CA2406176A1 - Procede et appareil pour selectionner au moins un canal desire en utilisant une banque d'un appareil micromecanique vibratoire - Google Patents

Procede et appareil pour selectionner au moins un canal desire en utilisant une banque d'un appareil micromecanique vibratoire Download PDF

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Publication number
CA2406176A1
CA2406176A1 CA002406176A CA2406176A CA2406176A1 CA 2406176 A1 CA2406176 A1 CA 2406176A1 CA 002406176 A CA002406176 A CA 002406176A CA 2406176 A CA2406176 A CA 2406176A CA 2406176 A1 CA2406176 A1 CA 2406176A1
Authority
CA
Canada
Prior art keywords
filters
micromechanical
bank
channel
filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
CA002406176A
Other languages
English (en)
Inventor
Clark T. C. Nguyen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Michigan
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of CA2406176A1 publication Critical patent/CA2406176A1/fr
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/462—Microelectro-mechanical filters
    • H03H9/465—Microelectro-mechanical filters in combination with other electronic elements
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02393—Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor
    • H03H9/02409—Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor by application of a DC-bias voltage
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/462—Microelectro-mechanical filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/462—Microelectro-mechanical filters
    • H03H9/467—Post-fabrication trimming of parameters, e.g. center frequency
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/48—Coupling means therefor
    • H03H9/50—Mechanical coupling means
    • H03H9/505—Mechanical coupling means for microelectro-mechanical filters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02511—Vertical, i.e. perpendicular to the substrate plane
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02519—Torsional
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02527—Combined

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Micromachines (AREA)
  • Transceivers (AREA)
  • Transmitters (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
  • Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
  • Amplifiers (AREA)
  • Input Circuits Of Receivers And Coupling Of Receivers And Audio Equipment (AREA)
  • Networks Using Active Elements (AREA)
  • Filters And Equalizers (AREA)

Abstract

L'invention concerne des procédés et architectures basés sur MEMS qui utilisent des résonateurs micromécaniques vibratoires dans des circuits pour effectuer le filtrage, le mixage, le référencement des fréquences et pour remplir les fonctions d'amplification, par exemple, un procédé et appareil pour sélectionner au moins un canal désiré dans un sous-système de récepteur RF. Un des premiers avantages qu'offre l'utilisation de ce type d'architectures est l'économie d'énergie grâce aux échanges d'énergie par haute sélectivité, à savoir par Q élevé. L'invention concerne en outre l'utilisation d'un nombre élevé de liens micromécaniques entre les réseaux SSI et VLSI, qui permettent de remplir les fonctions de traitement de signaux avec une consommation CC proche de zéro.
CA002406176A 2000-04-20 2001-04-20 Procede et appareil pour selectionner au moins un canal desire en utilisant une banque d'un appareil micromecanique vibratoire Abandoned CA2406176A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US19906300P 2000-04-20 2000-04-20
US60/199,063 2000-04-20
PCT/US2001/040562 WO2001082476A2 (fr) 2000-04-20 2001-04-20 Procede et appareil pour selectionner au moins un canal desire en utilisant une banque d'un appareil micromecanique vibratoire

Publications (1)

Publication Number Publication Date
CA2406176A1 true CA2406176A1 (fr) 2001-11-01

Family

ID=22736053

Family Applications (4)

Application Number Title Priority Date Filing Date
CA002406543A Abandoned CA2406543A1 (fr) 2000-04-20 2001-04-20 Procede et sous-systeme de traitement de signaux dans lesquels on utilise une pluralite de dispositifs micromecaniques vibrants
CA002406176A Abandoned CA2406176A1 (fr) 2000-04-20 2001-04-20 Procede et appareil pour selectionner au moins un canal desire en utilisant une banque d'un appareil micromecanique vibratoire
CA002406518A Abandoned CA2406518A1 (fr) 2000-04-20 2001-04-20 Procede et appareil employes pour generer un signal ayant au moins une frequence de sortie desiree au moyen d'un groupe de dispositifs micromecaniques vibrants
CA002406223A Abandoned CA2406223A1 (fr) 2000-04-20 2001-04-20 Procede et appareil de filtrage de signaux dans un sous-systeme comprenant un amplificateur de puissance comportant un groupe d'appareils micromecaniques vibrants

Family Applications Before (1)

Application Number Title Priority Date Filing Date
CA002406543A Abandoned CA2406543A1 (fr) 2000-04-20 2001-04-20 Procede et sous-systeme de traitement de signaux dans lesquels on utilise une pluralite de dispositifs micromecaniques vibrants

Family Applications After (2)

Application Number Title Priority Date Filing Date
CA002406518A Abandoned CA2406518A1 (fr) 2000-04-20 2001-04-20 Procede et appareil employes pour generer un signal ayant au moins une frequence de sortie desiree au moyen d'un groupe de dispositifs micromecaniques vibrants
CA002406223A Abandoned CA2406223A1 (fr) 2000-04-20 2001-04-20 Procede et appareil de filtrage de signaux dans un sous-systeme comprenant un amplificateur de puissance comportant un groupe d'appareils micromecaniques vibrants

Country Status (5)

Country Link
EP (4) EP1277277A2 (fr)
JP (4) JP2004515089A (fr)
AU (6) AU2001261036A1 (fr)
CA (4) CA2406543A1 (fr)
WO (6) WO2001082479A2 (fr)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
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JP4176450B2 (ja) 2002-02-13 2008-11-05 松下電器産業株式会社 微小機械振動フィルタ
JP4075503B2 (ja) * 2002-07-30 2008-04-16 ソニー株式会社 マイクロマシンおよびその製造方法
WO2004032320A1 (fr) * 2002-10-03 2004-04-15 Sharp Kabushiki Kaisha Microresonateur, microfiltre, micro-oscillateur et dispositif de communication sans fil
DE10252828B4 (de) * 2002-11-13 2018-07-05 Epcos Ag Mit akustischen Wellen arbeitendes Bauelement und Verfahren zur Herstellung eines Bauelements
EP1432119A1 (fr) * 2002-12-17 2004-06-23 Dialog Semiconductor GmbH Oscillateur à résonance série de qualité supérieure
JP4575075B2 (ja) * 2003-08-12 2010-11-04 パナソニック株式会社 電気機械フィルタ、これを用いた電気回路および電気機器
US6870444B1 (en) 2003-08-28 2005-03-22 Motorola, Inc. Electromechanical resonator and method of operating same
US20070010227A1 (en) * 2003-09-19 2007-01-11 Koji Naniwada Micro electric machine system resonator, drive method thereof, manufacturing method thereof, and frequency filter
US6995622B2 (en) 2004-01-09 2006-02-07 Robert Bosh Gmbh Frequency and/or phase compensated microelectromechanical oscillator
FI20040162A0 (fi) 2004-02-03 2004-02-03 Nokia Oyj Viitevärähtelijän taajuuden vakauttaminen
JP2005311568A (ja) * 2004-04-20 2005-11-04 Sony Corp フィルタ装置及び送受信機
JP2005311567A (ja) * 2004-04-20 2005-11-04 Sony Corp フィルタ装置及び送受信機
JP4586404B2 (ja) * 2004-04-28 2010-11-24 ソニー株式会社 フィルタ装置及び送受信機
JP4470606B2 (ja) * 2004-06-18 2010-06-02 ソニー株式会社 高周波素子、並びに通信装置
JP4608984B2 (ja) * 2004-07-21 2011-01-12 ソニー株式会社 微小共振器およびその製造方法、ならびに電子機器
JP2006041911A (ja) * 2004-07-27 2006-02-09 Matsushita Electric Ind Co Ltd Ｍｅｍｓフィルタ装置およびその製造方法
JP4635619B2 (ja) * 2005-01-20 2011-02-23 ソニー株式会社 微小共振器及び通信装置
JP4604730B2 (ja) * 2005-01-20 2011-01-05 ソニー株式会社 微小振動子、半導体装置及び通信装置
JP4617904B2 (ja) * 2005-02-01 2011-01-26 ソニー株式会社 微小振動子、半導体装置及び通信装置
JP4645227B2 (ja) * 2005-02-28 2011-03-09 セイコーエプソン株式会社 振動子構造体及びその製造方法
US7227432B2 (en) * 2005-06-30 2007-06-05 Robert Bosch Gmbh MEMS resonator array structure and method of operating and using same
JP2007150736A (ja) 2005-11-28 2007-06-14 Sony Corp 微小電気機械デバイス
JP2007174438A (ja) * 2005-12-23 2007-07-05 Toshiba Corp フィルタ回路及びフィルタを備えた無線通信システム
JP4930769B2 (ja) * 2006-09-04 2012-05-16 セイコーインスツル株式会社 発振器
JP2008211420A (ja) * 2007-02-26 2008-09-11 Seiko Instruments Inc 発振器
JP5122888B2 (ja) * 2007-08-27 2013-01-16 セイコーインスツル株式会社 発振子、発振子の製造方法、及び発振器
US7907035B2 (en) * 2007-12-18 2011-03-15 Robert Bosch Gmbh MEMS resonator array structure and method of operating and using same
US8493157B2 (en) 2008-06-18 2013-07-23 Nxp B.V. MEMS resonator for filtering and mixing
FR2939581B1 (fr) * 2008-12-09 2010-11-26 Commissariat Energie Atomique Reseau de resonateurs couples, filtre passe-bande et oscillateur.
FR2942681B1 (fr) * 2009-02-27 2011-05-13 Commissariat Energie Atomique Dispositif resonant micrometrique ou nanometrique a transistors
WO2010150821A1 (fr) * 2009-06-25 2010-12-29 三洋電機株式会社 Résonateur
CN103905009A (zh) 2012-12-27 2014-07-02 精工爱普生株式会社 振子、振荡器、电子设备、移动体和振子的制造方法

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WO1994014240A1 (fr) * 1992-12-11 1994-06-23 The Regents Of The University Of California Processeurs de signal a elements microelectromecaniques
US5839062A (en) * 1994-03-18 1998-11-17 The Regents Of The University Of California Mixing, modulation and demodulation via electromechanical resonators
US6049702A (en) * 1997-12-04 2000-04-11 Rockwell Science Center, Llc Integrated passive transceiver section
FI106894B (fi) * 1998-06-02 2001-04-30 Nokia Mobile Phones Ltd Resonaattorirakenteita

Also Published As

Publication number Publication date
AU2001261036A1 (en) 2001-11-07
AU2001255867A1 (en) 2001-11-07
WO2001082467A2 (fr) 2001-11-01
EP1285491A2 (fr) 2003-02-26
WO2001082476A2 (fr) 2001-11-01
WO2001082467A3 (fr) 2002-04-11
CA2406543A1 (fr) 2001-11-01
CA2406518A1 (fr) 2001-11-01
JP2004515089A (ja) 2004-05-20
WO2001082475A2 (fr) 2001-11-01
WO2001082477A2 (fr) 2001-11-01
WO2001082479A2 (fr) 2001-11-01
CA2406223A1 (fr) 2001-11-01
WO2001082476A3 (fr) 2002-08-15
AU2001257612A1 (en) 2001-11-07
WO2001082478A3 (fr) 2002-04-11
AU2001255868A1 (en) 2001-11-07
JP2003532322A (ja) 2003-10-28
AU2001255866A1 (en) 2001-11-07
WO2001082479A3 (fr) 2002-04-11
EP1290788A2 (fr) 2003-03-12
AU2001255865A1 (en) 2001-11-07
WO2001082475A3 (fr) 2002-02-21
EP1275201A2 (fr) 2003-01-15
WO2001082477A3 (fr) 2002-04-11
EP1277277A2 (fr) 2003-01-22
JP2003532323A (ja) 2003-10-28
WO2001082478A2 (fr) 2001-11-01
JP2003532320A (ja) 2003-10-28

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Legal Events

Date Code Title Description
FZDE Discontinued