CN100411982C - 一种大粒径纳米级二氧化硅胶体的制备方法 - Google Patents
一种大粒径纳米级二氧化硅胶体的制备方法 Download PDFInfo
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- CN100411982C CN100411982C CNB2006100116145A CN200610011614A CN100411982C CN 100411982 C CN100411982 C CN 100411982C CN B2006100116145 A CNB2006100116145 A CN B2006100116145A CN 200610011614 A CN200610011614 A CN 200610011614A CN 100411982 C CN100411982 C CN 100411982C
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- silicon dioxide
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- abrasive
- grain size
- silicon
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 94
- 239000000377 silicon dioxide Substances 0.000 title claims abstract description 45
- 235000012239 silicon dioxide Nutrition 0.000 title claims abstract description 35
- 238000002360 preparation method Methods 0.000 title claims abstract description 21
- 239000000084 colloidal system Substances 0.000 title claims abstract description 20
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 12
- 238000003756 stirring Methods 0.000 claims abstract description 3
- 239000002245 particle Substances 0.000 claims description 51
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims description 19
- 239000000243 solution Substances 0.000 claims description 12
- 235000013312 flour Nutrition 0.000 claims description 10
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 claims description 9
- 235000013339 cereals Nutrition 0.000 claims description 9
- 238000006243 chemical reaction Methods 0.000 claims description 9
- 239000007864 aqueous solution Substances 0.000 claims description 8
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims 2
- 229910021529 ammonia Inorganic materials 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 19
- 238000000034 method Methods 0.000 abstract description 19
- 239000003513 alkali Substances 0.000 abstract description 6
- 238000009826 distribution Methods 0.000 abstract description 3
- 239000012535 impurity Substances 0.000 abstract description 3
- 238000001556 precipitation Methods 0.000 abstract description 3
- 239000011863 silicon-based powder Substances 0.000 abstract 2
- 229910001385 heavy metal Inorganic materials 0.000 abstract 1
- 238000005498 polishing Methods 0.000 description 28
- 229960001866 silicon dioxide Drugs 0.000 description 25
- 230000000694 effects Effects 0.000 description 20
- 229910052710 silicon Inorganic materials 0.000 description 17
- 239000010703 silicon Substances 0.000 description 17
- 229910004298 SiO 2 Inorganic materials 0.000 description 16
- 239000010410 layer Substances 0.000 description 14
- 239000006185 dispersion Substances 0.000 description 11
- 238000005516 engineering process Methods 0.000 description 9
- 239000013078 crystal Substances 0.000 description 8
- 239000000463 material Substances 0.000 description 7
- 239000005543 nano-size silicon particle Substances 0.000 description 7
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 6
- 239000003082 abrasive agent Substances 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 230000007246 mechanism Effects 0.000 description 5
- 239000000843 powder Substances 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- 238000000227 grinding Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 230000035484 reaction time Effects 0.000 description 3
- 238000011160 research Methods 0.000 description 3
- 239000004408 titanium dioxide Substances 0.000 description 3
- 241000237502 Ostreidae Species 0.000 description 2
- 235000011114 ammonium hydroxide Nutrition 0.000 description 2
- 238000006555 catalytic reaction Methods 0.000 description 2
- 238000005119 centrifugation Methods 0.000 description 2
- 239000008119 colloidal silica Substances 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 239000012467 final product Substances 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 239000008187 granular material Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000036571 hydration Effects 0.000 description 2
- 238000006703 hydration reaction Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910021645 metal ion Inorganic materials 0.000 description 2
- 235000020636 oyster Nutrition 0.000 description 2
- 238000007517 polishing process Methods 0.000 description 2
- 239000002244 precipitate Substances 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 238000001988 small-angle X-ray diffraction Methods 0.000 description 2
- 239000011734 sodium Substances 0.000 description 2
- 238000003980 solgel method Methods 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- 230000002194 synthesizing effect Effects 0.000 description 2
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 150000008044 alkali metal hydroxides Chemical class 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000012295 chemical reaction liquid Substances 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000001027 hydrothermal synthesis Methods 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 238000005342 ion exchange Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000006193 liquid solution Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 239000012982 microporous membrane Substances 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 239000012452 mother liquor Substances 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000006479 redox reaction Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- 230000005476 size effect Effects 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
Landscapes
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
Description
时间(min) | 温度(℃) | 加粉量(Kg) | 二氧化硅粒径(nm) |
起始 | 65 | 0.5 | - |
20 | 68 | 0.75 | - |
40 | 70 | 1.0 | - |
60 | 75 | 1.5 | - |
80 | 80 | 2.0 | - |
100 | 90 | 3.0 | - |
120 | 90 | 4.0 | - |
140 | 90 | 5.5 | - |
160 | 90 | 7.0 | - |
180 | 90 | 10.0 | - |
200 | 90 | 20.0 | 55±2 |
320 | 保温 | 出料 | 60±2 |
时间(min) | 温度(℃) | 加粉量(Kg) | 二氧化硅粒径(nm) |
母液配制 | 65 | 加晶种20Kg | 30 |
起始 | 65 | 0.5 | |
20 | 68 | 0.75 | - |
40 | 70 | 1.0 | - |
60 | 75 | 1.5 | - |
80 | 80 | 2.0 | - |
100 | 90 | 3.0 | - |
120 | 90 | 4.0 | - |
140 | 90 | 5.5 | - |
160 | 90 | 7.0 | - |
180 | 90 | 10.0 | - |
200 | 90 | 20.0 | 110±2 |
320 | 保温 | 出料 | 120±2 |
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB2006100116145A CN100411982C (zh) | 2006-04-07 | 2006-04-07 | 一种大粒径纳米级二氧化硅胶体的制备方法 |
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CNB2006100116145A CN100411982C (zh) | 2006-04-07 | 2006-04-07 | 一种大粒径纳米级二氧化硅胶体的制备方法 |
Publications (2)
Publication Number | Publication Date |
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CN1830778A CN1830778A (zh) | 2006-09-13 |
CN100411982C true CN100411982C (zh) | 2008-08-20 |
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CNB2006100116145A Expired - Fee Related CN100411982C (zh) | 2006-04-07 | 2006-04-07 | 一种大粒径纳米级二氧化硅胶体的制备方法 |
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CN (1) | CN100411982C (zh) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1974385B (zh) * | 2006-12-08 | 2010-05-19 | 中国科学院宁波材料技术与工程研究所 | 一种单分散性二氧化硅溶胶的制备方法 |
CN102344761A (zh) * | 2011-08-03 | 2012-02-08 | 南通海迅天恒纳米科技有限公司 | 一种铈掺杂二氧化硅溶胶的制备方法 |
CN105462574A (zh) * | 2016-01-04 | 2016-04-06 | 中国石油天然气股份有限公司 | 一种封端聚醚改性的纳米二氧化硅驱油剂及其制备方法 |
CN105731468A (zh) * | 2016-03-17 | 2016-07-06 | 江苏天恒纳米科技股份有限公司 | 一种粒径可控硅溶胶的制备方法 |
CN109455724A (zh) * | 2018-12-26 | 2019-03-12 | 江苏德鑫新材料科技有限公司 | 一种超高纯硅溶胶的制备方法 |
CN111732107B (zh) * | 2020-07-10 | 2021-03-30 | 阳江市惠尔特新材料科技有限公司 | 一种水玻璃制备超大粒径高浓度硅溶胶的方法 |
CN114591684B (zh) * | 2022-02-18 | 2024-01-30 | 浙江开化元通硅业有限公司 | 一种基于高纯球形硅溶胶的环保型化学机械抛光液及其制备方法和抛光方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1188182A (en) * | 1966-05-10 | 1970-04-15 | Philadelphia Quartz Co | Hydrophilic Silica Sol |
CN86104144A (zh) * | 1986-12-29 | 1988-07-20 | 张扬正 | 大粒径、低粘度硅溶胶的制造方法 |
SU1712307A1 (ru) * | 1989-11-01 | 1992-02-15 | Всесоюзный Научно-Исследовательский И Проектный Институт "Теплопроект" | Способ получени кремнезол |
-
2006
- 2006-04-07 CN CNB2006100116145A patent/CN100411982C/zh not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1188182A (en) * | 1966-05-10 | 1970-04-15 | Philadelphia Quartz Co | Hydrophilic Silica Sol |
CN86104144A (zh) * | 1986-12-29 | 1988-07-20 | 张扬正 | 大粒径、低粘度硅溶胶的制造方法 |
SU1712307A1 (ru) * | 1989-11-01 | 1992-02-15 | Всесоюзный Научно-Исследовательский И Проектный Институт "Теплопроект" | Способ получени кремнезол |
Non-Patent Citations (4)
Title |
---|
大粒径纳米二氧化硅的制备技术. 许念强,顾建祥,罗康,郑松保.化工进展,第23卷第7期. 2004 |
大粒径纳米二氧化硅的制备技术. 许念强,顾建祥,罗康,郑松保.化工进展,第23卷第7期. 2004 * |
大颗粒、高浓度硅溶胶的制备新方法. 许念强,顾建祥,罗康,郑松保.化工进展,第24卷第8期. 2005 |
大颗粒、高浓度硅溶胶的制备新方法. 许念强,顾建祥,罗康,郑松保.化工进展,第24卷第8期. 2005 * |
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CN1830778A (zh) | 2006-09-13 |
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Address after: 100085 Beijing, Haidian District, on the road to information on the ground floor, building 12, C402, C406 room, No. 1 Patentee after: BEIJING GRISH HITECH CO., LTD. Address before: 100085, Beijing, Haidian District on the road No. 26, Zhongguancun venture building, room 1017 Patentee before: Beijing Grish Hitech Co., Ltd. |
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