WO2001082478A3 - Method and subsystem for processing signals utilizing a plurality of vibrating micromechanical devices - Google Patents

Method and subsystem for processing signals utilizing a plurality of vibrating micromechanical devices Download PDF

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Publication number
WO2001082478A3
WO2001082478A3 PCT/US2001/040565 US0140565W WO0182478A3 WO 2001082478 A3 WO2001082478 A3 WO 2001082478A3 US 0140565 W US0140565 W US 0140565W WO 0182478 A3 WO0182478 A3 WO 0182478A3
Authority
WO
WIPO (PCT)
Prior art keywords
subsystem
vibrating micromechanical
signals utilizing
architectures
circuits
Prior art date
Application number
PCT/US2001/040565
Other languages
French (fr)
Other versions
WO2001082478A2 (en
Inventor
Clark T C Nguyen
Original Assignee
Univ Michigan
Clark T C Nguyen
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Michigan, Clark T C Nguyen filed Critical Univ Michigan
Priority to JP2001579450A priority Critical patent/JP2004515089A/en
Priority to EP01931148A priority patent/EP1277277A2/en
Priority to AU2001257612A priority patent/AU2001257612A1/en
Priority to CA002406543A priority patent/CA2406543A1/en
Publication of WO2001082478A2 publication Critical patent/WO2001082478A2/en
Publication of WO2001082478A3 publication Critical patent/WO2001082478A3/en

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/462—Microelectro-mechanical filters
    • H03H9/465—Microelectro-mechanical filters in combination with other electronic elements
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02393—Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor
    • H03H9/02409—Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor by application of a DC-bias voltage
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/462—Microelectro-mechanical filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/462—Microelectro-mechanical filters
    • H03H9/467—Post-fabrication trimming of parameters, e.g. center frequency
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/48—Coupling means therefor
    • H03H9/50—Mechanical coupling means
    • H03H9/505—Mechanical coupling means for microelectro-mechanical filters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02511—Vertical, i.e. perpendicular to the substrate plane
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02519—Torsional
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02527—Combined

Abstract

Several MEMS-based methods and architectures which utilize vibrating micromechanical resonators in circuits to implement filtering, mixing, frequency reference and amplifying functions are provided. A method and subsystem are provided for processing RF signals utilizing a plurality of vibrating micromechanical devices typically in the form of an IF mixer-filter and an RF channel selector or an image-reject RF filter. One of the primary benefits of the use of such architectures is a savings in power consumption by trading power for high selectivity (i.e., high Q). Also, such methods and circuits can elimitate the need for a low noise amplifier in a receiver or transceiver subsystem. Consequently, the present invention relies on the use of a large number of micromechanical links in SSI networks to implement signal processing functions with basically zero DC power consumption.
PCT/US2001/040565 2000-04-20 2001-04-20 Method and subsystem for processing signals utilizing a plurality of vibrating micromechanical devices WO2001082478A2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2001579450A JP2004515089A (en) 2000-04-20 2001-04-20 Method and subsystem for processing a signal utilizing a plurality of vibrating micromechanical element arrays
EP01931148A EP1277277A2 (en) 2000-04-20 2001-04-20 Method and subsystem for processing signals utilizing a plurality of vibrating micromechanical devices
AU2001257612A AU2001257612A1 (en) 2000-04-20 2001-04-20 Method and subsystem for processing signals utilizing a plurality of vibrating micromechanical devices
CA002406543A CA2406543A1 (en) 2000-04-20 2001-04-20 Method and subsystem for processing signals utilizing a plurality of vibrating micromechanical devices

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US19906300P 2000-04-20 2000-04-20
US60/199,063 2000-04-20

Publications (2)

Publication Number Publication Date
WO2001082478A2 WO2001082478A2 (en) 2001-11-01
WO2001082478A3 true WO2001082478A3 (en) 2002-04-11

Family

ID=22736053

Family Applications (6)

Application Number Title Priority Date Filing Date
PCT/US2001/012806 WO2001082475A2 (en) 2000-04-20 2001-04-20 Method and apparatus for upconverting and filtering an information signal utilizing a vibrating micromechanical device
PCT/US2001/040564 WO2001082477A2 (en) 2000-04-20 2001-04-20 Method and apparatus for filtering signals utilizing a vibrating micromechanical resonator
PCT/US2001/040566 WO2001082479A2 (en) 2000-04-20 2001-04-20 Method and apparatus for filtering signals in a subsystem including a power amplifier utilizing a bank of vibrating micromechanical apparatus
PCT/US2001/040563 WO2001082467A2 (en) 2000-04-20 2001-04-20 Method and apparatus for generating a signal having at least one desired output frequency utilizing a bank of vibrating micromechanical devices
PCT/US2001/040565 WO2001082478A2 (en) 2000-04-20 2001-04-20 Method and subsystem for processing signals utilizing a plurality of vibrating micromechanical devices
PCT/US2001/040562 WO2001082476A2 (en) 2000-04-20 2001-04-20 Method and apparatus for selecting at least one desired channel utilizing a bank of vibrating micromechanical apparatus

Family Applications Before (4)

Application Number Title Priority Date Filing Date
PCT/US2001/012806 WO2001082475A2 (en) 2000-04-20 2001-04-20 Method and apparatus for upconverting and filtering an information signal utilizing a vibrating micromechanical device
PCT/US2001/040564 WO2001082477A2 (en) 2000-04-20 2001-04-20 Method and apparatus for filtering signals utilizing a vibrating micromechanical resonator
PCT/US2001/040566 WO2001082479A2 (en) 2000-04-20 2001-04-20 Method and apparatus for filtering signals in a subsystem including a power amplifier utilizing a bank of vibrating micromechanical apparatus
PCT/US2001/040563 WO2001082467A2 (en) 2000-04-20 2001-04-20 Method and apparatus for generating a signal having at least one desired output frequency utilizing a bank of vibrating micromechanical devices

Family Applications After (1)

Application Number Title Priority Date Filing Date
PCT/US2001/040562 WO2001082476A2 (en) 2000-04-20 2001-04-20 Method and apparatus for selecting at least one desired channel utilizing a bank of vibrating micromechanical apparatus

Country Status (5)

Country Link
EP (4) EP1285491A2 (en)
JP (4) JP2003532322A (en)
AU (6) AU2001255868A1 (en)
CA (4) CA2406518A1 (en)
WO (6) WO2001082475A2 (en)

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JP4176450B2 (en) * 2002-02-13 2008-11-05 松下電器産業株式会社 Micro mechanical vibration filter
JP4075503B2 (en) * 2002-07-30 2008-04-16 ソニー株式会社 Micromachine and manufacturing method thereof
AU2003271082A1 (en) * 2002-10-03 2004-04-23 Sharp Kabushiki Kaisha Microresonator, microfilter, micro-oscillator, and wireless communication device
DE10252828B4 (en) * 2002-11-13 2018-07-05 Epcos Ag Acoustic wave device and method of fabricating a device
EP1432119A1 (en) * 2002-12-17 2004-06-23 Dialog Semiconductor GmbH High quality serial resonance oscillator
JP4575075B2 (en) * 2003-08-12 2010-11-04 パナソニック株式会社 Electromechanical filter, electric circuit and electric device using the same
US6870444B1 (en) 2003-08-28 2005-03-22 Motorola, Inc. Electromechanical resonator and method of operating same
EP1667323A1 (en) * 2003-09-19 2006-06-07 Sony Corporation Micro electric machine system resonator, drive method thereof, manufacturing method thereof, and frequency filter
US6995622B2 (en) 2004-01-09 2006-02-07 Robert Bosh Gmbh Frequency and/or phase compensated microelectromechanical oscillator
FI20040162A0 (en) * 2004-02-03 2004-02-03 Nokia Oyj Stabilization of reference oscillator frequency
JP2005311567A (en) * 2004-04-20 2005-11-04 Sony Corp Filter device and transceiver
JP2005311568A (en) * 2004-04-20 2005-11-04 Sony Corp Filter device and transceiver
JP4586404B2 (en) 2004-04-28 2010-11-24 ソニー株式会社 Filter device and transceiver
JP4470606B2 (en) 2004-06-18 2010-06-02 ソニー株式会社 High frequency element and communication device
JP4608984B2 (en) * 2004-07-21 2011-01-12 ソニー株式会社 Microresonator, manufacturing method thereof, and electronic device
JP2006041911A (en) * 2004-07-27 2006-02-09 Matsushita Electric Ind Co Ltd Mems filter device and manufacturing method thereof
JP4635619B2 (en) * 2005-01-20 2011-02-23 ソニー株式会社 Microresonator and communication device
JP4604730B2 (en) * 2005-01-20 2011-01-05 ソニー株式会社 Micro vibrator, semiconductor device, and communication device
JP4617904B2 (en) * 2005-02-01 2011-01-26 ソニー株式会社 Micro vibrator, semiconductor device, and communication device
JP4645227B2 (en) * 2005-02-28 2011-03-09 セイコーエプソン株式会社 Vibrator structure and manufacturing method thereof
US7227432B2 (en) * 2005-06-30 2007-06-05 Robert Bosch Gmbh MEMS resonator array structure and method of operating and using same
JP2007150736A (en) * 2005-11-28 2007-06-14 Sony Corp Micro electromechanical device
JP2007174438A (en) * 2005-12-23 2007-07-05 Toshiba Corp Filter circuit and radio communication system with filter
JP4930769B2 (en) * 2006-09-04 2012-05-16 セイコーインスツル株式会社 Oscillator
JP2008211420A (en) * 2007-02-26 2008-09-11 Seiko Instruments Inc Oscillator
JP5122888B2 (en) * 2007-08-27 2013-01-16 セイコーインスツル株式会社 OSCILLATOR, METHOD FOR MANUFACTURING OSCILLATOR, AND OSCILLATOR
US7907035B2 (en) * 2007-12-18 2011-03-15 Robert Bosch Gmbh MEMS resonator array structure and method of operating and using same
US8493157B2 (en) 2008-06-18 2013-07-23 Nxp B.V. MEMS resonator for filtering and mixing
FR2939581B1 (en) * 2008-12-09 2010-11-26 Commissariat Energie Atomique NETWORK OF COUPLED RESONATORS, PASS-BAND FILTER AND OSCILLATOR.
FR2942681B1 (en) * 2009-02-27 2011-05-13 Commissariat Energie Atomique MICROMETRIC OR NANOMETRIC RESONANT DEVICE WITH TRANSISTORS
WO2010150821A1 (en) * 2009-06-25 2010-12-29 三洋電機株式会社 Resonator
CN103905009A (en) 2012-12-27 2014-07-02 精工爱普生株式会社 Vibrator, oscillator, electronic apparatus, moving object, and method of manufacturing vibrator

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US5537083A (en) * 1992-12-11 1996-07-16 Regents Of The University Of California Microelectromechanical signal processors
US5839062A (en) * 1994-03-18 1998-11-17 The Regents Of The University Of California Mixing, modulation and demodulation via electromechanical resonators
EP0962999A2 (en) * 1998-06-02 1999-12-08 Nokia Mobile Phones Ltd. Resonator structures

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Patent Citations (3)

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US5537083A (en) * 1992-12-11 1996-07-16 Regents Of The University Of California Microelectromechanical signal processors
US5839062A (en) * 1994-03-18 1998-11-17 The Regents Of The University Of California Mixing, modulation and demodulation via electromechanical resonators
EP0962999A2 (en) * 1998-06-02 1999-12-08 Nokia Mobile Phones Ltd. Resonator structures

Non-Patent Citations (1)

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See also references of EP1277277A2 *

Also Published As

Publication number Publication date
AU2001255868A1 (en) 2001-11-07
CA2406543A1 (en) 2001-11-01
WO2001082467A2 (en) 2001-11-01
AU2001255867A1 (en) 2001-11-07
JP2003532323A (en) 2003-10-28
CA2406223A1 (en) 2001-11-01
JP2003532320A (en) 2003-10-28
WO2001082475A2 (en) 2001-11-01
JP2003532322A (en) 2003-10-28
WO2001082467A3 (en) 2002-04-11
WO2001082479A3 (en) 2002-04-11
CA2406518A1 (en) 2001-11-01
WO2001082479A2 (en) 2001-11-01
WO2001082477A2 (en) 2001-11-01
AU2001255865A1 (en) 2001-11-07
AU2001261036A1 (en) 2001-11-07
EP1277277A2 (en) 2003-01-22
EP1290788A2 (en) 2003-03-12
JP2004515089A (en) 2004-05-20
EP1285491A2 (en) 2003-02-26
CA2406176A1 (en) 2001-11-01
WO2001082477A3 (en) 2002-04-11
AU2001255866A1 (en) 2001-11-07
WO2001082476A3 (en) 2002-08-15
AU2001257612A1 (en) 2001-11-07
EP1275201A2 (en) 2003-01-15
WO2001082478A2 (en) 2001-11-01
WO2001082475A3 (en) 2002-02-21
WO2001082476A2 (en) 2001-11-01

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