CA1145171A - Glass waveguide for optical circuit and fabrication method thereof - Google Patents

Glass waveguide for optical circuit and fabrication method thereof

Info

Publication number
CA1145171A
CA1145171A CA000366893A CA366893A CA1145171A CA 1145171 A CA1145171 A CA 1145171A CA 000366893 A CA000366893 A CA 000366893A CA 366893 A CA366893 A CA 366893A CA 1145171 A CA1145171 A CA 1145171A
Authority
CA
Canada
Prior art keywords
glass
layer
core
substrate
waveguide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA000366893A
Other languages
English (en)
French (fr)
Inventor
Tatsuo Izawa
Hidefumi Mori
Nobuo Shimizu
Yasuji Murakami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP16274079A external-priority patent/JPS5685708A/ja
Priority claimed from JP16274179A external-priority patent/JPS5685709A/ja
Priority claimed from JP16274279A external-priority patent/JPS5685710A/ja
Priority claimed from JP55152173A external-priority patent/JPS5777039A/ja
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Application granted granted Critical
Publication of CA1145171A publication Critical patent/CA1145171A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/02—Surface treatment of glass, not in the form of fibres or filaments, by coating with glass
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/40—Coatings comprising at least one inhomogeneous layer
    • C03C2217/42—Coatings comprising at least one inhomogeneous layer consisting of particles only
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S65/00—Glass manufacturing
    • Y10S65/15—Nonoxygen containing chalogenides
    • Y10S65/16—Optical filament or fiber treatment with fluorine or incorporating fluorine in final product

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
CA000366893A 1979-12-17 1980-12-16 Glass waveguide for optical circuit and fabrication method thereof Expired CA1145171A (en)

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
JP16274079A JPS5685708A (en) 1979-12-17 1979-12-17 Glass waveguide path for fiber optics
JP162,740/1979 1979-12-17
JP16274179A JPS5685709A (en) 1979-12-17 1979-12-17 Method and apparatus for manufacturing glass waveguide path for fiber optics
JP16274279A JPS5685710A (en) 1979-12-17 1979-12-17 Glass waveguide path for fiber optics
JP162,741/1979 1979-12-17
JP162,742/1979 1979-12-17
JP55152173A JPS5777039A (en) 1980-10-31 1980-10-31 Manufacture of layer of fine glass particle for glass waveguide
JP152,173/1980 1980-10-31

Publications (1)

Publication Number Publication Date
CA1145171A true CA1145171A (en) 1983-04-26

Family

ID=27473129

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000366893A Expired CA1145171A (en) 1979-12-17 1980-12-16 Glass waveguide for optical circuit and fabrication method thereof

Country Status (5)

Country Link
US (1) US4425146A (ref)
CA (1) CA1145171A (ref)
DE (1) DE3047589C2 (ref)
FR (1) FR2486250A1 (ref)
GB (1) GB2066805B (ref)

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DE3206176A1 (de) * 1982-02-20 1983-08-25 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Verfahren zur herstellung einer vorform, aus der optische fasern ziehbar sind
DE3206177A1 (de) * 1982-02-20 1983-08-25 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Verfahren zur herstellung einer vorform, aus der optische fasern ziehbar sind
DE3206175A1 (de) * 1982-02-20 1983-08-25 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Verfahren zur herstellung einer vorform, aus der optische fasern ziehbar sind
US4616901A (en) * 1982-04-09 1986-10-14 At&T Bell Laboratories Doped optical fiber
FR2534034B1 (fr) * 1982-10-05 1986-02-28 Lyonnaise Transmiss Optiques Guide d'ondes lumineuses, et procedes de fabrication de celui-ci
NL8300650A (nl) * 1983-02-22 1984-09-17 Philips Nv Werkwijze voor het vervaardigen van een massieve voorvorm voor het trekken van optische vezels.
GB8414878D0 (en) * 1984-06-11 1984-07-18 Gen Electric Co Plc Integrated optical waveguides
DE3500672A1 (de) * 1985-01-11 1986-07-17 Philips Patentverwaltung Lichtleitfaser mit fluordotierung und verfahren zu deren herstellung
FR2576693B1 (fr) * 1985-01-30 1989-02-17 Comp Generale Electricite Procede de fabrication d'un composant optique a gradient d'indice de refraction
DE3543002A1 (de) * 1985-12-05 1987-06-11 Bodenseewerk Geraetetech Verfahren zur herstellung von integriert-optischen strukturen in glas
DE3641285A1 (de) * 1986-12-03 1988-06-09 Schott Glaswerke Verfahren zur messung von (alpha) und ss-strahlen geringer intensitaet
US4973345A (en) * 1987-10-13 1990-11-27 British Telecommunications Public Limited Company Surface treatments for optical fibre preforms
FR2625333B1 (fr) * 1987-12-24 1993-09-10 Commissariat Energie Atomique Procede de fabrication de microguides de lumiere a faibles pertes de propagation optique par depot de multicouches
US4904036A (en) * 1988-03-03 1990-02-27 American Telephone And Telegraph Company, At&T Bell Laboratories Subassemblies for optoelectronic hybrid integrated circuits
US5221352A (en) * 1989-06-19 1993-06-22 Glaverbel Apparatus for pyrolytically forming an oxide coating on a hot glass substrate
GB8914047D0 (en) * 1989-06-19 1989-08-09 Glaverbel Method of and apparatus for pyrolytically forming an oxide coating on a hot glass substrate
US4956000A (en) * 1989-06-28 1990-09-11 Reeber Robert R Gradient lens fabrication
US5125946A (en) * 1990-12-10 1992-06-30 Corning Incorporated Manufacturing method for planar optical waveguides
US5200029A (en) * 1991-04-25 1993-04-06 At&T Bell Laboratories Method of making a planar optical amplifier
JPH05273426A (ja) * 1991-12-06 1993-10-22 Sumitomo Electric Ind Ltd 光導波膜の作製方法およびこれを用いた光導波路の作製方法
AU657845B2 (en) * 1992-03-17 1995-03-23 Sumitomo Electric Industries, Ltd. Method and apparatus for producing glass thin film
TW263566B (ref) * 1993-01-14 1995-11-21 Sumitomo Electric Industries
JP2637891B2 (ja) * 1993-03-26 1997-08-06 日本電気株式会社 光導波路の製造方法
US5800860A (en) * 1995-06-28 1998-09-01 Lucent Technologies Inc. Method of manufacturing planar optical waveguides
GB2312525A (en) * 1996-04-24 1997-10-29 Northern Telecom Ltd Providing cladding on planar optical waveguide by heating to flow
KR19990082608A (ko) 1996-12-16 1999-11-25 알프레드 엘. 미첼슨 게르마늄 도핑 실리카 제조용 원료 및 제조방법
DE19831719A1 (de) * 1998-07-15 2000-01-20 Alcatel Sa Verfahren zur Herstellung planarer Wellenleiterstrukturen sowie Wellenleiterstruktur
US6631235B1 (en) * 1999-06-17 2003-10-07 The Furukawa Electric Co., Ltd. Planar lightwave circuit platform and method for manufacturing the same
KR100334820B1 (ko) * 1999-07-22 2002-05-02 윤종용 분산제어 광섬유 및 그 대구경 모재의 제조 방법
GB2355079A (en) 1999-10-07 2001-04-11 Kymata Ltd Multi-core waveguide
GB2355078A (en) * 1999-10-07 2001-04-11 Kymata Ltd Waveguide with composite cladding layer
US7087179B2 (en) * 2000-12-11 2006-08-08 Applied Materials, Inc. Optical integrated circuits (ICs)
CN1402027A (zh) * 2001-08-03 2003-03-12 Asml美国公司 能用于光波导的氧化物构件及其制造方法
US20030110808A1 (en) * 2001-12-14 2003-06-19 Applied Materials Inc., A Delaware Corporation Method of manufacturing an optical core
US20030113085A1 (en) * 2001-12-14 2003-06-19 Applied Materials, Inc., A Delaware Corporation HDP-CVD film for uppercladding application in optical waveguides
US7080528B2 (en) * 2002-10-23 2006-07-25 Applied Materials, Inc. Method of forming a phosphorus doped optical core using a PECVD process
EP1435533A1 (en) * 2002-12-30 2004-07-07 STMicroelectronics S.r.l. Waveguide manufacturing method and waveguide
FI116567B (fi) * 2003-09-29 2005-12-30 Liekki Oy Menetelmä sekä järjestelmä seostetun lasimateriaalin lähtöaineiden kaasuvirtauksen muodostamiseksi
US7079740B2 (en) * 2004-03-12 2006-07-18 Applied Materials, Inc. Use of amorphous carbon film as a hardmask in the fabrication of optical waveguides
JP2007114374A (ja) * 2005-10-19 2007-05-10 Hitachi Cable Ltd 光導波路素子及び多連光導波路素子
US7450813B2 (en) 2006-09-20 2008-11-11 Imra America, Inc. Rare earth doped and large effective area optical fibers for fiber lasers and amplifiers
CN102239434B (zh) 2008-12-04 2014-11-26 Imra美国公司 用于光纤激光器和放大器的高度稀土掺杂的光纤
WO2011139659A1 (en) * 2010-04-27 2011-11-10 Soreq Nuclear Research Center Optical waveguide fabrication
EP2588422B1 (en) * 2010-06-29 2020-03-11 Corning Incorporated Multi-layer glass sheet made by co-drawing using the overflow downdraw fusion process
US9018108B2 (en) 2013-01-25 2015-04-28 Applied Materials, Inc. Low shrinkage dielectric films
TWI656022B (zh) * 2013-11-13 2019-04-11 美商康寧公司 疊層玻璃物件及其製造方法
KR20190031264A (ko) 2016-07-15 2019-03-25 코닝 인코포레이티드 적층 구조를 갖는 조명 장치
US11307352B2 (en) 2016-07-15 2022-04-19 Corning Incorporated Optical waveguide article with laminate structure and method for forming the same

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3306768A (en) 1964-01-08 1967-02-28 Motorola Inc Method of forming thin oxide films
US3711262A (en) * 1970-05-11 1973-01-16 Corning Glass Works Method of producing optical waveguide fibers
GB1406870A (en) * 1970-05-11 1975-09-17 Corning Glass Works Method of forming an economic optical waveguide fibre
US3850687A (en) 1971-05-26 1974-11-26 Rca Corp Method of densifying silicate glasses
FR2152464B1 (ref) * 1971-09-16 1974-05-31 Thomson Csf
AT327425B (de) * 1971-10-11 1976-01-26 Inst Kib Akademii Nauk Gruzins Verfahren zum herstellen von lichtleitern mit wenigstens zwei lichtleitenden pfaden
GB1342544A (en) 1971-10-28 1974-01-03 Standard Telephones Cables Ltd Method of forming glass layers
US3806223A (en) 1972-03-30 1974-04-23 Corning Glass Works Planar optical waveguide
US3934061A (en) 1972-03-30 1976-01-20 Corning Glass Works Method of forming planar optical waveguides
GB1427327A (en) * 1972-06-08 1976-03-10 Standard Telephones Cables Ltd Glass optical fibres
CA1050833A (en) * 1974-02-22 1979-03-20 John B. Macchesney Optical fiber fabrication involving homogeneous reaction within a moving hot zone
US4217027A (en) 1974-02-22 1980-08-12 Bell Telephone Laboratories, Incorporated Optical fiber fabrication and resulting product
GB1559097A (en) 1976-06-01 1980-01-16 Standard Telephones Cables Ltd Optical fibre manufacture
GB2039880B (en) * 1978-08-18 1983-04-20 Western Electric Co Fabrication of optical fibres utilizing thermophoretic deposition of glass precursor particulates

Also Published As

Publication number Publication date
DE3047589C2 (de) 1985-08-29
DE3047589A1 (de) 1981-09-17
FR2486250A1 (fr) 1982-01-08
GB2066805B (en) 1984-05-23
US4425146A (en) 1984-01-10
FR2486250B1 (ref) 1984-06-01
GB2066805A (en) 1981-07-15

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Legal Events

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