CN100485312C - 用于波前控制和改进的3d测量的方法和装置 - Google Patents

用于波前控制和改进的3d测量的方法和装置 Download PDF

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Publication number
CN100485312C
CN100485312C CNB2005800134679A CN200580013467A CN100485312C CN 100485312 C CN100485312 C CN 100485312C CN B2005800134679 A CNB2005800134679 A CN B2005800134679A CN 200580013467 A CN200580013467 A CN 200580013467A CN 100485312 C CN100485312 C CN 100485312C
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wavefront
phase
plane
amplitude
image
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Expired - Fee Related
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Chinese (zh)
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CN101076705A (zh
Inventor
约埃尔·阿里耶利
谢伊·韦尔夫林
埃曼努埃尔·兰兹曼
加夫里尔·费金
塔尔·库兹涅兹
约拉姆·萨班
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NANO-OR TECHNOLOGIES (ISRAEL) Ltd
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NANO-OR TECHNOLOGIES (ISRAEL) Ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0641—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0675—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02083—Interferometers characterised by particular signal processing and presentation
    • G01B9/02087—Combining two or more images of the same region
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Optics & Photonics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
CNB2005800134679A 2004-03-11 2005-03-11 用于波前控制和改进的3d测量的方法和装置 Expired - Fee Related CN100485312C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US55257004P 2004-03-11 2004-03-11
US60/552,570 2004-03-11

Publications (2)

Publication Number Publication Date
CN101076705A CN101076705A (zh) 2007-11-21
CN100485312C true CN100485312C (zh) 2009-05-06

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US (1) US8319975B2 (enExample)
EP (1) EP1751492A4 (enExample)
JP (2) JP2007533977A (enExample)
KR (2) KR101159495B1 (enExample)
CN (1) CN100485312C (enExample)
CA (1) CA2559324A1 (enExample)
WO (1) WO2005086582A2 (enExample)

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WO2005086582A3 (en) 2007-06-14
US8319975B2 (en) 2012-11-27
KR101159380B1 (ko) 2012-06-27
WO2005086582A2 (en) 2005-09-22
CN101076705A (zh) 2007-11-21
HK1119231A1 (zh) 2009-02-27
JP2011154042A (ja) 2011-08-11
KR20110130532A (ko) 2011-12-05
KR20070047235A (ko) 2007-05-04
JP2007533977A (ja) 2007-11-22
EP1751492A2 (en) 2007-02-14
CA2559324A1 (en) 2005-09-22
US20100002950A1 (en) 2010-01-07
EP1751492A4 (en) 2016-07-20
KR101159495B1 (ko) 2012-06-22

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