WO2001082476A3 - Procede et appareil pour selectionner au moins un canal desire en utilisant une banque d'un appareil micromecanique vibratoire - Google Patents
Procede et appareil pour selectionner au moins un canal desire en utilisant une banque d'un appareil micromecanique vibratoire Download PDFInfo
- Publication number
- WO2001082476A3 WO2001082476A3 PCT/US2001/040562 US0140562W WO0182476A3 WO 2001082476 A3 WO2001082476 A3 WO 2001082476A3 US 0140562 W US0140562 W US 0140562W WO 0182476 A3 WO0182476 A3 WO 0182476A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- selecting
- desired channel
- bank
- architectures
- vibrating micromechanical
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/462—Microelectro-mechanical filters
- H03H9/465—Microelectro-mechanical filters in combination with other electronic elements
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H9/02393—Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor
- H03H9/02409—Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor by application of a DC-bias voltage
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/462—Microelectro-mechanical filters
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/462—Microelectro-mechanical filters
- H03H9/467—Post-fabrication trimming of parameters, e.g. center frequency
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/48—Coupling means therefor
- H03H9/50—Mechanical coupling means
- H03H9/505—Mechanical coupling means for microelectro-mechanical filters
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H2009/02488—Vibration modes
- H03H2009/02511—Vertical, i.e. perpendicular to the substrate plane
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H2009/02488—Vibration modes
- H03H2009/02519—Torsional
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H2009/02488—Vibration modes
- H03H2009/02527—Combined
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Micromachines (AREA)
- Transceivers (AREA)
- Transmitters (AREA)
- Oscillators With Electromechanical Resonators (AREA)
- Networks Using Active Elements (AREA)
- Filters And Equalizers (AREA)
- Input Circuits Of Receivers And Coupling Of Receivers And Audio Equipment (AREA)
- Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
- Amplifiers (AREA)
Abstract
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU2001255865A AU2001255865A1 (en) | 2000-04-20 | 2001-04-20 | Method and apparatus for selecting at least one desired channel utilizing a bank of vibrating micromechanical apparatus |
JP2001579448A JP2003532322A (ja) | 2000-04-20 | 2001-04-20 | 振動マイクロメカニカル装置列を利用して少なくとも1つの所望のチャンネルを選択するための方法及び装置 |
CA002406176A CA2406176A1 (fr) | 2000-04-20 | 2001-04-20 | Procede et appareil pour selectionner au moins un canal desire en utilisant une banque d'un appareil micromecanique vibratoire |
EP01929079A EP1290788A2 (fr) | 2000-04-20 | 2001-04-20 | Procede et appareil pour selectionner au moins un canal desire en utilisant une banque d'un appareil micromecanique vibratoire |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US19906300P | 2000-04-20 | 2000-04-20 | |
US60/199,063 | 2000-04-20 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2001082476A2 WO2001082476A2 (fr) | 2001-11-01 |
WO2001082476A3 true WO2001082476A3 (fr) | 2002-08-15 |
Family
ID=22736053
Family Applications (6)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2001/040565 WO2001082478A2 (fr) | 2000-04-20 | 2001-04-20 | Procede et sous-systeme de traitement de signaux dans lesquels on utilise une pluralite de dispositifs micromecaniques vibrants |
PCT/US2001/040563 WO2001082467A2 (fr) | 2000-04-20 | 2001-04-20 | Procede et appareil employes pour generer un signal ayant au moins une frequence de sortie desiree au moyen d'un groupe de dispositifs micromecaniques vibrants |
PCT/US2001/040566 WO2001082479A2 (fr) | 2000-04-20 | 2001-04-20 | Procede et appareil de filtrage de signaux dans un sous-systeme comprenant un amplificateur de puissance comportant un groupe d'appareils micromecaniques vibrants |
PCT/US2001/040564 WO2001082477A2 (fr) | 2000-04-20 | 2001-04-20 | Procede et dispositif de filtrage de signaux utilisant un resonateur micromecanique vibrant |
PCT/US2001/040562 WO2001082476A2 (fr) | 2000-04-20 | 2001-04-20 | Procede et appareil pour selectionner au moins un canal desire en utilisant une banque d'un appareil micromecanique vibratoire |
PCT/US2001/012806 WO2001082475A2 (fr) | 2000-04-20 | 2001-04-20 | Procede et appareil pour la conversion-elevation et le filtrage d'un signal d'information au moyen d'un dispositif micromecanique vibrant |
Family Applications Before (4)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2001/040565 WO2001082478A2 (fr) | 2000-04-20 | 2001-04-20 | Procede et sous-systeme de traitement de signaux dans lesquels on utilise une pluralite de dispositifs micromecaniques vibrants |
PCT/US2001/040563 WO2001082467A2 (fr) | 2000-04-20 | 2001-04-20 | Procede et appareil employes pour generer un signal ayant au moins une frequence de sortie desiree au moyen d'un groupe de dispositifs micromecaniques vibrants |
PCT/US2001/040566 WO2001082479A2 (fr) | 2000-04-20 | 2001-04-20 | Procede et appareil de filtrage de signaux dans un sous-systeme comprenant un amplificateur de puissance comportant un groupe d'appareils micromecaniques vibrants |
PCT/US2001/040564 WO2001082477A2 (fr) | 2000-04-20 | 2001-04-20 | Procede et dispositif de filtrage de signaux utilisant un resonateur micromecanique vibrant |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2001/012806 WO2001082475A2 (fr) | 2000-04-20 | 2001-04-20 | Procede et appareil pour la conversion-elevation et le filtrage d'un signal d'information au moyen d'un dispositif micromecanique vibrant |
Country Status (5)
Country | Link |
---|---|
EP (4) | EP1290788A2 (fr) |
JP (4) | JP2003532322A (fr) |
AU (6) | AU2001261036A1 (fr) |
CA (4) | CA2406223A1 (fr) |
WO (6) | WO2001082478A2 (fr) |
Families Citing this family (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4176450B2 (ja) | 2002-02-13 | 2008-11-05 | 松下電器産業株式会社 | 微小機械振動フィルタ |
JP4075503B2 (ja) | 2002-07-30 | 2008-04-16 | ソニー株式会社 | マイクロマシンおよびその製造方法 |
WO2004032320A1 (fr) * | 2002-10-03 | 2004-04-15 | Sharp Kabushiki Kaisha | Microresonateur, microfiltre, micro-oscillateur et dispositif de communication sans fil |
DE10252828B4 (de) * | 2002-11-13 | 2018-07-05 | Epcos Ag | Mit akustischen Wellen arbeitendes Bauelement und Verfahren zur Herstellung eines Bauelements |
EP1432119A1 (fr) * | 2002-12-17 | 2004-06-23 | Dialog Semiconductor GmbH | Oscillateur à résonance série de qualité supérieure |
JP4575075B2 (ja) * | 2003-08-12 | 2010-11-04 | パナソニック株式会社 | 電気機械フィルタ、これを用いた電気回路および電気機器 |
US6870444B1 (en) | 2003-08-28 | 2005-03-22 | Motorola, Inc. | Electromechanical resonator and method of operating same |
KR20060065720A (ko) * | 2003-09-19 | 2006-06-14 | 소니 가부시끼 가이샤 | 마이크로 전기 기계 시스템의 공진기 및 그 구동 방법 및그 제조 방법 및 주파수 필터 |
US6995622B2 (en) | 2004-01-09 | 2006-02-07 | Robert Bosh Gmbh | Frequency and/or phase compensated microelectromechanical oscillator |
FI20040162A0 (fi) * | 2004-02-03 | 2004-02-03 | Nokia Oyj | Viitevärähtelijän taajuuden vakauttaminen |
JP2005311567A (ja) * | 2004-04-20 | 2005-11-04 | Sony Corp | フィルタ装置及び送受信機 |
JP2005311568A (ja) * | 2004-04-20 | 2005-11-04 | Sony Corp | フィルタ装置及び送受信機 |
JP4586404B2 (ja) * | 2004-04-28 | 2010-11-24 | ソニー株式会社 | フィルタ装置及び送受信機 |
JP4470606B2 (ja) * | 2004-06-18 | 2010-06-02 | ソニー株式会社 | 高周波素子、並びに通信装置 |
JP4608984B2 (ja) * | 2004-07-21 | 2011-01-12 | ソニー株式会社 | 微小共振器およびその製造方法、ならびに電子機器 |
JP2006041911A (ja) * | 2004-07-27 | 2006-02-09 | Matsushita Electric Ind Co Ltd | Memsフィルタ装置およびその製造方法 |
JP4635619B2 (ja) * | 2005-01-20 | 2011-02-23 | ソニー株式会社 | 微小共振器及び通信装置 |
JP4604730B2 (ja) * | 2005-01-20 | 2011-01-05 | ソニー株式会社 | 微小振動子、半導体装置及び通信装置 |
JP4617904B2 (ja) * | 2005-02-01 | 2011-01-26 | ソニー株式会社 | 微小振動子、半導体装置及び通信装置 |
JP4645227B2 (ja) * | 2005-02-28 | 2011-03-09 | セイコーエプソン株式会社 | 振動子構造体及びその製造方法 |
US7227432B2 (en) * | 2005-06-30 | 2007-06-05 | Robert Bosch Gmbh | MEMS resonator array structure and method of operating and using same |
JP2007150736A (ja) * | 2005-11-28 | 2007-06-14 | Sony Corp | 微小電気機械デバイス |
JP2007174438A (ja) * | 2005-12-23 | 2007-07-05 | Toshiba Corp | フィルタ回路及びフィルタを備えた無線通信システム |
JP4930769B2 (ja) * | 2006-09-04 | 2012-05-16 | セイコーインスツル株式会社 | 発振器 |
JP2008211420A (ja) * | 2007-02-26 | 2008-09-11 | Seiko Instruments Inc | 発振器 |
JP5122888B2 (ja) * | 2007-08-27 | 2013-01-16 | セイコーインスツル株式会社 | 発振子、発振子の製造方法、及び発振器 |
US7907035B2 (en) * | 2007-12-18 | 2011-03-15 | Robert Bosch Gmbh | MEMS resonator array structure and method of operating and using same |
WO2009153754A2 (fr) | 2008-06-18 | 2009-12-23 | Nxp B.V. | Résonateur mems pour filtrage et mélange |
FR2939581B1 (fr) * | 2008-12-09 | 2010-11-26 | Commissariat Energie Atomique | Reseau de resonateurs couples, filtre passe-bande et oscillateur. |
FR2942681B1 (fr) * | 2009-02-27 | 2011-05-13 | Commissariat Energie Atomique | Dispositif resonant micrometrique ou nanometrique a transistors |
JP5453705B2 (ja) * | 2009-06-25 | 2014-03-26 | 学校法人立命館 | 共振器 |
CN103905009A (zh) | 2012-12-27 | 2014-07-02 | 精工爱普生株式会社 | 振子、振荡器、电子设备、移动体和振子的制造方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5537083A (en) * | 1992-12-11 | 1996-07-16 | Regents Of The University Of California | Microelectromechanical signal processors |
EP0962999A2 (fr) * | 1998-06-02 | 1999-12-08 | Nokia Mobile Phones Ltd. | Structures de résonateurs |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5839062A (en) * | 1994-03-18 | 1998-11-17 | The Regents Of The University Of California | Mixing, modulation and demodulation via electromechanical resonators |
US6049702A (en) * | 1997-12-04 | 2000-04-11 | Rockwell Science Center, Llc | Integrated passive transceiver section |
-
2001
- 2001-04-20 EP EP01929079A patent/EP1290788A2/fr not_active Ceased
- 2001-04-20 AU AU2001261036A patent/AU2001261036A1/en not_active Abandoned
- 2001-04-20 WO PCT/US2001/040565 patent/WO2001082478A2/fr active Application Filing
- 2001-04-20 AU AU2001255866A patent/AU2001255866A1/en not_active Abandoned
- 2001-04-20 AU AU2001255868A patent/AU2001255868A1/en not_active Abandoned
- 2001-04-20 WO PCT/US2001/040563 patent/WO2001082467A2/fr active Application Filing
- 2001-04-20 AU AU2001255865A patent/AU2001255865A1/en not_active Abandoned
- 2001-04-20 EP EP01929082A patent/EP1275201A2/fr not_active Ceased
- 2001-04-20 EP EP01929080A patent/EP1285491A2/fr not_active Ceased
- 2001-04-20 AU AU2001257612A patent/AU2001257612A1/en not_active Abandoned
- 2001-04-20 JP JP2001579448A patent/JP2003532322A/ja active Pending
- 2001-04-20 JP JP2001579451A patent/JP2003532323A/ja active Pending
- 2001-04-20 CA CA002406223A patent/CA2406223A1/fr not_active Abandoned
- 2001-04-20 WO PCT/US2001/040566 patent/WO2001082479A2/fr active Application Filing
- 2001-04-20 WO PCT/US2001/040564 patent/WO2001082477A2/fr active Application Filing
- 2001-04-20 JP JP2001579450A patent/JP2004515089A/ja active Pending
- 2001-04-20 JP JP2001579439A patent/JP2003532320A/ja active Pending
- 2001-04-20 CA CA002406543A patent/CA2406543A1/fr not_active Abandoned
- 2001-04-20 EP EP01931148A patent/EP1277277A2/fr not_active Ceased
- 2001-04-20 CA CA002406176A patent/CA2406176A1/fr not_active Abandoned
- 2001-04-20 WO PCT/US2001/040562 patent/WO2001082476A2/fr active Application Filing
- 2001-04-20 WO PCT/US2001/012806 patent/WO2001082475A2/fr active Application Filing
- 2001-04-20 CA CA002406518A patent/CA2406518A1/fr not_active Abandoned
- 2001-04-20 AU AU2001255867A patent/AU2001255867A1/en not_active Abandoned
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5537083A (en) * | 1992-12-11 | 1996-07-16 | Regents Of The University Of California | Microelectromechanical signal processors |
EP0962999A2 (fr) * | 1998-06-02 | 1999-12-08 | Nokia Mobile Phones Ltd. | Structures de résonateurs |
Non-Patent Citations (1)
Title |
---|
See also references of EP1290788A2 * |
Also Published As
Publication number | Publication date |
---|---|
WO2001082478A3 (fr) | 2002-04-11 |
WO2001082467A2 (fr) | 2001-11-01 |
WO2001082476A2 (fr) | 2001-11-01 |
EP1290788A2 (fr) | 2003-03-12 |
WO2001082478A2 (fr) | 2001-11-01 |
WO2001082467A3 (fr) | 2002-04-11 |
CA2406176A1 (fr) | 2001-11-01 |
WO2001082479A2 (fr) | 2001-11-01 |
JP2003532323A (ja) | 2003-10-28 |
AU2001261036A1 (en) | 2001-11-07 |
WO2001082475A3 (fr) | 2002-02-21 |
WO2001082477A3 (fr) | 2002-04-11 |
JP2004515089A (ja) | 2004-05-20 |
CA2406223A1 (fr) | 2001-11-01 |
WO2001082479A3 (fr) | 2002-04-11 |
AU2001255868A1 (en) | 2001-11-07 |
EP1277277A2 (fr) | 2003-01-22 |
CA2406543A1 (fr) | 2001-11-01 |
WO2001082475A2 (fr) | 2001-11-01 |
JP2003532322A (ja) | 2003-10-28 |
JP2003532320A (ja) | 2003-10-28 |
AU2001255867A1 (en) | 2001-11-07 |
EP1285491A2 (fr) | 2003-02-26 |
AU2001257612A1 (en) | 2001-11-07 |
CA2406518A1 (fr) | 2001-11-01 |
AU2001255866A1 (en) | 2001-11-07 |
WO2001082477A2 (fr) | 2001-11-01 |
AU2001255865A1 (en) | 2001-11-07 |
EP1275201A2 (fr) | 2003-01-15 |
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