CH664303A5 - Haltevorrichtung fuer targets fuer kathodenzerstaeubung. - Google Patents

Haltevorrichtung fuer targets fuer kathodenzerstaeubung. Download PDF

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Publication number
CH664303A5
CH664303A5 CH144685A CH144685A CH664303A5 CH 664303 A5 CH664303 A5 CH 664303A5 CH 144685 A CH144685 A CH 144685A CH 144685 A CH144685 A CH 144685A CH 664303 A5 CH664303 A5 CH 664303A5
Authority
CH
Switzerland
Prior art keywords
cooling
target
holding device
clamps
plate
Prior art date
Application number
CH144685A
Other languages
German (de)
English (en)
Inventor
Urs Wegmann
Eduard Dr Rille
Pius Gruenenfelder
Original Assignee
Balzers Hochvakuum
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Hochvakuum filed Critical Balzers Hochvakuum
Priority to CH144685A priority Critical patent/CH664303A5/de
Priority to DE19863603646 priority patent/DE3603646C2/de
Priority to GB8606354A priority patent/GB2173217B/en
Priority to FR8604430A priority patent/FR2579910B1/fr
Priority to JP7263686A priority patent/JPS61231171A/ja
Publication of CH664303A5 publication Critical patent/CH664303A5/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3435—Target holders (includes backing plates and endblocks)
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
    • H01J37/3405—Magnetron sputtering
    • H01J37/3408—Planar magnetron sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3488—Constructional details of particle beam apparatus not otherwise provided for, e.g. arrangement, mounting, housing, environment; special provisions for cleaning or maintenance of the apparatus
    • H01J37/3497—Temperature of target

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
CH144685A 1985-04-03 1985-04-03 Haltevorrichtung fuer targets fuer kathodenzerstaeubung. CH664303A5 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CH144685A CH664303A5 (de) 1985-04-03 1985-04-03 Haltevorrichtung fuer targets fuer kathodenzerstaeubung.
DE19863603646 DE3603646C2 (de) 1985-04-03 1986-02-06 Haltevorrichtung für Targets für Kathodenzerstäubung
GB8606354A GB2173217B (en) 1985-04-03 1986-03-14 Target holder for cathodic sputtering
FR8604430A FR2579910B1 (enrdf_load_stackoverflow) 1985-04-03 1986-03-27
JP7263686A JPS61231171A (ja) 1985-04-03 1986-04-01 カソード・スパツタリング用ターゲツト保持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH144685A CH664303A5 (de) 1985-04-03 1985-04-03 Haltevorrichtung fuer targets fuer kathodenzerstaeubung.

Publications (1)

Publication Number Publication Date
CH664303A5 true CH664303A5 (de) 1988-02-29

Family

ID=4210652

Family Applications (1)

Application Number Title Priority Date Filing Date
CH144685A CH664303A5 (de) 1985-04-03 1985-04-03 Haltevorrichtung fuer targets fuer kathodenzerstaeubung.

Country Status (5)

Country Link
JP (1) JPS61231171A (enrdf_load_stackoverflow)
CH (1) CH664303A5 (enrdf_load_stackoverflow)
DE (1) DE3603646C2 (enrdf_load_stackoverflow)
FR (1) FR2579910B1 (enrdf_load_stackoverflow)
GB (1) GB2173217B (enrdf_load_stackoverflow)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3613018A1 (de) * 1986-04-17 1987-10-22 Santos Pereira Ribeiro Car Dos Magnetron-zerstaeubungskathode
EP0276962A1 (en) * 1987-01-27 1988-08-03 Machine Technology Inc. Cooling device for a sputter target and source
EP0393344A1 (de) * 1989-04-20 1990-10-24 Balzers Aktiengesellschaft Haltevorrichtung für Targets von Zerstäubungsquellen und Verfahren zum Festhalten eines Targets in einer Halterung
US5032246A (en) * 1990-05-17 1991-07-16 Tosoh Smd, Inc. Sputtering target wrench and sputtering target design
JPH074359Y2 (ja) * 1990-07-10 1995-02-01 三ツ星ベルト株式会社 歯付ベルト
DE9014857U1 (de) * 1990-10-26 1992-02-20 Multi-Arc Oberflächentechnik GmbH, 5060 Bergisch Gladbach Großflächige Kathodenanordnung mit gleichmäßigem Abbrandverhalten
US6689254B1 (en) 1990-10-31 2004-02-10 Tokyo Electron Limited Sputtering apparatus with isolated coolant and sputtering target therefor
DE4133564C2 (de) * 1991-10-10 1999-11-18 Leybold Ag Vorrichtung zur lösbaren Befestigung eines Targets oder Targetgrundkörpers auf der Kathodenhalterung
US5271817A (en) * 1992-03-19 1993-12-21 Vlsi Technology, Inc. Design for sputter targets to reduce defects in refractory metal films
US5286361A (en) * 1992-10-19 1994-02-15 Regents Of The University Of California Magnetically attached sputter targets
EP0824760A1 (en) * 1995-05-11 1998-02-25 Materials Research Corporation Sputtering apparatus with isolated coolant and sputtering target therefor
DE29510381U1 (de) * 1995-06-27 1995-09-07 Leybold Ag, 63450 Hanau Vorrichtung zum Beschichten eines scheibenförmigen Substrats
DE19535894A1 (de) * 1995-09-27 1997-04-03 Leybold Materials Gmbh Target für die Sputterkathode einer Vakuumbeschichtungsanlage und Verfahren zu seiner Herstellung
DE19648390A1 (de) * 1995-09-27 1998-05-28 Leybold Materials Gmbh Target für die Sputterkathode einer Vakuumbeschichtungsanlage
DE19627533A1 (de) * 1996-07-09 1998-01-15 Leybold Materials Gmbh Target für die Sputterkathode einer Vakuumbeschichtungsanlage und Verfahren zu seiner Herstellung
US6068742A (en) * 1996-07-22 2000-05-30 Balzers Aktiengesellschaft Target arrangement with a circular plate, magnetron for mounting the target arrangement, and process for coating a series of circular disc-shaped workpieces by means of said magnetron source
US5985115A (en) 1997-04-11 1999-11-16 Novellus Systems, Inc. Internally cooled target assembly for magnetron sputtering
WO1998037568A1 (en) * 1997-02-24 1998-08-27 Novellus Systems, Inc. Internally cooled target assembly for magnetron sputtering
DE19746988A1 (de) * 1997-10-24 1999-05-06 Leybold Ag Zerstäuberkathode
DE29801666U1 (de) * 1998-02-02 1998-04-02 Leybold Materials Gmbh, 63450 Hanau Vorrichtung für die Herstellung von Targets für Zerstäubungskathoden
DE19910786A1 (de) * 1999-03-11 2000-09-14 Leybold Systems Gmbh Magnetronkathoden
US6551470B1 (en) * 1999-06-15 2003-04-22 Academy Precision Materials Clamp and target assembly
US6123775A (en) * 1999-06-30 2000-09-26 Lam Research Corporation Reaction chamber component having improved temperature uniformity
DE20005365U1 (de) 2000-03-23 2000-11-23 VenTec Gesellschaft für Venturekapital und Unternehmensberatung, 57078 Siegen Elektrodenanordnung für Plasmaätzanlagen hoher Leistung
US6264804B1 (en) 2000-04-12 2001-07-24 Ske Technology Corp. System and method for handling and masking a substrate in a sputter deposition system
US6413381B1 (en) 2000-04-12 2002-07-02 Steag Hamatech Ag Horizontal sputtering system
DE10018858B4 (de) * 2000-04-14 2005-08-18 Von Ardenne Anlagentechnik Gmbh Magnetronanordnung
DE102012006717A1 (de) * 2012-04-04 2013-10-10 Oerlikon Trading Ag, Trübbach An eine indirekte Kühlvorrichtung angepasstes Target
CN103286403A (zh) * 2013-05-06 2013-09-11 郑凯 一种平板焊接炉

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2054161A1 (de) * 1969-11-12 1971-05-19 Varian Associates Zerstaubungs Beschichtungsvor richtung
US3878085A (en) * 1973-07-05 1975-04-15 Sloan Technology Corp Cathode sputtering apparatus
US4166018A (en) * 1974-01-31 1979-08-28 Airco, Inc. Sputtering process and apparatus
GB2058143B (en) * 1979-07-31 1983-11-02 Nordiko Ltd Sputtering electrodes
GB2110719B (en) * 1981-11-30 1985-10-30 Anelva Corp Sputtering apparatus
DE3148354A1 (de) * 1981-12-07 1983-06-09 Siemens AG, 1000 Berlin und 8000 München Vorrichtung zur kathodenzerstaeubung eines metalles
JPS59200761A (ja) * 1983-04-28 1984-11-14 Toshiba Corp スパツタリングタ−ゲツト支持装置
US4428816A (en) * 1983-05-25 1984-01-31 Materials Research Corporation Focusing magnetron sputtering apparatus
US4448659A (en) * 1983-09-12 1984-05-15 Vac-Tec Systems, Inc. Method and apparatus for evaporation arc stabilization including initial target cleaning
US4581540A (en) * 1984-03-16 1986-04-08 Teledyne Industries, Inc. Current overload protected solid state relay
CH665057A5 (de) * 1984-07-20 1988-04-15 Balzers Hochvakuum Targetplatte fuer kathodenzerstaeubung.

Also Published As

Publication number Publication date
DE3603646C2 (de) 1996-08-22
FR2579910A1 (enrdf_load_stackoverflow) 1986-10-10
GB2173217B (en) 1989-04-19
JPS61231171A (ja) 1986-10-15
FR2579910B1 (enrdf_load_stackoverflow) 1990-01-12
GB8606354D0 (en) 1986-04-23
GB2173217A (en) 1986-10-08
DE3603646A1 (de) 1986-10-16

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