CN100338719C - 偏转器及其制造方法和应用偏转器的带电粒子束曝光装置 - Google Patents

偏转器及其制造方法和应用偏转器的带电粒子束曝光装置 Download PDF

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Publication number
CN100338719C
CN100338719C CNB2004100072769A CN200410007276A CN100338719C CN 100338719 C CN100338719 C CN 100338719C CN B2004100072769 A CNB2004100072769 A CN B2004100072769A CN 200410007276 A CN200410007276 A CN 200410007276A CN 100338719 C CN100338719 C CN 100338719C
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China
Prior art keywords
electrode
wiring
substrate
charged particle
particle beam
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Expired - Fee Related
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CNB2004100072769A
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English (en)
Chinese (zh)
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CN1525259A (zh
Inventor
小野治人
赤池正刚
玉森研尔
广濑太
小山泰史
寺崎敦则
长永兼一
中山义则
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Canon Inc
Hitachi Ltd
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Canon Inc
Hitachi Ltd
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Publication of CN1525259A publication Critical patent/CN1525259A/zh
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/045—Beam blanking or chopping, i.e. arrangements for momentarily interrupting exposure to the discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3174—Particle-beam lithography, e.g. electron beam lithography
    • H01J37/3177—Multi-beam, e.g. fly's eye, comb probe
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/04—Means for controlling the discharge
    • H01J2237/043—Beam blanking
    • H01J2237/0435—Multi-aperture
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/04—Means for controlling the discharge
    • H01J2237/043—Beam blanking
    • H01J2237/0435—Multi-aperture
    • H01J2237/0437—Semiconductor substrate

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Electron Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
CNB2004100072769A 2003-02-28 2004-02-27 偏转器及其制造方法和应用偏转器的带电粒子束曝光装置 Expired - Fee Related CN100338719C (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP053102/2003 2003-02-28
JP2003053102 2003-02-28
JP2004029602A JP2004282038A (ja) 2003-02-28 2004-02-05 偏向器、偏向器を製造する方法、偏向器を適用した荷電粒子線露光装置
JP029602/2004 2004-02-05

Publications (2)

Publication Number Publication Date
CN1525259A CN1525259A (zh) 2004-09-01
CN100338719C true CN100338719C (zh) 2007-09-19

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CNB2004100072769A Expired - Fee Related CN100338719C (zh) 2003-02-28 2004-02-27 偏转器及其制造方法和应用偏转器的带电粒子束曝光装置

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US (1) US7109494B2 (https=)
EP (1) EP1453076B1 (https=)
JP (1) JP2004282038A (https=)
CN (1) CN100338719C (https=)

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