JP2015514977A - 光センサ - Google Patents
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- 230000003287 optical effect Effects 0.000 title claims abstract description 291
- 238000001514 detection method Methods 0.000 claims abstract description 110
- 238000001228 spectrum Methods 0.000 claims abstract description 84
- 238000012546 transfer Methods 0.000 claims abstract description 28
- 230000000737 periodic effect Effects 0.000 claims abstract description 27
- 230000001133 acceleration Effects 0.000 claims description 105
- 238000000034 method Methods 0.000 claims description 36
- 238000005259 measurement Methods 0.000 claims description 35
- 239000000523 sample Substances 0.000 claims description 32
- 238000012360 testing method Methods 0.000 claims description 26
- 230000008859 change Effects 0.000 claims description 22
- 239000000463 material Substances 0.000 claims description 21
- 239000013307 optical fiber Substances 0.000 claims description 15
- 230000004044 response Effects 0.000 claims description 11
- 239000006185 dispersion Substances 0.000 claims description 7
- 239000000835 fiber Substances 0.000 claims description 7
- 230000033001 locomotion Effects 0.000 claims description 6
- 238000009795 derivation Methods 0.000 claims 1
- 238000009529 body temperature measurement Methods 0.000 description 10
- 239000012528 membrane Substances 0.000 description 10
- 229910052594 sapphire Inorganic materials 0.000 description 10
- 239000010980 sapphire Substances 0.000 description 10
- 239000000758 substrate Substances 0.000 description 7
- 238000005314 correlation function Methods 0.000 description 6
- 238000011088 calibration curve Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 238000006073 displacement reaction Methods 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 238000004458 analytical method Methods 0.000 description 4
- 238000009530 blood pressure measurement Methods 0.000 description 4
- 238000004364 calculation method Methods 0.000 description 3
- 238000012937 correction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000001914 filtration Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 230000002452 interceptive effect Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000002310 reflectometry Methods 0.000 description 3
- 230000003595 spectral effect Effects 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000004422 calculation algorithm Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 230000009977 dual effect Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 239000011343 solid material Substances 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 230000002277 temperature effect Effects 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000005305 interferometry Methods 0.000 description 1
- 230000009191 jumping Effects 0.000 description 1
- 238000007620 mathematical function Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000010606 normalization Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
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-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/353—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
- G01D5/35306—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement
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- G—PHYSICS
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- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/353—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
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- G—PHYSICS
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- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
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- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/353—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
- G01D5/35306—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement
- G01D5/35309—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer
- G01D5/35312—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer using a Fabry Perot
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- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/353—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
- G01D5/35306—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement
- G01D5/35332—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using other interferometers
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- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
- G01K11/32—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in transmittance, scattering or luminescence in optical fibres
- G01K11/3206—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in transmittance, scattering or luminescence in optical fibres at discrete locations in the fibre, e.g. using Bragg scattering
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0092—Pressure sensor associated with other sensors, e.g. for measuring acceleration or temperature
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
- G01L9/0077—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light
- G01L9/0079—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light with Fabry-Perot arrangements
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- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P1/00—Details of instruments
- G01P1/006—Details of instruments used for thermal compensation
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- G—PHYSICS
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- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/03—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses by using non-electrical means
- G01P15/032—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses by using non-electrical means by measuring the displacement of a movable inertial mass
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- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
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- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/093—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by photoelectric pick-up
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Abstract
Description
Claims (39)
- それぞれが光路差を有する1つまたは複数の感知干渉素子と、
前記1つまたは複数の感知干渉素子にプローブ光を送信するように構成された光源と、
前記1つまたは複数の感知干渉素子から受信したプローブ光における干渉スペクトルを検出するように構成されたスペクトルエンジンと、
前記干渉スペクトルから1つまたは複数の粗光路差信号を生成するように構成された第1検出機能部であって、前記1つまたは複数の粗光路差信号が、前記1つまたは複数の感知干渉素子それぞれの前記光路差に対応している、第1検出機能部と、
前記干渉スペクトル及び対応する前記1つまたは複数の粗光路差信号から、1つまたは複数の精緻光路差信号を生成するように構成された第2検出機能部であって、前記1つまたは複数の精緻光路差信号が、前記1つまたは複数の感知干渉素子それぞれの前記光路差に対応している、第2検出機能部と、を備える光センサ。 - 前記第1検出機能部は、
前記干渉スペクトルから光路差関数を導出するとともに、
前記光路差関数における1つまたは複数のピークを探し出すように構成されており、前記1つまたは複数のピークの各々は、前記1つまたは複数の感知干渉素子の1つに対応しており、
さらに前記第1検出機能部は、対応する前記ピークから前記1つまたは複数の粗光路差信号を生成するように構成されている、請求項1に記載の光センサ。 - 前記光路差関数は、前記干渉スペクトルから導出され、その導出に、離散フーリエ変換、及び、前記干渉スペクトルの相互相関の包絡線、のうちの少なくとも1つが用いられる、請求項2に記載の光センサ。
- 前記第2検出機能部は、1つまたは複数の周期伝達関数からなる少なくとも1つの組と前記干渉スペクトルとの相互相関を用いて、前記1つまたは複数の精緻光路差信号を生成するように構成されており、前記周期伝達関数の各組は、前記1つまたは複数の感知干渉素子のうちから選択された1つの感知干渉素子に対する精緻光路差信号を生成するように選択される、請求項1〜3のいずれか1つに記載の光センサ。
- 前記第2検出機能部は、各感知干渉素子に対する粗光路差信号に基づいて、前記1つまたは複数の周期伝達関数の組を選択するように構成されている、請求項4の光センサ。
- 前記第2検出機能部は、前記1つまたは複数の感知干渉素子うち、対応する一つの感知干渉素子のみの光路差を含む光路差範囲に対応する周期伝達関数の組を選択するように構成されている、請求項4又は5に記載の光センサ。
- 前記第2検出機能部は、周期伝達関数の各組に対する前記相互相関におけるピークを探し出すとともに、前記相互相関における当該ピークの位置に基づいて前記1つまたは複数の精緻光路差信号を生成するように構成されている、請求項4、5、又は6に記載の光センサ。
- 前記第2検出機能部は、周期伝達関数の各組を選択するに際し、当該組を用いた相互相関が一つのピークのみを含むように選択する、請求項4〜7のいずれか1つに記載の光センサ。
- 前記粗光路差信号のうち少なくとも1つに可変オフセットを適用し、対応する感知干渉素子における分散に起因する粗光路差信号及び精緻光路差信号のそれぞれの変化率を補償するように構成されている、請求項4〜8のいずれか1つに記載の光センサ。
- 少なくとも二つの感知干渉素子に対応する、少なくとも二つの粗光路差信号及び少なくとも二つの精緻光路差信号を生成するように構成されている、請求項1〜9のいずれか1つに記載の光圧力センサ。
- 各感知干渉素子毎に、当該感知干渉素子での測定量を示す信号を出力するように構成されている、請求項1〜10のいずれか1つに記載の光圧力センサ。
- 測定量を示す前記信号には、温度、圧力及び加速度から選択される物理パラメータを示す少なくとも1つの信号が含まれている、クレーム11に記載の光センサ。
- 測定量を示す前記信号には、圧力を示す信号及び温度を示す信号が含まれている、請求項12に記載の光センサ。
- 更に、前記精緻光路差信号のうちの一つである第1の信号を用いて、前記精緻光路差信号のうちの一つである第2の信号を補償し、その結果である、物理パラメータを示す補償信号を出力するように構成されている、請求項10に記載の光センサ。
- 更に、前記精緻光路差信号のうちの一つである第1の信号と、前記精緻光路差信号のうちの一つである第2の信号とを組み合わせて、その結果である、測定量を示す信号を導出して出力する、請求項10に記載の光センサ。
- センサヘッドを更に備える構成において、前記1つまたは複数の干渉素子は、それぞれ当該センサヘッドに形成された光キャビティである、請求項1〜15のいずれか1つに記載の光センサ。
- 前記1つまたは複数の干渉素子は、それぞれ前記センサヘッドに形成されているファブリ・ペロー共振器である、請求項16に記載の光センサ。
- 前記センサヘッドは、圧力感知光キャビティを更に備えており、当該圧力感知光キャビティは、前記センサヘッドに形成された物理キャビティである、請求項16又は17に記載の光圧力センサ。
- 前記センサヘッドにおける圧力を示す信号を出力するように構成された第3検出機能部を更に備える、請求項18に記載の光センサ。
- 前記センサヘッドに形成された加速度感知光キャビティと、前記センサヘッドにおける加速度を示す信号を出力するように構成された第3検出機能部とを更に備える、請求項16又は17に記載の光センサ。
- 前記精緻光路差信号は、前記センサヘッドにおける温度を示すものであり、当該光センサは、当該温度に対して前記加速度を示す信号を補償するように構成されている、請求項20に記載の光センサ。
- 前記光源は、ブロードバンドプローブ光を前記1つまたは複数の感知干渉素子へ送信するように構成されている、請求項1〜21に記載の光センサ。
- 1つまたは複数の感知干渉素子それぞれの光路差を検出する方法であって、
前記1つまたは複数の感知干渉素子にプローブ光を送信し、
前記1つまたは複数の感知干渉素子から受信したプローブ光における干渉スペクトルを検出し、
前記干渉スペクトルから、前記1つまたは複数の感知干渉素子のそれぞれの前記光路差に対応する、1つまたは複数の粗光路差信号を生成し、
前記干渉スペクトル及び対応する前記粗光路差信号から、前記1つまたは複数の感知干渉素子のそれぞれの前記光路差に対応する、1つまたは複数の精緻光路差信号を生成する、ことを含む方法。 - 前記1つまたは複数の精緻光路差信号は、1つまたは複数の周期伝達関数から成る少なくとも1つの組と前記干渉スペクトルとの相互相関を用いて生成されたものであり、周期伝達関数の各組は、前記1つまたは複数の感知干渉素子のうち、選択された1つの感知干渉素子に対して前記精緻光路差信号を生成するように選択される、請求項23に記載の方法。
- センサヘッドと加速度検出機能部とを備える加速度計であって、
前記センサヘッドは、加速度に反応する試験質量と、加速度に反応する前記試験質量の動きに応答する第1光路差を有する加速度感知干渉素子と、を備えており、加速度に対する前記試験質量の反応は、前記センサヘッドにおける温度に影響されるものであり、前記センサヘッドは、当該センサヘッドにおける温度に応答するが加速度には影響されない少なくとも1つの温度感知素子を更に備えており、
前記加速度検出機能部は、前記第1光路差から、前記センサヘッドでの加速度を検出するとともに、対応する加速度出力を提供するように構成されている、加速度計。 - 前記加速度検出機能部は、前記温度感知素子の検出に基づく前記センサヘッドにおける温度に応じて、検出された前記加速度を補償するように構成されている、請求項25に記載の加速度計。
- 前記温度感知素子から、前記センサヘッドにおける温度を検出するとともに、対応する温度出力を提供するように構成されている、請求項25に記載の加速度計。
- 前記少なくとも1つの温度感知素子は、温度感知干渉素子であり、この温度感知干渉素子は、前記センサヘッドにおける温度に応答するが加速度には影響されない第2光路差を有している、請求項25に記載の加速度計。
- 前記加速度検出機能部は、前記第2光路差に基づいて、前記センサヘッドにおける温度に応じて、検出された加速度を補償するように構成されている、請求項28に記載の加速度計。
- 前記第2光路差から、前記センサヘッドにおける温度を検出し、対応する温度出力を提供するように構成されている、請求項28に記載の加速度計。
- 前記温度感知素子は、前記センサヘッドに形成されているファブリ・ペロー共振器を備えており、このファブリ・ペロー共振器は前記センサヘッドの材料を含んでいる、請求項25〜30のいずれか1つに記載の加速度計。
- 前記温度感知素子は、ファイバーブラッググレーティングを備える、請求項25〜27のいずれか1つに記載の加速度計。
- 前記センサヘッドは、光ファイバを介して前記加速度検出機能部に結合されており、前記ファイバーブラッググレーティングは前記光ファイバに刻まれている、請求項32に記載の加速度計。
- 前記ファイバーブラッググレーティングは、少なくとも部分的に前記センサヘッド内に位置する、請求項33に記載の加速度計。
- 前記第1感知素子は、前記センサヘッドに形成されているファブリ・ペロー共振器であり、前記第1感知素子は、前記センサヘッドにおける物理キャビティを備えている、請求項25〜34のいずれか1つに記載の加速度計。
- 前記加速度感知干渉素子及び前記温度感知素子は、空間的に重複していない、請求項25〜35のいずれか1つに記載の加速度計。
- 前記センサヘッドは、前記第1光キャビティの境界を提供するダイヤフラムを備えており、前記試験質量は加速度に反応して前記ダイヤフラムを撓ませるように構成されている、請求項25〜36のいずれか1つに記載の加速度計。
- 前記試験質量は、前記ダイヤフラムと一体的に形成されているか、前記ダイヤフラムの内部に含まれている、請求項36に記載の加速度計。
- 加速度の前記検出に対して、請求項1〜22に基づく光センサを用いて温度に応じた補償がなさる加速度計であって、前記少なくとも1つの温度感知素子は、前記1つまたは複数の感知干渉素子により提供され、前記加速度出力に対して、前記少なくとも1つの温度感知素子からの前記精緻光路差信号を用いて、前記センサヘッドにおける温度に応じた補償がなされる、請求項25〜38のいずれか1つに記載の加速度計。
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