WO2001082477A3 - Method and apparatus for filtering signals utilizing a vibrating micromechanical resonator - Google Patents

Method and apparatus for filtering signals utilizing a vibrating micromechanical resonator Download PDF

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Publication number
WO2001082477A3
WO2001082477A3 PCT/US2001/040564 US0140564W WO0182477A3 WO 2001082477 A3 WO2001082477 A3 WO 2001082477A3 US 0140564 W US0140564 W US 0140564W WO 0182477 A3 WO0182477 A3 WO 0182477A3
Authority
WO
WIPO (PCT)
Prior art keywords
signals utilizing
vibrating micromechanical
filtering signals
architectures
micromechanical resonator
Prior art date
Application number
PCT/US2001/040564
Other languages
French (fr)
Other versions
WO2001082477A2 (en
Inventor
Clark T C Nguyen
Original Assignee
Univ Michigan
Clark T C Nguyen
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Michigan, Clark T C Nguyen filed Critical Univ Michigan
Priority to AU2001255867A priority Critical patent/AU2001255867A1/en
Publication of WO2001082477A2 publication Critical patent/WO2001082477A2/en
Publication of WO2001082477A3 publication Critical patent/WO2001082477A3/en

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/462—Microelectro-mechanical filters
    • H03H9/465—Microelectro-mechanical filters in combination with other electronic elements
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02393—Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor
    • H03H9/02409—Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor by application of a DC-bias voltage
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/462—Microelectro-mechanical filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/462—Microelectro-mechanical filters
    • H03H9/467—Post-fabrication trimming of parameters, e.g. center frequency
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/48—Coupling means therefor
    • H03H9/50—Mechanical coupling means
    • H03H9/505—Mechanical coupling means for microelectro-mechanical filters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02511—Vertical, i.e. perpendicular to the substrate plane
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02519—Torsional
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02527—Combined

Abstract

Several MEMS-based methods and architectures which utilize vibrating micromechanical resonators in circuits to implement filtering, mixing, frequency reference and amplifying functions are provided. Apparatus is provided for filtering signals utilizing vibrating micromechanical resonators. One of the primary benefits of the use of such architectures is a savings in power consumption by trading power for high selectivity (i.e., high Q). Consequently, the present invention relies on the use of a large number of micromechanical links in SSI networks to implement signal processing functions with basically zero DC power consumption.
PCT/US2001/040564 2000-04-20 2001-04-20 Method and apparatus for filtering signals utilizing a vibrating micromechanical resonator WO2001082477A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2001255867A AU2001255867A1 (en) 2000-04-20 2001-04-20 Method and apparatus for filtering signals utilizing a vibrating micromechanicalresonator

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US19906300P 2000-04-20 2000-04-20
US60/199,063 2000-04-20

Publications (2)

Publication Number Publication Date
WO2001082477A2 WO2001082477A2 (en) 2001-11-01
WO2001082477A3 true WO2001082477A3 (en) 2002-04-11

Family

ID=22736053

Family Applications (6)

Application Number Title Priority Date Filing Date
PCT/US2001/012806 WO2001082475A2 (en) 2000-04-20 2001-04-20 Method and apparatus for upconverting and filtering an information signal utilizing a vibrating micromechanical device
PCT/US2001/040564 WO2001082477A2 (en) 2000-04-20 2001-04-20 Method and apparatus for filtering signals utilizing a vibrating micromechanical resonator
PCT/US2001/040566 WO2001082479A2 (en) 2000-04-20 2001-04-20 Method and apparatus for filtering signals in a subsystem including a power amplifier utilizing a bank of vibrating micromechanical apparatus
PCT/US2001/040563 WO2001082467A2 (en) 2000-04-20 2001-04-20 Method and apparatus for generating a signal having at least one desired output frequency utilizing a bank of vibrating micromechanical devices
PCT/US2001/040565 WO2001082478A2 (en) 2000-04-20 2001-04-20 Method and subsystem for processing signals utilizing a plurality of vibrating micromechanical devices
PCT/US2001/040562 WO2001082476A2 (en) 2000-04-20 2001-04-20 Method and apparatus for selecting at least one desired channel utilizing a bank of vibrating micromechanical apparatus

Family Applications Before (1)

Application Number Title Priority Date Filing Date
PCT/US2001/012806 WO2001082475A2 (en) 2000-04-20 2001-04-20 Method and apparatus for upconverting and filtering an information signal utilizing a vibrating micromechanical device

Family Applications After (4)

Application Number Title Priority Date Filing Date
PCT/US2001/040566 WO2001082479A2 (en) 2000-04-20 2001-04-20 Method and apparatus for filtering signals in a subsystem including a power amplifier utilizing a bank of vibrating micromechanical apparatus
PCT/US2001/040563 WO2001082467A2 (en) 2000-04-20 2001-04-20 Method and apparatus for generating a signal having at least one desired output frequency utilizing a bank of vibrating micromechanical devices
PCT/US2001/040565 WO2001082478A2 (en) 2000-04-20 2001-04-20 Method and subsystem for processing signals utilizing a plurality of vibrating micromechanical devices
PCT/US2001/040562 WO2001082476A2 (en) 2000-04-20 2001-04-20 Method and apparatus for selecting at least one desired channel utilizing a bank of vibrating micromechanical apparatus

Country Status (5)

Country Link
EP (4) EP1285491A2 (en)
JP (4) JP2003532322A (en)
AU (6) AU2001255868A1 (en)
CA (4) CA2406518A1 (en)
WO (6) WO2001082475A2 (en)

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US6995622B2 (en) 2004-01-09 2006-02-07 Robert Bosh Gmbh Frequency and/or phase compensated microelectromechanical oscillator
FI20040162A0 (en) * 2004-02-03 2004-02-03 Nokia Oyj Stabilization of reference oscillator frequency
JP2005311567A (en) * 2004-04-20 2005-11-04 Sony Corp Filter device and transceiver
JP2005311568A (en) * 2004-04-20 2005-11-04 Sony Corp Filter device and transceiver
JP4586404B2 (en) 2004-04-28 2010-11-24 ソニー株式会社 Filter device and transceiver
JP4470606B2 (en) 2004-06-18 2010-06-02 ソニー株式会社 High frequency element and communication device
JP4608984B2 (en) * 2004-07-21 2011-01-12 ソニー株式会社 Microresonator, manufacturing method thereof, and electronic device
JP2006041911A (en) * 2004-07-27 2006-02-09 Matsushita Electric Ind Co Ltd Mems filter device and manufacturing method thereof
JP4635619B2 (en) * 2005-01-20 2011-02-23 ソニー株式会社 Microresonator and communication device
JP4604730B2 (en) * 2005-01-20 2011-01-05 ソニー株式会社 Micro vibrator, semiconductor device, and communication device
JP4617904B2 (en) * 2005-02-01 2011-01-26 ソニー株式会社 Micro vibrator, semiconductor device, and communication device
JP4645227B2 (en) * 2005-02-28 2011-03-09 セイコーエプソン株式会社 Vibrator structure and manufacturing method thereof
US7227432B2 (en) * 2005-06-30 2007-06-05 Robert Bosch Gmbh MEMS resonator array structure and method of operating and using same
JP2007150736A (en) * 2005-11-28 2007-06-14 Sony Corp Micro electromechanical device
JP2007174438A (en) * 2005-12-23 2007-07-05 Toshiba Corp Filter circuit and radio communication system with filter
JP4930769B2 (en) * 2006-09-04 2012-05-16 セイコーインスツル株式会社 Oscillator
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JP5122888B2 (en) * 2007-08-27 2013-01-16 セイコーインスツル株式会社 OSCILLATOR, METHOD FOR MANUFACTURING OSCILLATOR, AND OSCILLATOR
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Also Published As

Publication number Publication date
AU2001255868A1 (en) 2001-11-07
CA2406543A1 (en) 2001-11-01
WO2001082467A2 (en) 2001-11-01
AU2001255867A1 (en) 2001-11-07
JP2003532323A (en) 2003-10-28
CA2406223A1 (en) 2001-11-01
JP2003532320A (en) 2003-10-28
WO2001082475A2 (en) 2001-11-01
JP2003532322A (en) 2003-10-28
WO2001082467A3 (en) 2002-04-11
WO2001082479A3 (en) 2002-04-11
CA2406518A1 (en) 2001-11-01
WO2001082479A2 (en) 2001-11-01
WO2001082477A2 (en) 2001-11-01
AU2001255865A1 (en) 2001-11-07
AU2001261036A1 (en) 2001-11-07
EP1277277A2 (en) 2003-01-22
EP1290788A2 (en) 2003-03-12
JP2004515089A (en) 2004-05-20
EP1285491A2 (en) 2003-02-26
CA2406176A1 (en) 2001-11-01
WO2001082478A3 (en) 2002-04-11
AU2001255866A1 (en) 2001-11-07
WO2001082476A3 (en) 2002-08-15
AU2001257612A1 (en) 2001-11-07
EP1275201A2 (en) 2003-01-15
WO2001082478A2 (en) 2001-11-01
WO2001082475A3 (en) 2002-02-21
WO2001082476A2 (en) 2001-11-01

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