BR112016013216A2 - - Google Patents

Info

Publication number
BR112016013216A2
BR112016013216A2 BR112016013216A BR112016013216A BR112016013216A2 BR 112016013216 A2 BR112016013216 A2 BR 112016013216A2 BR 112016013216 A BR112016013216 A BR 112016013216A BR 112016013216 A BR112016013216 A BR 112016013216A BR 112016013216 A2 BR112016013216 A2 BR 112016013216A2
Authority
BR
Brazil
Application number
BR112016013216A
Other versions
BR112016013216B1 (pt
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of BR112016013216A2 publication Critical patent/BR112016013216A2/pt
Publication of BR112016013216B1 publication Critical patent/BR112016013216B1/pt

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/06Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier
    • H01L31/068Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
    • H01L31/0682Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells back-junction, i.e. rearside emitter, solar cells, e.g. interdigitated base-emitter regions back-junction cells
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0216Coatings
    • H01L31/02161Coatings for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/02167Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
    • H01L31/02168Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells the coatings being antireflective or having enhancing optical properties for the solar cells
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0224Electrodes
    • H01L31/022408Electrodes for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/022425Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
    • H01L31/022441Electrode arrangements specially adapted for back-contact solar cells
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0236Special surface textures
    • H01L31/02366Special surface textures of the substrate or of a layer on the substrate, e.g. textured ITO/glass substrate or superstrate, textured polymer layer on glass substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/0248Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/0352Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
    • H01L31/035272Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions characterised by at least one potential jump barrier or surface barrier
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/0248Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/036Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes
    • H01L31/0392Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1804Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic System
    • H01L31/182Special manufacturing methods for polycrystalline Si, e.g. Si ribbon, poly Si ingots, thin films of polycrystalline Si
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/186Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
    • H01L31/1864Annealing
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/186Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
    • H01L31/1872Recrystallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1876Particular processes or apparatus for batch treatment of the devices
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/546Polycrystalline silicon PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/547Monocrystalline silicon PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Sustainable Energy (AREA)
  • Photovoltaic Devices (AREA)
  • Recrystallisation Techniques (AREA)
BR112016013216-5A 2013-12-09 2014-12-08 Métodos de fabricação de região emissora de célula solar com o uso de implantação de íon e células obtidas BR112016013216B1 (pt)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201361913614P 2013-12-09 2013-12-09
US61/913.614 2013-12-09
US14/562.159 2014-12-05
US14/562,159 US9401450B2 (en) 2013-12-09 2014-12-05 Solar cell emitter region fabrication using ion implantation
PCT/US2014/069169 WO2015088992A1 (en) 2013-12-09 2014-12-08 Solar cell emitter region fabrication using ion implantation

Publications (2)

Publication Number Publication Date
BR112016013216A2 true BR112016013216A2 (pt) 2017-08-08
BR112016013216B1 BR112016013216B1 (pt) 2022-06-14

Family

ID=53272043

Family Applications (1)

Application Number Title Priority Date Filing Date
BR112016013216-5A BR112016013216B1 (pt) 2013-12-09 2014-12-08 Métodos de fabricação de região emissora de célula solar com o uso de implantação de íon e células obtidas

Country Status (14)

Country Link
US (2) US9401450B2 (pt)
EP (1) EP3080847B1 (pt)
JP (2) JP6636913B2 (pt)
KR (1) KR102407023B1 (pt)
CN (1) CN105659395B (pt)
AU (1) AU2014364086B2 (pt)
BR (1) BR112016013216B1 (pt)
MX (1) MX2016006973A (pt)
MY (1) MY192488A (pt)
PH (1) PH12016501052A1 (pt)
SA (1) SA516371270B1 (pt)
TW (1) TWI655676B (pt)
WO (1) WO2015088992A1 (pt)
ZA (1) ZA201603437B (pt)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7851698B2 (en) * 2008-06-12 2010-12-14 Sunpower Corporation Trench process and structure for backside contact solar cells with polysilicon doped regions
US20220209037A1 (en) * 2008-06-12 2022-06-30 Sunpower Corporation Trench process and structure for backside contact solar cells with polysilicon doped regions
US9401450B2 (en) * 2013-12-09 2016-07-26 Sunpower Corporation Solar cell emitter region fabrication using ion implantation
US9577134B2 (en) * 2013-12-09 2017-02-21 Sunpower Corporation Solar cell emitter region fabrication using self-aligned implant and cap
US9627558B2 (en) * 2014-04-09 2017-04-18 Arizona Board Of Regents On Behalf Of Arizona State University Methods and apparatuses for manufacturing self-aligned integrated back contact heterojunction solar cells
US9263625B2 (en) * 2014-06-30 2016-02-16 Sunpower Corporation Solar cell emitter region fabrication using ion implantation
US9520507B2 (en) 2014-12-22 2016-12-13 Sunpower Corporation Solar cells with improved lifetime, passivation and/or efficiency
US20160284913A1 (en) * 2015-03-27 2016-09-29 Staffan WESTERBERG Solar cell emitter region fabrication using substrate-level ion implantation
KR102272433B1 (ko) * 2015-06-30 2021-07-05 엘지전자 주식회사 태양 전지 및 이의 제조 방법
NL2015534B1 (en) * 2015-09-30 2017-05-10 Tempress Ip B V Method of manufacturing a solar cell.
JP2018073969A (ja) * 2016-10-28 2018-05-10 株式会社アルバック 太陽電池の製造方法
US10749052B2 (en) 2017-02-14 2020-08-18 Alliance For Sustainable Energy, Llc Methods of forming interdigitated back contact solar cells
US10801593B2 (en) 2017-04-26 2020-10-13 Paratech, Incorporated Strut extender mechanism
CN108831953B (zh) * 2017-05-04 2021-04-27 上海凯世通半导体股份有限公司 太阳能电池的制作方法
US10714652B2 (en) * 2017-06-21 2020-07-14 Alliance For Sustainable Energy, Llc Methods of forming interdigitated back contact layers
JP2019110185A (ja) * 2017-12-18 2019-07-04 株式会社アルバック 太陽電池の製造方法
CN110010451A (zh) * 2018-01-05 2019-07-12 上海凯世通半导体股份有限公司 掺杂方法
CN110010719B (zh) * 2018-01-05 2021-02-19 上海凯世通半导体股份有限公司 掺杂方法
CN110098279A (zh) * 2018-01-30 2019-08-06 上海凯世通半导体股份有限公司 太阳能电池的制作方法
EP3624204B1 (en) * 2018-09-13 2023-04-26 IMEC vzw Selective deposition for interdigitated patterns in solar cells
CN109509813A (zh) * 2018-11-26 2019-03-22 东方日升(常州)新能源有限公司 一种无掩膜的p型全背电极接触晶硅太阳电池的制备方法
CN109671790A (zh) * 2018-12-25 2019-04-23 浙江晶科能源有限公司 一种n型双面太阳能电池及其制备方法
US11267699B2 (en) 2019-02-21 2022-03-08 Invensense, Inc. Modification to rough polysilicon using ion implantation and silicide
US11329087B2 (en) 2020-03-25 2022-05-10 Globalfoundries U.S. Inc. Photodetectors with adjacent anode-cathode pairs
CN115667431A (zh) 2020-05-27 2023-01-31 株式会社理光 白色油墨、非白色油墨、油墨组、印刷组、印刷方法及印刷装置
CN113871494B (zh) * 2020-06-30 2024-03-15 泰州隆基乐叶光伏科技有限公司 一种太阳能电池及其制作方法
CN111816727A (zh) * 2020-07-14 2020-10-23 普乐新能源科技(徐州)有限公司 一种基于lpcvd的高效掺杂非晶硅技术的交叉指式背接触异质结太阳电池
CN111739984A (zh) * 2020-08-10 2020-10-02 浙江晶科能源有限公司 太阳能电池及其制作方法
EP4195299A1 (en) * 2021-12-13 2023-06-14 International Solar Energy Research Center Konstanz E.V. Interdigitated back contact solar cell and method for producing an interdigitated back contact solar cell
CN114883424B (zh) * 2022-05-25 2023-11-21 中国科学院电工研究所 一种基于丝网印刷制备全背接触晶硅异质结太阳电池结构的方法
CN117410385B (zh) * 2023-12-14 2024-02-27 金阳(泉州)新能源科技有限公司 一种去除部分掩膜层的联合钝化背接触电池的制备方法

Family Cites Families (53)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2695852A (en) 1952-02-15 1954-11-30 Bell Telephone Labor Inc Fabrication of semiconductors for signal translating devices
US3736425A (en) 1972-03-27 1973-05-29 Implama Ag Z U G Screen for ion implantation
US3790412A (en) 1972-04-07 1974-02-05 Bell Telephone Labor Inc Method of reducing the effects of particle impingement on shadow masks
US4086102A (en) 1976-12-13 1978-04-25 King William J Inexpensive solar cell and method therefor
US4448797A (en) 1981-02-04 1984-05-15 Xerox Corporation Masking techniques in chemical vapor deposition
US4381956A (en) 1981-04-06 1983-05-03 Motorola, Inc. Self-aligned buried channel fabrication process
DE3176643D1 (en) 1981-10-30 1988-03-10 Ibm Deutschland Shadow projecting mask for ion implantation and lithography by ion beam radiation
US4557037A (en) 1984-10-31 1985-12-10 Mobil Solar Energy Corporation Method of fabricating solar cells
US5907766A (en) 1996-10-21 1999-05-25 Electric Power Research Institute, Inc. Method of making a solar cell having improved anti-reflection passivation layer
US6087274A (en) 1998-03-03 2000-07-11 The United States Of America As Represented By The Secretary Of The Navy Nanoscale X-Y-Z translation of nanochannel glass replica-based masks for making complex structures during patterning
US6335534B1 (en) 1998-04-17 2002-01-01 Kabushiki Kaisha Toshiba Ion implantation apparatus, ion generating apparatus and semiconductor manufacturing method with ion implantation processes
US6417078B1 (en) 2000-05-03 2002-07-09 Ibis Technology Corporation Implantation process using sub-stoichiometric, oxygen doses at different energies
JP2002203806A (ja) 2000-10-31 2002-07-19 Toshiba Corp 半導体装置の製造方法、ステンシルマスク及びその製造方法
JP3785452B2 (ja) * 2001-09-06 2006-06-14 独立行政法人産業技術総合研究所 芳香族ポリカルボシランを含む層間絶縁膜及びこれを用いた半導体装置
JP2004091821A (ja) * 2002-08-29 2004-03-25 Kyocera Corp 薄膜デバイス用製造装置および薄膜デバイスの製造方法
JP2004193350A (ja) 2002-12-11 2004-07-08 Sharp Corp 太陽電池セルおよびその製造方法
JP3790215B2 (ja) 2002-12-26 2006-06-28 株式会社東芝 半導体装置の製造方法及び半導体製造装置
KR100598035B1 (ko) 2004-02-24 2006-07-07 삼성전자주식회사 전하 전송 이미지 소자의 제조 방법
US7531216B2 (en) 2004-07-28 2009-05-12 Advantech Global, Ltd Two-layer shadow mask with small dimension apertures and method of making and using same
JP2006114576A (ja) 2004-10-13 2006-04-27 Ishikawajima Harima Heavy Ind Co Ltd 多結晶シリコン太陽電池の製造方法
JP2007281156A (ja) 2006-04-06 2007-10-25 Japan Advanced Institute Of Science & Technology Hokuriku 裏面電極型半導体へテロ接合太陽電池ならびにその製造方法と製造装置
US20080072953A1 (en) 2006-09-27 2008-03-27 Thinsilicon Corp. Back contact device for photovoltaic cells and method of manufacturing a back contact device
US7638438B2 (en) 2006-12-12 2009-12-29 Palo Alto Research Center Incorporated Solar cell fabrication using extrusion mask
JP2009035780A (ja) * 2007-08-02 2009-02-19 Sfc:Kk 水素化アモルファスシリコンの製造方法及び製膜装置
WO2009029900A1 (en) 2007-08-31 2009-03-05 Applied Materials, Inc. Improved methods of emitter formation in solar cells
US7820460B2 (en) 2007-09-07 2010-10-26 Varian Semiconductor Equipment Associates, Inc. Patterned assembly for manufacturing a solar cell and a method thereof
US8987039B2 (en) * 2007-10-12 2015-03-24 Air Products And Chemicals, Inc. Antireflective coatings for photovoltaic applications
US7727866B2 (en) 2008-03-05 2010-06-01 Varian Semiconductor Equipment Associates, Inc. Use of chained implants in solar cells
US20090227061A1 (en) 2008-03-05 2009-09-10 Nicholas Bateman Establishing a high phosphorus concentration in solar cells
US8461032B2 (en) 2008-03-05 2013-06-11 Varian Semiconductor Equipment Associates, Inc. Use of dopants with different diffusivities for solar cell manufacture
JPWO2009123032A1 (ja) * 2008-04-02 2011-07-28 Jsr株式会社 含ケイ素重合体を含む組成物およびその硬化物
TW200945596A (en) * 2008-04-16 2009-11-01 Mosel Vitelic Inc A method for making a solar cell with a selective emitter
US7851698B2 (en) * 2008-06-12 2010-12-14 Sunpower Corporation Trench process and structure for backside contact solar cells with polysilicon doped regions
US7816239B2 (en) 2008-11-20 2010-10-19 Varian Semiconductor Equipment Associates, Inc. Technique for manufacturing a solar cell
KR101161807B1 (ko) * 2009-08-21 2012-07-03 주식회사 효성 플라즈마 도핑과 확산을 이용한 후면접합 태양전지의 제조방법 및 그 태양전지
US8465909B2 (en) * 2009-11-04 2013-06-18 Varian Semiconductor Equipment Associates, Inc. Self-aligned masking for solar cell manufacture
KR20110071375A (ko) * 2009-12-21 2011-06-29 현대중공업 주식회사 후면전계형 이종접합 태양전지 및 그 제조방법
TW201133571A (en) * 2010-03-04 2011-10-01 Varian Semiconductor Equipment Aligning successive implants with a soft mask
US8790957B2 (en) * 2010-03-04 2014-07-29 Sunpower Corporation Method of fabricating a back-contact solar cell and device thereof
US8912082B2 (en) * 2010-03-25 2014-12-16 Varian Semiconductor Equipment Associates, Inc. Implant alignment through a mask
US20110139231A1 (en) * 2010-08-25 2011-06-16 Daniel Meier Back junction solar cell with selective front surface field
US20120060904A1 (en) * 2010-09-13 2012-03-15 Smith David D Fabrication Of Solar Cells With Silicon Nano-Particles
US20120073650A1 (en) * 2010-09-24 2012-03-29 David Smith Method of fabricating an emitter region of a solar cell
KR20130135261A (ko) 2010-11-03 2013-12-10 어플라이드 머티어리얼스, 인코포레이티드 실리콘 카바이드 및 실리콘 카보나이트라이드 막들을 증착하기 위한 장치 및 방법들
US8802486B2 (en) * 2011-04-25 2014-08-12 Sunpower Corporation Method of forming emitters for a back-contact solar cell
US8658458B2 (en) * 2011-06-15 2014-02-25 Varian Semiconductor Equipment Associates, Inc. Patterned doping for polysilicon emitter solar cells
WO2013039881A2 (en) 2011-09-13 2013-03-21 Applied Materials, Inc. Carbosilane precursors for low temperature film deposition
TW201319299A (zh) 2011-09-13 2013-05-16 Applied Materials Inc 用於低溫電漿輔助沉積的活化矽前驅物
US9190548B2 (en) * 2011-10-11 2015-11-17 Varian Semiconductor Equipment Associates, Inc. Method of creating two dimensional doping patterns in solar cells
US9054255B2 (en) * 2012-03-23 2015-06-09 Sunpower Corporation Solar cell having an emitter region with wide bandgap semiconductor material
JP2013239476A (ja) 2012-05-11 2013-11-28 Mitsubishi Electric Corp 光起電力装置およびその製造方法、光起電力モジュール
US9401450B2 (en) * 2013-12-09 2016-07-26 Sunpower Corporation Solar cell emitter region fabrication using ion implantation
US9263625B2 (en) 2014-06-30 2016-02-16 Sunpower Corporation Solar cell emitter region fabrication using ion implantation

Also Published As

Publication number Publication date
KR102407023B1 (ko) 2022-06-10
US20160315214A1 (en) 2016-10-27
JP7028853B2 (ja) 2022-03-02
WO2015088992A1 (en) 2015-06-18
TW201528344A (zh) 2015-07-16
EP3080847B1 (en) 2019-04-10
TWI655676B (zh) 2019-04-01
MX2016006973A (es) 2016-09-27
AU2014364086B2 (en) 2019-06-20
ZA201603437B (en) 2018-11-28
US20150162483A1 (en) 2015-06-11
AU2014364086A1 (en) 2016-03-24
JP6636913B2 (ja) 2020-01-29
CN105659395A (zh) 2016-06-08
MY192488A (en) 2022-08-23
BR112016013216B1 (pt) 2022-06-14
SA516371270B1 (ar) 2021-01-14
JP2017504950A (ja) 2017-02-09
PH12016501052B1 (en) 2016-08-15
JP2020092269A (ja) 2020-06-11
KR20160096084A (ko) 2016-08-12
US9401450B2 (en) 2016-07-26
PH12016501052A1 (en) 2016-08-15
EP3080847A1 (en) 2016-10-19
US9716205B2 (en) 2017-07-25
EP3080847A4 (en) 2016-10-19
CN105659395B (zh) 2018-02-02

Similar Documents

Publication Publication Date Title
BR112016005220A2 (pt)
BR112016013216A2 (pt)
BR112015007533A2 (pt)
BR112016001136A2 (pt)
BR112014017733A2 (pt)
BR112014017739A2 (pt)
BR112014019326A2 (pt)
BR112015022748A2 (pt)
BR112014017765A2 (pt)
BR112014017855A2 (pt)
BR112014017669A2 (pt)
BR112014021878A2 (pt)
BR112014017901A2 (pt)
BR112014019204A2 (pt)
BR112015015948A2 (pt)
BR112014017722A2 (pt)
BR112015016283A2 (pt)
BR112014018578A2 (pt)
BR112014017794A2 (pt)
BR112014017653A2 (pt)
BR112016009017A2 (pt)
BR112016000510A2 (pt)
BR112014017601A2 (pt)
BR112015015312A2 (pt)
BR112014018353A2 (pt)

Legal Events

Date Code Title Description
B06U Preliminary requirement: requests with searches performed by other patent offices: procedure suspended [chapter 6.21 patent gazette]
B06A Patent application procedure suspended [chapter 6.1 patent gazette]
B09A Decision: intention to grant [chapter 9.1 patent gazette]
B16A Patent or certificate of addition of invention granted [chapter 16.1 patent gazette]

Free format text: PRAZO DE VALIDADE: 20 (VINTE) ANOS CONTADOS A PARTIR DE 08/12/2014, OBSERVADAS AS CONDICOES LEGAIS

B25G Requested change of headquarter approved

Owner name: SUNPOWER CORPORATION (US)

B25A Requested transfer of rights approved

Owner name: MAXEON SOLAR PTE. LTD. (SG)