CH615699A5 - - Google Patents
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- Publication number
- CH615699A5 CH615699A5 CH901275A CH901275A CH615699A5 CH 615699 A5 CH615699 A5 CH 615699A5 CH 901275 A CH901275 A CH 901275A CH 901275 A CH901275 A CH 901275A CH 615699 A5 CH615699 A5 CH 615699A5
- Authority
- CH
- Switzerland
- Prior art keywords
- rinsing
- water
- etched material
- sump
- inlet
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/46—Regeneration of etching compositions
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE2434305A DE2434305C2 (de) | 1974-07-17 | 1974-07-17 | Ätzanlage |
Publications (1)
Publication Number | Publication Date |
---|---|
CH615699A5 true CH615699A5 (fr) | 1980-02-15 |
Family
ID=5920781
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH901275A CH615699A5 (fr) | 1974-07-17 | 1975-07-10 |
Country Status (13)
Country | Link |
---|---|
US (1) | US4017343A (fr) |
AT (1) | AT335246B (fr) |
BE (1) | BE831361A (fr) |
BR (1) | BR7504517A (fr) |
CH (1) | CH615699A5 (fr) |
DE (1) | DE2434305C2 (fr) |
DK (1) | DK325875A (fr) |
FR (1) | FR2278796A1 (fr) |
GB (1) | GB1514286A (fr) |
IE (1) | IE41425B1 (fr) |
IT (1) | IT1050588B (fr) |
NL (1) | NL7508297A (fr) |
SE (1) | SE426713B (fr) |
Families Citing this family (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA1050864A (fr) * | 1973-08-29 | 1979-03-20 | James K. Anderson | Appareil de traitement automatique de photogravures sur surfaces curvilignes |
FR2354796A1 (fr) * | 1976-06-16 | 1978-01-13 | Poudres & Explosifs Ste Nale | Procede et dispositif de lavage d'un produit impregne par une substance liquide |
JPS5767133A (en) * | 1980-10-09 | 1982-04-23 | Nippon Steel Corp | Continuous annealing installation having adjusting device for strip surface |
US4350597A (en) * | 1980-10-31 | 1982-09-21 | Wilson & Company | Apparatus and process for treatment of sludge |
DE3317040A1 (de) * | 1983-05-10 | 1984-11-15 | Hans Höllmüller Maschinenbau GmbH & Co, 7033 Herrenberg | Verfahren und vorrichtung zur elektrolytischen regeneration eines aetzmittels |
US4911761A (en) * | 1984-05-21 | 1990-03-27 | Cfm Technologies Research Associates | Process and apparatus for drying surfaces |
US4778532A (en) * | 1985-06-24 | 1988-10-18 | Cfm Technologies Limited Partnership | Process and apparatus for treating wafers with process fluids |
US4984597B1 (en) * | 1984-05-21 | 1999-10-26 | Cfmt Inc | Apparatus for rinsing and drying surfaces |
US4654089A (en) * | 1985-05-31 | 1987-03-31 | Singelyn Daniel D | Counterflow spray rinse process |
DE3539886A1 (de) * | 1985-11-11 | 1987-05-14 | Hoellmueller Maschbau H | Verfahren und vorrichtung zum aetzen eines zumindest teilweise aus metall, vorzugsweise kupfer, bestehenden aetzguts |
JP2598305B2 (ja) * | 1988-06-06 | 1997-04-09 | 日東電工株式会社 | 半導体ウエハの処理システム |
DE3833242A1 (de) * | 1988-09-30 | 1990-04-05 | Hoellmueller Maschbau H | Verfahren zum aetzen von kupferhaltigen werkstuecken sowie aetzanlage zur durchfuehrung des verfahrens |
JPH0296334A (ja) * | 1988-10-01 | 1990-04-09 | Nisso Eng Kk | 高温エッチング液の循環方法 |
US4895099A (en) * | 1988-11-03 | 1990-01-23 | D.E.M. Controls Of Canada | Device for sequential spray application of chemical solutions used in the preparation of circuit board inner layers |
US4904339A (en) * | 1989-05-26 | 1990-02-27 | Psi Star | Vertical spray etch reactor and method |
DE3935222A1 (de) * | 1989-10-23 | 1991-04-25 | Hoellmueller Maschbau H | Aetzanlage sowie verfahren zum aetzen von gegenstaenden |
MY118065A (en) * | 1989-10-26 | 2004-08-30 | Toshiba Silicone | Cleaning compositions |
US5090432A (en) * | 1990-10-16 | 1992-02-25 | Verteq, Inc. | Single wafer megasonic semiconductor wafer processing system |
DE4110423A1 (de) * | 1991-03-29 | 1992-10-01 | Scient Impex Establishment | Vorrichtung zur chemischen metallbearbeitung |
DE69117927T2 (de) * | 1991-04-02 | 1996-08-01 | Unitika Ltd | Verfahren zum Behandeln eines geschmolzenen Salzbades |
KR100254653B1 (ko) | 1991-10-04 | 2000-05-01 | 월터 알란 이. | 대상물을 처리하는 방법 |
US6864570B2 (en) * | 1993-12-17 | 2005-03-08 | The Regents Of The University Of California | Method and apparatus for fabricating self-assembling microstructures |
DE4345077C2 (de) * | 1993-12-31 | 1999-09-23 | Zibulla & Sohn Gmbh | Vorrichtung zum Reinigen und Entfetten der Oberflächen von Blechen |
US5720813A (en) | 1995-06-07 | 1998-02-24 | Eamon P. McDonald | Thin sheet handling system |
US5733378A (en) * | 1996-02-26 | 1998-03-31 | Austin American Technology | Method for cleaning printed circuit boards |
US6039059A (en) | 1996-09-30 | 2000-03-21 | Verteq, Inc. | Wafer cleaning system |
US6328809B1 (en) | 1998-10-09 | 2001-12-11 | Scp Global Technologies, Inc. | Vapor drying system and method |
WO2010030505A1 (fr) * | 2008-09-10 | 2010-03-18 | Austin American Technology Corporation | Nettoyage et test de la propreté ionique d’ensembles électroniques |
US9406500B2 (en) * | 2012-02-08 | 2016-08-02 | Taiwan Semiconductor Manufacturing Company, Ltd. | Flux residue cleaning system and method |
EP3875642A1 (fr) * | 2020-03-04 | 2021-09-08 | AT & S Austria Technologie & Systemtechnik Aktiengesellschaft | Procédé de traitement des eaux de rinçage provenant de la fabrication de cartes de circuit imprimé et/ou de substrats |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3082774A (en) * | 1961-02-08 | 1963-03-26 | Ct Circuits Inc | Etching machine |
US3310435A (en) * | 1963-11-18 | 1967-03-21 | Dravo Corp | Process for continuous pickling of steel strip and regeneration of the contact acid |
US3871914A (en) * | 1971-10-18 | 1975-03-18 | Chemcut Corp | Etchant rinse apparatus |
-
1974
- 1974-07-17 DE DE2434305A patent/DE2434305C2/de not_active Expired
-
1975
- 1975-07-10 CH CH901275A patent/CH615699A5/de not_active IP Right Cessation
- 1975-07-11 AT AT539075A patent/AT335246B/de not_active IP Right Cessation
- 1975-07-11 NL NL7508297A patent/NL7508297A/xx not_active Application Discontinuation
- 1975-07-15 SE SE7508065A patent/SE426713B/xx not_active Application Discontinuation
- 1975-07-15 BE BE2054459A patent/BE831361A/fr not_active IP Right Cessation
- 1975-07-15 GB GB29529/75A patent/GB1514286A/en not_active Expired
- 1975-07-15 US US05/596,001 patent/US4017343A/en not_active Expired - Lifetime
- 1975-07-16 IT IT68866/75A patent/IT1050588B/it active
- 1975-07-16 FR FR7523056A patent/FR2278796A1/fr active Granted
- 1975-07-16 BR BR7504517*A patent/BR7504517A/pt unknown
- 1975-07-17 DK DK325875A patent/DK325875A/da not_active Application Discontinuation
- 1975-07-17 IE IE1594/75A patent/IE41425B1/en unknown
Also Published As
Publication number | Publication date |
---|---|
SE7508065L (sv) | 1976-01-19 |
IT1050588B (it) | 1981-03-20 |
IE41425L (en) | 1976-01-17 |
NL7508297A (nl) | 1976-01-20 |
GB1514286A (en) | 1978-06-14 |
ATA539075A (de) | 1976-06-15 |
FR2278796A1 (fr) | 1976-02-13 |
SE426713B (sv) | 1983-02-07 |
DE2434305C2 (de) | 1983-09-29 |
BR7504517A (pt) | 1976-07-06 |
IE41425B1 (en) | 1980-01-02 |
DK325875A (da) | 1976-02-13 |
FR2278796B3 (fr) | 1979-04-27 |
AT335246B (de) | 1977-02-25 |
BE831361A (fr) | 1975-11-03 |
US4017343A (en) | 1977-04-12 |
DE2434305A1 (de) | 1976-01-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PL | Patent ceased |