CA2093924C - Acid bath for copper plating - Google Patents

Acid bath for copper plating Download PDF

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Publication number
CA2093924C
CA2093924C CA002093924A CA2093924A CA2093924C CA 2093924 C CA2093924 C CA 2093924C CA 002093924 A CA002093924 A CA 002093924A CA 2093924 A CA2093924 A CA 2093924A CA 2093924 C CA2093924 C CA 2093924C
Authority
CA
Canada
Prior art keywords
bath
beta
bath according
phenazonium
naphthol
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CA002093924A
Other languages
English (en)
French (fr)
Other versions
CA2093924A1 (en
Inventor
Wolfgang Dahms
Horst Westphal
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Atotech Deutschland GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Atotech Deutschland GmbH and Co KG filed Critical Atotech Deutschland GmbH and Co KG
Publication of CA2093924A1 publication Critical patent/CA2093924A1/en
Application granted granted Critical
Publication of CA2093924C publication Critical patent/CA2093924C/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00—Electroplating: Baths therefor
    • C25D3/02—Electroplating: Baths therefor from solutions
    • C25D3/38—Electroplating: Baths therefor from solutions of copper

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroplating And Plating Baths Therefor (AREA)
  • Electrolytic Production Of Metals (AREA)
CA002093924A 1990-10-13 1991-10-11 Acid bath for copper plating Expired - Lifetime CA2093924C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DEP4032864.3 1990-10-13
DE4032864A DE4032864A1 (de) 1990-10-13 1990-10-13 Saures bad zur galvanischen abscheidung von kupferueberzuegen und verfahren unter verwendung dieser kombination
PCT/DE1991/000811 WO1992007116A1 (de) 1990-10-13 1991-10-11 Saures bad zur galvanischen abscheidung von kupferüberzügen und verfahren unter verwendung dieser kombination

Publications (2)

Publication Number Publication Date
CA2093924A1 CA2093924A1 (en) 1992-04-14
CA2093924C true CA2093924C (en) 2002-02-05

Family

ID=6416407

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002093924A Expired - Lifetime CA2093924C (en) 1990-10-13 1991-10-11 Acid bath for copper plating

Country Status (7)

Country Link
EP (1) EP0554275B1 (enExample)
JP (1) JPH06501986A (enExample)
AT (1) ATE115651T1 (enExample)
CA (1) CA2093924C (enExample)
DE (2) DE4032864A1 (enExample)
ES (1) ES2066477T3 (enExample)
WO (1) WO1992007116A1 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10261852B3 (de) 2002-12-20 2004-06-03 Atotech Deutschland Gmbh Gemisch oligomerer Phenaziniumverbindungen und dessen Herstellungsverfahren, saures Bad zur elektrolytischen Abscheidung eines Kupferniederschlages, enthaltend die oligomeren Phenaziniumverbindungen, sowie Verfahren zum elektrolytischen Abscheiden eines Kupferniederschlages mit einem das Gemisch enthaltenden Bad
DE10337669B4 (de) * 2003-08-08 2006-04-27 Atotech Deutschland Gmbh Wässrige, saure Lösung und Verfahren zum galvanischen Abscheiden von Kupferüberzügen sowie Verwendung der Lösung
DE102004041701A1 (de) * 2004-08-28 2006-03-02 Enthone Inc., West Haven Verfahren zur elektrolytischen Abscheidung von Metallen
US7282602B2 (en) * 2004-09-21 2007-10-16 Bionumerik Pharmaceuticals, Inc. Medicinal disulfide salts
WO2007086454A1 (ja) * 2006-01-27 2007-08-02 Okuno Chemical Industries Co., Ltd. 含リン銅をアノードとする電解銅めっき液用添加剤、電解銅めっき液及び電解銅めっき方法
DE102014208733A1 (de) 2014-05-09 2015-11-12 Dr. Hesse Gmbh & Cie Kg Verfahren zum elektrolytischen Abscheiden von Kupfer aus Wasser basierenden Elektrolyten
EP3497267B1 (en) 2016-08-15 2020-04-29 ATOTECH Deutschland GmbH Acidic aqueous composition for electrolytic copper plating

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL291575A (enExample) * 1962-04-16
DE1246347B (de) * 1966-03-08 1967-08-03 Schering Ag Saures galvanisches Kupferbad
DE2039831C3 (de) * 1970-06-06 1979-09-06 Schering Ag, 1000 Berlin Und 4619 Bergkamen Saures Bad zur galvanischen Abscheidung glänzender Kupferüberzüge
GB1526076A (en) * 1975-03-11 1978-09-27 Oxy Metal Industries Corp Electrodeposition of copper
DE2721985A1 (de) * 1977-05-14 1978-11-16 Bayer Ag Verfahren zur herstellung von urethan- und/oder harnstoffgruppen aufweisenden polyisocyanat polyadditionsprodukten
DE2746938C2 (de) * 1977-10-17 1987-04-09 Schering AG, 1000 Berlin und 4709 Bergkamen Wäßriges saures Bad zur galvanischen Abscheidung von glänzenden und rißfreien Kupferüberzügen und Verwendung dieses Bades
US4272335A (en) * 1980-02-19 1981-06-09 Oxy Metal Industries Corporation Composition and method for electrodeposition of copper
US4374709A (en) * 1980-05-01 1983-02-22 Occidental Chemical Corporation Process for plating polymeric substrates
US4376685A (en) * 1981-06-24 1983-03-15 M&T Chemicals Inc. Acid copper electroplating baths containing brightening and leveling additives
FR2510145B1 (fr) * 1981-07-24 1986-02-07 Rhone Poulenc Spec Chim Additif pour bain de cuivrage electrolytique acide, son procede de preparation et son application au cuivrage des circuits imprimes
WO1984001393A1 (en) * 1982-09-30 1984-04-12 Learonal Inc Electrolytic copper plating solutions
DE3402999A1 (de) * 1984-01-28 1985-08-01 Skw Trostberg Ag, 8223 Trostberg Duengerloesungen
DE3721985A1 (de) * 1987-06-30 1989-01-12 Schering Ag Waessriges saures bad zur galvanischen abscheidung glaenzender und eingeebneter kupferueberzuege

Also Published As

Publication number Publication date
DE4032864A1 (de) 1992-04-16
DE4032864C2 (enExample) 1993-01-07
WO1992007116A1 (de) 1992-04-30
EP0554275B1 (de) 1994-12-14
JPH06501986A (ja) 1994-03-03
CA2093924A1 (en) 1992-04-14
DE59103933D1 (de) 1995-01-26
EP0554275A1 (de) 1993-08-11
ATE115651T1 (de) 1994-12-15
ES2066477T3 (es) 1995-03-01

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Effective date: 20121202