CA1194176A - Dispositif detecteur de position d'un objet - Google Patents

Dispositif detecteur de position d'un objet

Info

Publication number
CA1194176A
CA1194176A CA000400111A CA400111A CA1194176A CA 1194176 A CA1194176 A CA 1194176A CA 000400111 A CA000400111 A CA 000400111A CA 400111 A CA400111 A CA 400111A CA 1194176 A CA1194176 A CA 1194176A
Authority
CA
Canada
Prior art keywords
prism
radiation
lens
detectors
radiation source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA000400111A
Other languages
English (en)
Inventor
Theodorus A. Fahner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Application granted granted Critical
Publication of CA1194176A publication Critical patent/CA1194176A/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Optical Recording Or Reproduction (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Lenses (AREA)
CA000400111A 1981-04-03 1982-03-31 Dispositif detecteur de position d'un objet Expired CA1194176A (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL8101668 1981-04-03
NL8101668A NL8101668A (nl) 1981-04-03 1981-04-03 Inrichting voor het detekteren van de positie van een voorwerp.

Publications (1)

Publication Number Publication Date
CA1194176A true CA1194176A (fr) 1985-09-24

Family

ID=19837293

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000400111A Expired CA1194176A (fr) 1981-04-03 1982-03-31 Dispositif detecteur de position d'un objet

Country Status (6)

Country Link
JP (1) JPS57178103A (fr)
CA (1) CA1194176A (fr)
DE (1) DE3211928A1 (fr)
FR (1) FR2503416B1 (fr)
GB (1) GB2096316B (fr)
NL (1) NL8101668A (fr)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3485494D1 (de) * 1983-05-17 1992-03-12 Matsushita Electric Ind Co Ltd Geraet zur bestimmung der ortung.
DE3328168A1 (de) * 1983-08-04 1985-02-21 Goetze Ag, 5093 Burscheid Verfahren und vorrichtung zur positionsfestlegung insbesondere von trennfugen
NL8401476A (nl) * 1984-05-09 1985-12-02 Philips Nv Inrichting voor het wisselen van maskers.
NL8401710A (nl) * 1984-05-29 1985-12-16 Philips Nv Inrichting voor het afbeelden van een maskerpatroon op een substraat.
JPS6155152A (ja) * 1984-08-27 1986-03-19 Mitsui Toatsu Chem Inc 熱硬化性樹脂成形材料
JPS6155151A (ja) * 1984-08-27 1986-03-19 Mitsui Toatsu Chem Inc 熱硬化性樹脂成形材料
JPS6155150A (ja) * 1984-08-27 1986-03-19 Mitsui Toatsu Chem Inc 熱硬化性樹脂成形材料
JPS6155153A (ja) * 1984-08-27 1986-03-19 Mitsui Toatsu Chem Inc 熱硬化性樹脂成形材料
DE3621961A1 (de) * 1986-07-01 1988-01-14 Wenglorz Sensoric Gmbh Reflexlichtschranke zur beruehrungslosen nachfuehrung eines geraetes
US4760429A (en) * 1986-11-05 1988-07-26 The Perkin-Elmer Corporation High speed reticle change system
DE3837042A1 (de) * 1988-10-31 1990-05-03 Battelle Institut E V Vorrichtung zum positionieren von materialien in einem kraftfeld
DE3907323A1 (de) * 1989-03-07 1990-09-20 Zinser Textilmaschinen Gmbh Spinnereimaschine, insbesondere ringspinnmaschine
DE4442400A1 (de) * 1994-11-30 1996-06-05 Imm Inst Mikrotech Sensor zur Bestimmung der Lage im Raum
DE102014010417A1 (de) * 2014-07-14 2016-01-14 Nanosurf Ag Positionsmesssystem für den Nanometerbereich
DE102014115748A1 (de) * 2014-10-29 2016-05-04 Tutech Innovation Gmbh System und Verfahren zur Bearbeitung von Bauteilen
CN109313454A (zh) * 2017-12-25 2019-02-05 深圳市大疆创新科技有限公司 云台的控制方法和控制设备

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2703505A (en) * 1948-07-03 1955-03-08 Kearney & Trecker Corp Apparatus for aligning machine elements
DE1205716B (de) * 1958-01-21 1965-11-25 Continental Elektro Ind Ag Lichtelektrische Einrichtung zur Ausrichtung der Ziellinie einer Visiervorrichtung
US3207904A (en) * 1962-04-09 1965-09-21 Western Electric Co Electro-optical article positioning system
DE1273210B (de) * 1962-08-24 1968-07-18 Philips Nv Vorrichtung zur lichtelektrischen Bestimmung der relativen Lage zweier Teile
GB1312825A (en) * 1969-04-19 1973-04-11 Licentia Gmbh Method and apparatus for bringing a mask and a semiconductor body into register with one another
DE2445333A1 (de) * 1973-10-01 1975-04-10 Philips Nv Optoelektronisches system zur bestimmung einer abweichung zwischen der istlage und der sollage einer ebene in einem optischen abbildungssystem
FR2340534A1 (fr) * 1976-02-09 1977-09-02 Centre Techn Ind Mecanique Procede et appareil pour le centrage des lentilles
GB1560778A (en) * 1978-03-21 1980-02-06 Int Computers Ltd Methods of aligning articles
FR2445512A1 (en) * 1978-12-27 1980-07-25 Thomson Csf Position detecting system for image forming appts. - includes two part photodiode providing two signals with difference proportional to position error

Also Published As

Publication number Publication date
FR2503416B1 (fr) 1986-01-03
FR2503416A1 (fr) 1982-10-08
DE3211928A1 (de) 1983-01-20
DE3211928C2 (fr) 1988-01-21
JPS6355002B2 (fr) 1988-11-01
GB2096316B (en) 1985-03-06
GB2096316A (en) 1982-10-13
JPS57178103A (en) 1982-11-02
NL8101668A (nl) 1982-11-01

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Legal Events

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