CN100475315C - 供气方法及其装置 - Google Patents

供气方法及其装置 Download PDF

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Publication number
CN100475315C
CN100475315C CNB028241304A CN02824130A CN100475315C CN 100475315 C CN100475315 C CN 100475315C CN B028241304 A CNB028241304 A CN B028241304A CN 02824130 A CN02824130 A CN 02824130A CN 100475315 C CN100475315 C CN 100475315C
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Prior art keywords
gas
mentioned
component
krypton
waste
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Expired - Fee Related
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CNB028241304A
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English (en)
Chinese (zh)
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CN1599638A (zh
Inventor
大见忠弘
石原良夫
中村章宽
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Taiyo Nippon Sanso Corp
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Nippon Sanso Corp
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D46/00Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B23/00Noble gases; Compounds thereof
    • C01B23/001Purification or separation processes of noble gases
    • C01B23/0036Physical processing only
    • C01B23/0052Physical processing only by adsorption in solids
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34Chemical or biological purification of waste gases
    • B01D53/46Removing components of defined structure
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34Chemical or biological purification of waste gases
    • B01D53/46Removing components of defined structure
    • B01D53/68Halogens or halogen compounds
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34Chemical or biological purification of waste gases
    • B01D53/46Removing components of defined structure
    • B01D53/68Halogens or halogen compounds
    • B01D53/70Organic halogen compounds
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34Chemical or biological purification of waste gases
    • B01D53/74General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B23/00Noble gases; Compounds thereof
    • C01B23/001Purification or separation processes of noble gases
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2257/00Components to be removed
    • B01D2257/10Single element gases other than halogens
    • B01D2257/11Noble gases
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2257/00Components to be removed
    • B01D2257/20Halogens or halogen compounds
    • B01D2257/206Organic halogen compounds
    • B01D2257/2066Fluorine
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00Purification or separation of specific gases
    • C01B2210/0029Obtaining noble gases
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00Purification or separation of specific gases
    • C01B2210/0029Obtaining noble gases
    • C01B2210/0035Krypton
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00Purification or separation of specific gases
    • C01B2210/0042Making ultrapure specific gas
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P20/00Technologies relating to chemical industry
    • Y02P20/151Reduction of greenhouse gas [GHG] emissions, e.g. CO2

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Environmental & Geological Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Biomedical Technology (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Separation Of Gases By Adsorption (AREA)
  • Treating Waste Gases (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Chemical Vapour Deposition (AREA)
CNB028241304A 2001-12-04 2002-12-04 供气方法及其装置 Expired - Fee Related CN100475315C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001369905A JP3891834B2 (ja) 2001-12-04 2001-12-04 ガス供給方法及び装置
JP369905/2001 2001-12-04

Publications (2)

Publication Number Publication Date
CN1599638A CN1599638A (zh) 2005-03-23
CN100475315C true CN100475315C (zh) 2009-04-08

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Family Applications (1)

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CNB028241304A Expired - Fee Related CN100475315C (zh) 2001-12-04 2002-12-04 供气方法及其装置

Country Status (8)

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US (1) US7258725B2 (enExample)
EP (1) EP1452221A4 (enExample)
JP (1) JP3891834B2 (enExample)
KR (1) KR100878946B1 (enExample)
CN (1) CN100475315C (enExample)
IL (1) IL162275A0 (enExample)
TW (1) TW200300699A (enExample)
WO (1) WO2003047731A1 (enExample)

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CN104147892A (zh) * 2010-01-28 2014-11-19 气体产品与化学公司 用于选择性收集过程流出物的方法和设备

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US7862645B2 (en) * 2008-02-01 2011-01-04 Air Products And Chemicals, Inc. Removal of gaseous contaminants from argon
KR101822779B1 (ko) 2008-02-11 2018-01-26 엔테그리스, 아이엔씨. 반도체 가공 시스템에서의 이온 공급원 세정법
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Publication number Priority date Publication date Assignee Title
CN104147892A (zh) * 2010-01-28 2014-11-19 气体产品与化学公司 用于选择性收集过程流出物的方法和设备
CN104147892B (zh) * 2010-01-28 2017-04-12 气体产品与化学公司 用于选择性收集过程流出物的方法和设备

Also Published As

Publication number Publication date
EP1452221A4 (en) 2006-02-01
CN1599638A (zh) 2005-03-23
TW200300699A (en) 2003-06-16
US7258725B2 (en) 2007-08-21
KR100878946B1 (ko) 2009-01-19
JP3891834B2 (ja) 2007-03-14
US20050109419A1 (en) 2005-05-26
KR20030045656A (ko) 2003-06-11
IL162275A0 (en) 2005-11-20
WO2003047731A1 (fr) 2003-06-12
JP2003164720A (ja) 2003-06-10
EP1452221A1 (en) 2004-09-01
TWI307639B (enExample) 2009-03-21

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