CA2406543A1 - Procede et sous-systeme de traitement de signaux dans lesquels on utilise une pluralite de dispositifs micromecaniques vibrants - Google Patents
Procede et sous-systeme de traitement de signaux dans lesquels on utilise une pluralite de dispositifs micromecaniques vibrants Download PDFInfo
- Publication number
- CA2406543A1 CA2406543A1 CA002406543A CA2406543A CA2406543A1 CA 2406543 A1 CA2406543 A1 CA 2406543A1 CA 002406543 A CA002406543 A CA 002406543A CA 2406543 A CA2406543 A CA 2406543A CA 2406543 A1 CA2406543 A1 CA 2406543A1
- Authority
- CA
- Canada
- Prior art keywords
- filter
- micromechanical
- subsystem
- desired frequency
- low noise
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/462—Microelectro-mechanical filters
- H03H9/465—Microelectro-mechanical filters in combination with other electronic elements
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H9/02393—Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor
- H03H9/02409—Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor by application of a DC-bias voltage
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/462—Microelectro-mechanical filters
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/462—Microelectro-mechanical filters
- H03H9/467—Post-fabrication trimming of parameters, e.g. center frequency
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/48—Coupling means therefor
- H03H9/50—Mechanical coupling means
- H03H9/505—Mechanical coupling means for microelectro-mechanical filters
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H2009/02488—Vibration modes
- H03H2009/02511—Vertical, i.e. perpendicular to the substrate plane
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H2009/02488—Vibration modes
- H03H2009/02519—Torsional
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H2009/02488—Vibration modes
- H03H2009/02527—Combined
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Micromachines (AREA)
- Transceivers (AREA)
- Transmitters (AREA)
- Oscillators With Electromechanical Resonators (AREA)
- Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
- Amplifiers (AREA)
- Input Circuits Of Receivers And Coupling Of Receivers And Audio Equipment (AREA)
- Networks Using Active Elements (AREA)
- Filters And Equalizers (AREA)
Abstract
La présente invention concerne plusieurs procédés et architectures fondés sur des systèmes microélectromécaniques (MEMS) dans lesquels on utilise des résonateurs micromécaniques vibrants dans des circuits pour effectuer des fonctions de filtrage, de mélange, de référence de fréquence et d'amplification. Un procédé et un sous-système sont prévus pour traiter des signaux de fréquence radioélectrique au moyen d'une pluralité de dispositifs micromécaniques vibrants se présentant spécifiquement sous forme d'un filtre mélangeur à fréquence intermédiaire et d'un sélecteur de voie de fréquence radioélectrique ou d'un filtre de fréquence radioélectrique à réjection d'image. Un des principaux avantages résultant de l'utilisation de telles architectures réside dans l'économie d'énergie associée à une forte sélectivité (c'est-à-dire un facteur de qualité (Q) élevé). Ces procédés et ces circuits peuvent également éliminer la nécessité d'utiliser un amplificateur à faible bruit dans un récepteur ou dans un système d'émetteur-récepteur. Par conséquent, cette invention repose sur l'utilisation d'un grand nombre de liaisons micromécaniques dans des réseaux SSI pour assurer des fonctions de traitement du signal avec une consommation de puissance sensiblement nulle.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US19906300P | 2000-04-20 | 2000-04-20 | |
US60/199,063 | 2000-04-20 | ||
PCT/US2001/040565 WO2001082478A2 (fr) | 2000-04-20 | 2001-04-20 | Procede et sous-systeme de traitement de signaux dans lesquels on utilise une pluralite de dispositifs micromecaniques vibrants |
Publications (1)
Publication Number | Publication Date |
---|---|
CA2406543A1 true CA2406543A1 (fr) | 2001-11-01 |
Family
ID=22736053
Family Applications (4)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA002406543A Abandoned CA2406543A1 (fr) | 2000-04-20 | 2001-04-20 | Procede et sous-systeme de traitement de signaux dans lesquels on utilise une pluralite de dispositifs micromecaniques vibrants |
CA002406176A Abandoned CA2406176A1 (fr) | 2000-04-20 | 2001-04-20 | Procede et appareil pour selectionner au moins un canal desire en utilisant une banque d'un appareil micromecanique vibratoire |
CA002406518A Abandoned CA2406518A1 (fr) | 2000-04-20 | 2001-04-20 | Procede et appareil employes pour generer un signal ayant au moins une frequence de sortie desiree au moyen d'un groupe de dispositifs micromecaniques vibrants |
CA002406223A Abandoned CA2406223A1 (fr) | 2000-04-20 | 2001-04-20 | Procede et appareil de filtrage de signaux dans un sous-systeme comprenant un amplificateur de puissance comportant un groupe d'appareils micromecaniques vibrants |
Family Applications After (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA002406176A Abandoned CA2406176A1 (fr) | 2000-04-20 | 2001-04-20 | Procede et appareil pour selectionner au moins un canal desire en utilisant une banque d'un appareil micromecanique vibratoire |
CA002406518A Abandoned CA2406518A1 (fr) | 2000-04-20 | 2001-04-20 | Procede et appareil employes pour generer un signal ayant au moins une frequence de sortie desiree au moyen d'un groupe de dispositifs micromecaniques vibrants |
CA002406223A Abandoned CA2406223A1 (fr) | 2000-04-20 | 2001-04-20 | Procede et appareil de filtrage de signaux dans un sous-systeme comprenant un amplificateur de puissance comportant un groupe d'appareils micromecaniques vibrants |
Country Status (5)
Country | Link |
---|---|
EP (4) | EP1277277A2 (fr) |
JP (4) | JP2004515089A (fr) |
AU (6) | AU2001261036A1 (fr) |
CA (4) | CA2406543A1 (fr) |
WO (6) | WO2001082479A2 (fr) |
Families Citing this family (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4176450B2 (ja) | 2002-02-13 | 2008-11-05 | 松下電器産業株式会社 | 微小機械振動フィルタ |
JP4075503B2 (ja) * | 2002-07-30 | 2008-04-16 | ソニー株式会社 | マイクロマシンおよびその製造方法 |
WO2004032320A1 (fr) * | 2002-10-03 | 2004-04-15 | Sharp Kabushiki Kaisha | Microresonateur, microfiltre, micro-oscillateur et dispositif de communication sans fil |
DE10252828B4 (de) * | 2002-11-13 | 2018-07-05 | Epcos Ag | Mit akustischen Wellen arbeitendes Bauelement und Verfahren zur Herstellung eines Bauelements |
EP1432119A1 (fr) * | 2002-12-17 | 2004-06-23 | Dialog Semiconductor GmbH | Oscillateur à résonance série de qualité supérieure |
JP4575075B2 (ja) * | 2003-08-12 | 2010-11-04 | パナソニック株式会社 | 電気機械フィルタ、これを用いた電気回路および電気機器 |
US6870444B1 (en) | 2003-08-28 | 2005-03-22 | Motorola, Inc. | Electromechanical resonator and method of operating same |
US20070010227A1 (en) * | 2003-09-19 | 2007-01-11 | Koji Naniwada | Micro electric machine system resonator, drive method thereof, manufacturing method thereof, and frequency filter |
US6995622B2 (en) | 2004-01-09 | 2006-02-07 | Robert Bosh Gmbh | Frequency and/or phase compensated microelectromechanical oscillator |
FI20040162A0 (fi) | 2004-02-03 | 2004-02-03 | Nokia Oyj | Viitevärähtelijän taajuuden vakauttaminen |
JP2005311568A (ja) * | 2004-04-20 | 2005-11-04 | Sony Corp | フィルタ装置及び送受信機 |
JP2005311567A (ja) * | 2004-04-20 | 2005-11-04 | Sony Corp | フィルタ装置及び送受信機 |
JP4586404B2 (ja) * | 2004-04-28 | 2010-11-24 | ソニー株式会社 | フィルタ装置及び送受信機 |
JP4470606B2 (ja) * | 2004-06-18 | 2010-06-02 | ソニー株式会社 | 高周波素子、並びに通信装置 |
JP4608984B2 (ja) * | 2004-07-21 | 2011-01-12 | ソニー株式会社 | 微小共振器およびその製造方法、ならびに電子機器 |
JP2006041911A (ja) * | 2004-07-27 | 2006-02-09 | Matsushita Electric Ind Co Ltd | Memsフィルタ装置およびその製造方法 |
JP4635619B2 (ja) * | 2005-01-20 | 2011-02-23 | ソニー株式会社 | 微小共振器及び通信装置 |
JP4604730B2 (ja) * | 2005-01-20 | 2011-01-05 | ソニー株式会社 | 微小振動子、半導体装置及び通信装置 |
JP4617904B2 (ja) * | 2005-02-01 | 2011-01-26 | ソニー株式会社 | 微小振動子、半導体装置及び通信装置 |
JP4645227B2 (ja) * | 2005-02-28 | 2011-03-09 | セイコーエプソン株式会社 | 振動子構造体及びその製造方法 |
US7227432B2 (en) * | 2005-06-30 | 2007-06-05 | Robert Bosch Gmbh | MEMS resonator array structure and method of operating and using same |
JP2007150736A (ja) | 2005-11-28 | 2007-06-14 | Sony Corp | 微小電気機械デバイス |
JP2007174438A (ja) * | 2005-12-23 | 2007-07-05 | Toshiba Corp | フィルタ回路及びフィルタを備えた無線通信システム |
JP4930769B2 (ja) * | 2006-09-04 | 2012-05-16 | セイコーインスツル株式会社 | 発振器 |
JP2008211420A (ja) * | 2007-02-26 | 2008-09-11 | Seiko Instruments Inc | 発振器 |
JP5122888B2 (ja) * | 2007-08-27 | 2013-01-16 | セイコーインスツル株式会社 | 発振子、発振子の製造方法、及び発振器 |
US7907035B2 (en) * | 2007-12-18 | 2011-03-15 | Robert Bosch Gmbh | MEMS resonator array structure and method of operating and using same |
US8493157B2 (en) | 2008-06-18 | 2013-07-23 | Nxp B.V. | MEMS resonator for filtering and mixing |
FR2939581B1 (fr) * | 2008-12-09 | 2010-11-26 | Commissariat Energie Atomique | Reseau de resonateurs couples, filtre passe-bande et oscillateur. |
FR2942681B1 (fr) * | 2009-02-27 | 2011-05-13 | Commissariat Energie Atomique | Dispositif resonant micrometrique ou nanometrique a transistors |
WO2010150821A1 (fr) * | 2009-06-25 | 2010-12-29 | 三洋電機株式会社 | Résonateur |
CN103905009A (zh) | 2012-12-27 | 2014-07-02 | 精工爱普生株式会社 | 振子、振荡器、电子设备、移动体和振子的制造方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1994014240A1 (fr) * | 1992-12-11 | 1994-06-23 | The Regents Of The University Of California | Processeurs de signal a elements microelectromecaniques |
US5839062A (en) * | 1994-03-18 | 1998-11-17 | The Regents Of The University Of California | Mixing, modulation and demodulation via electromechanical resonators |
US6049702A (en) * | 1997-12-04 | 2000-04-11 | Rockwell Science Center, Llc | Integrated passive transceiver section |
FI106894B (fi) * | 1998-06-02 | 2001-04-30 | Nokia Mobile Phones Ltd | Resonaattorirakenteita |
-
2001
- 2001-04-20 EP EP01931148A patent/EP1277277A2/fr not_active Ceased
- 2001-04-20 WO PCT/US2001/040566 patent/WO2001082479A2/fr active Application Filing
- 2001-04-20 WO PCT/US2001/040563 patent/WO2001082467A2/fr active Application Filing
- 2001-04-20 AU AU2001261036A patent/AU2001261036A1/en not_active Abandoned
- 2001-04-20 JP JP2001579450A patent/JP2004515089A/ja active Pending
- 2001-04-20 WO PCT/US2001/040564 patent/WO2001082477A2/fr active Application Filing
- 2001-04-20 AU AU2001255865A patent/AU2001255865A1/en not_active Abandoned
- 2001-04-20 CA CA002406543A patent/CA2406543A1/fr not_active Abandoned
- 2001-04-20 CA CA002406176A patent/CA2406176A1/fr not_active Abandoned
- 2001-04-20 WO PCT/US2001/040565 patent/WO2001082478A2/fr active Application Filing
- 2001-04-20 AU AU2001255866A patent/AU2001255866A1/en not_active Abandoned
- 2001-04-20 JP JP2001579448A patent/JP2003532322A/ja active Pending
- 2001-04-20 EP EP01929080A patent/EP1285491A2/fr not_active Ceased
- 2001-04-20 EP EP01929082A patent/EP1275201A2/fr not_active Ceased
- 2001-04-20 AU AU2001257612A patent/AU2001257612A1/en not_active Abandoned
- 2001-04-20 CA CA002406518A patent/CA2406518A1/fr not_active Abandoned
- 2001-04-20 JP JP2001579439A patent/JP2003532320A/ja active Pending
- 2001-04-20 AU AU2001255867A patent/AU2001255867A1/en not_active Abandoned
- 2001-04-20 WO PCT/US2001/040562 patent/WO2001082476A2/fr active Application Filing
- 2001-04-20 CA CA002406223A patent/CA2406223A1/fr not_active Abandoned
- 2001-04-20 JP JP2001579451A patent/JP2003532323A/ja active Pending
- 2001-04-20 AU AU2001255868A patent/AU2001255868A1/en not_active Abandoned
- 2001-04-20 EP EP01929079A patent/EP1290788A2/fr not_active Ceased
- 2001-04-20 WO PCT/US2001/012806 patent/WO2001082475A2/fr active Application Filing
Also Published As
Publication number | Publication date |
---|---|
AU2001261036A1 (en) | 2001-11-07 |
AU2001255867A1 (en) | 2001-11-07 |
WO2001082467A2 (fr) | 2001-11-01 |
EP1285491A2 (fr) | 2003-02-26 |
WO2001082476A2 (fr) | 2001-11-01 |
WO2001082467A3 (fr) | 2002-04-11 |
CA2406518A1 (fr) | 2001-11-01 |
JP2004515089A (ja) | 2004-05-20 |
WO2001082475A2 (fr) | 2001-11-01 |
WO2001082477A2 (fr) | 2001-11-01 |
WO2001082479A2 (fr) | 2001-11-01 |
CA2406223A1 (fr) | 2001-11-01 |
WO2001082476A3 (fr) | 2002-08-15 |
AU2001257612A1 (en) | 2001-11-07 |
WO2001082478A3 (fr) | 2002-04-11 |
AU2001255868A1 (en) | 2001-11-07 |
JP2003532322A (ja) | 2003-10-28 |
AU2001255866A1 (en) | 2001-11-07 |
WO2001082479A3 (fr) | 2002-04-11 |
EP1290788A2 (fr) | 2003-03-12 |
AU2001255865A1 (en) | 2001-11-07 |
WO2001082475A3 (fr) | 2002-02-21 |
EP1275201A2 (fr) | 2003-01-15 |
WO2001082477A3 (fr) | 2002-04-11 |
EP1277277A2 (fr) | 2003-01-22 |
CA2406176A1 (fr) | 2001-11-01 |
JP2003532323A (ja) | 2003-10-28 |
WO2001082478A2 (fr) | 2001-11-01 |
JP2003532320A (ja) | 2003-10-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FZDE | Discontinued |