AU2001255867A1 - Method and apparatus for filtering signals utilizing a vibrating micromechanicalresonator - Google Patents

Method and apparatus for filtering signals utilizing a vibrating micromechanicalresonator

Info

Publication number
AU2001255867A1
AU2001255867A1 AU2001255867A AU5586701A AU2001255867A1 AU 2001255867 A1 AU2001255867 A1 AU 2001255867A1 AU 2001255867 A AU2001255867 A AU 2001255867A AU 5586701 A AU5586701 A AU 5586701A AU 2001255867 A1 AU2001255867 A1 AU 2001255867A1
Authority
AU
Australia
Prior art keywords
micromechanicalresonator
vibrating
filtering signals
signals utilizing
utilizing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001255867A
Inventor
Clark T. C. Nguyen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Michigan
Original Assignee
University of Michigan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Michigan filed Critical University of Michigan
Publication of AU2001255867A1 publication Critical patent/AU2001255867A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/462—Microelectro-mechanical filters
    • H03H9/465—Microelectro-mechanical filters in combination with other electronic elements
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02393—Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor
    • H03H9/02409—Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor by application of a DC-bias voltage
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/462—Microelectro-mechanical filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/462—Microelectro-mechanical filters
    • H03H9/467—Post-fabrication trimming of parameters, e.g. center frequency
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/48—Coupling means therefor
    • H03H9/50—Mechanical coupling means
    • H03H9/505—Mechanical coupling means for microelectro-mechanical filters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02511—Vertical, i.e. perpendicular to the substrate plane
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02519—Torsional
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02527—Combined
AU2001255867A 2000-04-20 2001-04-20 Method and apparatus for filtering signals utilizing a vibrating micromechanicalresonator Abandoned AU2001255867A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US19906300P 2000-04-20 2000-04-20
US60199063 2000-04-20
PCT/US2001/040564 WO2001082477A2 (en) 2000-04-20 2001-04-20 Method and apparatus for filtering signals utilizing a vibrating micromechanical resonator

Publications (1)

Publication Number Publication Date
AU2001255867A1 true AU2001255867A1 (en) 2001-11-07

Family

ID=22736053

Family Applications (6)

Application Number Title Priority Date Filing Date
AU2001255868A Abandoned AU2001255868A1 (en) 2000-04-20 2001-04-20 Method and apparatus for filtering signals in a subsystem including a power amplifier utilizing a bank of vibrating micromechanical apparatus
AU2001255867A Abandoned AU2001255867A1 (en) 2000-04-20 2001-04-20 Method and apparatus for filtering signals utilizing a vibrating micromechanicalresonator
AU2001257612A Abandoned AU2001257612A1 (en) 2000-04-20 2001-04-20 Method and subsystem for processing signals utilizing a plurality of vibrating micromechanical devices
AU2001255865A Abandoned AU2001255865A1 (en) 2000-04-20 2001-04-20 Method and apparatus for selecting at least one desired channel utilizing a bank of vibrating micromechanical apparatus
AU2001261036A Abandoned AU2001261036A1 (en) 2000-04-20 2001-04-20 Method and apparatus for upconverting and filtering an information signal utilizing a vibrating micromechanical device
AU2001255866A Abandoned AU2001255866A1 (en) 2000-04-20 2001-04-20 Method and apparatus for generating a signal having at least one desired output frequency utilizing a bank of vibrating micromechanical devices

Family Applications Before (1)

Application Number Title Priority Date Filing Date
AU2001255868A Abandoned AU2001255868A1 (en) 2000-04-20 2001-04-20 Method and apparatus for filtering signals in a subsystem including a power amplifier utilizing a bank of vibrating micromechanical apparatus

Family Applications After (4)

Application Number Title Priority Date Filing Date
AU2001257612A Abandoned AU2001257612A1 (en) 2000-04-20 2001-04-20 Method and subsystem for processing signals utilizing a plurality of vibrating micromechanical devices
AU2001255865A Abandoned AU2001255865A1 (en) 2000-04-20 2001-04-20 Method and apparatus for selecting at least one desired channel utilizing a bank of vibrating micromechanical apparatus
AU2001261036A Abandoned AU2001261036A1 (en) 2000-04-20 2001-04-20 Method and apparatus for upconverting and filtering an information signal utilizing a vibrating micromechanical device
AU2001255866A Abandoned AU2001255866A1 (en) 2000-04-20 2001-04-20 Method and apparatus for generating a signal having at least one desired output frequency utilizing a bank of vibrating micromechanical devices

Country Status (5)

Country Link
EP (4) EP1285491A2 (en)
JP (4) JP2003532322A (en)
AU (6) AU2001255868A1 (en)
CA (4) CA2406518A1 (en)
WO (6) WO2001082475A2 (en)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4176450B2 (en) * 2002-02-13 2008-11-05 松下電器産業株式会社 Micro mechanical vibration filter
JP4075503B2 (en) * 2002-07-30 2008-04-16 ソニー株式会社 Micromachine and manufacturing method thereof
AU2003271082A1 (en) * 2002-10-03 2004-04-23 Sharp Kabushiki Kaisha Microresonator, microfilter, micro-oscillator, and wireless communication device
DE10252828B4 (en) * 2002-11-13 2018-07-05 Epcos Ag Acoustic wave device and method of fabricating a device
EP1432119A1 (en) * 2002-12-17 2004-06-23 Dialog Semiconductor GmbH High quality serial resonance oscillator
JP4575075B2 (en) * 2003-08-12 2010-11-04 パナソニック株式会社 Electromechanical filter, electric circuit and electric device using the same
US6870444B1 (en) 2003-08-28 2005-03-22 Motorola, Inc. Electromechanical resonator and method of operating same
EP1667323A1 (en) * 2003-09-19 2006-06-07 Sony Corporation Micro electric machine system resonator, drive method thereof, manufacturing method thereof, and frequency filter
US6995622B2 (en) 2004-01-09 2006-02-07 Robert Bosh Gmbh Frequency and/or phase compensated microelectromechanical oscillator
FI20040162A0 (en) * 2004-02-03 2004-02-03 Nokia Oyj Stabilization of reference oscillator frequency
JP2005311567A (en) * 2004-04-20 2005-11-04 Sony Corp Filter device and transceiver
JP2005311568A (en) * 2004-04-20 2005-11-04 Sony Corp Filter device and transceiver
JP4586404B2 (en) 2004-04-28 2010-11-24 ソニー株式会社 Filter device and transceiver
JP4470606B2 (en) 2004-06-18 2010-06-02 ソニー株式会社 High frequency element and communication device
JP4608984B2 (en) * 2004-07-21 2011-01-12 ソニー株式会社 Microresonator, manufacturing method thereof, and electronic device
JP2006041911A (en) * 2004-07-27 2006-02-09 Matsushita Electric Ind Co Ltd Mems filter device and manufacturing method thereof
JP4635619B2 (en) * 2005-01-20 2011-02-23 ソニー株式会社 Microresonator and communication device
JP4604730B2 (en) * 2005-01-20 2011-01-05 ソニー株式会社 Micro vibrator, semiconductor device, and communication device
JP4617904B2 (en) * 2005-02-01 2011-01-26 ソニー株式会社 Micro vibrator, semiconductor device, and communication device
JP4645227B2 (en) * 2005-02-28 2011-03-09 セイコーエプソン株式会社 Vibrator structure and manufacturing method thereof
US7227432B2 (en) * 2005-06-30 2007-06-05 Robert Bosch Gmbh MEMS resonator array structure and method of operating and using same
JP2007150736A (en) * 2005-11-28 2007-06-14 Sony Corp Micro electromechanical device
JP2007174438A (en) * 2005-12-23 2007-07-05 Toshiba Corp Filter circuit and radio communication system with filter
JP4930769B2 (en) * 2006-09-04 2012-05-16 セイコーインスツル株式会社 Oscillator
JP2008211420A (en) * 2007-02-26 2008-09-11 Seiko Instruments Inc Oscillator
JP5122888B2 (en) * 2007-08-27 2013-01-16 セイコーインスツル株式会社 OSCILLATOR, METHOD FOR MANUFACTURING OSCILLATOR, AND OSCILLATOR
US7907035B2 (en) * 2007-12-18 2011-03-15 Robert Bosch Gmbh MEMS resonator array structure and method of operating and using same
US8493157B2 (en) 2008-06-18 2013-07-23 Nxp B.V. MEMS resonator for filtering and mixing
FR2939581B1 (en) * 2008-12-09 2010-11-26 Commissariat Energie Atomique NETWORK OF COUPLED RESONATORS, PASS-BAND FILTER AND OSCILLATOR.
FR2942681B1 (en) * 2009-02-27 2011-05-13 Commissariat Energie Atomique MICROMETRIC OR NANOMETRIC RESONANT DEVICE WITH TRANSISTORS
WO2010150821A1 (en) * 2009-06-25 2010-12-29 三洋電機株式会社 Resonator
CN103905009A (en) 2012-12-27 2014-07-02 精工爱普生株式会社 Vibrator, oscillator, electronic apparatus, moving object, and method of manufacturing vibrator

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1994014240A1 (en) * 1992-12-11 1994-06-23 The Regents Of The University Of California Microelectromechanical signal processors
US5839062A (en) * 1994-03-18 1998-11-17 The Regents Of The University Of California Mixing, modulation and demodulation via electromechanical resonators
US6049702A (en) * 1997-12-04 2000-04-11 Rockwell Science Center, Llc Integrated passive transceiver section
FI106894B (en) * 1998-06-02 2001-04-30 Nokia Mobile Phones Ltd resonator structures

Also Published As

Publication number Publication date
AU2001255868A1 (en) 2001-11-07
CA2406543A1 (en) 2001-11-01
WO2001082467A2 (en) 2001-11-01
JP2003532323A (en) 2003-10-28
CA2406223A1 (en) 2001-11-01
JP2003532320A (en) 2003-10-28
WO2001082475A2 (en) 2001-11-01
JP2003532322A (en) 2003-10-28
WO2001082467A3 (en) 2002-04-11
WO2001082479A3 (en) 2002-04-11
CA2406518A1 (en) 2001-11-01
WO2001082479A2 (en) 2001-11-01
WO2001082477A2 (en) 2001-11-01
AU2001255865A1 (en) 2001-11-07
AU2001261036A1 (en) 2001-11-07
EP1277277A2 (en) 2003-01-22
EP1290788A2 (en) 2003-03-12
JP2004515089A (en) 2004-05-20
EP1285491A2 (en) 2003-02-26
CA2406176A1 (en) 2001-11-01
WO2001082478A3 (en) 2002-04-11
WO2001082477A3 (en) 2002-04-11
AU2001255866A1 (en) 2001-11-07
WO2001082476A3 (en) 2002-08-15
AU2001257612A1 (en) 2001-11-07
EP1275201A2 (en) 2003-01-15
WO2001082478A2 (en) 2001-11-01
WO2001082475A3 (en) 2002-02-21
WO2001082476A2 (en) 2001-11-01

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