CN100475315C - 供气方法及其装置 - Google Patents
供气方法及其装置 Download PDFInfo
- Publication number
- CN100475315C CN100475315C CNB028241304A CN02824130A CN100475315C CN 100475315 C CN100475315 C CN 100475315C CN B028241304 A CNB028241304 A CN B028241304A CN 02824130 A CN02824130 A CN 02824130A CN 100475315 C CN100475315 C CN 100475315C
- Authority
- CN
- China
- Prior art keywords
- gas
- mentioned
- component
- krypton
- waste
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B23/00—Noble gases; Compounds thereof
- C01B23/001—Purification or separation processes of noble gases
- C01B23/0036—Physical processing only
- C01B23/0052—Physical processing only by adsorption in solids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
- B01D53/68—Halogens or halogen compounds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
- B01D53/68—Halogens or halogen compounds
- B01D53/70—Organic halogen compounds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B23/00—Noble gases; Compounds thereof
- C01B23/001—Purification or separation processes of noble gases
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/10—Single element gases other than halogens
- B01D2257/11—Noble gases
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/20—Halogens or halogen compounds
- B01D2257/206—Organic halogen compounds
- B01D2257/2066—Fluorine
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2210/00—Purification or separation of specific gases
- C01B2210/0029—Obtaining noble gases
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2210/00—Purification or separation of specific gases
- C01B2210/0029—Obtaining noble gases
- C01B2210/0035—Krypton
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2210/00—Purification or separation of specific gases
- C01B2210/0042—Making ultrapure specific gas
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/151—Reduction of greenhouse gas [GHG] emissions, e.g. CO2
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- Environmental & Geological Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Biomedical Technology (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Separation Of Gases By Adsorption (AREA)
- Treating Waste Gases (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001369905A JP3891834B2 (ja) | 2001-12-04 | 2001-12-04 | ガス供給方法及び装置 |
| JP369905/2001 | 2001-12-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1599638A CN1599638A (zh) | 2005-03-23 |
| CN100475315C true CN100475315C (zh) | 2009-04-08 |
Family
ID=19179220
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB028241304A Expired - Fee Related CN100475315C (zh) | 2001-12-04 | 2002-12-04 | 供气方法及其装置 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US7258725B2 (enExample) |
| EP (1) | EP1452221A4 (enExample) |
| JP (1) | JP3891834B2 (enExample) |
| KR (1) | KR100878946B1 (enExample) |
| CN (1) | CN100475315C (enExample) |
| IL (1) | IL162275A0 (enExample) |
| TW (1) | TW200300699A (enExample) |
| WO (1) | WO2003047731A1 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104147892A (zh) * | 2010-01-28 | 2014-11-19 | 气体产品与化学公司 | 用于选择性收集过程流出物的方法和设备 |
Families Citing this family (65)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2863404B1 (fr) * | 2003-12-09 | 2006-04-21 | Cit Alcatel | Dispositif pour la generation et la commande du flux d'agents de nettoyage dans une chambre de procedes |
| US7819981B2 (en) * | 2004-10-26 | 2010-10-26 | Advanced Technology Materials, Inc. | Methods for cleaning ion implanter components |
| US7727305B2 (en) * | 2006-04-20 | 2010-06-01 | Lummus Technology Inc. | Method and system for atmosphere recycling |
| US20080000497A1 (en) * | 2006-06-30 | 2008-01-03 | Applied Materials, Inc. | Removal of organic-containing layers from large surface areas |
| WO2008004278A1 (fr) * | 2006-07-04 | 2008-01-10 | Toshiba Mitsubishi-Electric Industrial Systems Corporation | Procédé et dispositif de concentration / dilution de gaz spécifique |
| WO2008053215A1 (en) * | 2006-11-02 | 2008-05-08 | Kbig Limited | Product dispensing systems |
| JP5710263B2 (ja) * | 2007-11-12 | 2015-04-30 | エクソンモービル アップストリーム リサーチ カンパニー | ユーティリティガスの製造及び利用方法 |
| US7862645B2 (en) * | 2008-02-01 | 2011-01-04 | Air Products And Chemicals, Inc. | Removal of gaseous contaminants from argon |
| KR101822779B1 (ko) | 2008-02-11 | 2018-01-26 | 엔테그리스, 아이엔씨. | 반도체 가공 시스템에서의 이온 공급원 세정법 |
| WO2009134543A1 (en) | 2008-04-30 | 2009-11-05 | Exxonmobil Upstream Research Company | Method and apparatus for removal of oil from utility gas stream |
| US8518165B2 (en) * | 2009-03-16 | 2013-08-27 | J—Power Entech, Inc. | Dry exhaust-gas treating apparatus |
| CN102348491B (zh) * | 2009-03-16 | 2013-10-09 | 电源开发工程技术株式会社 | 再生塔及干式废气处理装置 |
| WO2011073889A1 (en) * | 2009-12-17 | 2011-06-23 | Koninklijke Philips Electronics N.V. | Oxygen separation method and system with a plasma pump and a membrane |
| US8858819B2 (en) | 2010-02-15 | 2014-10-14 | Air Products And Chemicals, Inc. | Method for chemical mechanical planarization of a tungsten-containing substrate |
| US9067168B2 (en) | 2010-05-28 | 2015-06-30 | Exxonmobil Upstream Research Company | Integrated adsorber head and valve design and swing adsorption methods related thereto |
| TWI495501B (zh) | 2010-11-15 | 2015-08-11 | Exxonmobil Upstream Res Co | 動力分餾器及用於氣體混合物之分餾的循環法 |
| US8795411B2 (en) | 2011-02-07 | 2014-08-05 | Air Products And Chemicals, Inc. | Method for recovering high-value components from waste gas streams |
| EA201501140A1 (ru) | 2011-03-01 | 2016-04-29 | Эксонмобил Апстрим Рисерч Компани | Способы удаления загрязняющих примесей из потока углеводородов в циклическом адсорбционном процессе и связанные с этим устройства и системы |
| EP2680954B1 (en) | 2011-03-01 | 2018-09-12 | Exxonmobil Upstream Research Company | Methods of removing contaminants from a hydrocarbon stream by pressure swing adsorption and related apparatus and systems |
| US9017457B2 (en) | 2011-03-01 | 2015-04-28 | Exxonmobil Upstream Research Company | Apparatus and systems having a reciprocating valve head assembly and swing adsorption processes related thereto |
| BR112013018597A2 (pt) | 2011-03-01 | 2019-01-08 | Exxonmobil Upstream Res Co | aparelho e sistemas tendo um contator adsorvente encaixado e processos de adsorção oscilante |
| EP2680948A4 (en) | 2011-03-01 | 2015-05-06 | Exxonmobil Upstream Res Co | APPARATUS AND SYSTEMS WITH VALVE ASSEMBLY ROTARY POWER SUPPLY AND BALANCED ADSORPTION PROCESS THEREFOR |
| CA2842928A1 (en) | 2011-03-01 | 2012-11-29 | Exxonmobil Upstream Research Company | Apparatus and systems having a rotary valve assembly and swing adsorption processes related thereto |
| US9162175B2 (en) | 2011-03-01 | 2015-10-20 | Exxonmobil Upstream Research Company | Apparatus and systems having compact configuration multiple swing adsorption beds and methods related thereto |
| JP5039861B1 (ja) * | 2012-01-30 | 2012-10-03 | 住友精化株式会社 | 製品ガス供給方法、および製品ガス供給システム |
| US9034078B2 (en) | 2012-09-05 | 2015-05-19 | Exxonmobil Upstream Research Company | Apparatus and systems having an adsorbent contactor and swing adsorption processes related thereto |
| US9072921B2 (en) * | 2012-10-24 | 2015-07-07 | Hamilton Sundstrand Corporation | Thermodynamically-optimized advanced fire suppression system |
| KR101244426B1 (ko) * | 2012-12-03 | 2013-03-18 | (유)성문 | 화재예방 및 억제장치 |
| FR3008166B1 (fr) * | 2013-07-05 | 2015-06-26 | Air Liquide | Station et procede de remplissage de reservoirs de gaz |
| US10443127B2 (en) * | 2013-11-05 | 2019-10-15 | Taiwan Semiconductor Manufacturing Company Limited | System and method for supplying a precursor for an atomic layer deposition (ALD) process |
| WO2016014232A1 (en) | 2014-07-25 | 2016-01-28 | Exxonmobil Upstream Research Company | Apparatus and system having a valve assembly and swing adsorption processes related thereto |
| EP3218326B1 (en) | 2014-11-11 | 2020-03-04 | ExxonMobil Upstream Research Company | High capacity structures and monoliths via paste imprinting |
| SG11201703809RA (en) | 2014-12-10 | 2017-06-29 | Exxonmobil Res & Eng Co | Adsorbent-incorporated polymer fibers in packed bed and fabric contactors, and methods and devices using same |
| CN107635644A (zh) | 2014-12-23 | 2018-01-26 | 埃克森美孚上游研究公司 | 结构化吸附床,其生产方法及其用途 |
| SG11201707065PA (en) | 2015-05-15 | 2017-11-29 | Exxonmobil Upstream Res Co | Apparatus and system for swing adsorption processes related thereto |
| SG11201707069QA (en) | 2015-05-15 | 2017-11-29 | Exxonmobil Upstream Res Co | Apparatus and system for swing adsorption processes related thereto comprising mid-bed purge systems |
| US10293298B2 (en) | 2015-09-02 | 2019-05-21 | Exxonmobil Upstream Research Company | Apparatus and system for combined temperature and pressure swing adsorption processes related thereto |
| AU2016317387B2 (en) | 2015-09-02 | 2019-11-21 | Exxonmobil Upstream Research Company | Process and system for swing adsorption using an overhead stream of a demethanizer as purge gas |
| KR102118860B1 (ko) | 2015-10-27 | 2020-06-04 | 엑손모빌 업스트림 리서치 캄파니 | 복수의 밸브들을 갖는 관련 스윙 흡착 공정을 위한 장치 및 시스템 |
| EP3368190A1 (en) | 2015-10-27 | 2018-09-05 | Exxonmobil Upstream Research Company | Apparatus and system for swing adsorption processes related thereto having actively-controlled feed poppet valves and passively controlled product valves |
| CN108348838B (zh) | 2015-10-27 | 2021-11-05 | 埃克森美孚上游研究公司 | 具有多个阀门的变吸附方法相关的装置和系统 |
| EP3377194A1 (en) | 2015-11-16 | 2018-09-26 | Exxonmobil Upstream Research Company | Adsorbent materials and methods of adsorbing carbon dioxide |
| CA3017612C (en) | 2016-03-18 | 2021-06-22 | Exxonmobil Upstream Research Company | Apparatus and system for swing adsorption processes related thereto |
| EP3463620A1 (en) | 2016-05-31 | 2019-04-10 | ExxonMobil Upstream Research Company | Apparatus and system for swing adsorption processes |
| CA3025615A1 (en) | 2016-05-31 | 2017-12-07 | Exxonmobil Upstream Research Company | Apparatus and system for swing adsorption processes |
| US10434458B2 (en) | 2016-08-31 | 2019-10-08 | Exxonmobil Upstream Research Company | Apparatus and system for swing adsorption processes related thereto |
| WO2018044501A1 (en) | 2016-09-01 | 2018-03-08 | Exxonmobil Upstream Research Company | Swing adsorption processes for removing water using 3a zeolite structures |
| US10328382B2 (en) | 2016-09-29 | 2019-06-25 | Exxonmobil Upstream Research Company | Apparatus and system for testing swing adsorption processes |
| CA3045034C (en) | 2016-12-21 | 2021-06-29 | Exxonmobil Upstream Research Company | Self-supporting structures having active materials |
| WO2018118361A1 (en) | 2016-12-21 | 2018-06-28 | Exxonmobil Upstream Research Company | Self-supporting structures having foam-geometry structure and active materials |
| JP6831311B2 (ja) * | 2017-09-15 | 2021-02-17 | 株式会社神戸製鋼所 | ガス供給装置、およびガス供給装置の運転開始方法 |
| US11331620B2 (en) | 2018-01-24 | 2022-05-17 | Exxonmobil Upstream Research Company | Apparatus and system for swing adsorption processes |
| JP7020951B2 (ja) * | 2018-02-09 | 2022-02-16 | 東京エレクトロン株式会社 | プラズマ処理システムおよびプラズマ処理方法 |
| WO2019168628A1 (en) | 2018-02-28 | 2019-09-06 | Exxonmobil Upstream Research Company | Apparatus and system for swing adsorption processes |
| WO2020131496A1 (en) | 2018-12-21 | 2020-06-25 | Exxonmobil Upstream Research Company | Flow modulation systems, apparatus, and methods for cyclical swing adsorption |
| JP7198676B2 (ja) * | 2019-01-21 | 2023-01-04 | 株式会社荏原製作所 | 希ガス回収システムおよび希ガス回収方法 |
| US11557462B2 (en) * | 2019-03-13 | 2023-01-17 | Kla Corporation | Collecting and recycling rare gases in semiconductor processing equipment |
| US11376545B2 (en) | 2019-04-30 | 2022-07-05 | Exxonmobil Upstream Research Company | Rapid cycle adsorbent bed |
| WO2021071755A1 (en) | 2019-10-07 | 2021-04-15 | Exxonmobil Upstream Research Company | Adsorption processes and systems utilizing step lift control of hydraulically actuated poppet valves |
| WO2021076594A1 (en) | 2019-10-16 | 2021-04-22 | Exxonmobil Upstream Research Company | Dehydration processes utilizing cationic zeolite rho |
| WO2022065466A1 (ja) * | 2020-09-28 | 2022-03-31 | 大陽日酸株式会社 | ガス分離方法、およびガス分離装置 |
| US12131962B2 (en) * | 2021-05-13 | 2024-10-29 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor processing tool and methods of operation |
| JP7604328B2 (ja) * | 2021-06-14 | 2024-12-23 | 株式会社日本製鋼所 | 発泡成形用の射出成形機 |
| EP4265322A1 (en) | 2022-04-22 | 2023-10-25 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Helium recovery process |
| CN116603354B (zh) * | 2023-05-25 | 2025-08-19 | 派瑞科技有限公司 | 用于制备氘代试剂的尾气回收设备 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6217633B1 (en) * | 1997-12-01 | 2001-04-17 | Nippon Sanso Corporation | Method and apparatus for recovering rare gas |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS503480B2 (enExample) * | 1972-02-25 | 1975-02-05 | ||
| DE3039604A1 (de) * | 1980-10-21 | 1982-05-19 | Kernforschungszentrum Karlsruhe Gmbh, 7500 Karlsruhe | Verfahren zum abtrennen der spaltedelgase xenon und krypton aus abgasen kerntechnischer anlagen |
| JPS6274430A (ja) * | 1985-09-28 | 1987-04-06 | Central Glass Co Ltd | 希ガスハライドエキシマ−レ−ザ−ガスの精製法 |
| JPH06295870A (ja) * | 1993-04-08 | 1994-10-21 | Nippon Steel Corp | 化学的気相成長装置 |
| US5557951A (en) * | 1995-03-24 | 1996-09-24 | Praxair Technology, Inc. | Process and apparatus for recovery and purification of argon from a cryogenic air separation unit |
| JPH09251981A (ja) | 1996-03-14 | 1997-09-22 | Toshiba Corp | 半導体製造装置 |
| US5759237A (en) * | 1996-06-14 | 1998-06-02 | L'air Liquide Societe Anonyme Pour L'etude Et, L'exploitation Des Procedes Georges Claude | Process and system for selective abatement of reactive gases and recovery of perfluorocompound gases |
| JP3545914B2 (ja) * | 1997-08-22 | 2004-07-21 | 株式会社神戸製鋼所 | アルゴンの回収方法および同装置 |
| JPH11114360A (ja) | 1997-10-09 | 1999-04-27 | Sony Corp | 排ガス処理装置 |
| KR20000015813U (ko) * | 1999-01-18 | 2000-08-16 | 김영환 | 반도체 웨이퍼 증착장비의 배기가스 재공급장치 |
| US7285154B2 (en) * | 2004-11-24 | 2007-10-23 | Air Products And Chemicals, Inc. | Xenon recovery system |
-
2001
- 2001-12-04 JP JP2001369905A patent/JP3891834B2/ja not_active Expired - Lifetime
-
2002
- 2002-12-03 TW TW091134995A patent/TW200300699A/zh not_active IP Right Cessation
- 2002-12-04 IL IL16227502A patent/IL162275A0/xx not_active IP Right Cessation
- 2002-12-04 KR KR1020020076554A patent/KR100878946B1/ko not_active Expired - Fee Related
- 2002-12-04 WO PCT/JP2002/012703 patent/WO2003047731A1/ja not_active Ceased
- 2002-12-04 CN CNB028241304A patent/CN100475315C/zh not_active Expired - Fee Related
- 2002-12-04 EP EP02788714A patent/EP1452221A4/en not_active Withdrawn
- 2002-12-04 US US10/497,311 patent/US7258725B2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6217633B1 (en) * | 1997-12-01 | 2001-04-17 | Nippon Sanso Corporation | Method and apparatus for recovering rare gas |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104147892A (zh) * | 2010-01-28 | 2014-11-19 | 气体产品与化学公司 | 用于选择性收集过程流出物的方法和设备 |
| CN104147892B (zh) * | 2010-01-28 | 2017-04-12 | 气体产品与化学公司 | 用于选择性收集过程流出物的方法和设备 |
Also Published As
| Publication number | Publication date |
|---|---|
| EP1452221A4 (en) | 2006-02-01 |
| CN1599638A (zh) | 2005-03-23 |
| TW200300699A (en) | 2003-06-16 |
| US7258725B2 (en) | 2007-08-21 |
| KR100878946B1 (ko) | 2009-01-19 |
| JP3891834B2 (ja) | 2007-03-14 |
| US20050109419A1 (en) | 2005-05-26 |
| KR20030045656A (ko) | 2003-06-11 |
| IL162275A0 (en) | 2005-11-20 |
| WO2003047731A1 (fr) | 2003-06-12 |
| JP2003164720A (ja) | 2003-06-10 |
| EP1452221A1 (en) | 2004-09-01 |
| TWI307639B (enExample) | 2009-03-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN100475315C (zh) | 供气方法及其装置 | |
| CN1176736C (zh) | 气体的分离纯化方法及其装置 | |
| JP4769350B2 (ja) | 希ガスの回収方法及び装置 | |
| US20060130649A1 (en) | Treatment of effluent gases | |
| JP5506396B2 (ja) | オゾン濃縮装置 | |
| JP2004010478A (ja) | 吸着精製プロセスを用いるフッ素の回収方法 | |
| KR100436111B1 (ko) | 흡착제베드의상층및바닥의동시진공화를이용한압력순환흡착식방법및시스템 | |
| JP3921203B2 (ja) | ガス分離方法および装置 | |
| KR101461239B1 (ko) | 저순도 질소가스 발생방법 | |
| WO2003086586A1 (en) | Gas separating method | |
| WO2011093246A1 (ja) | 可燃性ガス濃縮装置 | |
| JP5584887B2 (ja) | オゾンガス濃縮方法及びその装置 | |
| JP4430913B2 (ja) | ガス供給方法及び装置 | |
| JP5116195B2 (ja) | ガス分離精製方法 | |
| JP2005270953A (ja) | 混合ガスの分離方法、並びに窒素ガス分離装置及び窒素ガス消費システム | |
| KR20040104494A (ko) | 기체형 기질로부터 동위원소의 분리장치 및 방법 | |
| JP5529558B2 (ja) | 可燃性ガス濃縮装置 | |
| JP2006206989A (ja) | 高純度水素の製造方法およびそれに用いる装置 | |
| JP2011117032A (ja) | フッ素ガス生成装置 | |
| JP7787227B2 (ja) | ガス分離方法及びガス分離装置 | |
| JP2025171125A (ja) | ガス分離方法及びガス分離装置 | |
| JP2025171124A (ja) | ガス分離方法及びガス分離装置 | |
| JP2023088489A (ja) | 窒素ガス分離方法及び窒素ガス分離装置 | |
| JP5451422B2 (ja) | 可燃性ガス濃縮装置 | |
| CN118751015A (zh) | 一种混合气体提纯氢气的设备与方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090408 Termination date: 20141204 |
|
| EXPY | Termination of patent right or utility model |