GB9610471D0 - Optical measurement - Google Patents

Optical measurement

Info

Publication number
GB9610471D0
GB9610471D0 GBGB9610471.6A GB9610471A GB9610471D0 GB 9610471 D0 GB9610471 D0 GB 9610471D0 GB 9610471 A GB9610471 A GB 9610471A GB 9610471 D0 GB9610471 D0 GB 9610471D0
Authority
GB
United Kingdom
Prior art keywords
optical measurement
measurement
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GBGB9610471.6A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Nottingham
Original Assignee
University of Nottingham
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Nottingham filed Critical University of Nottingham
Priority to GBGB9610471.6A priority Critical patent/GB9610471D0/en
Publication of GB9610471D0 publication Critical patent/GB9610471D0/en
Application status is Pending legal-status Critical

Links

GBGB9610471.6A 1996-05-18 1996-05-18 Optical measurement Pending GB9610471D0 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GBGB9610471.6A GB9610471D0 (en) 1996-05-18 1996-05-18 Optical measurement

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
GBGB9610471.6A GB9610471D0 (en) 1996-05-18 1996-05-18 Optical measurement
CN 97196506 CN1225720A (en) 1996-05-18 1997-05-16 Optical measurement
JP09541783A JP2000510951A (en) 1996-05-18 1997-05-16 Optical measurement
PCT/GB1997/001353 WO1997044633A1 (en) 1996-05-18 1997-05-16 Optical measurement
EP19970923185 EP0900356A1 (en) 1996-05-18 1997-05-16 Optical measurement

Publications (1)

Publication Number Publication Date
GB9610471D0 true GB9610471D0 (en) 1996-07-24

Family

ID=10793969

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB9610471.6A Pending GB9610471D0 (en) 1996-05-18 1996-05-18 Optical measurement

Country Status (5)

Country Link
EP (1) EP0900356A1 (en)
JP (1) JP2000510951A (en)
CN (1) CN1225720A (en)
GB (1) GB9610471D0 (en)
WO (1) WO1997044633A1 (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19856400B4 (en) * 1998-12-07 2009-04-09 Steinbichler Optotechnik Gmbh Method and apparatus for direct phase measurement of radiation
US6804009B2 (en) 2000-05-03 2004-10-12 The Regents Of The University Of California Wollaston prism phase-stepping point diffraction interferometer and method
FR2818376B1 (en) 2000-12-18 2003-03-28 Centre Nat Rech Scient A ellipsometric two-dimensional display of a sample, method of viewing and measuring ellipsometric METHOD with spatial resolution
US7139081B2 (en) 2002-09-09 2006-11-21 Zygo Corporation Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures
US7106454B2 (en) 2003-03-06 2006-09-12 Zygo Corporation Profiling complex surface structures using scanning interferometry
US7271918B2 (en) 2003-03-06 2007-09-18 Zygo Corporation Profiling complex surface structures using scanning interferometry
US7324214B2 (en) 2003-03-06 2008-01-29 Zygo Corporation Interferometer and method for measuring characteristics of optically unresolved surface features
AT421716T (en) 2003-09-15 2009-02-15 Zygo Corp Surface triangulation and profiling
TWI335417B (en) 2003-10-27 2011-01-01 Zygo Corp Method and apparatus for thin film measurement
JP2007533977A (en) * 2004-03-11 2007-11-22 アイコス・ビジョン・システムズ・ナムローゼ・フェンノートシャップ Wavefront operation and improvements 3d measuring method and device
US7428057B2 (en) * 2005-01-20 2008-09-23 Zygo Corporation Interferometer for determining characteristics of an object surface, including processing and calibration
US7321431B2 (en) 2005-05-19 2008-01-22 Zygo Corporation Method and system for analyzing low-coherence interferometry signals for information about thin film structures
US7889355B2 (en) 2007-01-31 2011-02-15 Zygo Corporation Interferometry for lateral metrology
US8120781B2 (en) 2008-11-26 2012-02-21 Zygo Corporation Interferometric systems and methods featuring spectral analysis of unevenly sampled data
CN101520413B (en) 2009-02-18 2011-09-21 深圳大学 A heterodyne interference elliptic-deviation measurement nonlinear error compensation method
WO2017041843A1 (en) * 2015-09-09 2017-03-16 Siemens Healthcare Gmbh A technique for illuminating a sample to be inspected by interferometric microscopy

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6125282B2 (en) * 1979-06-22 1986-06-14 Intaanashonaru Bijinesu Mashiinzu Corp
JPH061178B2 (en) * 1985-01-16 1994-01-05 株式会社日立製作所 Defect inspection method and apparatus
US4905311A (en) * 1988-02-10 1990-02-27 Brother Kogyo Kabushiki Kaisha Optical surface roughness measuring apparatus with polarization detection
US5602643A (en) * 1996-02-07 1997-02-11 Wyko Corporation Method and apparatus for correcting surface profiles determined by phase-shifting interferometry according to optical parameters of test surface

Also Published As

Publication number Publication date
JP2000510951A (en) 2000-08-22
WO1997044633A1 (en) 1997-11-27
EP0900356A1 (en) 1999-03-10
CN1225720A (en) 1999-08-11

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