CN100438334C - 微型机械式静电振子 - Google Patents

微型机械式静电振子 Download PDF

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Publication number
CN100438334C
CN100438334C CNB2004100955860A CN200410095586A CN100438334C CN 100438334 C CN100438334 C CN 100438334C CN B2004100955860 A CNB2004100955860 A CN B2004100955860A CN 200410095586 A CN200410095586 A CN 200410095586A CN 100438334 C CN100438334 C CN 100438334C
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CN
China
Prior art keywords
vibrating body
substrate
electrode
vibrator
electrostatic
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Expired - Fee Related
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CNB2004100955860A
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English (en)
Chinese (zh)
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CN1625046A (zh
Inventor
木原竜儿
中岛卓哉
古畑诚
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Seiko Epson Corp
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Seiko Epson Corp
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Publication of CN1625046A publication Critical patent/CN1625046A/zh
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Publication of CN100438334C publication Critical patent/CN100438334C/zh
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2431—Ring resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/0072—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02259—Driving or detection means
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02433—Means for compensation or elimination of undesired effects
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1057—Mounting in enclosures for microelectro-mechanical devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2436—Disk resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2447—Beam resonators
    • H03H9/2457—Clamped-free beam resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2447—Beam resonators
    • H03H9/2463—Clamped-clamped beam resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02496—Horizontal, i.e. parallel to the substrate plane
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02496—Horizontal, i.e. parallel to the substrate plane
    • H03H2009/02503—Breath-like, e.g. Lam? mode, wine-glass mode
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02519—Torsional

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Micromachines (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
CNB2004100955860A 2003-12-04 2004-12-02 微型机械式静电振子 Expired - Fee Related CN100438334C (zh)

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
JP2003405839 2003-12-04
JP2003405839 2003-12-04
JP2004038468 2004-02-16
JP2004038468 2004-02-16
JP2004054182 2004-02-27
JP2004054180 2004-02-27
JP2004054180 2004-02-27
JP2004054182 2004-02-27
JP2004244835 2004-08-25
JP2004244835A JP4086023B2 (ja) 2003-12-04 2004-08-25 マイクロメカニカル静電振動子

Publications (2)

Publication Number Publication Date
CN1625046A CN1625046A (zh) 2005-06-08
CN100438334C true CN100438334C (zh) 2008-11-26

Family

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Family Applications (1)

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CNB2004100955860A Expired - Fee Related CN100438334C (zh) 2003-12-04 2004-12-02 微型机械式静电振子

Country Status (7)

Country Link
US (1) US7215061B2 (enExample)
EP (1) EP1538747B1 (enExample)
JP (1) JP4086023B2 (enExample)
CN (1) CN100438334C (enExample)
AT (1) ATE352900T1 (enExample)
DE (1) DE602004004484T2 (enExample)
ES (1) ES2277188T3 (enExample)

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CN114124025B (zh) * 2021-11-04 2025-01-03 北京晶芯微科技有限公司 一种微机械谐振器及其制备方法

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Also Published As

Publication number Publication date
EP1538747B1 (en) 2007-01-24
EP1538747A1 (en) 2005-06-08
ES2277188T3 (es) 2007-07-01
DE602004004484D1 (de) 2007-03-15
JP2005271191A (ja) 2005-10-06
ATE352900T1 (de) 2007-02-15
DE602004004484T2 (de) 2007-11-08
US7215061B2 (en) 2007-05-08
US20050151442A1 (en) 2005-07-14
JP4086023B2 (ja) 2008-05-14
CN1625046A (zh) 2005-06-08

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