CN100552401C - 用于压力测量的系统和方法 - Google Patents

用于压力测量的系统和方法 Download PDF

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Publication number
CN100552401C
CN100552401C CNB2005800286968A CN200580028696A CN100552401C CN 100552401 C CN100552401 C CN 100552401C CN B2005800286968 A CNB2005800286968 A CN B2005800286968A CN 200580028696 A CN200580028696 A CN 200580028696A CN 100552401 C CN100552401 C CN 100552401C
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CN
China
Prior art keywords
circuit board
board housing
housing
diameter portion
pressure measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB2005800286968A
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English (en)
Chinese (zh)
Other versions
CN101040176A (zh
Inventor
金子义和
岛田修二
柳泽育弘
和田义则
W·S·柯什
W·J·洛克西姆
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ashcroft Nagano Inc
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Ashcroft Nagano Inc
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Publication date
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Publication of CN101040176A publication Critical patent/CN101040176A/zh
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Publication of CN100552401C publication Critical patent/CN100552401C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14Housings
    • G01L19/148Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14Housings
    • G01L19/142Multiple part housings
    • G01L19/143Two part housings
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0055Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
CNB2005800286968A 2004-08-27 2005-08-25 用于压力测量的系统和方法 Expired - Fee Related CN100552401C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/928,024 US7270010B2 (en) 2004-08-27 2004-08-27 System and method for pressure measurement
US10/928,024 2004-08-27

Publications (2)

Publication Number Publication Date
CN101040176A CN101040176A (zh) 2007-09-19
CN100552401C true CN100552401C (zh) 2009-10-21

Family

ID=35427553

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB2005800286968A Expired - Fee Related CN100552401C (zh) 2004-08-27 2005-08-25 用于压力测量的系统和方法

Country Status (6)

Country Link
US (1) US7270010B2 (enExample)
EP (1) EP1800098B1 (enExample)
JP (1) JP5091676B2 (enExample)
CN (1) CN100552401C (enExample)
CA (1) CA2576853C (enExample)
WO (1) WO2006026376A1 (enExample)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4203678B2 (ja) * 2006-12-07 2009-01-07 Smc株式会社 圧力スイッチ
JP4403559B2 (ja) * 2006-12-07 2010-01-27 Smc株式会社 圧力スイッチ
US7779701B2 (en) * 2008-06-02 2010-08-24 Sensata Technologies, Inc. Pressure sensor apparatus
JP5395412B2 (ja) * 2008-11-25 2014-01-22 パナソニック株式会社 インタポーザ
US9354132B2 (en) * 2009-02-12 2016-05-31 Continental Automotive Systems, Inc. Jointless pressure sensor port
US8156816B2 (en) * 2010-05-27 2012-04-17 Sensata Technologies, Inc. Pressure sensor
CN102323836A (zh) * 2011-05-10 2012-01-18 贵州航天电器股份有限公司 一种温度控制组件
US8459125B2 (en) * 2011-08-01 2013-06-11 Honeywell International Inc. Pressure sensor assembly
DE102012012527B4 (de) * 2012-06-26 2015-05-21 Krohne Analytics Gmbh Messvorrichtung zum Bestimmen einer Prozessgröße
US9746390B2 (en) * 2015-02-26 2017-08-29 Sensata Technologies, Inc. Microfused silicon strain gauge (MSG) pressure sensor package
CN107290099B (zh) 2016-04-11 2021-06-08 森萨塔科技公司 压力传感器、用于压力传感器的插塞件和制造插塞件的方法
EP3236226B1 (en) 2016-04-20 2019-07-24 Sensata Technologies, Inc. Method of manufacturing a pressure sensor
US10545064B2 (en) 2017-05-04 2020-01-28 Sensata Technologies, Inc. Integrated pressure and temperature sensor
US10323998B2 (en) * 2017-06-30 2019-06-18 Sensata Technologies, Inc. Fluid pressure sensor
US10724907B2 (en) 2017-07-12 2020-07-28 Sensata Technologies, Inc. Pressure sensor element with glass barrier material configured for increased capacitive response
US10557770B2 (en) 2017-09-14 2020-02-11 Sensata Technologies, Inc. Pressure sensor with improved strain gauge
JP6793624B2 (ja) * 2017-11-13 2020-12-02 株式会社鷺宮製作所 圧力センサ
CN108168766B (zh) * 2018-01-09 2020-03-27 武汉飞恩微电子有限公司 一种重载压力传感器及其制造方法
DE102019119426A1 (de) * 2019-07-17 2021-01-21 Endress+Hauser SE+Co. KG Feldgerät der Automatisierungstechnik
CN112556919A (zh) * 2020-12-10 2021-03-26 龙微科技无锡有限公司 一种新型耐腐蚀压力传感器模块
DE102021122566A1 (de) * 2021-08-31 2023-03-02 Endress+Hauser SE+Co. KG Feldgerät der Automatisierungstechnik
EP4469769A2 (en) * 2022-03-17 2024-12-04 Sensata Technologies, Inc. Brake pedal with force sensor and membranes

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0995979A1 (de) * 1998-10-23 2000-04-26 Endress + Hauser GmbH + Co. Druckaufnehmer
CN2400795Y (zh) * 1999-12-23 2000-10-11 王洪业 离子束溅射沉积薄膜压力传感器
EP1211496A2 (en) * 2000-11-30 2002-06-05 Nagano Keiki Co., Ltd. Pressure sensor
EP1382953A2 (en) * 2002-07-10 2004-01-21 Texas Instruments Incorporated Hermetic pressure transducer

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0650271B2 (ja) * 1986-03-07 1994-06-29 太平洋工業株式会社 圧力検知装置
US5174014A (en) * 1990-07-27 1992-12-29 Data Instruments, Inc. Method of manufacturing pressure transducers
IT1257206B (it) 1992-05-29 1996-01-10 Fascia elastica di molleggio per sedili di autoveicoli.
JPH0821775A (ja) * 1994-07-08 1996-01-23 Fuji Koki Seisakusho:Kk 圧力センサ
JPH08105808A (ja) * 1994-10-05 1996-04-23 Mitsubishi Electric Corp 圧力センサ
JP3440629B2 (ja) 1995-04-25 2003-08-25 松下電工株式会社 圧力センサ
JPH10185735A (ja) * 1996-12-27 1998-07-14 Nagano Keiki Co Ltd 圧力センサモジュール
US5880372A (en) * 1997-01-10 1999-03-09 Integrated Sensor Solutions Media compatible pressure sensor device utilizing self-aligned components which fit together without the need for adhesives
US6089106A (en) * 1998-09-04 2000-07-18 Breed Automotive Technology, Inc. Force sensor assembly
JP2000155062A (ja) * 1998-11-19 2000-06-06 Nippon Seiki Co Ltd 圧力検出器
DE19916087A1 (de) * 1999-04-09 2000-10-26 Lucas Ind Plc Anordnung zur Messung eines Fluiddrucks
US6453747B1 (en) * 2000-01-12 2002-09-24 Peter A. Weise Hermetic pressure transducer
JP2001208633A (ja) 2000-01-27 2001-08-03 Matsushita Electric Ind Co Ltd 圧力センサ
DE10004408C1 (de) * 2000-02-02 2001-06-21 Paragon Sensors & Systems Ag Mikrofonmodul
US6769308B1 (en) * 2000-09-22 2004-08-03 Delphi Technologies, Inc. Low-cost stainless steel pressure sensor assembly for a pneumatic valve
JP3556165B2 (ja) * 2000-11-30 2004-08-18 長野計器株式会社 圧力センサ
JP4356238B2 (ja) * 2000-12-25 2009-11-04 株式会社デンソー 圧力センサ
US6907789B2 (en) * 2002-05-06 2005-06-21 Honeywell International Inc. Sensor package
US6722205B2 (en) * 2002-06-24 2004-04-20 Honeywell International, Inc. Unitary pressure sensor housing and assembly
US6782758B2 (en) * 2002-07-10 2004-08-31 Texas Instruments Incorporated Hermetic pressure transducer
US6823718B2 (en) * 2002-10-28 2004-11-30 Pti Technologies, Inc. Single-body multiple sensing device
US6742395B1 (en) * 2002-12-20 2004-06-01 Texas Instruments Incorporated Hermetic pressure transducer
US6866545B2 (en) * 2003-03-10 2005-03-15 Control Products, Inc., (Us) Electrical cordset with integral signal conditioning circuitry
US6997059B2 (en) * 2003-10-07 2006-02-14 Cts Corporation Pressure sensor
JP4301048B2 (ja) * 2004-03-19 2009-07-22 株式会社デンソー 圧力センサおよびその製造方法
US7131334B2 (en) * 2004-04-19 2006-11-07 Celerity, Inc. Pressure sensor device and method

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0995979A1 (de) * 1998-10-23 2000-04-26 Endress + Hauser GmbH + Co. Druckaufnehmer
CN2400795Y (zh) * 1999-12-23 2000-10-11 王洪业 离子束溅射沉积薄膜压力传感器
EP1211496A2 (en) * 2000-11-30 2002-06-05 Nagano Keiki Co., Ltd. Pressure sensor
EP1382953A2 (en) * 2002-07-10 2004-01-21 Texas Instruments Incorporated Hermetic pressure transducer

Also Published As

Publication number Publication date
WO2006026376A1 (en) 2006-03-09
JP5091676B2 (ja) 2012-12-05
CN101040176A (zh) 2007-09-19
CA2576853A1 (en) 2006-03-09
US20060042393A1 (en) 2006-03-02
CA2576853C (en) 2014-05-06
EP1800098B1 (en) 2015-08-12
JP2008511833A (ja) 2008-04-17
US7270010B2 (en) 2007-09-18
EP1800098A1 (en) 2007-06-27

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Granted publication date: 20091021

Termination date: 20190825