CN100551554C - 用于面板处理系统的吸取单元组件 - Google Patents
用于面板处理系统的吸取单元组件 Download PDFInfo
- Publication number
- CN100551554C CN100551554C CNB2005100840927A CN200510084092A CN100551554C CN 100551554 C CN100551554 C CN 100551554C CN B2005100840927 A CNB2005100840927 A CN B2005100840927A CN 200510084092 A CN200510084092 A CN 200510084092A CN 100551554 C CN100551554 C CN 100551554C
- Authority
- CN
- China
- Prior art keywords
- suction
- unit
- suction unit
- panel
- channel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000012545 processing Methods 0.000 title claims abstract description 10
- 239000012530 fluid Substances 0.000 claims abstract description 52
- 239000007788 liquid Substances 0.000 claims description 34
- 238000000605 extraction Methods 0.000 claims description 9
- 230000009102 absorption Effects 0.000 claims description 4
- 238000010521 absorption reaction Methods 0.000 claims description 4
- 230000008685 targeting Effects 0.000 claims 1
- 238000007599 discharging Methods 0.000 abstract description 2
- 238000004140 cleaning Methods 0.000 description 10
- 238000000034 method Methods 0.000 description 8
- 230000000717 retained effect Effects 0.000 description 5
- 239000012459 cleaning agent Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000008030 elimination Effects 0.000 description 3
- 238000003379 elimination reaction Methods 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 230000000712 assembly Effects 0.000 description 2
- 238000000429 assembly Methods 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000005465 channeling Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229920006351 engineering plastic Polymers 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011010 flushing procedure Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 230000011218 segmentation Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
- H01J9/241—Manufacture or joining of vessels, leading-in conductors or bases the vessel being for a flat panel display
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/38—Exhausting, degassing, filling, or cleaning vessels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/52—Recovery of material from discharge tubes or lamps
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1316—Methods for cleaning the liquid crystal cells, or components thereof, during manufacture: Materials therefor
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Cleaning In General (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Liquid Crystal (AREA)
- Manipulator (AREA)
Abstract
Description
Claims (12)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020040054421A KR100568837B1 (ko) | 2004-07-13 | 2004-07-13 | 흡입유니트 어셈블리 |
KR1020040054421 | 2004-07-13 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1721092A CN1721092A (zh) | 2006-01-18 |
CN100551554C true CN100551554C (zh) | 2009-10-21 |
Family
ID=35893590
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2005100840927A Expired - Fee Related CN100551554C (zh) | 2004-07-13 | 2005-07-12 | 用于面板处理系统的吸取单元组件 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4354434B2 (zh) |
KR (1) | KR100568837B1 (zh) |
CN (1) | CN100551554C (zh) |
TW (1) | TWI270923B (zh) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100853387B1 (ko) * | 2007-05-17 | 2008-08-21 | 두손산업 (주) | 기판 제조 공정상의 공정액 흡입장치 |
JP2012026736A (ja) | 2010-07-20 | 2012-02-09 | Mitsutoyo Corp | 表面粗さ試験機のスキッド洗浄方法 |
KR102232691B1 (ko) * | 2013-06-26 | 2021-03-29 | 삼성디스플레이 주식회사 | 기판 처리장치, 이를 구비하는 증착장치, 기판 처리방법 및 증착방법 |
CN106353902B (zh) * | 2016-11-08 | 2019-03-22 | 武汉华星光电技术有限公司 | 一种液晶面板移载装置及液晶面板切割系统 |
KR102018271B1 (ko) * | 2018-08-09 | 2019-09-05 | (주)한빛테크놀로지 | 균일한 에칭 환경 조성을 위한 에칭 장치 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5388304A (en) * | 1992-04-13 | 1995-02-14 | Shinko Co., Ltd. | Dust removing system for panellike bodies |
JP2003145064A (ja) * | 2001-11-12 | 2003-05-20 | Tokyo Electron Ltd | 2流体ジェットノズル及び基板洗浄装置 |
-
2004
- 2004-07-13 KR KR1020040054421A patent/KR100568837B1/ko active IP Right Grant
-
2005
- 2005-06-27 TW TW094121411A patent/TWI270923B/zh not_active IP Right Cessation
- 2005-07-11 JP JP2005201682A patent/JP4354434B2/ja not_active Expired - Fee Related
- 2005-07-12 CN CNB2005100840927A patent/CN100551554C/zh not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5388304A (en) * | 1992-04-13 | 1995-02-14 | Shinko Co., Ltd. | Dust removing system for panellike bodies |
JP2003145064A (ja) * | 2001-11-12 | 2003-05-20 | Tokyo Electron Ltd | 2流体ジェットノズル及び基板洗浄装置 |
Non-Patent Citations (1)
Title |
---|
2003-332401A 2003.11.21 |
Also Published As
Publication number | Publication date |
---|---|
KR100568837B1 (ko) | 2006-04-10 |
KR20060005577A (ko) | 2006-01-18 |
TWI270923B (en) | 2007-01-11 |
JP4354434B2 (ja) | 2009-10-28 |
JP2006026634A (ja) | 2006-02-02 |
TW200603238A (en) | 2006-01-16 |
CN1721092A (zh) | 2006-01-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: WEIHAI DIANMEISHI OPTO-MECHATRONICS CO., LTD. Effective date: 20140227 |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20140227 Address after: Gyeonggi Do, South Korea Patentee after: DMS Co.,Ltd. Patentee after: WEIHAI DMS OPTICAL ELECTROMECHANICAL CO.,LTD. Address before: Gyeonggi Do, South Korea Patentee before: DMS Co.,Ltd. |
|
CP03 | Change of name, title or address | ||
CP03 | Change of name, title or address |
Address after: 264205 No. 88-1, Bekaert Road, Weihai Economic and Technological Development Zone, Weihai City, Shandong Province Patentee after: WEIHAI DMS OPTICAL ELECTROMECHANICAL Co.,Ltd. Patentee after: DMS Co.,Ltd. Address before: Gyeonggi Do, South Korea Patentee before: DMS Co.,Ltd. Patentee before: WEIHAI DMS OPTICAL ELECTROMECHANICAL Co.,Ltd. |
|
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20091021 |
|
CF01 | Termination of patent right due to non-payment of annual fee |