illustrating measurement test portion of placing on the present invention's test portion platform line width measuring method, presentation graphs 1 and the brightness waveform that is obtained by embodiments of the present invention;
Fig. 3 is the figure of the brightness waveform that obtains during with reflected light and transillumination measurement test portion of expression;
Fig. 4 is the figure that measures brightness waveform when expression is resulting under the different situation of the transmissivity of the catoptrical reflectivity of test portion and transmitted light lights simultaneously;
Fig. 5 is the figure that the measuring principle of the live width of measuring test portion is described;
Fig. 6 be expression as the measurement test portion of the measuring object of reality, with the figure of the brightness waveform that obtains by in the past wire width measuring device.
Embodiment
Fig. 1 is the structural drawing of embodiment that has utilized the wire width measuring device of line width measuring method of the present invention.In Fig. 1, the 1st, (closed-circuit television: video camera closed-circuit television), shooting is by the image of the sample of the measurement test portion of microscope amplification for measuring CCTV.The 2nd, be configured in the adapter with an automatic light meter before the CCTV video camera, be the equipment that the light quantity that is used for arriving the imaging apparatus (CCD) of CCTV video camera 1 is adjusted into the value of ormal weight.
3～6 is microscopical structure member, the 3rd, and straight tube, the 4th, light projector pipe, the 5th, converter (revolver), the 6th, object lens.The 7th, optical waveguide, the 11st, microscopical light source for reflection illumination assembly, through optical waveguide 7, light projector pipe 4, and object lens 6, the not shown measurement test portion on the irradiation test portion platform 8 is as indirect illumination from the light of the exit wound of bullet of this light source for reflection illumination assembly 11 output.
In addition, the 9th, transillumination head, the 10th, optical waveguide, the 12nd, the light source for transmission illumination assembly, from the light that the exit wound of bullet of this light source for transmission illumination assembly 12 is exported, process optical waveguide 10, transillumination head 9, from the not shown measurement test portion of back side illuminaton on test portion platform 8, as transillumination.
Light by the light of measuring the test portion reflection and transmission incides in the CCTV video camera 1 via the ND optical filters in the adapter 2 with an automatic light meter, is taken and is transformed to vision signal.
The vision signal that is obtained by CCTV video camera 1 is input in the image processing apparatus 13, and being converted to can be by the form of video display device 14 demonstrations, and this image is presented on the video display device 14.
The 15th, the manipulater of mouse or keyboard etc. is observed the image that is shown by video monitor 14, controls the operation in image processing apparatus 13, appointment and demonstration light modulation zone.
Fig. 2 is used for illustrating the measurement test portion placed on the present invention's the test portion platform 8 line width measuring method, presentation graphs 1 and the figure of the brightness waveform that obtained by embodiments of the present invention.Fig. 2 (a) is the vertical view that actual measuring object is promptly measured test portion, and Fig. 2 (b) is its sectional view, and Fig. 2 (c) is the example of resulting brightness waveform.
Shown in Fig. 2 (a) and (b), measure test portion and on the transparency carrier 21 that with the LCD substrate is representative, form opaque pattern 22, and striding transparency carrier 21 and opaque pattern 22, form semi-transparent film 23 thereon.
When the both sides of this measurement test portion that throws light on simultaneously with reflected light and transmitted light, showing the vertical view 2 (a) of measuring test portion and the image (zone that still, in this stage, does not show label 26 and 27 of brightness waveform Fig. 2 (c) on the video monitor 14.In addition, the brightness waveform in this stage is the waveform L after the peak value of brightness waveform from the waveform of Fig. 2 (c) reduces).
When measuring the live width of this semi-transparent film (ITO) 23 of measuring test portion, use the manipulater 15 of Fig. 1 in embodiments of the present invention, shown in Fig. 2 (a), on transparency carrier 21, specify and show the light modulation zone 26 of transmitted light, on opaque pattern 22, specify and show catoptrical light modulation zone 27.
Then, in brightness waveform Fig. 2 (c), ND optical filter (transmissivity continually varying optical filter) in the adapter with an automatic light meter 2 of Fig. 1 is carried out light modulation, so that the peak value of the brightness waveform that obtains from catoptrical light modulation zone 27 is predetermined setting (for example, vision signal 0.7V); And in the light source for transmission illumination assembly 12 of Fig. 1, the transmitted light from transmitted light source is carried out light modulation, so that the peak value of the brightness waveform that obtains from the light modulation zone 26 of transmitted light is predetermined setting (for example, vision signal 0.7V).
The result of this light modulation makes the catoptrical peak value and the peak value of transmitted light become identical setting (for example, vision signal 0.7V).Brightness waveform in this stage is the waveform H after the peak value of brightness waveform from the waveform of Fig. 6 (c) rises.In addition, can also be different with above-mentioned example, the peak value of the peak value of the brightness waveform that obtains from catoptrical light modulation zone by reflected light adjustment or the brightness waveform that obtains from the light modulation zone of transmitted light by the adjustment of ND optical filter from reflection source.
Then, by carrying out the measurement that Fig. 5 illustrates such live width, measure the live width of semi-transparent film (ITO) 23.
Thereby, in the present embodiment, can access the line width measuring method of the contrast state that can keep stable.Live width that thus can locating tab assembly semi-transparent film (ITO) 23.In addition, the live width data can be not inhomogeneous because of the sample of measuring test portion, and the reproduction of measurement is also easy.
In addition, in the present embodiment, even the transmissivity of catoptrical reflectivity and transmitted light is different because of the sample of measuring test portion, because the image processing apparatus 13 by Fig. 1 produces control signal, make this control signal feed back to ND optical filter (transmissivity continually varying optical filter) and light source for transmission illumination assembly 12 in the adapter with an automatic light meter 2, so also can automatically keep identical setting (vision signal 0.7V) all the time.In addition, can measure the live width of semi-transparent film (ITO) 23 thus all the time exactly.
Claims (4)
1. line width measuring method, it is characterized in that, in wire width measuring device, measure the live width of semi-transparent film with the both sides of reflected light and transmitted light illumination measurement simultaneously test portion, this measurement test portion is to form opaque pattern and striding above-mentioned transparency carrier and above-mentioned opaque pattern and form above-mentioned semi-transparent film on transparency carrier
When measuring the live width of above-mentioned semi-transparent film, specify behind the light modulation zone peak value of the brightness waveform by making reflected light and transmitted light respectively to reach the mode light modulation respectively of predetermined value separately respectively to above-mentioned transparency carrier and above-mentioned opaque pattern, measure the live width of above-mentioned semi-transparent film then.
2. line width measuring method, it is characterized in that, in wire width measuring device, be used for using from the semi-transparent film of the indirect lighting measurement test portion that reflects light source, simultaneously opposition side from the above-mentioned semi-transparent film of the above-mentioned measurement test portion of the transillumination of transmitted light source, measure the live width of above-mentioned semi-transparent film, above-mentioned measurement test portion is to form opaque pattern and striding above-mentioned transparency carrier and above-mentioned opaque pattern and form above-mentioned semi-transparent film on transparency carrier
When measuring the live width of above-mentioned semi-transparent film, above-mentioned transparency carrier and above-mentioned opaque pattern are specified the light modulation zone and the catoptrical light modulation zone of transmitted light respectively;
Adjust in the light modulation adapter optical filter or from the reflected light of above-mentioned reflection source, so that the peak value of the brightness waveform that obtains from above-mentioned catoptrical light modulation zone becomes predetermined value;
And adjust in the above-mentioned light modulation adapter above-mentioned optical filter or from the transmitted light of above-mentioned transmitted light source, so that the peak value of the brightness waveform that obtains from the light modulation zone of above-mentioned transmitted light becomes predetermined value;
Measure the live width of above-mentioned semi-transparent film then.
3. line width measuring method as claimed in claim 2 is characterized in that, adjusts the optical filter in the light modulation adapter, so that the peak value of the brightness waveform that obtains from above-mentioned catoptrical light modulation zone becomes predetermined value; And adjust transmitted light from above-mentioned transmitted light source, so that the peak value of the brightness waveform that obtains from the light modulation zone of above-mentioned transmitted light becomes predetermined value;
Measure the live width of above-mentioned semi-transparent film then.
4. line width measuring method as claimed in claim 3, it is characterized in that, carry out light modulation, the above-mentioned peak value of the above-mentioned brightness waveform that make the above-mentioned peak value of the above-mentioned brightness waveform that obtains from above-mentioned catoptrical light modulation zone, obtains with light modulation zone from above-mentioned transmitted light is identical.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005003442A JP4663334B2 (en) | 2005-01-11 | 2005-01-11 | Line width measurement method |
| JP003442/2005 | 2005-01-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1804545A CN1804545A (en) | 2006-07-19 |
| CN100378431C true CN100378431C (en) | 2008-04-02 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNB2006100049545A Active CN100378431C (en) | 2005-01-11 | 2006-01-11 | Line width measuring method |
Country Status (4)
| Country | Link |
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| JP (1) | JP4663334B2 (en) |
| KR (1) | KR100674774B1 (en) |
| CN (1) | CN100378431C (en) |
| TW (1) | TWI276773B (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009058377A (en) * | 2007-08-31 | 2009-03-19 | Hitachi Kokusai Electric Inc | Inspection apparatus |
| JP5270971B2 (en) * | 2008-06-10 | 2013-08-21 | 株式会社キーエンス | Image measuring apparatus, image measuring method, and computer program |
| CN102095377A (en) * | 2010-11-04 | 2011-06-15 | 深圳市华星光电技术有限公司 | Line width measuring device |
| CN103217107B (en) * | 2013-03-29 | 2015-11-25 | 深圳市华星光电技术有限公司 | Precision length measurement machine and light amount interference method and device for removing thereof |
| CN103697812B (en) * | 2013-12-18 | 2016-08-10 | 京东方科技集团股份有限公司 | The light quantity intensity of critical size measurement apparatus adjusts system and method for adjustment |
| CN108181094A (en) * | 2017-12-25 | 2018-06-19 | 中国航空工业集团公司洛阳电光设备研究所 | A kind of head-up display Character Intensity and line width measuring method |
| CN111189395A (en) * | 2018-11-14 | 2020-05-22 | 苏州能讯高能半导体有限公司 | Undercut structure measurement system and undercut structure measurement method |
| US11419809B2 (en) | 2019-06-27 | 2022-08-23 | L'oreal | Hair treatment compositions and methods for treating hair |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1438469A (en) * | 2002-01-21 | 2003-08-27 | 株式会社日立国际电气 | Wire-width measuring method and apparatus thereof |
| JP2004170400A (en) * | 2002-10-30 | 2004-06-17 | Hitachi Kokusai Electric Inc | Method and system for measuring dimensions |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01101407A (en) * | 1987-10-15 | 1989-04-19 | Dainippon Screen Mfg Co Ltd | Line width measuring method |
| JPH03261810A (en) * | 1990-03-12 | 1991-11-21 | Fujitsu Ltd | Outer appearance inspection apparatus |
| JPH05302822A (en) * | 1992-04-27 | 1993-11-16 | Sumitomo Electric Ind Ltd | Measuring method and device for etch factor of printed circuit board |
| JPH07218234A (en) * | 1994-02-04 | 1995-08-18 | Citizen Watch Co Ltd | Size measuring method for fine pattern |
| JPH10227608A (en) * | 1997-02-13 | 1998-08-25 | Olympus Optical Co Ltd | Edge detector |
| JP2000028319A (en) * | 1998-07-09 | 2000-01-28 | Hitachi Denshi Ltd | Automatic dimming apparatus for microscope |
| JP2001091469A (en) * | 1999-09-21 | 2001-04-06 | Olympus Optical Co Ltd | Surface defect inspection device |
| JP3830451B2 (en) | 2002-01-21 | 2006-10-04 | 株式会社日立国際電気 | Line width measuring method and line width measuring apparatus |
-
2005
- 2005-01-11 JP JP2005003442A patent/JP4663334B2/en active Active
-
2006
- 2006-01-10 KR KR1020060002685A patent/KR100674774B1/en active IP Right Grant
- 2006-01-10 TW TW095100849A patent/TWI276773B/en active
- 2006-01-11 CN CNB2006100049545A patent/CN100378431C/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1438469A (en) * | 2002-01-21 | 2003-08-27 | 株式会社日立国际电气 | Wire-width measuring method and apparatus thereof |
| JP2004170400A (en) * | 2002-10-30 | 2004-06-17 | Hitachi Kokusai Electric Inc | Method and system for measuring dimensions |
Non-Patent Citations (2)
| Title |
|---|
| DXY-1型线宽轮廓测量仪的设计. 李庆祥，薛实福，王伯雄，徐毓娴.仪器仪表学报，第13卷第2期. 1992 * |
| 纳米级精度的线宽测量仪. 王云庆，李庆祥，薛实福，周兆英.光学精密工程，第2卷第1期. 1994 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1804545A (en) | 2006-07-19 |
| JP4663334B2 (en) | 2011-04-06 |
| KR20060082047A (en) | 2006-07-14 |
| KR100674774B1 (en) | 2007-01-25 |
| TWI276773B (en) | 2007-03-21 |
| TW200632276A (en) | 2006-09-16 |
| JP2006194593A (en) | 2006-07-27 |
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