CA2425787C - Epitaxial edge termination for silicon carbide schottky devices and methods of fabricating silicon carbide devices incorporating same - Google Patents

Epitaxial edge termination for silicon carbide schottky devices and methods of fabricating silicon carbide devices incorporating same Download PDF

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Publication number
CA2425787C
CA2425787C CA2425787A CA2425787A CA2425787C CA 2425787 C CA2425787 C CA 2425787C CA 2425787 A CA2425787 A CA 2425787A CA 2425787 A CA2425787 A CA 2425787A CA 2425787 C CA2425787 C CA 2425787C
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CA
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Prior art keywords
silicon carbide
type
layer
schottky
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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CA2425787A
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English (en)
French (fr)
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CA2425787A1 (en
Inventor
Ranbir Singh
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Wolfspeed Inc
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Cree Inc
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Publication of CA2425787A1 publication Critical patent/CA2425787A1/en
Application granted granted Critical
Publication of CA2425787C publication Critical patent/CA2425787C/en
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Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D8/00—Diodes
    • H10D8/50—PIN diodes 
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D8/00—Diodes
    • H10D8/60—Schottky-barrier diodes 
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/83—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge
    • H10D62/832—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge being Group IV materials comprising two or more elements, e.g. SiGe
    • H10D62/8325—Silicon carbide
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/931—Silicon carbide semiconductor

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  • Electrodes Of Semiconductors (AREA)
  • Ceramic Products (AREA)
CA2425787A 2000-11-28 2001-11-06 Epitaxial edge termination for silicon carbide schottky devices and methods of fabricating silicon carbide devices incorporating same Expired - Lifetime CA2425787C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/723,710 2000-11-28
US09/723,710 US6573128B1 (en) 2000-11-28 2000-11-28 Epitaxial edge termination for silicon carbide Schottky devices and methods of fabricating silicon carbide devices incorporating same
PCT/US2001/047924 WO2002045177A2 (en) 2000-11-28 2001-11-06 Epitaxial edge termination for silicon carbide schottky devices and methods of fabricating silicon carbide devices incorporating same

Publications (2)

Publication Number Publication Date
CA2425787A1 CA2425787A1 (en) 2002-06-06
CA2425787C true CA2425787C (en) 2014-09-30

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Family Applications (1)

Application Number Title Priority Date Filing Date
CA2425787A Expired - Lifetime CA2425787C (en) 2000-11-28 2001-11-06 Epitaxial edge termination for silicon carbide schottky devices and methods of fabricating silicon carbide devices incorporating same

Country Status (8)

Country Link
US (2) US6573128B1 (enExample)
EP (1) EP1354362B1 (enExample)
JP (1) JP4115275B2 (enExample)
KR (1) KR100816541B1 (enExample)
CN (1) CN100370627C (enExample)
AU (1) AU2002229001A1 (enExample)
CA (1) CA2425787C (enExample)
WO (1) WO2002045177A2 (enExample)

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Also Published As

Publication number Publication date
EP1354362B1 (en) 2013-01-16
KR100816541B1 (ko) 2008-03-26
US20030045045A1 (en) 2003-03-06
WO2002045177A3 (en) 2003-01-30
EP1354362A2 (en) 2003-10-22
JP4115275B2 (ja) 2008-07-09
CN100370627C (zh) 2008-02-20
WO2002045177A2 (en) 2002-06-06
JP2004515080A (ja) 2004-05-20
AU2002229001A1 (en) 2002-06-11
US6673662B2 (en) 2004-01-06
CA2425787A1 (en) 2002-06-06
CN1663053A (zh) 2005-08-31
US6573128B1 (en) 2003-06-03
KR20040055717A (ko) 2004-06-26

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