JPH07307599A - Inspection device and product manufacture - Google Patents

Abstract

PURPOSE:To provide an inspection device which reduces a load on an operator and is useful for improvement of product quality at a low cost. CONSTITUTION:An inspection object 1 is positioned in an X-Y table 2, automatic inspection is carried out by three dimensional surface configuration of the inspection object 1 acquired by LEDs 3a, 3b, 3d, 3f and a camera 5, a position of a place thereof judged no good is stored in a memory 12 and a position of the inspection object 1 is imaged by white circular light source 4 and cameras 6a, 6b and is displayed by a display unit 15 for visual inspection.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an inspection device for semi-finished product inspection performed in a product manufacturing line, and a product manufacturing method for completing the semi-finished product by repairing and correcting a defective portion detected by the inspection, In particular, an automated inspection technology is used for the same object in the same inspection device to display an image of a location that is not automatically detected and the visual re-inspection using this image is effectively carried out. The present invention relates to a method for accurately and easily detecting a defective portion and repairing it.

[0002]

2. Description of the Related Art In a conventional manufacturing process, an operator inspects a semi-finished product in the process of manufacturing and repairs or corrects a defective portion if found. On the other hand, the inspection process by the operator is being automated one after another due to the advancement of the inspection automation technology, and the automation of the visual inspection by the image recognition technology and the sensing technology is a large part thereof. However, objectively evaluating the track record of many visual inspection automation technology applications that have been implemented so far, it is hard to say that they have an overwhelmingly superior ability to visual inspection by operators. It is in. This is because the automation technology does not yet reach the human ability in terms of accuracy for a minute object and especially flexibility for an imaging environment. In other words, we must admit that there are still technical obstacles to the expanded use of automatic inspection equipment.

[0003]

In order to deal with the dissatisfaction level in the above visual inspection automation technology, the present invention introduces the following concept. (1) The advantages of visual inspection by humans and the advantages of automatic computer inspection should be compatible. The advantage of human visual inspection lies in its precision and flexibility, while the advantage of automatic computer inspection lies in its stability. Therefore, it is desirable to be able to perform automatic inspection and visual inspection in a single inspection device in a functionally integrated manner. (2) One of the methods to realize this concept is that automatic inspection is limited to automatic detection of points that deviate from standard non-defective product quality (referred to as "defective suspect" points in the following description). After completion, the defective suspect location is imaged and displayed, and the operator visually inspects the displayed image to re-inspect, and finally the true defective location is extracted. (3) The operator repairs or corrects the true defective portion finally extracted in this way to complete a semi-finished product and obtain a finished product.

One form of realizing this concept is
This is a system in which the automatic inspection function and the image display function are functionally integrated. However, there are technical problems with this integration. The problem is that the conditions that are favorable for optical sensing for automatic inspection and the conditions that are favorable for imaging for visual inspection do not necessarily match. Taking automatic inspection of a three-dimensional shape as an example, a light cutting method or a structured light projection method such as a certain lattice fringe pattern is generally applied to the basic three-dimensional measurement. The light conditions used in this case are not very suitable for observing an object with the naked eye, and sufficient visual observation cannot be performed. On the other hand, the optical environment for satisfactorily observing a three-dimensional object is illumination with less shading by white light and the viewing angle from an oblique direction in both the azimuth angle and the inclination angle. However, this environment does not make any sense for 3D measurement. Moreover, there are AND conditions for both of these functions. It is a factor of observation magnification. In the case of automatic inspection, there is a trade-off with inspection speed, so a low magnification is preferable as long as recognition performance permits. For example, in the automatic inspection of the mounted printed circuit board, a sufficient recognition result is usually obtained at a resolution of 50 to 25 microns per pixel, but the image for visual inspection needs to be increased several times more. .

The easiest way to solve these problems is to mount the automatic inspection function and the image display function on separate inspection devices. However, in this form, the components are duplicated, and as a matter of course, not only the space but also the cost is almost doubled, and the practicability is extremely low in terms of total performance. Therefore, the necessity for a form in which the light emitting / receiving system used for the automatic inspection function and the image display function are separate, but integrated as an inspection device, emerges. In this case, it is a problem to make different optical sensing methods compatible in the same inspection device in principle, and that is the technical problem of the present invention without reworking.

[0006]

As described above, in this form, the original function cannot be effectively exhibited by simply integrating both functions. Mere integration causes functional impairments, especially because the light fluxes used in both functions cause mutual intervention.
Further, a functionally effective relationship is required between the automatic inspection function and the image display function for visual inspection. In view of this, the present invention provides a solution for forming an appropriate mutual relationship between the automatic inspection means and the image display means, and establishes a practical integrated inspection device. Specifically, the following functions are the means for solving the problems. That is, (a) means for making the automatic inspection function and the image display function optically non-interfering with each other, but in this case, the automatic inspection function may optically utilize the image display function. (B) Storage function of location data of defective suspect judgment points by automatic inspection. (C) A function of positioning the re-inspection target at the defective suspect position based on the stored defective suspect position position data, and a function of capturing and displaying the image. (D) A function that allows the operator to visually check the display image of the defective suspect location and extract and determine the true defective location. (E) Equipped with a standard recognition algorithm (defect suspect detection algorithm) in the automatic inspection function. (F) A function for repairing and correcting the true defective portion extracted by visual re-inspection.

[0007]

According to the present invention, it is possible to combine an optimization system utilizing the advantages of the automatic inspection and the visual inspection of the display image according to the inspection object and the purpose of the inspection. In addition to realizing the inspection manufacturing method described above, it became easy to stabilize the manufacturing quality.

[0008]

The present invention will be described below with reference to the drawings showing the embodiments. FIG. 1 shows the structure of an inspection apparatus according to a first embodiment of the present invention. The image sensing device shown in FIG. 1 is an optical separation system based on time division, and when the light projection and light reception are turned on in the phase (T1) for automatic inspection, a measurement light projection / reception device and a display are displayed. In the phase (T2) for the visual inspection of the image, it is composed of a combination of an illumination / imaging device in which illumination and imaging are turned on. The measuring light emitting / receiving device constitutes a three-dimensional measuring device that time-divisionally projects light beams with different angles to sense the surface shape. A plan view from directly above is shown in FIG. The measuring projection device of the first embodiment is 3 in FIGS. 1 and 2, and is composed of a plurality of groups of LEDs as a light source (in FIG. 2, 0 °, 90 °, 180 °,
8 total of 3a-3h installed in 4 azimuth directions of 270 degrees
Group of LEDs). Of these LEDs, 3a-
The four LEDs 3d illuminate the inspection object with a steep incident inclination angle, and the four LEDs 3e to 3h illuminate the inspection object with a gradual incident inclination angle. The light flux hitting the inspection area of the inspection object has the specular reflection component as the center vector according to the surface solid angle (that is, either the slow surface normal vector or the steep surface normal vector) at that location. The reflected light is reflected and the monochrome shutter camera 5 as an image pickup device takes an image.

As shown in the time chart of FIG. 16, the four LED light sources 3a to 3d emit light at timings T1 (i-1), (i = 1, 2, ..., N) within the phase (T1), The camera 5 takes an image. On the other hand, four LED light sources 3e
Up to 3h emit light at timing T1 (i) within the phase (T1), and the camera 5 takes an image. Two images, a T1 (i-1) image and a T1 (i) image captured at these two timings, are taken into respective memory frames and combined to form a T1 (i) image, which is determined as a data image for automatic recognition. Used for calculation. Further, when the background light amount is at a sufficiently low level, the camera 5 may capture an image by performing a normal imaging operation without using the shutter camera function at the timing T1 (i) within the phase (T1). Incidentally, the visual inspection illumination image pickup device is OFF in the phase (T1). When the automatic inspection of the inspection location is completed, the inspection apparatus then enters the state of image display phase (T2) for visual inspection. In the phase (T2), conversely, the measurement light projecting / receiving device is turned off and the visual inspection illumination image pickup device is turned on. 4 and 6 of FIGS. 1 and 2
Is a visual inspection illumination image pickup device, and in this embodiment, the illumination device guides a light beam from a halogen lamp equipped with an LCD shutter by an optical fiber to form a white annular light source 4. Further, 6a to 6d are four color cameras, which have a viewing direction tilt angle of 45 degrees and 13
It is installed in four azimuth directions of 5 degrees, 225 degrees, and 315 degrees. At the visual inspection phase (T2), the light source is LC
The D shutter becomes “open”, the inspection target is illuminated, and the color image captured by the camera is displayed on the screen of the display unit 15.

The operation sequence of the entire inspection is shown in the flow charts of FIGS. First, when the inspection object 1 is carried in by a carry-in device (not shown) and set on the XY stage 2 of FIG. 1 (ST1), a positioning device (not shown) is generated by a control signal of the control unit 10 according to the inspection sequence. )
Moves the XY stage 2 to bring the inspection area of the inspection object 1 to the automatic inspection position (ST2). Therefore, the inspection phase becomes T1, and the LED light sources 3a to 3a
As described above, the 3d and the LED light sources 3e to 3h project the light flux having the respective incident solid angles at the timing T1 (i-1) and the timing T1 (i) (ST3). The reflected light from the target is imaged by the monochrome camera 5 of the imaging device (ST3). Therefore, the monochrome camera 5 converts this into an image signal and outputs it to the image input unit 8 (ST3). Image processing operation unit 9
Calculates an inspection parameter from the image signal quantized by the image input unit 8 via the route (A) (ST
4) The program is supplied to a standard recognition algorithm that is programmed in advance and is used for the quality judgment, and the quality of the inspection area is automatically judged (ST5). If the determination result is a defective suspect with a suspected defect, ST6 becomes NO, and the defective suspect position (that is, retested position) position data is stored in the memory 12 in ST7. If the determination result is non-defective, ST6 becomes YES, and if ST8 is NO, the target is moved to the next inspection position, but if YES, the inspection of the fully automatic inspection area is completed, Proceed to the visual re-inspection step of phase T2 (FIG. 4).

In the visual re-inspection step of FIG. 4, the re-inspection sequence is performed by the positioning device (not shown) by the control signal of the control unit 10 according to the defective suspect position position data stored in the memory 12 of FIG. −
The Y stage 2 is moved to bring the reinspection area of the inspection object 1 to the reinspection position (ST9). Therefore, in ST10, when the white annular light source 4 irradiates the inspection object 1 with a white light flux, the color camera 6 images the re-inspection region and displays the image on the screen of the display unit 15 (ST11). Therefore, the operator makes a visual inspection by observing this image to make a pass / fail judgment (ST1
2) Input the judgment result into the input unit 13 (ST1
3). When the input of the result is completed, if ST14 is NO, the inspection sequence is performed by the positioning device (not shown) again by the control signal of the control unit 10 according to the defective suspect position position data stored in the memory 12.
The stage 2 is moved to bring the inspection object 1 to the next re-inspection position, and the above-described operation is repeated. In this way, when the re-inspection of all the re-inspection positions is completed, ST14
Is YES, and the inspection target 1 is ejected from the XY stage 2 (ST16). As described above, in this embodiment, the quality judgment is automatically performed, and only the area suspected of being defective is displayed as an image. Therefore, the operator only needs to perform a very small number of visual inspections, which is a significant labor saving. Not only is it realized, but by setting a gentle automatic inspection standard judgment standard, the risk of non-detection of defective points is avoided, and a small number of over-detected good points are allowed to be detected as defective suspects. The visual re-inspection of the chisel is performed by the displayed image.

Next, a second embodiment of the present invention will be described (FIGS. 5 and 6). The second embodiment is an inspection device that optically separates the measuring light projecting / receiving device and the image display illuminating / imaging device according to the difference in polarization angle (FIG. 6 is a plan view from directly above). The measuring light projecting device 3 and the light receiving device 5 for automatic inspection shown in FIGS. 5 and 6 constitute a three-dimensional sensing device that projects light beams with different angles at time division to measure the surface shape. And projects and receives polarized light having a polarization angle of 90 degrees. On the other hand, the illumination / imaging device for visual inspection illuminates and images polarized light having a polarization angle of 0 degree. As described above, since the second embodiment utilizes the difference in the polarization angle, the specularly reflected light of the primary light (projected light beam) and the secondary light are insensitive to each other. It is not necessary to repeat ON / OFF of the light source between the automatic inspection phase (T1) and the image display phase (T2) as in the first embodiment. The measuring floodlight device of the second embodiment is used as a light source and has a polarization angle of 90 ° in the forward direction.
It consists of multiple groups of LEDs equipped with a polarization filter of 3 degrees (in FIG. 6, it consists of a total of 8 LEDs of 3a to 3h installed in four azimuth directions of 0 degree, 90 degrees, 180 degrees, and 270 degrees). . Of these LEDs, 4 LEs 3a to 3d
D illuminates the inspection object with a steep incident inclination angle, and 3e to
Four LEDs of 3h illuminate the test object with a slow incident tilt angle. The light flux that hits the inspection area of the inspection object is reflected light with the specular reflection component as the center vector according to the surface solid angle (that is, either the slow surface normal vector or the steep surface normal vector) at that location. The light is reflected, and an image is captured by the monochrome camera 5 equipped with a 90-degree polarization filter. As shown in the time chart of FIG. 17, 4 LEs
The D light sources 3a to 3d have timing T1 within the phase (T1).
(I-1), (i = 1, 2, ..., N) emits light,
The monochrome camera 5 takes an image. On the other hand, the other 4 LEDs
The light sources 3e to 3h are timing T1 within the phase (T1).
The light is emitted in (i) and the monochrome camera 5 takes an image.
Two images of T1 (i-1) and T1 (i) images captured at these two timings are taken into each memory frame and combined to form a T1 (i) image, which is judged as a data image for automatic recognition. Used for calculation. When the automatic inspection of the inspection location is completed, the inspection apparatus then enters the state of image display phase (T2) for visual inspection. 5 and 6
Reference numerals 4 and 6 are illumination imaging devices for visual inspection, which are devices dedicated to 0 degree polarization. In this embodiment, the illumination device is white light sources 4a to 4d equipped with a 0 degree polarization filter. Further, 6a to 6d are four color cameras equipped with a 0-degree polarization filter, which are installed in four azimuth directions of 45 degrees, 135 degrees, 225 degrees, and 315 degrees with a visual direction inclination angle effective for visual inspection. Has been done. Phase of visual inspection (T
In 2), the color image imaged by 0 degree polarization is displayed on the screen of the display unit 15.

The operation sequence of the entire inspection is shown in the flow charts of FIGS. First, when the inspection target 1 of FIG. 5 is loaded by the carry-in device (not shown) and set on the XY stage 2 (ST1), a positioning device (not shown) is generated by the control signal of the control unit 10 according to the inspection sequence. ) Moves the XY stage 2 to bring the inspection region of the inspection object 1 to the automatic inspection position (ST2). Therefore, the inspection phase becomes T1, and the monochrome camera 5 of the image pickup device images the reflected light from the target (ST3). Then, the monochrome camera 5 converts this into an image signal and outputs it to the image input unit 8 (ST3). Image processing operation unit 9
Calculates an inspection parameter from the image signal quantized by the image input unit 8 via the route (A) (ST
4) The program is supplied to a standard recognition algorithm that is programmed in advance and is used for the quality judgment, and the quality of the inspection area is automatically judged (ST5). If the determination result is a defective suspect with a suspected defect, ST6 becomes NO, and the defective suspect position (that is, retested position) position data is stored in the memory 12 in ST7. If the determination result is non-defective, ST6 becomes YES, and if ST8 is NO, the target is moved to the next inspection position. If YES, the inspection of the fully automatic inspection area is completed, Proceed to the visual reinspection step (T2) (FIG. 8).

In the visual re-inspection step of FIG. 8, the re-inspection sequence is performed by the control unit 1 according to the defective suspect position position data stored in the memory 12 of FIG.
A control signal of 0 causes the positioning device (not shown) to move to X-
The Y stage 2 is moved to bring the re-inspection area to be inspected to the re-inspection position (ST9). Therefore, in ST10, the imaging gate of the color camera 6 is turned on, and the re-inspection area in which the white light source 4 is radiating the polarized white light flux having the polarization angle of 0 degree is selectively imaged by 0 degree polarization, and the image is displayed by the display unit 15. Is displayed on the screen (ST11). Therefore, the operator observes this image to perform an image inspection to make a pass / fail judgment (ST12), and inputs the judgment result to the input unit 13 (ST13). If ST14 is NO when the input of the result is finished, the inspection sequence is the memory 1
A positioning device (not shown) again moves the XY stage 2 according to the control signal of the control unit 10 according to the defective suspect position position data stored in No. 2 to bring the inspection object 1 to the next re-inspection position. The described operation is repeated. In this way, when the re-inspection at all the re-inspection positions is completed, ST14 becomes YES and the inspection object 1 is ejected from the XY stage 2 (ST16). As described above, also in the second embodiment, the pass / fail judgment is automatically performed and only the area suspected of being defective is displayed as an image, so that the operator only needs to perform a very small number of visual inspections, which is a large Not only is labor saving realized, but the risk of non-detection of defective points is avoided by setting a gentle automatic inspection standard judgment standard, and a small number of over-detected defective points are allowed to be detected as defective suspects. Only the minute visual re-inspection is performed by the display image.

Next, a third embodiment of the present invention will be described with reference to the drawings. The third embodiment is also an inspection device that optically separates the measuring light projecting / receiving device and the image displaying illumination / imaging device according to the difference in polarization angle. FIG. 9 shows a third embodiment of the present invention.
The structure of the inspection apparatus of an Example is shown. In the image sensing device shown in FIG. 9, the light emitting / receiving device for measurement in which the light receiving gate is turned on in the phase (T1) for the automatic inspection and the image capturing gate in the phase (T2) for the visual inspection of the displayed image are provided. It consists of a combination of lighting and imaging devices that are turned on. The measuring light-projecting / light-receiving device of the third embodiment constitutes a three-dimensional measuring device that projects color light fluxes having different incident angles to sense the surface shape. The measurement light projecting device is 3 in FIG. 9, and includes a plurality of groups of color light sources (for example, incandescent lamps with color filters) as light sources. Each of these color light sources 3 is equipped with a polarizing filter having a polarization angle of 90 degrees on its front surface, and therefore the light source 3 always emits a 90 degree polarized color light beam as shown in the time chart of FIG. Of these light sources, a light source group including 3a and 3b emits yellow light, for example, and an object to be inspected is illuminated with a steep incident tilt angle, and a light source group including 3e and 3f emits blue light and a slow incident tilt angle. Illuminates the inspection object. The color light flux that hits the inspection area of the inspection target has a specular reflection component as a center vector according to the surface solid angle (that is, either a slow surface normal vector or a steep surface normal vector) at that location. The color reflected light is reflected, and an image is captured by the color shutter camera 5 with a polarization filter having a polarization angle of 90 degrees. Further, in the figure, 4 is a white light source which is not equipped with a polarization filter unlike the second embodiment, and therefore, the color shutter camera 5 with a polarization filter having a polarization angle of 90 degrees shows the luminous flux emitted by the white light source 4 toward the target. It can also receive reflected light. Since the white light source 4 illuminates the object with a medium inclination angle, it becomes possible to detect a surface normal vector having a medium inclination, and three types of inclination angle surfaces of steep inclination, middle inclination and gentle inclination are detected. Therefore, it is possible to perform more detailed shape measurement than the second embodiment. At the timing T1 (i) (i = 1, 2, ..., N) in the phase (T1),
The camera 5 images the 90 degree polarized color specular reflection light, the white light specular reflection light, and the scattered reflection light. Capture the captured color image into a color memory frame and use it as a T1 (i) image,
Used as a data image for automatic recognition in the pass / fail judgment calculation. Incidentally, the imaging gate of the visual inspection imaging device 6 is OFF in the phase (T1). When the automatic inspection of the inspection location is completed, the inspection apparatus then enters the state of image display phase (T2) for visual inspection. In the phase (T2), on the contrary, the light receiving gate of the measurement light receiving device is turned off, and the image pickup gate of the visual inspection image pickup device 6 is turned on.
Reference numerals 4 and 6 in FIG. 9 denote illumination image pickup devices for visual inspection. In this embodiment, the illumination device 4 is a white light source group including white light sources 4a and 4b. The image pickup device 6 is a color camera including color cameras 6a and 6b provided with a polarization filter having a polarization angle of 0 degree on the front surface, and is installed with a viewing direction tilt angle and azimuth angle effective for visual inspection. Therefore, the imaging device 6 receives and receives the specular reflection light from the illumination of the illumination device 4,
The 90-degree polarized color specularly reflected light originating from the color light source 3 is not received, thereby preventing the generation of an image that is a hindrance in visual inspection. In the phase (T2) of the visual inspection, the imaging gate of the imaging device 6 is turned on, and the captured color image is displayed on the screen of the display unit 15. As described above, in the third embodiment, the illumination system for image display is used as a part of the light projecting / receiving system for automatic inspection, and the image pickup system for image display uses the reflection effect for measurement by utilizing the polarization effect. Since unnecessary contamination of light is eliminated, it is not necessary to prevent the mixture of light fluxes of other systems by blinking the light source, and more precise shape measurement and a display image that is easy to see can be obtained. The yellow light and the blue light used in the present embodiment are not limited to the combination of these two colors, of course, and the red light and the green light or other combinations can be used without any problem. . The operation flow of the third embodiment is basically the same as that of the second embodiment, so its explanation is omitted.

Next, a fourth embodiment of the present invention will be described with reference to the drawings. The fourth embodiment is an inspection device that optically separates the measuring light projecting / receiving device and the image displaying illumination / imaging device according to the difference in the measuring light wavelength. FIG. 10 shows the structure of an inspection apparatus according to the fourth embodiment of the present invention. 10 and 1
The image sensing device shown in FIG. 1 includes a measuring light projecting / receiving device in which a light receiving gate is turned on in a phase (T1) for automatic inspection and a phase (T
In 2), it is composed of a combination of illumination and an image pickup device in which the image pickup gate is turned on (see the time chart in FIG. 18). The projecting / receiving device for measurement of the fourth embodiment constitutes a three-dimensional sensing device for projecting light beams having different wavelength ranges at different incident angles to measure the surface shape. The projecting device for measurement is 3 and 4 in FIG. 10, and 3 is composed of a plurality of infrared light sources (for example, infrared light emitting LEDs having a center wavelength of 950 nm) as a light source. These light sources illuminate the inspection object with a gradual incident tilt angle. A white light source 4 illuminates the inspection object with a steep incident inclination angle (see FIG. 1).
0 and the embodiment shown in FIG. 11, a white ring light source is used, but needless to say, it does not necessarily have a ring shape depending on the purpose). As will be described later, the light source 4 also serves as an imaging light source in the next phase. In this manner, in the phase (T1), the infrared wavelength light flux emitted from the infrared light source 3 and the visible wavelength light flux emitted from the white light source 4 are mixed to illuminate the target. The mixed light flux that hits the inspection area of the inspection target has a specular reflection component as a center vector depending on the surface solid angle (that is, either a slow surface normal vector or a steep surface normal vector) at that location. A shutter camera 5 that is an imaging device that reflects the reflected light flux
Takes an image. The image pickup device 5 is a near infrared monochrome camera 5a.
And a monochrome camera 5b equipped with a near infrared light cut filter, and the same image incident through the optical path system 5c is distributed to both cameras at a ratio of 1: 1. The infrared light image and the visible light image captured by the image capturing device 5 at the timing T1 (i) (i = 1, 2, ..., N) in the phase (T1) are captured in a memory frame to be a T1 (i) image, Used as a data image for automatic recognition in the pass / fail judgment calculation. Incidentally, the imaging gate of the visual inspection imaging device 6 is OFF in the phase (T1). When the automatic inspection of the inspection location is completed, the inspection apparatus then enters the state of image display phase (T2) for visual inspection. In the phase (T2), on the contrary, the light receiving gate of the measurement light receiving device is turned off, and the image pickup gate of the visual inspection image pickup device 6 is turned on. 10 and 11
4 and 6 are illumination image pickup devices for visual inspection, and in this embodiment, the illumination device 4 is a white ring light source. Imaging device 6
Are color cameras 6a to 6d, which are installed with a viewing direction tilt angle and azimuth angle effective for visual inspection. Since the color camera is insensitive to infrared light according to the light transmission characteristics of the built-in color filter, the imaging device 6 receives visible light reflected by the illumination device 4, but the infrared light derived from the infrared light source 3 is received. It does not receive the reflected light, and does not generate an obstructive image in visual inspection. In the phase (T2) of the visual inspection, the imaging gate of the imaging device 6 is turned on, and the captured color image is displayed on the screen of the display unit 15.
As described above, in the fourth embodiment, the light emission for automatic inspection
Utilizing an illumination system for image display as part of the light receiving system,
The image pickup system for displaying an image eliminates unnecessary contamination of the reflected light for measurement by utilizing the infrared insensitive effect. The operation flow of the fourth embodiment is basically the same as the second operation flow.
The description is omitted because it is the same as the embodiment.

Next, a fifth embodiment of the present invention will be described with reference to the drawings. The fifth embodiment is an inspection device in which the light source / light receiving device for measurement and the illumination / imaging device for image display use a common light source. FIG. 12 shows the structure of an inspection apparatus according to the fifth embodiment of the present invention. In the image sensing device shown in FIG. 12, the light emitting / receiving device for measurement in which the light receiving gate is turned on at the phase (T1) for the automatic inspection and the image capturing gate at the phase (T2) for the visual inspection of the displayed image are provided. It consists of a combination of lighting and imaging devices that are turned on (see the time chart in FIG. 19). The projecting / receiving device for measurement of the fifth embodiment constitutes a three-dimensional measuring device that measures the three-dimensional shape by utilizing the parallax of both eyes. The measuring light-projecting device is 3 in FIG. 12, and 3 uses a white ring light source as a light source. As will be described later, the light source 3 also serves as an imaging light source in the next phase. Reference numeral 5a in FIG. 12 denotes a left-eye viewing monochrome camera, 5b denotes a right-eye viewing monochrome camera, and in the automatic inspection phase (T1), the timing T1 (i) (i = 1, 2 in the phase (T1)). , ..., N), the left and right images are captured via the optical path system 4 including the optical paths for the left and right images. The left and right images are taken into a memory frame, three-dimensional image measurement is performed by a program stored in advance in the memory based on the triangulation method, and used as a T1 (i) image for pass / fail judgment calculation for automatic recognition. Incidentally, the imaging gate of the visual inspection imaging device 6 is OFF in the phase (T1). When the automatic inspection of the inspection location is completed, the inspection apparatus then enters the state of image display phase (T2) for visual inspection. In the phase (T2), on the contrary, the light receiving gate of the measurement light receiving device is turned off, and the image pickup gate of the visual inspection image pickup device 6 is turned on. Reference numerals 3 and 6 in FIG. 12 are illumination inspection image pickup devices for visual inspection. In this embodiment, the illumination device 3 is a white ring light source, and shares the measurement light source. The image pickup device 6 is four color cameras including 6a and 6b (the other two are not shown), and is installed with a visual direction inclination angle and azimuth angle effective for visual inspection. In the phase (T2) of the visual inspection, the imaging gate 6 of the imaging device 6 is turned on, and the captured color image is displayed on the screen of the display unit 15. Note that the operation flow of the fifth embodiment is basically the same as that of the second embodiment, so description thereof will be omitted.

Next, the imaging zooming function of the image display means according to the first to fifth embodiments of the present invention will be described. As is clear from the description of the embodiments already described, since the proposal of the present invention enables the separation of the image pickup device in the automatic inspection phase and the image display phase,
As a result, the imaging magnification in each phase became independent. Therefore, the problem of the above-mentioned magnification is basically solved. However, from a more detailed point of view of practicality, the magnification required for image viewing in the image display phase often varies depending on each inspection region in one inspection target. For example, in order to observe a good image of the soldering of the tips of QEP leads having a pitch interval of 0.3 mm, a resolution of 10 pixels or less per pixel is required, but the pitch mounted on the same printed board is large. A resolution of 30 microns is sufficient for SOP with a spacing of 0.8 mm and soldering image inspection of the majority of chip parts, and the difference means a difference of 9 times or more in terms of area. Therefore, if an easy-to-see image is obtained and the inspection speed is taken into consideration, it is a practically necessary function to equip the image display means with a function of varying the magnification of imaging, that is, a zooming function. In each of the embodiments of the present invention, each image display means is provided with an automatic zoom function, and a program for fetching the adaptive magnification of each inspection region taught in advance in the automatic inspection stage into the re-inspection data is prepared. In the phase, each re-inspection area is automatically enlarged or reduced to a magnification suitable for each.

Next, a manufacturing process for completing a semi-finished product by repairing and correcting a portion finally determined to be defective while performing visual image re-inspection by the inspection apparatus according to the present invention will be described. An example will be described using a manufacturing line for soldering an electronic component to a printed wiring board. FIG. 13 shows a printed wiring board as an object, and shows a manufacturing line for soldering electronic components to the printed wiring board. When the printed wiring board is loaded into the leftmost solder printer, cream solder is applied by screen printing there, it is loaded into the chip placement machine by the belt conveyor, the chip components are loaded, and then the variant component loading machine is loaded. Deformed parts are attached by being exposed. When all the scheduled parts are mounted, they are carried into the reflow furnace, the cream solder is melted, and the soldering is completed. The soldered printed wiring board is then sent to the inspection device according to the present invention, and in the automatic inspection phase of the inspection device, the presence or absence of electronic components and the quality of soldering are checked by the same steps as shown in FIG. The inspection is done. The position data of the defective suspect position suspected of being defective in the automatic inspection phase is stored in the memory, and the defective suspect position is image-displayed in the image display phase.
Therefore, the operator uses the displayed image to visually re-inspect the image as described above. In this embodiment, however, the defective portion of the printed wiring board of this semi-finished product should be immediately repaired and corrected on the spot. You can do it.

In FIG. 14, when the inspection apparatus is equipped with a repair table 17, and the image is visually re-inspected at the defective suspect location and it is determined that the defect is detected, the re-inspection target is pulled out to the repair table 17.
Therefore, the repair target 18 is repaired or modified.
The operation steps in that case are as shown in the flowchart of FIG. 15, and every time the operator judges a defect by visual inspection of the image (ST12), the repair table 17 is repaired and corrected (ST13), and the target is X-rayed again. -When returning to the Y table 2, the re-inspection target 1 is positioned at the re-inspection position in the same manner as described above, and the image of the next re-inspection location is displayed. In this way, the mounted printed wiring board that has undergone the re-inspection and the repair and correction so that the component mounting states of all parts are perfect is finished as a product and shipped as a finished product. Inspection and repair / correction are thus inextricably linked, and are incorporated in the manufacturing process as an essential step. Note that FIG.
The repair table 17 of No. 4 may have a configuration in which the XY table 2 is also used to perform its function.

[0021]

According to the present invention, the inspection target is the standard defect and the part suspected of being defective is detected as the "defective suspect position" by the automatic inspection technique, and the number of defective suspect positions is greatly reduced. Since only the image is displayed by the image display technology, the operator visually inspects the image to make a final defect determination and repair the defect to make it easy to complete the semi-finished product. I can do it now. In this way, not only was the load on the operator reduced, but the size and cost of the inspection device were reduced compared to the conventional automated inspection technology aimed at completely unmanned operation. As a result, not only the cost performance is greatly improved, but also the standard quality automatic inspection naturally provides the production quality data, so that the production technicians and operators can play a practically effective role in improving the production quality. It is a very promising one.

[Brief description of drawings]

FIG. 1 is a diagram showing a configuration of a first embodiment inspection apparatus of the present invention.

FIG. 2 is a plan view of a light projecting unit and a light receiving unit of the inspection apparatus of the embodiment.

FIG. 3 is a flowchart for explaining the operation of the inspection apparatus of the same embodiment.

FIG. 4 is a flowchart for explaining the operation of the inspection apparatus according to the embodiment with FIG.

FIG. 5 is a diagram showing a configuration of an inspection apparatus according to a second embodiment of the present invention.

FIG. 6 is a plan view of a light projecting unit and a light receiving unit of the inspection apparatus of the embodiment.

FIG. 7 is a flowchart for explaining the operation of the inspection apparatus according to the embodiment.

8 is a flowchart for explaining the operation of the inspection apparatus according to the embodiment with FIG.

FIG. 9 is a diagram showing the configuration of an inspection apparatus according to a third embodiment of the present invention.

FIG. 10 is a diagram showing a configuration of an inspection device according to a fourth embodiment of the present invention.

FIG. 11 is a plan view of a light projecting unit and a light receiving unit of the inspection apparatus of the embodiment.

FIG. 12 is a diagram showing the configuration of an inspection device according to a fifth embodiment of the present invention.

FIG. 13 is a diagram showing a manufacturing process for soldering an electronic component to a printed wiring board.

FIG. 14 is a diagram showing the configuration of a sixth embodiment inspection apparatus of the present invention.

FIG. 15 is a flowchart for explaining the operation of the inspection apparatus according to the embodiment.

16 is a time chart for explaining the operation of the inspection apparatus of the embodiment shown in FIG.

17 is a time chart for explaining the operation of the inspection apparatus of the embodiment shown in FIG.

FIG. 18 is a time chart for explaining the operation of the embodiment inspection apparatus of FIGS. 9 and 10.

FIG. 19 is a time chart for explaining the operation of the inspection apparatus according to the embodiment of FIG.

[Explanation of symbols]

 1 inspection object 2 XY table 3a, ... 3f LED 4 white annular light source 5 monochrome camera 6a, 6b color camera 12 memory 15 display unit

Claims (11)

[Claims] 1. Positioning means for positioning an inspection target,
An automatic inspection means including the first sensing means, for automatically inspecting the inspection object positioned by the positioning means, and a memory means for storing position data of a portion determined to be not of good quality by the automatic inspection means. And the second
Including the sensing means, using the position data stored in the memory means is determined to be not good quality, consisting of an image display means for imaging and displaying the non-good judgment portion of the inspection target, An inspection apparatus, wherein the first and second sensing means are different sensing means. 2. The automatic inspection means according to claim 1, wherein the first sensing means is a three-dimensional shape information sensing means. 3. The first sensing means and the second sensing means are optical sensing means, and the light receiving means of the first sensing means is a primary luminous flux or inspection derived from the light projecting means of the second sensing means. For the secondary light flux passing through the object, the light receiving means of the second sensing means is the first
2. The inspection apparatus according to claim 1, wherein an optical separating means is provided for the primary light flux originating from the light projecting means of the sensing means or the secondary light flux passing through the inspection object. 4. The first and second sensing means include a light projecting means and a light receiving means, and each of the light projecting means and the light receiving means constitutes an optical separating means by an optical time division method. The inspection apparatus according to claim 3, wherein 5. The inspection apparatus according to claim 3, wherein each of the light projecting means and the light receiving means constitutes an optical separating means by utilizing an optical property of polarized light. 6. The inspection apparatus according to claim 3, wherein each of the light projecting means and the light receiving means constitutes an optical separating means by utilizing a difference in wavelength of light. 7. The automatic inspection carried out by the automatic inspection means is not limited to the secondary luminous flux produced by the projection of the projection means included in the first sensing means, but the projection means included in the second sensing means. The inspection apparatus according to claim 1, wherein the inspection is performed by also utilizing a secondary light flux produced by the projection of 8. The inspection apparatus according to claim 1, wherein the first sensing means and the second sensing means share a light projecting means. 9. The inspection apparatus according to claim 1, wherein the light projecting / light receiving means included in the second sensing means comprises a combination of a white light illumination device and a color image pickup device. 10. The inspection apparatus according to claim 1, wherein the second sensing means has means for automatically changing the image sensing magnification. 11. A position of a location where a semi-finished product to be inspected is positioned by a positioning means, and the inspection object is inspected by an automatic inspection means including a first sensing means, and as a result of the inspection, it is determined that the quality is not good. Data is stored in the memory means, and the bad position of the inspection object is image-displayed on the image display means including the second sensing means which is a sensing means different from the first sensing means by using the stored position data, A method of manufacturing a product, in which a semi-finished product is completed by repairing and correcting a visual inspection defect determination portion detected by visually inspecting an image of a re-inspection portion displayed as an image.