CA2633667C - Radiation image conversion panel, scintillator panel, and radiation image sensor - Google Patents

Radiation image conversion panel, scintillator panel, and radiation image sensor Download PDF

Info

Publication number
CA2633667C
CA2633667C CA2633667A CA2633667A CA2633667C CA 2633667 C CA2633667 C CA 2633667C CA 2633667 A CA2633667 A CA 2633667A CA 2633667 A CA2633667 A CA 2633667A CA 2633667 C CA2633667 C CA 2633667C
Authority
CA
Canada
Prior art keywords
oxide layer
film
aluminum oxide
scintillator
metal film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CA2633667A
Other languages
English (en)
French (fr)
Other versions
CA2633667A1 (en
Inventor
Takaharu Suzuki
Yutaka Kusuyama
Masanori Yamashita
Kazuhiro Shirakawa
Toshio Takabayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamamatsu Photonics KK
Original Assignee
Hamamatsu Photonics KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics KK filed Critical Hamamatsu Photonics KK
Publication of CA2633667A1 publication Critical patent/CA2633667A1/en
Application granted granted Critical
Publication of CA2633667C publication Critical patent/CA2633667C/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
    • H10F30/20—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
    • H10F30/29—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to radiation having very short wavelengths, e.g. X-rays, gamma-rays or corpuscular radiation

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Measurement Of Radiation (AREA)
  • Conversion Of X-Rays Into Visible Images (AREA)
CA2633667A 2007-06-15 2008-06-05 Radiation image conversion panel, scintillator panel, and radiation image sensor Active CA2633667C (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/812,233 US7468514B1 (en) 2007-06-15 2007-06-15 Radiation image conversion panel, scintillator panel, and radiation image sensor
US11/812,233 2007-06-15

Publications (2)

Publication Number Publication Date
CA2633667A1 CA2633667A1 (en) 2008-12-15
CA2633667C true CA2633667C (en) 2012-03-13

Family

ID=40131434

Family Applications (1)

Application Number Title Priority Date Filing Date
CA2633667A Active CA2633667C (en) 2007-06-15 2008-06-05 Radiation image conversion panel, scintillator panel, and radiation image sensor

Country Status (5)

Country Link
US (2) US7468514B1 (https=)
JP (1) JP4317251B2 (https=)
KR (3) KR101042065B1 (https=)
CN (2) CN102819032B (https=)
CA (1) CA2633667C (https=)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE502004010774D1 (de) * 2004-10-08 2010-04-01 Sgl Carbon Se Polymergebundene fasergelege
CN101604118B (zh) * 2008-12-31 2012-07-04 中国工程物理研究院流体物理研究所 一种将高能x射线图像转换为可见光图像的装置
WO2010103917A1 (ja) 2009-03-13 2010-09-16 コニカミノルタエムジー株式会社 放射線検出装置
US8957380B2 (en) * 2009-06-30 2015-02-17 Avago Technologies General Ip (Singapore) Pte. Ltd. Infrared attenuating or blocking layer in optical proximity sensor
JP5577644B2 (ja) * 2009-08-05 2014-08-27 コニカミノルタ株式会社 放射線画像検出装置およびその製造方法
JP2011137665A (ja) * 2009-12-26 2011-07-14 Canon Inc シンチレータパネル及び放射線撮像装置とその製造方法、ならびに放射線撮像システム
GB2477346B (en) * 2010-02-01 2016-03-23 Scintacor Ltd Scintillator assembly for use in digital x-ray imaging
US8729471B2 (en) 2010-07-30 2014-05-20 Pulsetor, Llc Electron detector including an intimately-coupled scintillator-photomultiplier combination, and electron microscope and X-ray detector employing same
JP6215202B2 (ja) * 2011-08-05 2017-10-18 パルセータ, エルエルシーPulsetor, Llc 密接に結合したシンチレータ−光電子増倍管の１又は複数の組合体を含む電子検出器及びそれを使用した電子顕微鏡
US8829454B2 (en) 2012-02-27 2014-09-09 Analog Devices, Inc. Compact sensor module
JP5922518B2 (ja) * 2012-07-20 2016-05-24 浜松ホトニクス株式会社 シンチレータパネル及び放射線検出器
US9116022B2 (en) 2012-12-07 2015-08-25 Analog Devices, Inc. Compact sensor module
KR101455382B1 (ko) * 2012-12-26 2014-10-27 한국전기연구원 휘진성 형광체를 이용한 하이브리드 엑스-선 검출 장치
EP3197983B1 (en) 2014-09-25 2023-06-07 Koninklijke Philips N.V. Detection device for detecting gamma or x-ray radiation
KR101601530B1 (ko) * 2014-11-06 2016-03-09 현대자동차주식회사 전파 투과형 다층 광학막
WO2016153335A1 (en) * 2015-03-20 2016-09-29 Perkinelmer Health Sciences B.V. Scintillator
WO2016167334A1 (ja) * 2015-04-16 2016-10-20 三菱化学株式会社 放射線像変換スクリーン、フラットパネルディテクタ、放射線検出装置、及びシンチレータ
US10074624B2 (en) 2015-08-07 2018-09-11 Analog Devices, Inc. Bond pads with differently sized openings
JP6504997B2 (ja) * 2015-11-05 2019-04-24 浜松ホトニクス株式会社 放射線像変換パネル、放射線像変換パネルの製造方法、放射線イメージセンサ及び放射線イメージセンサの製造方法
JP6676372B2 (ja) * 2015-12-28 2020-04-08 株式会社Ｓ−Ｎａｎｏｔｅｃｈ Ｃｏ−Ｃｒｅａｔｉｏｎ シンチレータ及び電子検出器
DE112017003014B4 (de) 2016-06-16 2025-03-06 Ngk Insulators, Ltd. Leuchtstoffvorrichtung und Fluoreszenz aussendende Beleuchtungsvorrichtung
CN108966642A (zh) * 2017-03-22 2018-12-07 富士胶片株式会社 放射线检测器以及放射线图像摄影装置
JP6534497B2 (ja) * 2017-03-22 2019-06-26 富士フイルム株式会社 放射線検出器及び放射線画像撮影装置
US11056455B2 (en) 2017-08-01 2021-07-06 Analog Devices, Inc. Negative fillet for mounting an integrated device die to a carrier
JP6433561B1 (ja) 2017-09-27 2018-12-05 浜松ホトニクス株式会社 シンチレータパネル及び放射線検出器
JP6433560B1 (ja) 2017-09-27 2018-12-05 浜松ホトニクス株式会社 シンチレータパネル及び放射線検出器
EP3890612A4 (en) 2018-12-06 2022-10-05 Analog Devices, Inc. SHIELDED INTEGRATED DEVICE HOUSINGS
CN113228272B (zh) 2018-12-06 2025-02-28 美国亚德诺半导体公司 具有无源器件组件的集成器件封装
JP7057299B2 (ja) 2019-02-21 2022-04-19 ニチバン株式会社 伸縮性パッドを用いた医療用貼付材
JP2021032817A (ja) * 2019-08-28 2021-03-01 キヤノン電子管デバイス株式会社 シンチレータパネル、および放射線検出器
US11664340B2 (en) 2020-07-13 2023-05-30 Analog Devices, Inc. Negative fillet for mounting an integrated device die to a carrier
CN115107135A (zh) * 2021-03-22 2022-09-27 云南传承木业有限公司 一种无醛强化木地板的制作方法

Family Cites Families (44)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5689702A (en) 1979-12-21 1981-07-21 Sumitomo Electric Ind Ltd Laser beam reflecting mirror
JPS5889702A (ja) 1981-11-20 1983-05-28 松下電器産業株式会社 導電性ペ−スト
JPS6173901A (ja) 1984-09-19 1986-04-16 Fujitsu Ltd 赤外線検知装置用金属鏡の製造方法
DE3578359D1 (de) 1984-12-17 1990-07-26 Konishiroku Photo Ind Schirm zum speichern eines strahlungsbildes.
US4873708A (en) 1987-05-11 1989-10-10 General Electric Company Digital radiographic imaging system and method therefor
JP2677818B2 (ja) 1987-08-17 1997-11-17 コニカ株式会社 放射線画像変換パネル
JPH04118599A (ja) 1990-09-10 1992-04-20 Fujitsu Ltd Ｘ線画像変換シートおよびそのシートを用いる装置
US5949848A (en) 1996-07-19 1999-09-07 Varian Assocaites, Inc. X-ray imaging apparatus and method using a flat amorphous silicon imaging panel
KR100389980B1 (ko) 1998-06-18 2003-07-12 하마마츠 포토닉스 가부시키가이샤 신틸레이터 패널, 방사선 이미지 센서 및 그 제조 방법
JP3566926B2 (ja) 1998-06-18 2004-09-15 浜松ホトニクス株式会社 シンチレータパネル及び放射線イメージセンサ
DE69913185T2 (de) 1998-06-18 2004-08-26 Hamamatsu Photonics K.K., Hamamatsu Verfahren zur abscheidung eines organischen films
US7034306B2 (en) 1998-06-18 2006-04-25 Hamamatsu Photonics K.K. Scintillator panel and radiation image sensor
EP1139120B1 (en) 1998-06-18 2005-09-28 Hamamatsu Photonics K.K. Radiation image sensor, and method for manufacturing the same
AU3168199A (en) 1999-04-09 2000-11-14 Hamamatsu Photonics K.K. Scintillator panel and radiation ray image sensor
AU3678300A (en) * 1999-04-16 2000-11-02 Hamamatsu Photonics K.K. Scintillator panel and radiation image sensor
JP3126715B2 (ja) * 1999-04-16 2001-01-22 浜松ホトニクス株式会社 シンチレータパネル及び放射線イメージセンサ
WO2002023219A1 (en) * 2000-09-11 2002-03-21 Hamamatsu Photonics K.K. Scintillator panel, radiation image sensor and methods of producing them
WO2002023220A1 (en) 2000-09-11 2002-03-21 Hamamatsu Photonics K.K. Scintillator panel, radiation image sensor and methods of producing them
DE20021660U1 (de) 2000-12-20 2002-05-02 Alanod Aluminium Veredlung Gmb Verbundmaterial
DE20021657U1 (de) 2000-12-20 2002-05-02 Alanod Aluminium Veredlung Gmb Abdeckteil für eine Lichtquelle
KR20030072606A (ko) * 2001-01-30 2003-09-15 하마마츠 포토닉스 가부시키가이샤 신틸레이터 패널 및 방사선 이미지 센서
US6835936B2 (en) 2001-02-07 2004-12-28 Canon Kabushiki Kaisha Scintillator panel, method of manufacturing scintillator panel, radiation detection device, and radiation detection system
US6652996B2 (en) 2002-01-31 2003-11-25 Eastman Kodak Company Radiographic phosphor panel having improved speed and sharpness
JP2003262700A (ja) * 2002-03-08 2003-09-19 Konica Corp 放射線画像変換パネル及び放射線画像変換パネルの作製方法
JP4118599B2 (ja) 2002-05-20 2008-07-16 三菱電機株式会社 ダイバーシチ受信機および受信方法
JP4451843B2 (ja) 2003-03-07 2010-04-14 浜松ホトニクス株式会社 シンチレータパネルの製造方法及び放射線イメージセンサの製造方法
JP2004294137A (ja) * 2003-03-26 2004-10-21 Konica Minolta Holdings Inc 放射線像変換パネル及びその製造方法
JP2004325126A (ja) * 2003-04-22 2004-11-18 Canon Inc 放射線検出装置
JP3848288B2 (ja) * 2003-04-25 2006-11-22 キヤノン株式会社 放射線画像撮影装置
JP2005029895A (ja) 2003-07-04 2005-02-03 Agfa Gevaert Nv 蒸着装置
JP2005091221A (ja) 2003-09-18 2005-04-07 Fuji Photo Film Co Ltd 放射線像変換器
JP2005172511A (ja) * 2003-12-09 2005-06-30 Canon Inc 放射線検出装置、その製造方法、および放射線撮像システム
JP2005181220A (ja) 2003-12-22 2005-07-07 Fuji Photo Film Co Ltd 放射線像変換パネル
JP4594188B2 (ja) * 2004-08-10 2010-12-08 キヤノン株式会社 放射線検出装置及び放射線検出システム
JP2006119124A (ja) 2004-09-22 2006-05-11 Fuji Photo Film Co Ltd 放射線像変換パネルおよびその製造方法
US20060060792A1 (en) 2004-09-22 2006-03-23 Fuji Photo Film Co., Ltd. Radiographic image conversion panel and method of manufacturing the same
JP2006113007A (ja) 2004-10-18 2006-04-27 Konica Minolta Medical & Graphic Inc 放射線画像変換パネル
JPWO2006049183A1 (ja) * 2004-11-01 2008-05-29 マークテクノロジー株式会社 放射線画像撮像装置
JP2006189377A (ja) * 2005-01-07 2006-07-20 Canon Inc シンチレータパネル、放射線検出装置、及び放射線検出システム
JP2006220439A (ja) * 2005-02-08 2006-08-24 Canon Inc シンチレータパネル、放射線検出装置及びその製造方法
JP2006267013A (ja) * 2005-03-25 2006-10-05 Fuji Photo Film Co Ltd 輝尽性蛍光体パネル及び輝尽性蛍光体パネルの製造方法
JP2007040836A (ja) * 2005-08-03 2007-02-15 Fujifilm Corp 放射線像変換パネル
RU2298813C1 (ru) 2005-12-26 2007-05-10 Федеральное государственное унитарное предприятие "Научно-исследовательский институт импульсной техники" (ФГУП НИИИТ) Волоконно-оптическое устройство для визуализации распределения плотности потока импульсного ионизирующего излучения
KR100745991B1 (ko) 2006-08-11 2007-08-06 삼성전자주식회사 이미지 센서 및 그 제조 방법

Also Published As

Publication number Publication date
US7812315B2 (en) 2010-10-12
CN101324671B (zh) 2012-10-03
US7468514B1 (en) 2008-12-23
CN102819032A (zh) 2012-12-12
JP2008309770A (ja) 2008-12-25
JP4317251B2 (ja) 2009-08-19
CN101324671A (zh) 2008-12-17
KR20120081045A (ko) 2012-07-18
US20090072160A1 (en) 2009-03-19
KR20110031442A (ko) 2011-03-28
CA2633667A1 (en) 2008-12-15
KR101042065B1 (ko) 2011-06-16
KR101294880B1 (ko) 2013-08-08
CN102819032B (zh) 2015-11-25
US20080308736A1 (en) 2008-12-18
KR20080110507A (ko) 2008-12-18
KR101294870B1 (ko) 2013-08-08

Similar Documents

Publication Publication Date Title
CA2633667C (en) Radiation image conversion panel, scintillator panel, and radiation image sensor
JPWO2002023220A1 (ja) シンチレータパネル、放射線イメージセンサおよびそれらの製造方法
WO2002023219A1 (en) Scintillator panel, radiation image sensor and methods of producing them
EP2006710A2 (en) Radiation image conversion panel, scintillator panel, and radiation image sensor
CA2633785C (en) Radiation image conversion panel, scintillator panel, and radiation image sensor
JP6504997B2 (ja) 放射線像変換パネル、放射線像変換パネルの製造方法、放射線イメージセンサ及び放射線イメージセンサの製造方法
US7741619B2 (en) Scintillator panel for radiation, and flat panel detector
EP3062127B1 (en) Radiation image converting panel and radiation image sensor

Legal Events

Date Code Title Description
EEER Examination request
MPN Maintenance fee for patent paid

Free format text: FEE DESCRIPTION TEXT: MF (PATENT, 17TH ANNIV.) - STANDARD

Year of fee payment: 17

U00 Fee paid

Free format text: ST27 STATUS EVENT CODE: A-4-4-U10-U00-U101 (AS PROVIDED BY THE NATIONAL OFFICE); EVENT TEXT: MAINTENANCE REQUEST RECEIVED

Effective date: 20250430

U11 Full renewal or maintenance fee paid

Free format text: ST27 STATUS EVENT CODE: A-4-4-U10-U11-U102 (AS PROVIDED BY THE NATIONAL OFFICE); EVENT TEXT: MAINTENANCE FEE PAYMENT PAID IN FULL

Effective date: 20250430