CN101020869A - 狭缝式涂布机的清洗剂、用于制造显示器的狭缝式涂布机和显示器的制造方法 - Google Patents
狭缝式涂布机的清洗剂、用于制造显示器的狭缝式涂布机和显示器的制造方法 Download PDFInfo
- Publication number
- CN101020869A CN101020869A CNA2007100080557A CN200710008055A CN101020869A CN 101020869 A CN101020869 A CN 101020869A CN A2007100080557 A CNA2007100080557 A CN A2007100080557A CN 200710008055 A CN200710008055 A CN 200710008055A CN 101020869 A CN101020869 A CN 101020869A
- Authority
- CN
- China
- Prior art keywords
- slit type
- clean
- out system
- propylene glycol
- type coater
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 15
- 238000000034 method Methods 0.000 title claims description 20
- 239000012459 cleaning agent Substances 0.000 title 1
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 claims abstract description 42
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 claims abstract description 25
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 claims abstract description 20
- FKRCODPIKNYEAC-UHFFFAOYSA-N ethyl propionate Chemical compound CCOC(=O)CC FKRCODPIKNYEAC-UHFFFAOYSA-N 0.000 claims abstract description 20
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 60
- 239000007788 liquid Substances 0.000 claims description 51
- 239000000758 substrate Substances 0.000 claims description 30
- 230000003595 spectral effect Effects 0.000 claims description 9
- 239000003086 colorant Substances 0.000 claims description 7
- 238000000059 patterning Methods 0.000 claims description 7
- 238000000576 coating method Methods 0.000 abstract description 12
- 239000011248 coating agent Substances 0.000 abstract description 10
- 239000003599 detergent Substances 0.000 abstract 2
- 239000010409 thin film Substances 0.000 description 13
- 239000004973 liquid crystal related substance Substances 0.000 description 9
- 239000011159 matrix material Substances 0.000 description 7
- 238000003860 storage Methods 0.000 description 7
- 239000012530 fluid Substances 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 5
- 238000012360 testing method Methods 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000002161 passivation Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000012847 fine chemical Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 229920002189 poly(glycerol 1-O-monomethacrylate) polymer Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000000935 solvent evaporation Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/26—Organic compounds containing oxygen
- C11D7/263—Ethers
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/26—Organic compounds containing oxygen
- C11D7/266—Esters or carbonates
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/50—Solvents
- C11D7/5004—Organic solvents
- C11D7/5022—Organic solvents containing oxygen
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
- C11D2111/10—Objects to be cleaned
- C11D2111/14—Hard surfaces
- C11D2111/22—Electronic devices, e.g. PCBs or semiconductors
Landscapes
- Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Life Sciences & Earth Sciences (AREA)
- Emergency Medicine (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Health & Medical Sciences (AREA)
- Wood Science & Technology (AREA)
- Organic Chemistry (AREA)
- Optical Filters (AREA)
- Materials For Photolithography (AREA)
- Detergent Compositions (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Abstract
Description
丙酮含量(wt%) | 闪点(℃) |
5 | 19 |
10 | 10 |
20 | -1 |
30 | -7 |
Claims (21)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR13590/06 | 2006-02-13 | ||
KR1020060013590A KR20070081572A (ko) | 2006-02-13 | 2006-02-13 | 슬릿 코터 세정제, 표시장치 제조용 슬릿 코터 및표시장치의 제조방법 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201010170571A Division CN101824370A (zh) | 2006-02-13 | 2007-02-09 | 狭缝式涂布机的清洗剂、用于制造显示器的狭缝式涂布机和显示器的制造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101020869A true CN101020869A (zh) | 2007-08-22 |
CN101020869B CN101020869B (zh) | 2010-11-24 |
Family
ID=38495296
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2007100080557A Expired - Fee Related CN101020869B (zh) | 2006-02-13 | 2007-02-09 | 狭缝式涂布机的清洗剂、用于制造显示器的狭缝式涂布机和显示器的制造方法 |
CN201010170571A Pending CN101824370A (zh) | 2006-02-13 | 2007-02-09 | 狭缝式涂布机的清洗剂、用于制造显示器的狭缝式涂布机和显示器的制造方法 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201010170571A Pending CN101824370A (zh) | 2006-02-13 | 2007-02-09 | 狭缝式涂布机的清洗剂、用于制造显示器的狭缝式涂布机和显示器的制造方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20080039359A1 (zh) |
JP (1) | JP2007217689A (zh) |
KR (1) | KR20070081572A (zh) |
CN (2) | CN101020869B (zh) |
TW (1) | TW200732469A (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110412837A (zh) * | 2018-04-28 | 2019-11-05 | 上海微电子装备(集团)股份有限公司 | 喷洒装置、显影系统和显影方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101020910B1 (ko) * | 2008-12-24 | 2011-03-09 | 엘지이노텍 주식회사 | 반도체 발광소자 및 그 제조방법 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5221592A (en) * | 1992-03-06 | 1993-06-22 | Hoechst Celanese Corporation | Diazo ester of a benzolactone ring compound and positive photoresist composition and element utilizing the diazo ester |
JP3248781B2 (ja) * | 1993-06-28 | 2002-01-21 | 東京応化工業株式会社 | レジスト洗浄除去用溶剤及びそれを使用する電子部品製造用基材の製造方法 |
JPH10186680A (ja) * | 1996-12-26 | 1998-07-14 | Clariant Internatl Ltd | リンス液 |
JPH10316997A (ja) * | 1997-05-15 | 1998-12-02 | Mitsubishi Rayon Co Ltd | 工業装置に付着した残存物の洗浄方法 |
JP3978255B2 (ja) * | 1997-06-24 | 2007-09-19 | Azエレクトロニックマテリアルズ株式会社 | リソグラフィー用洗浄剤 |
JP2000193818A (ja) * | 1998-12-28 | 2000-07-14 | Canon Inc | 塗布方法および装置 |
KR100308422B1 (ko) * | 1999-04-15 | 2001-09-26 | 주식회사 동진쎄미켐 | 스핀-온-글라스 및 감광성 수지 제거용 씬너 조성물 |
KR100434485B1 (ko) * | 1999-10-08 | 2004-06-05 | 삼성전자주식회사 | 포토레지스트 스트립퍼 조성물 및 이를 이용한 포토레지스트 스트립 방법 |
KR20030011480A (ko) * | 2001-08-03 | 2003-02-11 | 주식회사 덕성 | 포토레지스트용 박리액 조성물 |
KR100474098B1 (ko) * | 2001-09-12 | 2005-03-07 | 주식회사 덕성 | 감광성수지 세정용 시너 조성물 |
KR100483846B1 (ko) * | 2002-10-15 | 2005-04-19 | 삼성전자주식회사 | 신너 조성물 및 이를 사용한 포토레지스트의 스트립핑 방법 |
US6682876B2 (en) * | 2001-12-14 | 2004-01-27 | Samsung Electronics Co., Ltd. | Thinner composition and method of stripping a photoresist using the same |
KR100926308B1 (ko) * | 2003-04-23 | 2009-11-12 | 삼성전자주식회사 | 세정 유닛, 이를 갖는 코팅 장치 및 방법 |
TWI276929B (en) * | 2003-12-16 | 2007-03-21 | Showa Denko Kk | Photosensitive composition remover |
TWI383271B (zh) * | 2004-03-03 | 2013-01-21 | Daicel Chem | 微影後之洗淨步驟用洗淨劑及沖洗液 |
KR101176101B1 (ko) * | 2004-06-18 | 2012-08-22 | 후지필름 가부시키가이샤 | 착색 감광성 수지 조성물, 착색 감광성 수지 조성물의 도포막, 감광성 수지 전사 재료, 감광성 수지층의 형성방법, 컬러필터, 컬러필터의 제조방법 및 액정표시장치 |
KR100669866B1 (ko) * | 2004-12-06 | 2007-01-16 | 삼성전자주식회사 | 포토레지스트 제거용 조성물, 이를 이용한 포토레지스트의 제거 방법 및 반도체 장치의 제조 방법 |
-
2006
- 2006-02-13 KR KR1020060013590A patent/KR20070081572A/ko not_active Application Discontinuation
-
2007
- 2007-01-24 TW TW096102706A patent/TW200732469A/zh unknown
- 2007-02-09 JP JP2007030969A patent/JP2007217689A/ja active Pending
- 2007-02-09 CN CN2007100080557A patent/CN101020869B/zh not_active Expired - Fee Related
- 2007-02-09 CN CN201010170571A patent/CN101824370A/zh active Pending
- 2007-02-13 US US11/674,390 patent/US20080039359A1/en not_active Abandoned
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110412837A (zh) * | 2018-04-28 | 2019-11-05 | 上海微电子装备(集团)股份有限公司 | 喷洒装置、显影系统和显影方法 |
Also Published As
Publication number | Publication date |
---|---|
US20080039359A1 (en) | 2008-02-14 |
CN101824370A (zh) | 2010-09-08 |
KR20070081572A (ko) | 2007-08-17 |
TW200732469A (en) | 2007-09-01 |
CN101020869B (zh) | 2010-11-24 |
JP2007217689A (ja) | 2007-08-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: SAMSUNG DISPLAY CO., LTD. Free format text: FORMER OWNER: SAMSUNG ELECTRONICS CO., LTD. Effective date: 20121107 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20121107 Address after: Gyeonggi Do, South Korea Patentee after: Samsung Display Co.,Ltd. Address before: Gyeonggi Do, South Korea Patentee before: Samsung Electronics Co.,Ltd. |
|
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20101124 Termination date: 20210209 |