AU2001236511A1 - Micro-electromechanical structure resonator, method of making, and method of using - Google Patents

Micro-electromechanical structure resonator, method of making, and method of using

Info

Publication number
AU2001236511A1
AU2001236511A1 AU2001236511A AU3651101A AU2001236511A1 AU 2001236511 A1 AU2001236511 A1 AU 2001236511A1 AU 2001236511 A AU2001236511 A AU 2001236511A AU 3651101 A AU3651101 A AU 3651101A AU 2001236511 A1 AU2001236511 A1 AU 2001236511A1
Authority
AU
Australia
Prior art keywords
micro
making
electromechanical structure
structure resonator
resonator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001236511A
Inventor
Peng Cheng
Qing Ma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Intel Corp
Original Assignee
Intel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Intel Corp filed Critical Intel Corp
Publication of AU2001236511A1 publication Critical patent/AU2001236511A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/0072—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks
    • H03H3/0076—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks for obtaining desired frequency or temperature coefficients
    • H03H3/0077—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks for obtaining desired frequency or temperature coefficients by tuning of resonance frequency
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0067—Mechanical properties
    • B81B3/007—For controlling stiffness, e.g. ribs
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B21/00—Head arrangements not specific to the method of recording or reproducing
    • G11B21/16—Supporting the heads; Supporting the sockets for plug-in heads
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/4806—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed specially adapted for disk drive assemblies, e.g. assembly prior to operation, hard or flexible disk drives
    • G11B5/484—Integrated arm assemblies, e.g. formed by material deposition or by etching from single piece of metal or by lamination of materials forming a single arm/suspension/head unit
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2447—Beam resonators
    • H03H9/2463—Clamped-clamped beam resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02283—Vibrating means
    • H03H2009/0233—Vibrating means comprising perforations

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
AU2001236511A 2000-02-18 2001-01-22 Micro-electromechanical structure resonator, method of making, and method of using Abandoned AU2001236511A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09507228 2000-02-18
US09/507,228 US6445106B1 (en) 2000-02-18 2000-02-18 Micro-electromechanical structure resonator, method of making, and method of using
PCT/US2001/002203 WO2001061846A1 (en) 2000-02-18 2001-01-22 Micro-electromechanical structure resonator, method of making, and method of using

Publications (1)

Publication Number Publication Date
AU2001236511A1 true AU2001236511A1 (en) 2001-08-27

Family

ID=24017770

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001236511A Abandoned AU2001236511A1 (en) 2000-02-18 2001-01-22 Micro-electromechanical structure resonator, method of making, and method of using

Country Status (4)

Country Link
US (2) US6445106B1 (en)
EP (1) EP1260019B1 (en)
AU (1) AU2001236511A1 (en)
WO (1) WO2001061846A1 (en)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7071520B2 (en) * 2000-08-23 2006-07-04 Reflectivity, Inc MEMS with flexible portions made of novel materials
US7057246B2 (en) * 2000-08-23 2006-06-06 Reflectivity, Inc Transition metal dielectric alloy materials for MEMS
US7057251B2 (en) * 2001-07-20 2006-06-06 Reflectivity, Inc MEMS device made of transition metal-dielectric oxide materials
US6632698B2 (en) * 2001-08-07 2003-10-14 Hewlett-Packard Development Company, L.P. Microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams in MEMS
US6531668B1 (en) * 2001-08-30 2003-03-11 Intel Corporation High-speed MEMS switch with high-resonance-frequency beam
US6630871B2 (en) * 2001-09-28 2003-10-07 Intel Corporation Center-mass-reduced microbridge structures for ultra-high frequency MEM resonator
US6714007B2 (en) * 2002-01-18 2004-03-30 Honeywell International Inc. Optically powered resonant integrated microstructure magnetic field gradient sensor
US7701022B2 (en) * 2002-05-01 2010-04-20 Rohm Co., Ltd. Semiconductor device and method of producing the same
US6835589B2 (en) * 2002-11-14 2004-12-28 International Business Machines Corporation Three-dimensional integrated CMOS-MEMS device and process for making the same
US7245897B2 (en) * 2003-03-10 2007-07-17 Intel Corporation Using an electroacoustic resonator
US6987432B2 (en) * 2003-04-16 2006-01-17 Robert Bosch Gmbh Temperature compensation for silicon MEMS resonator
US6876283B1 (en) * 2003-07-11 2005-04-05 Iowa State University Research Foundation, Inc. Tapered-width micro-cantilevers and micro-bridges
US7183622B2 (en) * 2004-06-30 2007-02-27 Intel Corporation Module integrating MEMS and passive components
FR2883560A1 (en) * 2005-03-24 2006-09-29 St Microelectronics Sa ELECTROMECHANICAL MICROSYSTEM COMPRISING A BEAM DEFORMING BY FLEXION
US7268463B2 (en) * 2005-07-28 2007-09-11 Freescale Semiconductor, Inc. Stress release mechanism in MEMS device and method of making same
US7612423B2 (en) * 2005-08-31 2009-11-03 Teledyne Scientific & Imaging, Llc Signal-carrying flexure structure for micro-electromechanical devices
US20070235501A1 (en) * 2006-03-29 2007-10-11 John Heck Self-packaging MEMS device
US7859365B2 (en) * 2006-12-13 2010-12-28 Georgia Tech Research Corporation Low frequency process-variation-insensitive temperature-stable micromechanical resonators
US7777596B2 (en) * 2007-12-18 2010-08-17 Robert Bosch Gmbh MEMS resonator structure and method
US8476809B2 (en) * 2008-04-29 2013-07-02 Sand 9, Inc. Microelectromechanical systems (MEMS) resonators and related apparatus and methods
US8704315B2 (en) * 2008-06-26 2014-04-22 Cornell University CMOS integrated micromechanical resonators and methods for fabricating the same
US7888843B2 (en) * 2008-09-10 2011-02-15 Georgia Tech Research Corporation Thin-film piezoelectric-on-insulator resonators having perforated resonator bodies therein
US7939990B2 (en) * 2009-01-30 2011-05-10 Integrated Device Technology, Inc. Thin-film bulk acoustic resonators having perforated bodies that provide reduced susceptibility to process-induced lateral dimension variations
US20100194246A1 (en) * 2009-01-30 2010-08-05 Integrated Device Technology, Inc. Thin-Film Bulk Acoustic Resonators Having Reduced Susceptibility to Process-Induced Material Thickness Variations
US8887571B2 (en) 2009-03-31 2014-11-18 Siemens Aktiengesellschaft Vibrating micromechanical system having beam-shaped element
US8381378B2 (en) * 2009-06-19 2013-02-26 Georgia Tech Research Corporation Methods of forming micromechanical resonators having high density trench arrays therein that provide passive temperature compensation
US8106724B1 (en) 2009-07-23 2012-01-31 Integrated Device Technologies, Inc. Thin-film bulk acoustic resonators having perforated resonator body supports that enhance quality factor
US8865497B2 (en) * 2010-06-25 2014-10-21 International Business Machines Corporation Planar cavity MEMS and related structures, methods of manufacture and design structures
US8501515B1 (en) 2011-02-25 2013-08-06 Integrated Device Technology Inc. Methods of forming micro-electromechanical resonators using passive compensation techniques
US8610336B1 (en) 2011-09-30 2013-12-17 Integrated Device Technology Inc Microelectromechanical resonators having resistive heating elements therein configured to provide frequency tuning through convective heating of resonator bodies
CN107592089B (en) * 2017-09-14 2020-04-21 东南大学 Low thermoelastic damping cantilever micro-beam resonator with through hole structure
DE102018219546B3 (en) * 2018-11-15 2019-09-12 Robert Bosch Gmbh Micromechanical component

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4381672A (en) * 1981-03-04 1983-05-03 The Bendix Corporation Vibrating beam rotation sensor
JPS60180203A (en) 1984-02-27 1985-09-14 Tdk Corp Dielectric resonator and its manufacture
US5061049A (en) 1984-08-31 1991-10-29 Texas Instruments Incorporated Spatial light modulator and method
US4614119A (en) * 1985-03-08 1986-09-30 The Foxboro Company Resonant hollow beam and method
US4764244A (en) * 1985-06-11 1988-08-16 The Foxboro Company Resonant sensor and method of making same
JPS63299605A (en) 1987-05-29 1988-12-07 Murata Mfg Co Ltd Manufacture of dielectric resonator
JP2547869B2 (en) 1988-11-09 1996-10-23 キヤノン株式会社 PROBE UNIT, METHOD FOR DRIVING THE PROBE, AND SCANNING TUNNEL CURRENT DETECTION DEVICE HAVING THE PROBE UNIT
JPH0723631B2 (en) 1988-11-18 1995-03-15 株式会社ノザワ Method for manufacturing resonator type soundproof panel
JP3030574B2 (en) 1990-08-16 2000-04-10 キヤノン株式会社 Micro-displacement information detecting probe element, scanning tunnel microscope, atomic force microscope, and information processing apparatus using the same
US5314572A (en) 1990-08-17 1994-05-24 Analog Devices, Inc. Method for fabricating microstructures
JP2910807B2 (en) 1991-10-25 1999-06-23 株式会社村田製作所 Dielectric resonator device, dielectric filter, and method of manufacturing the same
AU5869994A (en) * 1992-12-11 1994-07-04 Regents Of The University Of California, The Microelectromechanical signal processors
US5417115A (en) * 1993-07-23 1995-05-23 Honeywell Inc. Dielectrically isolated resonant microsensors
US5658698A (en) * 1994-01-31 1997-08-19 Canon Kabushiki Kaisha Microstructure, process for manufacturing thereof and devices incorporating the same
KR950024146A (en) 1994-01-31 1995-08-21 모리시타 요이찌 Information recording and reproducing apparatus and information recording and reproducing method
JPH08222911A (en) 1995-02-17 1996-08-30 Toko Inc Manufacture of dielectric filter and dielectric resonator
JPH08329538A (en) * 1995-05-30 1996-12-13 Hewlett Packard Co <Hp> Probe device
US6557419B1 (en) 1996-12-31 2003-05-06 Honeywell International Inc. Zero TCF thin film resonator
US5808210A (en) * 1996-12-31 1998-09-15 Honeywell Inc. Thin film resonant microbeam absolute pressure sensor
US5914553A (en) * 1997-06-16 1999-06-22 Cornell Research Foundation, Inc. Multistable tunable micromechanical resonators
US6249073B1 (en) 1999-01-14 2001-06-19 The Regents Of The University Of Michigan Device including a micromechanical resonator having an operating frequency and method of extending same
US6269698B1 (en) * 1999-03-25 2001-08-07 Alliedsignal Inc. Vibrating beam force sensor
US6367914B1 (en) * 1999-04-15 2002-04-09 Ricoh Company, Ltd. Electrostatic ink-jet head and method of production of the same
JP2001026105A (en) * 1999-07-15 2001-01-30 Ricoh Co Ltd Ink jet head
US6263736B1 (en) * 1999-09-24 2001-07-24 Ut-Battelle, Llc Electrostatically tunable resonance frequency beam utilizing a stress-sensitive film

Also Published As

Publication number Publication date
US6479921B2 (en) 2002-11-12
US6445106B1 (en) 2002-09-03
WO2001061846A1 (en) 2001-08-23
EP1260019A1 (en) 2002-11-27
US20020096967A1 (en) 2002-07-25
EP1260019B1 (en) 2016-11-30

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