CN100554871C - 测量光盘厚度的方法 - Google Patents
测量光盘厚度的方法 Download PDFInfo
- Publication number
- CN100554871C CN100554871C CNB03824795XA CN03824795A CN100554871C CN 100554871 C CN100554871 C CN 100554871C CN B03824795X A CNB03824795X A CN B03824795XA CN 03824795 A CN03824795 A CN 03824795A CN 100554871 C CN100554871 C CN 100554871C
- Authority
- CN
- China
- Prior art keywords
- wavelength
- refractive index
- thickness
- spectrum
- function
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0675—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating using interferometry
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/002—Recording, reproducing or erasing systems characterised by the shape or form of the carrier
- G11B7/0037—Recording, reproducing or erasing systems characterised by the shape or form of the carrier with discs
- G11B7/00375—Recording, reproducing or erasing systems characterised by the shape or form of the carrier with discs arrangements for detection of physical defects, e.g. of recording layer
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
- G11B7/268—Post-production operations, e.g. initialising phase-change recording layers, checking for defects
Abstract
Description
Claims (8)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020030040312A KR100947228B1 (ko) | 2003-06-20 | 2003-06-20 | 광디스크의 두께 측정 방법 |
KR1020030040312 | 2003-06-20 | ||
PCT/KR2003/001234 WO2004113829A1 (en) | 2003-06-20 | 2003-06-24 | Method for measuring thickness of an optical disc |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2007101547044A Division CN101131316B (zh) | 2003-06-20 | 2003-06-24 | 用于测量光盘厚度的系统、仪器、设备以及机器可读媒介 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1695039A CN1695039A (zh) | 2005-11-09 |
CN100554871C true CN100554871C (zh) | 2009-10-28 |
Family
ID=36123539
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB03824795XA Expired - Lifetime CN100554871C (zh) | 2003-06-20 | 2003-06-24 | 测量光盘厚度的方法 |
CN2007101547044A Expired - Fee Related CN101131316B (zh) | 2003-06-20 | 2003-06-24 | 用于测量光盘厚度的系统、仪器、设备以及机器可读媒介 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2007101547044A Expired - Fee Related CN101131316B (zh) | 2003-06-20 | 2003-06-24 | 用于测量光盘厚度的系统、仪器、设备以及机器可读媒介 |
Country Status (12)
Country | Link |
---|---|
US (2) | US7145662B2 (zh) |
EP (2) | EP1873482A3 (zh) |
JP (2) | JP2007518964A (zh) |
KR (1) | KR100947228B1 (zh) |
CN (2) | CN100554871C (zh) |
AU (1) | AU2003244248B2 (zh) |
BR (1) | BR0311411A (zh) |
CA (1) | CA2490094C (zh) |
MX (1) | MXPA04012069A (zh) |
RU (1) | RU2354930C2 (zh) |
TW (1) | TWI284317B (zh) |
WO (1) | WO2004113829A1 (zh) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100393522B1 (en) * | 2003-01-11 | 2003-08-02 | Ellipso Technology Co Ltd | Device and method for measuring film thickness, making use of improved fast fourier transformation |
KR100947228B1 (ko) * | 2003-06-20 | 2010-03-11 | 엘지전자 주식회사 | 광디스크의 두께 측정 방법 |
JP2006313077A (ja) * | 2005-05-06 | 2006-11-16 | Ricoh Co Ltd | 光学積層体検査方法,光学積層体製造方法および光学積層体検査装置ならびに光学積層体製造装置 |
GB0600447D0 (en) * | 2006-01-11 | 2006-02-15 | Scalar Technologies Ltd | Disc Cover Layer Measurement System |
JP2010002328A (ja) * | 2008-06-20 | 2010-01-07 | Otsuka Denshi Co Ltd | 膜厚測定装置 |
JP2010050276A (ja) * | 2008-08-21 | 2010-03-04 | Tokyo Electron Ltd | 基板処理装置及び光学定数算出方法並びにその方法を実行するプログラムを記憶した記録媒体 |
JP2012504752A (ja) * | 2008-10-01 | 2012-02-23 | ピーター ヴォルターズ ゲーエムベーハー | 円盤状加工物の厚さを測定する方法 |
JP5395417B2 (ja) | 2008-12-09 | 2014-01-22 | テイ・エス テック株式会社 | 測定方法および測定装置 |
JP5521607B2 (ja) * | 2009-03-13 | 2014-06-18 | 株式会社リコー | 膜厚測定方法、膜厚測定装置および該膜厚測定装置を有する画像形成装置、並びに光導電性感光体の製造方法および光導電性感光体 |
KR101653854B1 (ko) * | 2009-10-13 | 2016-09-02 | 하마마츠 포토닉스 가부시키가이샤 | 막두께 측정 장치 및 막두께 측정 방법 |
JP4911437B2 (ja) * | 2009-10-30 | 2012-04-04 | 横河電機株式会社 | 多層膜の膜厚測定装置 |
DE102010006237A1 (de) | 2010-01-26 | 2011-07-28 | Siemens Aktiengesellschaft, 80333 | Verfahren und Anordnung zum Messen der Dicke einer Schicht |
CN102401634A (zh) * | 2010-09-14 | 2012-04-04 | 凌阳科技股份有限公司 | 光盘片的厚度检测方法与装置 |
JP2012208050A (ja) * | 2011-03-30 | 2012-10-25 | Tokyo Electron Ltd | 測定装置及びプラズマ処理装置 |
US9714825B2 (en) * | 2011-04-08 | 2017-07-25 | Rudolph Technologies, Inc. | Wafer shape thickness and trench measurement |
JP2013032981A (ja) * | 2011-08-02 | 2013-02-14 | Otsuka Denshi Co Ltd | 膜厚測定装置 |
KR102397265B1 (ko) * | 2012-08-03 | 2022-05-12 | 스트리커 코포레이션 | 로봇 수술을 위한 시스템 및 방법 |
CN103344206A (zh) * | 2013-06-27 | 2013-10-09 | 开平市盈光机电科技有限公司 | 一种用于测量光盘盘基厚度的检测计 |
DE102014209032A1 (de) * | 2014-01-27 | 2015-07-30 | Robert Bosch Gmbh | Werkzeugmaschinenvorrichtung |
CN106018342A (zh) * | 2016-05-16 | 2016-10-12 | 云南瑞博检测技术股份有限公司 | 一种测量薄膜折射率的方法 |
US10383631B2 (en) * | 2016-08-04 | 2019-08-20 | Covidien Lp | Variable speed control of powered surgical device |
CN112729135B (zh) * | 2020-12-21 | 2022-04-26 | 华中科技大学 | 一种具有主动光学防抖功能的面阵扫频测距/厚的装置和方法 |
CN112629421B (zh) * | 2020-12-31 | 2022-09-23 | 武汉颐光科技有限公司 | 一种基于快速傅里叶变换的薄膜厚度测量方法 |
Family Cites Families (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6271804A (ja) * | 1985-09-26 | 1987-04-02 | Nippon Kogaku Kk <Nikon> | 膜厚測定装置 |
US4905170A (en) * | 1987-11-12 | 1990-02-27 | Forouhi Abdul R | Method and apparatus of determining optical constants of amorphous semiconductors and dielectrics |
US5227861A (en) * | 1989-09-25 | 1993-07-13 | Mitsubishi Denki Kabushiki Kaisha | Apparatus for and method of evaluating multilayer thin film |
US5291269A (en) * | 1991-12-06 | 1994-03-01 | Hughes Aircraft Company | Apparatus and method for performing thin film layer thickness metrology on a thin film layer having shape deformations and local slope variations |
US5386119A (en) * | 1993-03-25 | 1995-01-31 | Hughes Aircraft Company | Apparatus and method for thick wafer measurement |
JP2840181B2 (ja) * | 1993-08-20 | 1998-12-24 | 大日本スクリーン製造株式会社 | 多層膜試料の膜厚測定方法 |
JP2866559B2 (ja) * | 1993-09-20 | 1999-03-08 | 大日本スクリーン製造株式会社 | 膜厚測定方法 |
JP3732894B2 (ja) * | 1996-06-26 | 2006-01-11 | 松下電器産業株式会社 | 多層薄膜の膜厚測定方法と、その方法を用いた光学情報記録媒体の製造方法及び光学情報記録媒体の製造装置 |
CN1049287C (zh) * | 1998-01-20 | 2000-02-09 | 山东大学 | 实时测定晶体生长固/液界面和边界层结构的方法和结晶器 |
US6236459B1 (en) * | 1998-11-05 | 2001-05-22 | University Of Miami | Thin film measuring device and method |
US6172756B1 (en) | 1998-12-11 | 2001-01-09 | Filmetrics, Inc. | Rapid and accurate end point detection in a noisy environment |
JP2000249520A (ja) * | 1999-03-03 | 2000-09-14 | Asahi Chem Ind Co Ltd | 多層薄膜の膜厚測定方法 |
US6392756B1 (en) * | 1999-06-18 | 2002-05-21 | N&K Technology, Inc. | Method and apparatus for optically determining physical parameters of thin films deposited on a complex substrate |
JP2001227916A (ja) * | 2000-02-17 | 2001-08-24 | Murata Mfg Co Ltd | 膜厚測定方法および干渉膜厚測定装置 |
US6826561B2 (en) * | 2000-05-22 | 2004-11-30 | Broadcom Corporation | Method and apparatus for performing a binary search on an expanded tree |
JP2002277220A (ja) * | 2001-03-19 | 2002-09-25 | Hitachi Ltd | 膜厚計測のための計測点決定方法およびそれを用いた薄膜デバイスの製造方法並びに薄膜デバイスの製造装置 |
JP3864719B2 (ja) * | 2001-03-29 | 2007-01-10 | 三菱電機株式会社 | 膜厚測定方法及び膜厚測定装置 |
JP2002367235A (ja) * | 2001-06-08 | 2002-12-20 | Hitachi Ltd | 多層構造ディスクの製造方法と製造装置 |
JP4242767B2 (ja) * | 2001-09-21 | 2009-03-25 | ケイマック | 2次元型検出器を用いた薄膜特性測定装置及びその測定方法 |
DE10204943B4 (de) * | 2002-02-07 | 2005-04-21 | Leica Microsystems Jena Gmbh | Verfahren zur Bestimmung von Schichtdicken |
DE10232746A1 (de) * | 2002-07-19 | 2004-02-05 | Leica Microsystems Semiconductor Gmbh | Verfahren zur Automatischen Ermittlung optischer Parameter eines Schichtstapels |
KR100393522B1 (en) * | 2003-01-11 | 2003-08-02 | Ellipso Technology Co Ltd | Device and method for measuring film thickness, making use of improved fast fourier transformation |
KR100947228B1 (ko) * | 2003-06-20 | 2010-03-11 | 엘지전자 주식회사 | 광디스크의 두께 측정 방법 |
US7821655B2 (en) * | 2004-02-09 | 2010-10-26 | Axcelis Technologies, Inc. | In-situ absolute measurement process and apparatus for film thickness, film removal rate, and removal endpoint prediction |
-
2003
- 2003-06-20 KR KR1020030040312A patent/KR100947228B1/ko not_active IP Right Cessation
- 2003-06-24 JP JP2005500932A patent/JP2007518964A/ja active Pending
- 2003-06-24 CA CA2490094A patent/CA2490094C/en not_active Expired - Fee Related
- 2003-06-24 BR BR0311411-2A patent/BR0311411A/pt not_active Application Discontinuation
- 2003-06-24 CN CNB03824795XA patent/CN100554871C/zh not_active Expired - Lifetime
- 2003-06-24 EP EP07018404A patent/EP1873482A3/en not_active Ceased
- 2003-06-24 MX MXPA04012069A patent/MXPA04012069A/es active IP Right Grant
- 2003-06-24 AU AU2003244248A patent/AU2003244248B2/en not_active Expired
- 2003-06-24 EP EP03817216.9A patent/EP1636541B1/en not_active Expired - Lifetime
- 2003-06-24 RU RU2004125863/28A patent/RU2354930C2/ru active
- 2003-06-24 CN CN2007101547044A patent/CN101131316B/zh not_active Expired - Fee Related
- 2003-06-24 WO PCT/KR2003/001234 patent/WO2004113829A1/en active Application Filing
- 2003-08-05 US US10/633,639 patent/US7145662B2/en not_active Expired - Lifetime
- 2003-08-08 TW TW092121817A patent/TWI284317B/zh not_active IP Right Cessation
-
2006
- 2006-09-12 US US11/519,084 patent/US7248372B2/en active Active
-
2007
- 2007-09-04 JP JP2007228949A patent/JP2008039789A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
CA2490094A1 (en) | 2004-12-20 |
JP2007518964A (ja) | 2007-07-12 |
EP1873482A3 (en) | 2008-04-23 |
AU2003244248A1 (en) | 2005-01-04 |
WO2004113829A1 (en) | 2004-12-29 |
US7248372B2 (en) | 2007-07-24 |
EP1636541B1 (en) | 2013-12-04 |
KR100947228B1 (ko) | 2010-03-11 |
TW200501156A (en) | 2005-01-01 |
JP2008039789A (ja) | 2008-02-21 |
CA2490094C (en) | 2010-11-23 |
EP1636541A1 (en) | 2006-03-22 |
CN1695039A (zh) | 2005-11-09 |
CN101131316A (zh) | 2008-02-27 |
RU2354930C2 (ru) | 2009-05-10 |
US20070008549A1 (en) | 2007-01-11 |
CN101131316B (zh) | 2012-05-02 |
US20040257583A1 (en) | 2004-12-23 |
EP1873482A2 (en) | 2008-01-02 |
KR20040110839A (ko) | 2004-12-31 |
TWI284317B (en) | 2007-07-21 |
AU2003244248A2 (en) | 2005-01-04 |
MXPA04012069A (es) | 2005-08-16 |
RU2004125863A (ru) | 2006-06-10 |
US7145662B2 (en) | 2006-12-05 |
BR0311411A (pt) | 2005-03-15 |
AU2003244248B2 (en) | 2009-06-11 |
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EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20051109 Assignee: CHINA HUALU GROUP Co.,Ltd. Assignor: Blue light United Co.,Ltd. Contract record no.: 2015990000016 Denomination of invention: Method for measuring thickness of an optical disc Granted publication date: 20091028 License type: Common License Record date: 20150108 |
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EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20051109 Assignee: Shanghai Epic Music Co.,Ltd. Assignor: Blue light United Co.,Ltd. Contract record no.: 2016990000555 Denomination of invention: Method for measuring thickness of an optical disc Granted publication date: 20091028 License type: Common License Record date: 20161228 |
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