CN100557428C - 偏振光膜检查装置及方法 - Google Patents

偏振光膜检查装置及方法 Download PDF

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Publication number
CN100557428C
CN100557428C CNB2006100033636A CN200610003363A CN100557428C CN 100557428 C CN100557428 C CN 100557428C CN B2006100033636 A CNB2006100033636 A CN B2006100033636A CN 200610003363 A CN200610003363 A CN 200610003363A CN 100557428 C CN100557428 C CN 100557428C
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CN
China
Prior art keywords
polarization film
carrier
film
polarization
evacuated panel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB2006100033636A
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English (en)
Chinese (zh)
Other versions
CN1841052A (zh
Inventor
张珉硕
金镇雨
金亨珍
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EUN BU TECHNOLOGY Co Ltd
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EUN BU TECHNOLOGY Co Ltd
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Publication of CN1841052A publication Critical patent/CN1841052A/zh
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Publication of CN100557428C publication Critical patent/CN100557428C/zh
Expired - Fee Related legal-status Critical Current
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/85Investigating moving fluids or granular solids
    • G01N21/8507Probe photometers, i.e. with optical measuring part dipped into fluid sample
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/005Testing of reflective surfaces, e.g. mirrors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/86Investigating moving sheets
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8851Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/30Polarising elements
    • G02B5/3025Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
CNB2006100033636A 2005-03-31 2006-01-26 偏振光膜检查装置及方法 Expired - Fee Related CN100557428C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020050027002 2005-03-31
KR1020050027002A KR100789659B1 (ko) 2005-03-31 2005-03-31 편광필름 검사장치 및 방법

Publications (2)

Publication Number Publication Date
CN1841052A CN1841052A (zh) 2006-10-04
CN100557428C true CN100557428C (zh) 2009-11-04

Family

ID=37030159

Family Applications (1)

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CNB2006100033636A Expired - Fee Related CN100557428C (zh) 2005-03-31 2006-01-26 偏振光膜检查装置及方法

Country Status (4)

Country Link
JP (1) JP4226608B2 (ja)
KR (1) KR100789659B1 (ja)
CN (1) CN100557428C (ja)
TW (1) TWI275836B (ja)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100853247B1 (ko) * 2006-12-08 2008-08-21 주식회사 에스에프에이 편광필름 제조장치 및 편광필름 제조방법
KR100903585B1 (ko) * 2007-07-13 2009-06-23 충북대학교 산학협력단 편광필름 검사장치의 진공척
KR100804033B1 (ko) * 2007-10-04 2008-02-18 주식회사 쓰리비 시스템 광학 필름 검사장치
KR100922616B1 (ko) 2007-10-24 2009-10-21 주식회사 아바코 필름 검사장치
KR100920221B1 (ko) * 2007-11-28 2009-10-05 주식회사 아바코 필름 검사장치
KR101052883B1 (ko) * 2009-02-10 2011-07-29 엘아이지에이디피 주식회사 편광판 이송장치 및 편광판 이송방법
KR101042885B1 (ko) * 2011-03-04 2011-06-20 오승훈 시트 필름 검사용 정렬장치
KR102025704B1 (ko) * 2012-09-14 2019-09-27 삼성디스플레이 주식회사 필름 검사 장치
KR101452214B1 (ko) * 2012-12-11 2014-10-22 주식회사 에스에프에이 패널 검사장치
CN104748856A (zh) * 2013-12-31 2015-07-01 致茂电子股份有限公司 光学检测装置
CN106353332B (zh) * 2015-07-15 2019-05-28 明眼有限公司 利用图案透光板的偏光膜检查装置
KR101677016B1 (ko) * 2015-07-17 2016-11-18 디아이티 주식회사 글래스 및 필름 혼용 표면검사장치
KR20180016757A (ko) * 2016-08-08 2018-02-20 동우 화인켐 주식회사 광학 필름의 결함 검사 방법 및 장치
KR20190036007A (ko) 2017-09-26 2019-04-04 삼성전자주식회사 그립 장치 및 이를 포함하는 기판 검사 시스템
CN108088857A (zh) * 2017-11-27 2018-05-29 江西合力泰科技有限公司 一种透光膜的检测方法
KR101996346B1 (ko) * 2018-11-22 2019-07-03 (주)제이티에스 슬리터 일체형 분리막 외관 검사장치 및 이를 이용하는 분리막 검사시스템
JP2023031371A (ja) * 2021-08-25 2023-03-09 日東電工株式会社 光透過性積層体の検査方法および検査装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2677981B2 (ja) * 1996-01-26 1997-11-17 株式会社日立製作所 露光装置
JPH09329774A (ja) * 1996-06-11 1997-12-22 Hitachi Ltd 液晶表示基板外観検査装置
JP3977503B2 (ja) 1998-02-05 2007-09-19 住友化学株式会社 フィルム検査方法およびそれを用いたフィルム検査装置
KR100799208B1 (ko) * 2002-02-26 2008-01-29 삼성테크윈 주식회사 반도체 팩키지의 검사 및, 분류 방법과 장치
KR100420244B1 (ko) * 2002-05-11 2004-03-02 주식회사 이오테크닉스 필름 마커 시스템 및 이의 제어 방법
KR100625689B1 (ko) * 2003-12-12 2006-09-20 에버테크노 주식회사 편광필름 검사장치

Also Published As

Publication number Publication date
JP4226608B2 (ja) 2009-02-18
KR100789659B1 (ko) 2007-12-31
TWI275836B (en) 2007-03-11
TW200634357A (en) 2006-10-01
CN1841052A (zh) 2006-10-04
KR20060104666A (ko) 2006-10-09
JP2006284559A (ja) 2006-10-19

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