JP2004515089A - 複数の振動マイクロメカニカル素子列を利用して信号を処理するための方法及びサブシステム - Google Patents

複数の振動マイクロメカニカル素子列を利用して信号を処理するための方法及びサブシステム Download PDF

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Publication number
JP2004515089A
JP2004515089A JP2001579450A JP2001579450A JP2004515089A JP 2004515089 A JP2004515089 A JP 2004515089A JP 2001579450 A JP2001579450 A JP 2001579450A JP 2001579450 A JP2001579450 A JP 2001579450A JP 2004515089 A JP2004515089 A JP 2004515089A
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JP
Japan
Prior art keywords
filter
mechanical
signal
resonator
port
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Pending
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JP2001579450A
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English (en)
Japanese (ja)
Inventor
ングイェン　クラーク　ティ　シー
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University of Michigan
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University of Michigan
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Application filed by University of Michigan filed Critical University of Michigan
Publication of JP2004515089A publication Critical patent/JP2004515089A/ja
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/462—Microelectro-mechanical filters
    • H03H9/465—Microelectro-mechanical filters in combination with other electronic elements
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02393—Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor
    • H03H9/02409—Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor by application of a DC-bias voltage
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/462—Microelectro-mechanical filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/462—Microelectro-mechanical filters
    • H03H9/467—Post-fabrication trimming of parameters, e.g. center frequency
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/48—Coupling means therefor
    • H03H9/50—Mechanical coupling means
    • H03H9/505—Mechanical coupling means for microelectro-mechanical filters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02511—Vertical, i.e. perpendicular to the substrate plane
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02519—Torsional
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02527—Combined

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Micromachines (AREA)
  • Transceivers (AREA)
  • Transmitters (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
  • Networks Using Active Elements (AREA)
  • Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
  • Input Circuits Of Receivers And Coupling Of Receivers And Audio Equipment (AREA)
  • Amplifiers (AREA)
  • Filters And Equalizers (AREA)
JP2001579450A 2000-04-20 2001-04-20 複数の振動マイクロメカニカル素子列を利用して信号を処理するための方法及びサブシステム Pending JP2004515089A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US19906300P 2000-04-20 2000-04-20
PCT/US2001/040565 WO2001082478A2 (fr) 2000-04-20 2001-04-20 Procede et sous-systeme de traitement de signaux dans lesquels on utilise une pluralite de dispositifs micromecaniques vibrants

Publications (1)

Publication Number Publication Date
JP2004515089A true JP2004515089A (ja) 2004-05-20

Family

ID=22736053

Family Applications (4)

Application Number Title Priority Date Filing Date
JP2001579448A Pending JP2003532322A (ja) 2000-04-20 2001-04-20 振動マイクロメカニカル装置列を利用して少なくとも１つの所望のチャンネルを選択するための方法及び装置
JP2001579439A Pending JP2003532320A (ja) 2000-04-20 2001-04-20 振動マイクロメカニカル素子列を利用して少なくとも１つの所望の出力周波数を有する信号を生成するための方法及び装置
JP2001579451A Pending JP2003532323A (ja) 2000-04-20 2001-04-20 振動マイクロメカニカル装置列を利用して電力増幅器を有するサブシステムの信号を濾過するための方法及び装置
JP2001579450A Pending JP2004515089A (ja) 2000-04-20 2001-04-20 複数の振動マイクロメカニカル素子列を利用して信号を処理するための方法及びサブシステム

Family Applications Before (3)

Application Number Title Priority Date Filing Date
JP2001579448A Pending JP2003532322A (ja) 2000-04-20 2001-04-20 振動マイクロメカニカル装置列を利用して少なくとも１つの所望のチャンネルを選択するための方法及び装置
JP2001579439A Pending JP2003532320A (ja) 2000-04-20 2001-04-20 振動マイクロメカニカル素子列を利用して少なくとも１つの所望の出力周波数を有する信号を生成するための方法及び装置
JP2001579451A Pending JP2003532323A (ja) 2000-04-20 2001-04-20 振動マイクロメカニカル装置列を利用して電力増幅器を有するサブシステムの信号を濾過するための方法及び装置

Country Status (5)

Country Link
EP (4) EP1277277A2 (fr)
JP (4) JP2003532322A (fr)
AU (6) AU2001255867A1 (fr)
CA (4) CA2406518A1 (fr)
WO (6) WO2001082475A2 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006041911A (ja) * 2004-07-27 2006-02-09 Matsushita Electric Ind Co Ltd Ｍｅｍｓフィルタ装置およびその製造方法
US9154109B2 (en) 2012-12-27 2015-10-06 Seiko Epson Corporation Vibrator, oscillator, electronic apparatus, moving object, and method of manufacturing vibrator

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4176450B2 (ja) 2002-02-13 2008-11-05 松下電器産業株式会社 微小機械振動フィルタ
JP4075503B2 (ja) 2002-07-30 2008-04-16 ソニー株式会社 マイクロマシンおよびその製造方法
AU2003271082A1 (en) * 2002-10-03 2004-04-23 Sharp Kabushiki Kaisha Microresonator, microfilter, micro-oscillator, and wireless communication device
DE10252828B4 (de) * 2002-11-13 2018-07-05 Epcos Ag Mit akustischen Wellen arbeitendes Bauelement und Verfahren zur Herstellung eines Bauelements
EP1432119A1 (fr) * 2002-12-17 2004-06-23 Dialog Semiconductor GmbH Oscillateur à résonance série de qualité supérieure
JP4575075B2 (ja) * 2003-08-12 2010-11-04 パナソニック株式会社 電気機械フィルタ、これを用いた電気回路および電気機器
US6870444B1 (en) 2003-08-28 2005-03-22 Motorola, Inc. Electromechanical resonator and method of operating same
KR20060065720A (ko) * 2003-09-19 2006-06-14 소니 가부시끼 가이샤 마이크로 전기 기계 시스템의 공진기 및 그 구동 방법 및그 제조 방법 및 주파수 필터
US6995622B2 (en) 2004-01-09 2006-02-07 Robert Bosh Gmbh Frequency and/or phase compensated microelectromechanical oscillator
FI20040162A0 (fi) * 2004-02-03 2004-02-03 Nokia Oyj Viitevärähtelijän taajuuden vakauttaminen
JP2005311567A (ja) * 2004-04-20 2005-11-04 Sony Corp フィルタ装置及び送受信機
JP2005311568A (ja) * 2004-04-20 2005-11-04 Sony Corp フィルタ装置及び送受信機
JP4586404B2 (ja) * 2004-04-28 2010-11-24 ソニー株式会社 フィルタ装置及び送受信機
JP4470606B2 (ja) * 2004-06-18 2010-06-02 ソニー株式会社 高周波素子、並びに通信装置
JP4608984B2 (ja) * 2004-07-21 2011-01-12 ソニー株式会社 微小共振器およびその製造方法、ならびに電子機器
JP4604730B2 (ja) * 2005-01-20 2011-01-05 ソニー株式会社 微小振動子、半導体装置及び通信装置
JP4635619B2 (ja) * 2005-01-20 2011-02-23 ソニー株式会社 微小共振器及び通信装置
JP4617904B2 (ja) * 2005-02-01 2011-01-26 ソニー株式会社 微小振動子、半導体装置及び通信装置
JP4645227B2 (ja) * 2005-02-28 2011-03-09 セイコーエプソン株式会社 振動子構造体及びその製造方法
US7227432B2 (en) * 2005-06-30 2007-06-05 Robert Bosch Gmbh MEMS resonator array structure and method of operating and using same
JP2007150736A (ja) * 2005-11-28 2007-06-14 Sony Corp 微小電気機械デバイス
JP2007174438A (ja) * 2005-12-23 2007-07-05 Toshiba Corp フィルタ回路及びフィルタを備えた無線通信システム
JP4930769B2 (ja) * 2006-09-04 2012-05-16 セイコーインスツル株式会社 発振器
JP2008211420A (ja) * 2007-02-26 2008-09-11 Seiko Instruments Inc 発振器
JP5122888B2 (ja) * 2007-08-27 2013-01-16 セイコーインスツル株式会社 発振子、発振子の製造方法、及び発振器
US7907035B2 (en) * 2007-12-18 2011-03-15 Robert Bosch Gmbh MEMS resonator array structure and method of operating and using same
US8493157B2 (en) 2008-06-18 2013-07-23 Nxp B.V. MEMS resonator for filtering and mixing
FR2939581B1 (fr) * 2008-12-09 2010-11-26 Commissariat Energie Atomique Reseau de resonateurs couples, filtre passe-bande et oscillateur.
FR2942681B1 (fr) * 2009-02-27 2011-05-13 Commissariat Energie Atomique Dispositif resonant micrometrique ou nanometrique a transistors
JP5453705B2 (ja) * 2009-06-25 2014-03-26 学校法人立命館 共振器

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995026080A1 (fr) * 1994-03-18 1995-09-28 The Regents Of The University Of California Melange, modulation et demodulation au moyen de resonateurs electrochimiques
US5537083A (en) * 1992-12-11 1996-07-16 Regents Of The University Of California Microelectromechanical signal processors

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US6049702A (en) * 1997-12-04 2000-04-11 Rockwell Science Center, Llc Integrated passive transceiver section
FI106894B (fi) * 1998-06-02 2001-04-30 Nokia Mobile Phones Ltd Resonaattorirakenteita

Patent Citations (2)

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Publication number Priority date Publication date Assignee Title
US5537083A (en) * 1992-12-11 1996-07-16 Regents Of The University Of California Microelectromechanical signal processors
WO1995026080A1 (fr) * 1994-03-18 1995-09-28 The Regents Of The University Of California Melange, modulation et demodulation au moyen de resonateurs electrochimiques

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006041911A (ja) * 2004-07-27 2006-02-09 Matsushita Electric Ind Co Ltd Ｍｅｍｓフィルタ装置およびその製造方法
US9154109B2 (en) 2012-12-27 2015-10-06 Seiko Epson Corporation Vibrator, oscillator, electronic apparatus, moving object, and method of manufacturing vibrator

Also Published As

Publication number Publication date
WO2001082475A3 (fr) 2002-02-21
CA2406543A1 (fr) 2001-11-01
AU2001261036A1 (en) 2001-11-07
AU2001255865A1 (en) 2001-11-07
WO2001082475A2 (fr) 2001-11-01
WO2001082478A3 (fr) 2002-04-11
CA2406518A1 (fr) 2001-11-01
WO2001082467A2 (fr) 2001-11-01
CA2406223A1 (fr) 2001-11-01
AU2001255866A1 (en) 2001-11-07
EP1277277A2 (fr) 2003-01-22
WO2001082477A3 (fr) 2002-04-11
JP2003532320A (ja) 2003-10-28
EP1275201A2 (fr) 2003-01-15
AU2001255868A1 (en) 2001-11-07
WO2001082478A2 (fr) 2001-11-01
JP2003532322A (ja) 2003-10-28
WO2001082479A2 (fr) 2001-11-01
WO2001082476A2 (fr) 2001-11-01
EP1290788A2 (fr) 2003-03-12
CA2406176A1 (fr) 2001-11-01
WO2001082477A2 (fr) 2001-11-01
AU2001255867A1 (en) 2001-11-07
WO2001082467A3 (fr) 2002-04-11
WO2001082476A3 (fr) 2002-08-15
AU2001257612A1 (en) 2001-11-07
WO2001082479A3 (fr) 2002-04-11
EP1285491A2 (fr) 2003-02-26
JP2003532323A (ja) 2003-10-28

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