CA2920837C - Lapping slurry having a cationic surfactant - Google Patents

Lapping slurry having a cationic surfactant Download PDF

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Publication number
CA2920837C
CA2920837C CA2920837A CA2920837A CA2920837C CA 2920837 C CA2920837 C CA 2920837C CA 2920837 A CA2920837 A CA 2920837A CA 2920837 A CA2920837 A CA 2920837A CA 2920837 C CA2920837 C CA 2920837C
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CA
Canada
Prior art keywords
chloride
diamond
lapping slurry
lapping
dimethylamine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CA2920837A
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English (en)
French (fr)
Other versions
CA2920837A1 (en
Inventor
Shuang Ji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Diamond Innovations Inc
Original Assignee
Diamond Innovations Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Diamond Innovations Inc filed Critical Diamond Innovations Inc
Publication of CA2920837A1 publication Critical patent/CA2920837A1/en
Application granted granted Critical
Publication of CA2920837C publication Critical patent/CA2920837C/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09G—POLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00—Polishing compositions
    • C09G1/02—Polishing compositions containing abrasives or grinding agents
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1454—Abrasive powders, suspensions and pastes for polishing
    • C09K3/1472—Non-aqueous liquid suspensions
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1436—Composite particles, e.g. coated particles
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1454—Abrasive powders, suspensions and pastes for polishing
    • C09K3/1463—Aqueous liquid suspensions
    • H10P52/00—
    • H10P52/402—

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Composite Materials (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
CA2920837A 2013-08-23 2014-07-24 Lapping slurry having a cationic surfactant Active CA2920837C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US13/974,588 US9388328B2 (en) 2013-08-23 2013-08-23 Lapping slurry having a cationic surfactant
US13/974,588 2013-08-23
PCT/US2014/047980 WO2015026477A1 (en) 2013-08-23 2014-07-24 Lapping slurry having a cationic surfactant

Publications (2)

Publication Number Publication Date
CA2920837A1 CA2920837A1 (en) 2015-02-26
CA2920837C true CA2920837C (en) 2021-07-27

Family

ID=51352791

Family Applications (1)

Application Number Title Priority Date Filing Date
CA2920837A Active CA2920837C (en) 2013-08-23 2014-07-24 Lapping slurry having a cationic surfactant

Country Status (13)

Country Link
US (1) US9388328B2 (show.php)
EP (2) EP3036299B1 (show.php)
JP (1) JP6491208B2 (show.php)
KR (1) KR102262967B1 (show.php)
CN (1) CN105579548A (show.php)
BR (1) BR112016003781B1 (show.php)
CA (1) CA2920837C (show.php)
DK (1) DK3036299T3 (show.php)
ES (1) ES2874899T3 (show.php)
MY (1) MY179920A (show.php)
SG (1) SG11201601038WA (show.php)
TW (1) TWI662115B (show.php)
WO (1) WO2015026477A1 (show.php)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9633831B2 (en) * 2013-08-26 2017-04-25 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Chemical mechanical polishing composition for polishing a sapphire surface and methods of using same
CN106147617A (zh) * 2015-04-28 2016-11-23 天津诺邦科技有限公司 一种多晶金刚石水基抛光液及其制备方法
EP3456624B1 (en) 2017-09-14 2020-01-01 AIRBUS HELICOPTERS DEUTSCHLAND GmbH A composite sandwich panel with a sandwich area
TWI640434B (zh) * 2017-12-14 2018-11-11 明志科技大學 Composite separator and preparation method thereof
CN108892509A (zh) * 2018-08-03 2018-11-27 宁波哈泰雷碳化物有限公司 一种用于陶瓷浇注成型的纳米碳化硅浆料的制备方法
CN114958302B (zh) * 2022-05-26 2024-06-18 珠海戴蒙斯科技有限公司 一种高效的研磨液及其制备方法和应用
TWI899712B (zh) * 2023-03-30 2025-10-01 美商戴蒙創新公司 具有改善的碳化矽移除率之鑽石基拋光組成物

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US4038048A (en) * 1975-02-14 1977-07-26 Thrower Jr Herbert T Lapping composition containing a carboxy vinyl polymer
US4468339B1 (en) * 1982-01-21 1989-05-16 Aqueous compositions containing overbased materials
US4867757A (en) 1988-09-09 1989-09-19 Nalco Chemical Company Lapping slurry compositions with improved lap rate
JP3247419B2 (ja) * 1991-04-10 2002-01-15 株式会社日立製作所 ラップ定盤およびラップ液
US5456735A (en) 1991-07-12 1995-10-10 Norton Company Method of abrading with boron suboxide (BxO) and the boron suboxide (BxO) articles and composition used
JP3576261B2 (ja) * 1995-03-29 2004-10-13 東京磁気印刷株式会社 分散／凝集状態を制御した遊離砥粒スラリー、その製造法及びその分散方法
US5855633A (en) 1997-06-06 1999-01-05 Lockheed Martin Energy Systems, Inc. Lapping slurry
US6258140B1 (en) * 1999-09-27 2001-07-10 Fujimi America Inc. Polishing composition
US6491843B1 (en) * 1999-12-08 2002-12-10 Eastman Kodak Company Slurry for chemical mechanical polishing silicon dioxide
JP2003138248A (ja) * 2001-10-16 2003-05-14 Ppt Research Inc 切削又は研磨用スラリー組成物およびその利用
US7018560B2 (en) * 2003-08-05 2006-03-28 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Composition for polishing semiconductor layers
JP3974127B2 (ja) * 2003-09-12 2007-09-12 株式会社東芝 半導体装置の製造方法
JP2007012638A (ja) * 2003-10-01 2007-01-18 Asahi Kasei Chemicals Corp 金属用研磨組成物
US7253111B2 (en) * 2004-04-21 2007-08-07 Rohm And Haas Electronic Materials Cmp Holding, Inc. Barrier polishing solution
US20060196849A1 (en) 2005-03-04 2006-09-07 Kevin Moeggenborg Composition and method for polishing a sapphire surface
US20060289387A1 (en) 2005-06-23 2006-12-28 Lombardi John L Non-aqueous lapping composition and method using same
KR20070012209A (ko) * 2005-07-21 2007-01-25 가부시키가이샤 후지미인코퍼레이티드 연마용 조성물 및 연마 방법
US20080148649A1 (en) * 2006-12-21 2008-06-26 Zhendong Liu Ruthenium-barrier polishing slurry
JP2008270584A (ja) * 2007-04-23 2008-11-06 Nippon Chem Ind Co Ltd 半導体ウエハ研磨用組成物及び研磨加工方法
KR101232442B1 (ko) * 2007-09-21 2013-02-12 캐보트 마이크로일렉트로닉스 코포레이션 아미노실란으로 처리된 연마제 입자를 이용한 연마 조성물 및 방법
JP2009158810A (ja) * 2007-12-27 2009-07-16 Toshiba Corp 化学的機械的研磨用スラリーおよび半導体装置の製造方法
JP2010028086A (ja) * 2008-06-16 2010-02-04 Hitachi Chem Co Ltd Ｃｍｐ研磨剤、このｃｍｐ研磨剤を用いた研磨方法
JP2011171689A (ja) * 2009-07-07 2011-09-01 Kao Corp シリコンウエハ用研磨液組成物
JP2011040427A (ja) * 2009-08-06 2011-02-24 Yamaguchi Seiken Kogyo Kk 研磨剤組成物
JP5452175B2 (ja) 2009-11-04 2014-03-26 昭和電工株式会社 ラップ加工方法
JP2011171446A (ja) * 2010-02-17 2011-09-01 Hitachi Chem Co Ltd Ｃｍｐ用研磨液及びこれを用いた研磨方法
CN101974296A (zh) * 2010-11-12 2011-02-16 大连三达奥克化学股份有限公司 核/壳型复合纳米磨料硅片抛光液
JP5705813B2 (ja) * 2011-12-02 2015-04-22 古河電気工業株式会社 ダイヤモンド砥粒の製造方法、ワイヤ工具の製造方法およびワイヤ工具
CN103254799A (zh) * 2013-05-29 2013-08-21 陈玉祥 一种亲水金刚石悬浮研磨抛光液及其制备方法

Also Published As

Publication number Publication date
US9388328B2 (en) 2016-07-12
TW201510201A (zh) 2015-03-16
TWI662115B (zh) 2019-06-11
BR112016003781A2 (show.php) 2017-08-01
EP3036299A1 (en) 2016-06-29
WO2015026477A1 (en) 2015-02-26
JP2016532757A (ja) 2016-10-20
EP3036299B1 (en) 2021-04-21
EP3653683A1 (en) 2020-05-20
BR112016003781B1 (pt) 2022-05-17
US20150052822A1 (en) 2015-02-26
MY179920A (en) 2020-11-19
CA2920837A1 (en) 2015-02-26
DK3036299T3 (da) 2021-06-28
KR102262967B1 (ko) 2021-06-08
KR20160047504A (ko) 2016-05-02
ES2874899T3 (es) 2021-11-05
CN105579548A (zh) 2016-05-11
JP6491208B2 (ja) 2019-03-27
SG11201601038WA (en) 2016-03-30

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Effective date: 20190529